CN2135767Y - Super-precision surface measurer - Google Patents
Super-precision surface measurer Download PDFInfo
- Publication number
- CN2135767Y CN2135767Y CN 92221100 CN92221100U CN2135767Y CN 2135767 Y CN2135767 Y CN 2135767Y CN 92221100 CN92221100 CN 92221100 CN 92221100 U CN92221100 U CN 92221100U CN 2135767 Y CN2135767 Y CN 2135767Y
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- CN
- China
- Prior art keywords
- microscope
- prism
- measuring
- light
- light source
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- Expired - Lifetime
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- 238000005259 measurement Methods 0.000 claims abstract description 8
- 238000012876 topography Methods 0.000 claims description 3
- 230000000007 visual effect Effects 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000004441 surface measurement Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000009342 intercropping Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The utility model relates to a novel super-precise surface pattern measurer, belonging to the technical field of length measurement. The measurer is composed of a workbench, a light source, a reflecting prism, a microscope, a photodetector, a computer and an image monitor. A measured sample arranged on the workbench contacts with the bottom of a measuring prism. Incident light generated by the light source passes through the reflecting prism and the measuring prism and goes into the microscope. The photodetector transmits the light intensity signals of the microscope to the computer and the image monitor which then work out the surface pattern distribution of the measured sample. The measurer has the advantages of high speed, precision, strong anti-interference ability, etc.
Description
The utility model relates to a kind of novel superfinish topography measurement instrument, belongs to the length metering technical field.
The measurement of surface topography is to the relation of research surface geometrical features and usability, and the quality of raising finished surface and the performance of product have crucial meaning.With optical means surface measurements pattern, owing to can realize nondestructive measurement and evaluation, and have advantages such as precision is high-speed fast, therefore be subjected to people's extensive attention and widespread usage.What application was maximum at present is Mirau branch light path interference microscope.
The light path principle of Mirau interference microscope as shown in Figure 1, the light beam that sends from light source sees through reference plate 2 behind microcobjective 1, be divided into two-way by the semi-transparent semi-reflecting film on the beam-splitter 3.One Reuter is reflected by tested surface 4 after crossing beam-splitter, behind beam-splitter and reference plate, get back in the microscopic fields of view, another road is reflexed on the little minute surface 5 that is plated in the reference plate surface by beam-splitter, the light beam of reflected back is reflected by beam-splitter once more from the little minute surface, pass reference plate then and arrive microscopic fields of view, join with first via light beam and interfere.Utilize interference microscope surface measurements pattern, normally determine surface roughness parameter indirectly by the distortion of measuring interference fringe, the measuring accuracy of this analytical approach is very low, generally between λ～λ/20 (λ is an optical wavelength).
Koliopoulos improves the Miran interference microscope, reference plate in the microscope is fixed on the tubular piezoelectric ceramics 5 (as Fig. 2), 4 is measured surfaces among the figure, the 5th, piezoelectric ceramics, the 6th, eyepiece, the 7th, the CCD planar array detector, the 8th, light source, the 9th, object lens, at the uniform velocity mobile by computer control Piezoelectric Ceramic reference plate along optical axis direction, make the phase differential intercropping linear change at any time between reference light and the measuring light, so on the interference field each point interference light intensity just bright and dark between make sinusoidal variations, because the microcosmic difference in height of each point makes the interferometric phase of respective point on the interference field also different on the measured surface.Utilizing CCD face battle array to survey the light intensity of each point on the interference field, is sine function with computing machine with the luminous intensity measurement data fitting of each point, by the phase relation between the each point sine function relatively, just can obtain the height profile data of measured surface pattern.
Interference microscope after the improvement is at present most popular a kind of instrument with optical means surface measurements pattern, but it also has following weak point: (1) is very responsive to mechanical vibration, atmospheric disturbance and influence of temperature variation, need to be equipped with air supporting accurate vibration isolation platform, the strict condition of work that limits measurement environment.(2) optical system complexity, the cost height, (3) adjust difficulty.
The purpose of this utility model is the measuring surface form instrument that design is a kind of fast accurately, antijamming capability is very strong.
Content of the present utility model is the measuring surface form instrument, is made up of worktable, light source, reflective prism, measuring prism, microscope, photo-detector, computing machine and picture monitor.Sample places on the worktable, and the bottom surface of measuring prism is the measuring basis face, contacts with the surface of sample.After the incident light that light source sends passes through described reflective prism and measuring prism, enter microscope, photo-detector detects the light intensity signal in the microscope, and pass the signal along to computing machine and picture monitor successively, to the gained Signal Processing, just can calculate the topographic profile data on sample surface through computing machine.
