CN213692093U - Piezoelectric sensor - Google Patents
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- CN213692093U CN213692093U CN202023226021.5U CN202023226021U CN213692093U CN 213692093 U CN213692093 U CN 213692093U CN 202023226021 U CN202023226021 U CN 202023226021U CN 213692093 U CN213692093 U CN 213692093U
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Abstract
The utility model provides a piezoelectric sensor belongs to sensor technical field. Wherein, piezoelectric sensor includes: a piezoelectric body, a first electrode lead-out member, and a second electrode lead-out member; wherein the first electrode lead-out member is disposed on a first surface of the piezoelectric body and electrically connected to the first surface; a first portion of the second electrode lead-out member is disposed on and electrically connected to the second surface of the piezoelectric body; and the second part of the second electrode lead-out piece extends to the first surface to be flush with the first electrode lead-out piece. The utility model discloses a piezoelectric sensor can draw forth the second electrode that is located piezoelectricity body second surface to the first surface through setting up second electrode extraction piece, and this second electrode extraction piece is in same horizontal plane with the first electrode extraction piece that is located the first surface to strengthen its structural rigidity when making piezoelectric sensor's roughness easily control.
Description
Technical Field
The utility model belongs to the technical field of the sensor, concretely relates to piezoelectric sensor.
Background
Because the piezoelectric ceramic has better mechanical property and stable piezoelectric property, the piezoelectric ceramic is taken as an important force, heat, electricity and light sensitive functional material and has been widely applied to the aspects of sensors, ultrasonic transducers, micro-displacers, other electronic components and the like. At present, the piezoelectric ceramics are mainly installed in the following two common modes: first, the direct bonding approach is inefficient and provides poor mounting consistency. Secondly, welding is realized through an SMT process, the mode efficiency is high, but the flanging electrode is easy to break due to the action of high temperature and the drawing force of solder paste during SMT. In addition, since the piezoelectric sensor is based on the piezoelectric effect, when the crystal is acted by an external force in a certain fixed direction, an electric polarization phenomenon is generated inside, and electrodes with opposite signs are generated on certain two opposite surfaces. That is, two electrodes of the piezoelectric sensor are located on different planes of the piezoelectric material, and flatness is difficult to control based on the two packaging methods, so that the response performance of the piezoelectric ceramic is seriously influenced; secondly, the flanging electrode is easy to break in production and the like.
Therefore, based on the above technical problem, the utility model provides a new piezoelectric sensor.
SUMMERY OF THE UTILITY MODEL
The utility model discloses aim at solving one of the technical problem that exists among the prior art at least, provide a piezoelectric sensor.
The utility model provides a piezoelectric sensor, include: a piezoelectric body, a first electrode lead-out member, and a second electrode lead-out member; wherein,
the first electrode lead-out member is disposed on a first surface of the piezoelectric body and electrically connected to the first surface;
a first portion of the second electrode lead-out member is disposed on and electrically connected to the second surface of the piezoelectric body; and the second part of the second electrode lead-out piece extends to the first surface to be flush with the first electrode lead-out piece.
Optionally, the second portion of the second electrode lead-out member extends from an end of the first portion toward a center of the first surface, and is insulated from the first electrode lead-out member.
Optionally, the second electrode leading-out part is of a U-shaped structure.
Optionally, the U-shaped structure is clamped on the piezoelectric body, one end of the U-shaped structure is electrically connected to the second surface as a first portion of the second electrode lead-out member, the other end of the U-shaped structure is electrically connected to the first surface as a second portion of the second electrode lead-out member, and a bent portion of the U-shaped structure is spaced from an end portion of the piezoelectric body by a predetermined distance.
Alternatively, the second portion of the second electrode lead-out member may extend from an end of the first portion to an outside of the piezoelectric body.
Optionally, the first surface and the second surface of the piezoelectric body are provided with a conductive layer electrically connected to the piezoelectric body at a position corresponding to the first electrode lead-out member and the second electrode lead-out member, and the first electrode lead-out member and the second electrode lead-out member are electrically connected to the corresponding conductive layer.
Optionally, a plurality of via holes are disposed on the first electrode leading-out member, the first portion and the second portion of the second electrode leading-out member, and a protrusion corresponding to the via hole is formed on the piezoelectric body and disposed in the via hole.
Optionally, a plurality of protrusions are formed on each of the first electrode lead-out member, the first portion and the second portion of the second electrode lead-out member, electrode lead-out holes corresponding to the protrusions are formed on the piezoelectric body, and the protrusions are disposed in the electrode lead-out holes.
Optionally, the first electrode lead-out member extends inward from an end portion of the first surface of the piezoelectric body.
Optionally, the first electrode lead-out member and/or the second electrode lead-out member are made of a conductive material and serve as a reinforcing plate of the piezoelectric sensor.
The utility model provides a piezoelectric sensor, which comprises a piezoelectric body, a first electrode leading-out piece and a second electrode leading-out piece; wherein the first electrode lead-out member is disposed on a first surface of the piezoelectric body and electrically connected to the first surface; a first portion of the second electrode lead-out member is disposed on and electrically connected to the second surface of the piezoelectric body; and the second part of the second electrode lead-out piece extends to the first surface to be flush with the first electrode lead-out piece. The utility model discloses a piezoelectric sensor can draw forth the second electrode that is located piezoelectricity body second surface to the first surface through setting up second electrode extraction piece, and this second electrode extraction piece is in same horizontal plane with the first electrode extraction piece that is located the first surface to strengthen its structural rigidity when making piezoelectric sensor's roughness easily control.
Drawings
Fig. 1 is a schematic structural diagram of a piezoelectric sensor according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a piezoelectric sensor according to another embodiment of the present invention;
fig. 3 is a schematic structural diagram of a piezoelectric sensor according to another embodiment of the present invention;
fig. 4 is a schematic structural diagram of a piezoelectric sensor according to another embodiment of the present invention.
Detailed Description
In order to make the technical solution of the present invention better understood by those skilled in the art, the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. It is to be understood that the embodiments described are only some of the embodiments of the present invention, and not all of them. Based on the described embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
Unless otherwise specifically stated, technical or scientific terms used herein shall have the ordinary meaning as understood by those of ordinary skill in the art to which the present invention belongs. As used in this application, the terms "comprises" or "comprising," or the like, do not specify the presence of stated shapes, numbers, steps, acts, operations, elements, components, and/or groups thereof, nor do they preclude the presence or addition of one or more other different shapes, numbers, steps, acts, operations, elements, components, and/or groups thereof. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number and order of the indicated features.
In some descriptions of the present invention, unless expressly stated or limited otherwise, the terms "mounted," "connected," or "fixed" and the like are not intended to be limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect through an intermediate medium, communication between two elements, or interaction between two elements. Also, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate an orientation or positional relationship based on that shown in the drawings, and are used only to indicate a relative positional relationship, which may also be changed accordingly when the absolute position of the object being described is changed.
As shown in fig. 1 to 4, the present invention provides a piezoelectric sensor 100, including: a piezoelectric body 110, a first electrode lead-out member 120, and a second electrode lead-out member 130. Wherein the first electrode lead-out member 120 is disposed on and electrically connected to a first surface of the piezoelectric body 110, and the first portion of the second electrode lead-out member 130 is disposed on and electrically connected to a second surface of the piezoelectric body 110; and, the second portion of the second electrode lead-out member 130 extends toward the first surface to be flush with the first electrode lead-out member 120.
This embodiment is through increasing first electrode extraction piece and second electrode extraction piece respectively on the first surface and the second surface at the piezoelectricity, in order to draw two electrodes of piezoelectricity, and make two electrodes be located the first surface of piezoelectricity simultaneously, be in same horizontal plane promptly, like this, it is easier to control piezoelectric sensor's roughness, and, two electrodes of the piezoelectric sensor after two incorgruous electrode extraction pieces messenger encapsulation distinguish obviously, be convenient for braid and production, in order better support general SMT or ACF technology, high production efficiency, reliability and yield greatly increased.
It should be noted that the first electrode lead-out member of the present embodiment may be a positive electrode lead-out member, or may be a negative electrode lead-out member, and the second electrode lead-out member may be a negative electrode lead-out member or a positive electrode lead-out member, depending on the piezoelectric effect of the piezoelectric material, when the direction of the applied force changes, the polarity of the charge changes accordingly. Correspondingly, the first surface may be a top surface of the piezoelectric body, or may be a bottom surface of the piezoelectric body, and the second surface may be a bottom surface of the piezoelectric body, or may be a top surface of the piezoelectric body, which is not particularly limited.
In the present embodiment, the piezoelectric body is not particularly limited, and for example, various piezoelectric ceramics such as piezoelectric polycrystal may be used, or quartz crystal such as piezoelectric single crystal may be used.
For example, the present embodiment may select a piezoelectric body of piezoelectric ceramics, and a first surface (bottom surface) of the piezoelectric ceramics is provided with a positive electrode lead-out member, and a second surface (top surface) of the piezoelectric ceramic sensor is provided with a negative electrode lead-out member. Of course, it is obvious to a person skilled in the art that other piezoelectrics may also be provided.
It should be noted that, in this embodiment, the structures of the first electrode leading-out element and the second electrode leading-out element are not specifically limited, and may be specifically configured according to actual requirements or a process for manufacturing a piezoelectric sensor (for example, manufacturing a piezoelectric ceramic sensor), as long as the two electrodes of the piezoelectric body are respectively led out by the two electrode leading-out elements, and the second electrode on the second surface of the piezoelectric body is led out to the first surface, so that the two electrodes are simultaneously located on the same horizontal plane of the piezoelectric body.
Specifically, as shown in fig. 1 and 2, the present embodiment gives a first structure of the first electrode lead-out member and the second electrode lead-out member, both of which adopt plate-like structures. Specifically, the first electrode lead 120 extends inward from an end of the first surface (bottom surface) of the piezoelectric body 110, i.e., has a planar plate-like structure. That is, the first electrode lead-out member may be provided on the entire bottom surface of the piezoelectric body, or may be provided on a part of the bottom surface.
Illustratively, as shown in fig. 1, in some embodiments, the first electrode lead-out member 120 is disposed on a portion of the bottom surface of the piezoelectric body 110.
With continued reference to fig. 2, in other embodiments, the first electrode lead-out member 120 is disposed on the entire bottom surface of the piezoelectric body 110.
It should be understood that the first portion of the second electrode lead-out member may be provided on the entire top surface of the piezoelectric body as well, and may be provided only on a part of the top surface. As shown in fig. 1, in some embodiments, the first portion of the second electrode lead-out member 130 is disposed on a portion of the second surface (top surface) of the piezoelectric body 110, and the second portion extends from an end of the first portion toward the center of the first surface (bottom surface) of the piezoelectric body 110, and is insulated from the first electrode lead-out member. That is, the first portion of the second electrode lead-out member is disposed on the top surface of the piezoelectric body, and the second portion is disposed on the first surface of the piezoelectric body, and of course, the first electrode lead-out member is further disposed on the first surface, and an insulating region is provided between the first electrode lead-out member and the second portion of the second electrode lead-out member.
It is to be understood that, in order to make the surface of the piezoelectric body form an electrode, the first surface and the second surface of the piezoelectric body are provided with conductive layers electrically connected to the piezoelectric body at positions corresponding to the first electrode lead-out member and the second electrode lead-out member, which are electrically connected to the corresponding conductive layers. That is, it is also necessary to provide conductive layers (e.g., silver layers) on the first and second surfaces of the piezoelectric body.
Based on the above structure, as shown in fig. 1, the second electrode lead-out member 130 of the present embodiment is a U-shaped structure, and the U-shaped structure is sandwiched on the piezoelectric body 110, one end of the U-shaped structure is electrically connected to the second surface as a first portion of the second electrode lead-out member, the other end of the U-shaped structure is electrically connected to the first surface as a second portion of the second electrode lead-out member, and a bent portion of the U-shaped structure is spaced from an end portion of the piezoelectric body 110 by a predetermined distance, so that the second electrode lead-out member of the piezoelectric body is led out from the top surface to the bottom surface, and is located on the same horizontal plane. The structural design relieves the constraint limitation of the combination of the second electrode leading-out piece and the side surface of the piezoelectric body, and is convenient for process realization.
With reference to fig. 2, the electrode lead-out member according to the present embodiment has a plate-shaped structure, so that the second portion of the second electrode lead-out member 130 is bent and extended from the end of the first portion to the bottom surface and the outer side of the piezoelectric body 110, that is, the first portion of the second electrode lead-out member is disposed on the top surface of the piezoelectric body, and the second portion is not in contact with the piezoelectric body, and is directly led out from the top surface to the bottom surface and then extended out to form a sheet shape, so that the two electrode lead-out members are located on the same horizontal plane. Of course, it is understood that the first portion of the second electrode lead-out member may be provided on a portion of the top surface and extend from one end of the top surface to a side of the bottom surface facing away from the piezoelectric body, or may be provided on the entire top surface and extend from both ends of the top surface to a side of the bottom surface facing away from the piezoelectric body.
Furthermore, the first electrode leading-out piece and the second electrode leading-out piece can be fixedly connected with the surface of the piezoelectric body through conductive adhesive. Specifically, referring to fig. 1, a first conductive adhesive 140 is disposed between the first electrode lead 120 and the conductive layer of the bottom surface of the piezoelectric body 110, and a second conductive adhesive 150 is disposed between the second electrode lead 130 and the conductive layer of the top surface and the bottom surface of the piezoelectric body 110. Referring to fig. 2, a first conductive adhesive 140 is disposed between the first electrode lead-out element 120 and the entire bottom conductive layer of the piezoelectric body 110, and a second conductive adhesive 150 is disposed between the second electrode lead-out element 130 and the entire top conductive layer of the piezoelectric body 110. That is, the present embodiment electrically connects each electrode lead-out member to the corresponding electrode of the piezoelectric body through the conductive paste.
Furthermore, in order to solve the problem that the flanged electrode is not easily broken when the SMT process is used, the first electrode lead-out member and the second electrode lead-out member of the present embodiment may be made of a conductive material, and may be used as a reinforcing plate of the piezoelectric sensor, for example, a reinforcing plate made of other conductive materials such as a copper sheet, a steel sheet, an iron sheet, and an aluminum sheet. Therefore, by the reinforcing plate structure, the electrodes can be led out, the mechanical strength of the piezoelectric sensor (such as piezoelectric ceramic) is enhanced, the warping problem of the piezoelectric ceramic caused by stress release after an aging test is inhibited, the consistency of products is improved, and the problem of breakage in transportation and subsequent production is avoided.
Specifically, as shown in fig. 3, the present embodiment provides a second structure of the first electrode lead-out member and the second electrode lead-out member, and the first electrode lead-out member 120 extends inward from an end portion of the first surface (bottom surface) of the piezoelectric body 110 so as to be disposed on a part of the bottom surface of the piezoelectric body. The second portion of the second electrode lead 130 extends from the end of the first portion toward the center of the first surface of the piezoelectric body 110, and is insulated from the first electrode lead 120. That is, the first portion of the second electrode lead-out member is disposed on the second surface (top surface) of the piezoelectric body, and the second portion is disposed on the first surface of the piezoelectric body, and of course, the first electrode lead-out member is further disposed on the first surface, and an insulating region is provided between the first electrode lead-out member and the second portion of the second electrode lead-out member.
It should be understood that, also based on the above-described structure, the second electrode lead-out member of the present embodiment may also have a U-shaped structure so as to lead out the second electrode lead-out member of the piezoelectric body from the top surface to the bottom surface at the same level as the first electrode lead-out member.
In the embodiment, the first electrode leading-out member, the first portion of the second electrode leading-out member, and the second portion of the second electrode leading-out member are respectively provided with a via hole, and correspondingly, a protrusion corresponding to the via hole is formed on the piezoelectric body and is arranged in the via hole. Specifically, as shown in fig. 3, the first electrode lead 120 is provided with a plurality of via holes 121, and the first and second portions of the second electrode lead 130 are provided with a plurality of via holes 131. Correspondingly, the first surface and the second surface of the piezoelectric body 110 are formed with protrusions corresponding to the vias, and each protrusion is disposed in a corresponding via. Of course, a protrusion may also be formed on the side surface of the piezoelectric body corresponding to the second electrode lead-out member, and similarly, the protrusion is disposed in the corresponding via hole to realize the lead-out of the second electrode lead-out member from the top surface to the bottom surface of the piezoelectric body.
Furthermore, in order to solve the problem that the flanging electrode is not easy to break when the SMT process is adopted, the first electrode lead-out member and the second electrode lead-out member of the present embodiment may also be made of a conductive material and serve as a reinforcing plate of the piezoelectric sensor.
It should be noted that, based on the present embodiment, a die casting process is adopted to implement the combination of the piezoelectric sensor (for example, piezoelectric ceramic) and the electrode lead-out part, so that the stiffening plate of the present embodiment selects a high temperature resistant steel sheet, and thus, after the piezoelectric ceramic is sintered for the first time, the piezoelectric ceramic and the stiffening plate are directly implemented by the die casting process, so that the two electrode lead-out parts are provided with through holes, and the piezoelectric ceramic is extruded and filled in the through holes by the die casting process to form the corresponding electrode lead-out part.
Specifically, as shown in fig. 4, the present embodiment provides a third structure of the first electrode lead-out member and the second electrode lead-out member, and the first electrode lead-out member 120 extends from an end portion of the first surface (bottom surface) of the piezoelectric body 110 to the inner side of the bottom surface to be disposed on a part of the bottom surface of the piezoelectric body. The second portion of the second electrode lead 130 extends from the end of the first portion toward the center of the first surface of the piezoelectric body 110, and is insulated from the first electrode lead 120. That is, the first portion of the second electrode lead-out member is disposed on the second surface (top surface) of the piezoelectric body, and the second portion is disposed on the first surface of the piezoelectric body, and of course, the first electrode lead-out member is further disposed on the first surface, and an insulating region is provided between the first electrode lead-out member and the second portion of the second electrode lead-out member.
It should be understood that, also based on the above-described structure, the second electrode lead-out member of the present embodiment may also have a U-shaped structure so as to lead out the second electrode lead-out member of the piezoelectric body from the top surface to the bottom surface, at the same level as the first electrode lead-out member.
In the embodiment, a plurality of protrusions are formed on the first part and the second part of the first electrode leading-out piece and the second electrode leading-out piece, electrode leading-out holes corresponding to the protrusions are formed in the piezoelectric body, and the protrusions are arranged in the corresponding electrode leading-out holes. Specifically, as shown in fig. 4, a plurality of protrusions 122 are formed on the first electrode lead-out member 120, a plurality of protrusions 132 are formed on the first portion and the second portion of the second electrode lead-out member 130, and correspondingly, electrode lead-out holes corresponding to the protrusions are formed on the first surface and the second surface of the piezoelectric body 110, and each protrusion is disposed in the corresponding electrode lead-out hole. Of course, an electrode lead-out hole may be also formed on the side surface of the piezoelectric body corresponding to the second electrode lead-out member, and a corresponding protrusion is also formed in the electrode lead-out hole to lead the second electrode lead-out member from the top surface to the bottom surface of the piezoelectric body.
The electrode lead-out holes formed in the first surface and the second surface of the piezoelectric body are blind holes.
It should be further noted that, in this embodiment, the protrusions formed on the first electrode lead-out member and the second electrode lead-out member may be integrally formed with the electrode lead-out member body, or may be separately disposed, for example, after a tape casting process is adopted to tape-cast a piezoelectric body (for example, piezoelectric ceramic), array blind holes, i.e., electrode lead-out holes, are locally disposed on the ceramic body by laser, then, a conductive material is respectively filled in the corresponding electrode lead-out holes as a filling layer to form protrusions on the corresponding electrode lead-out members, after the filling is completed, a layer of conductive reinforcing material is further printed on the surface of the filling layer to serve as a connecting layer for connecting the protrusions, i.e., the corresponding piezoelectric body, so as to achieve the combination of the electrode lead-out member and the piezoelectric ceramic by a sintering process.
Furthermore, in order to solve the problem that the flanged electrode is not easy to break when the SMT process is used, the first electrode lead-out member and the second electrode lead-out member of the present embodiment may also be made of a conductive material and serve as a reinforcing plate of the piezoelectric sensor.
The utility model provides a piezoelectric sensor has following beneficial effect for prior art: first, the utility model discloses a piezoelectric sensor can draw two electrodes of piezoelectricity out through setting up first electrode extraction piece and second electrode extraction piece, and further draws out the second electrode extraction piece on piezoelectricity second surface to the first surface, draws out the piece with the first electrode that is located the first surface and is in same horizontal plane to make piezoelectric sensor's roughness easily control, be convenient for braid and production. Second, the utility model discloses an electrode extraction structure can adopt the stiffening plate structure, has strengthened the mechanical strength of piezoceramics body, has avoided cracked problem in transportation and follow-up production to and, through the reinforcement design, restrained piezoceramics because the warpage problem that the release of stress leads to after aging test, improved the uniformity of product. Third, the utility model discloses a piezoelectric sensor can support general SMT or ACF technology well, and production efficiency is high, reliability and yield greatly increased have solved the easy cracked problem of turn-ups electrode when production of conventional silver thick liquid technology.
It is to be understood that the above embodiments are merely exemplary embodiments that have been employed to illustrate the principles of the present invention, and that the present invention is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (10)
1. A piezoelectric sensor, comprising: a piezoelectric body, a first electrode lead-out member, and a second electrode lead-out member; wherein,
the first electrode lead-out member is disposed on a first surface of the piezoelectric body and electrically connected to the first surface;
a first portion of the second electrode lead-out member is disposed on and electrically connected to the second surface of the piezoelectric body; and the second part of the second electrode lead-out piece extends to the first surface to be flush with the first electrode lead-out piece.
2. The piezoelectric sensor according to claim 1, wherein the second portion of the second electrode lead-out member extends from an end of the first portion toward a center of the first surface, and is insulated from the first electrode lead-out member.
3. The piezoelectric sensor according to claim 2, wherein the second electrode lead-out member has a U-shaped configuration.
4. The piezoelectric sensor according to claim 3, wherein the U-shaped structure is sandwiched between the piezoelectric body, one end of the U-shaped structure is electrically connected to the second surface as a first portion of the second electrode lead-out member, the other end of the U-shaped structure is electrically connected to the first surface as a second portion of the second electrode lead-out member, and a bent portion of the U-shaped structure is spaced apart from an end portion of the piezoelectric body by a predetermined distance.
5. The piezoelectric sensor according to claim 1, wherein the second portion of the second electrode lead-out member extends from an end of the first portion to an outside of the piezoelectric body.
6. The piezoelectric sensor according to any one of claims 2 to 5, wherein the first surface and the second surface of the piezoelectric body are provided with conductive layers electrically connected to the piezoelectric body at positions corresponding to the first electrode lead-out member and the second electrode lead-out member, which are electrically connected to the corresponding conductive layers.
7. The piezoelectric sensor according to claim 2 or 3, wherein a plurality of via holes are provided on each of the first electrode lead-out member, the first portion of the second electrode lead-out member, and the second portion, and wherein a protrusion corresponding to the via hole is formed on the piezoelectric body, the protrusion being provided in the via hole.
8. The piezoelectric sensor according to claim 2 or 3, wherein a plurality of protrusions are formed on each of the first electrode lead-out member, the first portion, and the second portion of the second electrode lead-out member, electrode lead-out holes corresponding to the protrusions are formed on the piezoelectric body, and the protrusions are disposed in the electrode lead-out holes.
9. The piezoelectric sensor according to any one of claims 1 to 5, wherein the first electrode lead-out member extends inward from an end portion of the first surface of the piezoelectric body.
10. The piezoelectric sensor according to any one of claims 1 to 5, wherein the first electrode lead-out member and/or the second electrode lead-out member is made of a conductive material and serves as a reinforcing plate of the piezoelectric sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023226021.5U CN213692093U (en) | 2020-12-28 | 2020-12-28 | Piezoelectric sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023226021.5U CN213692093U (en) | 2020-12-28 | 2020-12-28 | Piezoelectric sensor |
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| CN213692093U true CN213692093U (en) | 2021-07-13 |
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| CN202023226021.5U Active CN213692093U (en) | 2020-12-28 | 2020-12-28 | Piezoelectric sensor |
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