Description of drawings:
Fig. 1 and Fig. 2 are prior art test philosophy synoptic diagram.
Fig. 3 is a structural representation of the present utility model.
Fig. 4 is a hm scaling method synoptic diagram
Below in conjunction with accompanying drawing, introduce principle of work of the present utility model and test process in detail.Among Fig. 3, the 10th, worktable, the 11st, measured surface, the 12nd, measuring basis face, the 13rd, measuring prism, the 14th, reflective prism, the 15th, light source, the 16th, microscope, the 17th, photo-detector, the 18th, computing machine, the 19th, picture monitor.
Principle of work of the present utility model is: under total reflection condition, light wave be not utterly on the interface by whole reflected back first media.When measured surface and reference field comes in contact or distance very hour, measured surface will absorb the energy of a part of light wave, and reflected light is died down.For the point or the tiny area of arbitrary position in the visual field, two surface spacings are more little, and then intensity of reflected light is weak more, and promptly reflective light intensity and surface spacing have the funtcional relationship of definite dullness.After the structure of instrument was determined, the funtcional relationship of intensity of reflected light and surface spacing can be with following simplified style subrepresentation:
Wherein: R is a reflectivity, i.e. the ratio of reflective light intensity and incident intensity
H is a surface spacing
Ro is the ratio of surface spacing reflective light intensity and incident intensity when being zero
Hm is a constant, and is definite by demarcating
The scaling method of hm as shown in Figure 4.20 is prisms among the figure, the 21st, and gauge.Through suitably being installed, make to form a very little locking angle between gauge and the prism surface, determine the angle of wedge with the light interference technique.Instrument is adjusted to normal measurement state, and beginning is along angle of wedge direction search from contact point (surface spacing is zero), and when reflectivity increased to 1, pairing surface spacing was hm.Use the step of this measuring instrument surface measurements pattern as follows:
(1) opening power is adjusted worktable and is made measured surface away from the measuring basis face, and at this moment light total reflection is not destroyed, and the light intensity that photo-detector is surveyed is identical with incident light, and result of detection is imported computing machine and storage.
(2) regulate worktable, make measured surface lean on the measuring basis face, survey intensity of reflected light and deposit data in computing machine.
(3) computer search reflective light intensity data are found out the minimal reflection light intensity value, should value compare with incident intensity, then obtain demarcating constant Ro.
(4) hm and optical wavelength, incident angle, factors such as prismatic refraction rate are relevant, and irrelevant with measured surface, after the instrument adjustment finished, hm promptly determined, by demarcating the concrete numerical value that promptly obtains hm.
(5) computing machine is compared the reflectivity R that promptly obtains each point in the visual field with the result of step (2) with the result of (1), 1. promptly calculates the topographic profile data of measured surface again according to formula.
The vertical resolution of this measuring instrument is better than 1 nanometer, and its maximum characteristics are that antijamming capability is very strong, has simultaneously to measure rapidly, and is easy and simple to handle, the advantages such as the low and good reliability of cost.
Claims (1)
1, a kind of superfinish topography measurement instrument is characterized in that described measuring instrument is made up of worktable, light source, reflective prism, measuring prism, microscope, light-operated survey device, computing machine and visual monitor; Sample places on the described worktable; The bottom surface of described measuring prism is the measuring basis face, contacts with the surface of sample; The incident light that described light source sends enters described microscope after passing through described reflective prism and measuring prism, and described photo-detector detects the light intensity signal in the microscope, and passes the signal along to computing machine and picture monitor successively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 92221100 CN2135767Y (en) | 1992-09-29 | 1992-09-29 | Super-precision surface measurer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 92221100 CN2135767Y (en) | 1992-09-29 | 1992-09-29 | Super-precision surface measurer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2135767Y true CN2135767Y (en) | 1993-06-09 |
Family
ID=33767980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 92221100 Expired - Lifetime CN2135767Y (en) | 1992-09-29 | 1992-09-29 | Super-precision surface measurer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2135767Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101324429B (en) * | 2008-07-11 | 2011-03-30 | 中国科学院电工研究所 | High precision measurement method of scanning probe microscope |
| CN109916515A (en) * | 2019-03-29 | 2019-06-21 | 清华-伯克利深圳学院筹备办公室 | A kind of polarization detecting device |
-
1992
- 1992-09-29 CN CN 92221100 patent/CN2135767Y/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101324429B (en) * | 2008-07-11 | 2011-03-30 | 中国科学院电工研究所 | High precision measurement method of scanning probe microscope |
| CN109916515A (en) * | 2019-03-29 | 2019-06-21 | 清华-伯克利深圳学院筹备办公室 | A kind of polarization detecting device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |