CN109916515A - A kind of polarization detecting device - Google Patents
A kind of polarization detecting device Download PDFInfo
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- CN109916515A CN109916515A CN201910251927.5A CN201910251927A CN109916515A CN 109916515 A CN109916515 A CN 109916515A CN 201910251927 A CN201910251927 A CN 201910251927A CN 109916515 A CN109916515 A CN 109916515A
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Abstract
The embodiment of the invention discloses a kind of polarization detecting devices, the optical axis of the beam exit unit of the polarization detecting device and the optical axis of beam reception unit are parallel to each other, and beam adjustment unit is arranged in the optical path between beam exit unit and beam reception unit, the polarized incident light beam that the beam adjustment unit can control the offer of beam exit unit is projected to tested particle, and beam reception unit is enabled to receive the polarization scattering light beam of the predetermined angle by being tested Particle Scattering, realize the detection to the specific angle of scattering of tested particle.Polarization detecting device structure provided in an embodiment of the present invention is simple, and lateral dimension is smaller, occupies little space, and is conducive to integrated adjustment.
Description
Technical field
The present embodiments relate to polarimetry technical field more particularly to a kind of polarization detecting devices.
Background technique
Polarimetry technology is that one kind can be to the advanced technology that particle is characterized, the basic principle is that polarised light is thrown
It is incident upon particle, by measuring scattering light, reflected light or the transmitted light of particle, after obtaining polarized light scatter, reflection or transmission
Intensity and polarization properties etc., therefrom to extract the microstructure information of particle.
Polarization detecting device in the prior art is made of incident arm and receiving arm, wherein incident arm provides incident polarization
Light, receiving arm receive scattering light, reflected light or transmitted light.After Particle Scattering, receiving arm receives the polarised light that incident arm provides
Light is scattered, which carries fine-grained microstructure information, and the intensity and polarization properties for analyzing the scattering light can get micro-
The microstructure information of grain.
But it when scattering light using a certain angle of the polarization detecting device of prior art detection particle, incident arm and connects
Receiving arm needs at an angle, such as when measuring 120 ° of the rear light to polarization scattering, incident arm and receiving arm need to be in 60 ° of folder
Angle, this causes the lateral dimension of polarization detecting device larger, and occupied space is larger, adjustment not easy of integration.
Summary of the invention
For above-mentioned there are problem, the embodiment of the present invention provides a kind of polarization detecting device, is able to solve in the prior art
The lateral dimension of polarization detecting device is larger, and occupied space is larger, not the technical issues of adjustment easy of integration.
The embodiment of the invention provides a kind of polarization detecting devices, comprising: the beam exit unit that is set gradually along optical path,
Beam adjustment unit and beam reception unit;
The beam exit unit is for providing polarized incident light beam;
The beam adjustment unit is projected to tested particle for controlling the polarized incident light beam;
The beam reception unit is for receiving predetermined angle of the polarized incident light after the tested Particle Scattering
Polarization scattering light beam;
Wherein, the optical axis of the beam exit unit is parallel with the optical axis of the beam reception unit.
Optionally, the beam adjustment unit includes light modulation prism;
The light modulation prism includes at least the plane of incidence, reflecting surface and exit facet;
The plane of incidence of the vertical light modulation prism of the polarized incident light beam enters the light modulation prism, in the light modulation rib
The reflecting surface of mirror is totally reflected;In the vertical tune of the polarized incident light beam of the reflecting surface total reflection of the light modulation prism
The exit facet of light prism projects, and is projected to the tested particle.
Optionally, the beam adjustment unit includes reflecting mirror;
The polarized incident light beam is totally reflected through the reflecting surface of the reflecting mirror, and is projected to tested particle.
Optionally, the beam adjustment unit further includes plus lens;
When the beam adjustment unit includes the light modulation prism and the plus lens, the light modulation prism and described
Plus lens is set gradually along optical path;
The polarization outgoing beam that the plus lens is used to project the exit facet of the vertical light modulation prism focuses, and throws
It is incident upon the tested particle;
Alternatively, when the beam adjustment unit includes the reflecting mirror and the plus lens, the reflecting mirror and institute
Plus lens is stated to set gradually along optical path;
The polarized reflection light beam that the plus lens is used for the reflecting surface total reflection to the reflecting mirror focuses, and is projected to
The tested particle.
Optionally, the incidence angle that the polarized incident light beam is totally reflected is θ;The incidence angle θ meets:
Wherein, n1For the refractive index of the optically denser medium of the first side of the reflecting surface, n2For away from described in first side
The refractive index of the optically thinner medium of second side of reflecting surface;
The angle of scattering of the polarization scattering light beam of the predetermined angle is β;Wherein, the θ of β=2.
Optionally, which is characterized in that the beam adjustment unit further includes the encapsulation knot positioned at described reflecting surface second side
Structure;
The encapsulating structure and the reflecting surface constitute sealing space, and the light is sealed in the sealing space and dredges Jie
Matter.
Optionally, angle of scattering β=120 °;60 ° of the incidence angle θ=.
Optionally, the light modulation prism includes prism.
Optionally, the beam exit unit includes light source, the polarizer and the diaphragm set gradually along the optical path;
The light source is for providing natural light;
The polarizer is used to the natural light being converted to polarised light;
The diaphragm is used to limit the light beam of the polarised light, to provide the polarized incident light beam.
Optionally, the beam reception unit includes receiving microscope group and polarization detector;
The reception microscope group includes the receiving lens being oppositely arranged and collimation lens;
The polarization scattering light beam of the predetermined angle polymerize in the focus of the receiving lens, and enters institute in focus diverging
Collimation lens is stated, parallel polarization light beam is converted to;
The polarization detector is for receiving the parallel polarization light beam.
Optionally, the microscope group that receives further includes the aperture light between the receiving lens and the collimation lens
Door screen;
The aperture center of the aperture is overlapped with the focus of the receiving lens;The aperture is used for described
The polarization scattering light beam of the predetermined angle of receiving lens polymerization carries out space filtering.
Optionally, the distance between the receiving lens and the collimation lens are equal to the focal length f of the receiving lens1With
The focal length f of the collimation lens2The sum of.
Polarization detecting device provided in an embodiment of the present invention, the optical axis of beam exit unit and the optical axis of beam reception unit
It is parallel to each other, and beam adjustment unit, the light beam regulation is arranged in the optical path between beam exit unit and beam reception unit
The polarized incident light beam that unit can control the offer of beam exit unit is projected to tested particle, and enables beam reception unit
Enough polarization scattering light beams for receiving the predetermined angle by being tested Particle Scattering, realize the inspection to the specific angle of scattering of tested particle
It surveys.Polarization detecting device structure provided in an embodiment of the present invention is simple, and lateral dimension is smaller, occupies little space, and is conducive to integrated adjust
School.
Detailed description of the invention
Fig. 1 is the structural representation of the polarization detecting device of the prior art;
Fig. 2 is a kind of structural schematic diagram of polarization detecting device provided in an embodiment of the present invention;
Fig. 3 is the structural schematic diagram of another polarization detecting device provided in an embodiment of the present invention;
Fig. 4 is the structural schematic diagram of another polarization detecting device provided in an embodiment of the present invention;
Fig. 5 is the structural schematic diagram of another polarization detecting device provided in an embodiment of the present invention;
Fig. 6 is the structural schematic diagram of another polarization detecting device provided in an embodiment of the present invention;
Fig. 7 is the structural schematic diagram of another polarization detecting device provided in an embodiment of the present invention;
Fig. 8 is the structural schematic diagram of another polarization detecting device provided in an embodiment of the present invention.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining the present invention rather than limiting the invention.It also should be noted that in order to just
Only the parts related to the present invention are shown in description, attached drawing rather than entire infrastructure.
Based on the method for polarization optics scattering, a branch of polarized incident light beam is through tested Particle Scattering, by measuring by being tested
The polarization properties and intensity of the polarization scattering light of Particle Scattering can get the microstructure of the tested particle, such as particle size component
With distribution etc..Currently, be tested before the polarization scattering light that is scattered of particle is divided into polarization scattering light, lateral polarization scattering light and after
To polarization scattering light, and the intensity and polarization properties of different directions and the polarization scattering light of angle have difference, and measured is micro-
Seeing structure has difference.Since 120 ° of back scattering polarised lights have stable polarization properties and intensity, would generally survey
The back scattering polarised light of tested 120 ° of particle is measured, to obtain the microstructure of tested particle.
In this way, having 60 ° of angle between the incident arm and receiving arm of polarization detecting device in the prior art, can survey
120 ° of back scattering polarised light is obtained, this causes polarization detecting device to have biggish size.
Fig. 1 is the structural representation of the polarization detecting device of the prior art.Such as Fig. 1, polarization detecting device is by a pair in 60 ° of folders
The incident arm and receiving arm at angle are constituted, and incident arm provides polarized incident light beam, which occurs after tested particle
Scattering, the backward polarization scattering light of 120 ° scattered carry the microstructure information of tested particle, are received by receiving arm
120 ° of the backward polarization scattering light, and extracted by the intensity of 120 ° of the backward polarization scattering light and polarization properties etc. tested
The microstructure information of particle.
But polarization detecting device lateral dimension in the prior art is larger, occupied space is big, is unfavorable for current miniaturization
The development of instrument.
Based on above-mentioned technical problem, the embodiment of the present invention provides a kind of polarization detecting device, including sets gradually along optical path
Beam exit unit, beam adjustment unit and beam reception unit;Beam exit unit is for providing polarized incident light beam;Light
Beam adjusts unit and is projected to tested particle for controlling polarized incident light beam;Beam reception unit is for receiving polarized incident light warp
The polarization scattering light beam of predetermined angle after tested Particle Scattering;Wherein, the optical axis of beam exit unit and beam reception unit
Optical axis it is parallel.
Polarization detecting device provided in an embodiment of the present invention, the optical axis of beam exit unit and the optical axis of beam reception unit
It is parallel to each other, and beam adjustment unit is set in the optical path between beam exit unit and beam reception unit, the light beam tune
The polarized incident light beam that section unit can control the offer of beam exit unit is projected to tested particle, and makes beam reception unit
The polarization scattering light beam that the predetermined angle by being tested Particle Scattering can be received, realizes the inspection to the specific angle of scattering of tested particle
It surveys.Polarization detecting device structure provided in an embodiment of the present invention is simple, and lateral dimension is smaller, occupies little space, and is conducive to integrated adjust
School.
It is core of the invention thought above, following will be combined with the drawings in the embodiments of the present invention, to the embodiment of the present invention
In technical solution be clearly and completely described.Based on the embodiments of the present invention, those of ordinary skill in the art are not having
Under the premise of making creative work, every other embodiment obtained be shall fall within the protection scope of the present invention.
Fig. 2 is a kind of structural schematic diagram of polarization detecting device provided in an embodiment of the present invention.Such as Fig. 2, the present invention is implemented
The polarization detecting device that example provides includes that the beam exit unit 10 set gradually along optical path, beam adjustment unit 20 and light beam connect
Receive unit 30;Beam exit unit 10 is for providing polarized incident light beam;Beam adjustment unit 20 is for controlling polarized incident light
Beam is projected to tested particle 40;Beam reception unit 30 is used to receive preset angle of the polarized incident light after being tested particle 40 and scattering
The polarization scattering light beam of degree;Wherein, the optical axis X1 of beam exit unit 10 and the optical axis X2 of beam reception unit 30 are parallel.
Specifically, the polarized incident light beam that beam exit unit 10 is emitted may include linear polarization incident beam, it is oval partially
Shake incident beam or circular polarization incident light beam, and the embodiment of the present invention is to the specific polarization state of polarized incident light beam without limit
It is fixed.Polarized incident light beam is projected to tested particle 40 after beam adjustment unit 20 is adjusted, so that optical axis and beam exit
The parallel beam reception unit 30 of unit 10 can receive the polarization scattering light beam for the predetermined angle that tested particle 40 scatters, and
Calculating is measured to the polarization scattering light beam of the predetermined angle, finally obtains the related ginseng such as microstructure of tested particle 40
Number.Wherein, the angle of scattering β of the polarization scattering light beam of the predetermined angle for example can be 120 °.
In this way, the embodiment of the present invention is by between the beam exit unit that optical axis is parallel to each other and beam reception unit
Beam adjustment unit is set in optical path, and the polarized incident light that beam exit unit provides is projected to after beam adjustment unit is adjusted
Tested particle enables to beam reception unit to receive the polarization scattering light beam of the predetermined angle by being tested Particle Scattering, realizes
Detection to the specific angle of scattering of tested particle, meanwhile, the optical axis of beam exit unit and beam reception unit is parallel to each other, because
This occupies little space with lesser lateral dimension and simple structure, is conducive to integrated adjustment.
It should be noted that the polarized incident light beam that beam exit unit 10 provides in Fig. 2 is controlled through beam adjustment unit 20
During system is projected to tested particle, the polarization state of light beam can not change, and can pass through corresponding polarization state detector
The polarization state of the polarized incident light beam after beam adjustment unit 20 is detected, and beam exit is adjusted according to polarization state detected
The polarization state for the polarized incident light beam that unit 10 provides, so that the polarized incident light beam that beam exit unit 10 provides is through light beam tune
Identical polarization state is kept before and after section unit 20.It is described in detail below in conjunction with the specific structure of beam adjustment unit 20.
Optionally, Fig. 3 is the structural schematic diagram of another polarization detecting device provided in an embodiment of the present invention.Such as Fig. 3, light
It includes light modulation prism 21 that beam, which adjusts unit 20,;The light modulation prism 21 includes at least the plane of incidence 211, reflecting surface 212 and exit facet
213;The plane of incidence 211 of the vertical light modulation prism 21 of polarized incident light beam enters light modulation prism 21, in the reflection of light modulation prism 21
Face 212 is totally reflected;Going out for prism 21 is vertically dimmed in the polarized incident light beam that the reflecting surface 211 of light modulation prism 21 is totally reflected
The injection of face 213 is penetrated, and is projected to tested particle 40.
Specifically, light modulation prism can be prism or the prism of other structures, as long as meeting the incident light of the plane of incidence 211
Beam projects after reflecting surface 212 is totally reflected through exit facet 213, and is projected to tested particle 40.According to Fresnel public affairs
The theory of formula, when polarized incident light beam from a medium to another medium with 90 ° of angle incidence when, the polarized incident light beam
Polarization state can remain unchanged, therefore polarized incident light beam enters light modulation prism 21 perpendicular to the plane of incidence 211 of light modulation prism 21,
It enables to polarized incident light beam to carry out light modulation prism 21 to retrodeviate polarization state and do not change;Simultaneously in the reflecting surface of light modulation prism 21
212 be totally reflected after vertically dim prism 21 exit facet 213 project, again such that the polarized incident light beam being totally reflected
When projecting light modulation prism 21, polarization state does not change.
Optionally, with continued reference to Fig. 3, the incidence angle that polarized incident light beam is totally reflected is θ;The incidence angle θ meets:
Wherein, n1For the refractive index of the optically denser medium of the first side of reflecting surface 212, n2For away from the reflecting surface 212 of the first side
Second side optically thinner medium refractive index;The angle of scattering of the polarization scattering light beam of predetermined angle is β, wherein the θ of β=2.
Specifically, the incidence angle θ that polarized incident light beam is totally reflected on reflecting surface 212 should be greater than being equal in the reflection
The critical angle θ that face 212 is totally reflectedc, from the formula being totally reflected:
Wherein, n1For the refractive index of the optically denser medium of the first side of reflecting surface 212, n2For away from the reflecting surface 212 of the first side
Second side optically thinner medium refractive index.When the incidence angle θ that polarized incident light beam is totally reflected on reflecting surface 212 meets
When following formula:
The incidence angle θ that the polarized incident light beam is totally reflected on reflecting surface 212 is equal to be occurred entirely in the reflecting surface 212
The critical angle θ of reflectionc, so enable to polarized incident light beam that total reflection occurs on reflecting surface 212 and keep original polarization
State.Wherein, the refractive index n of the optically denser medium of the first side of reflecting surface 2121As dim the refractive index of prism 21, reflecting surface 212
Second side optically thinner medium refractive index n2It can be the refractive index of tested 40 local environment of particle, or other satisfactions
The refractive index of the optically thinner medium of total reflection.
Since polarized incident light beam enters in light modulation prism 21 perpendicular to the plane of incidence 211, and projected perpendicular to exit facet 213
Tested particle 40, while optical axis X1 and the X2 phase of beam exit unit 10 and beam reception unit 30 are projected to after light modulation prism 21
It is mutually parallel, therefore according to the definition of geometry it is found that the polarization scattering of predetermined angle received by beam reception unit 30
The angle of scattering β of light beam is equal to the sum of the incidence angle θ that polarized incident light beam is totally reflected on reflecting surface 212 and angle of emergence α.By
The incidence angle θ that polarized incident light beam known to reflection law is totally reflected on reflecting surface 212 is equal to angle of emergence α, therefore β=2
θ。
Wherein, incidence angle θ is chosen as being equal to 60 °, and angle of scattering β is chosen as being equal to 120 °.In this way, beam reception unit 30 is examined
The angle of scattering of the polarization scattering light of the predetermined angle measured be 120 °, can according to the angle of scattering be 120 ° predetermined angle it is inclined
The parameters such as the intensity and polarization properties of vibration scattering light obtain the microstructure information of tested particle 40, and obtained microstructure
Information Stability and veracity with higher.
Optionally, Fig. 4 is the structural schematic diagram of another polarization detecting device provided in an embodiment of the present invention.Such as Fig. 4,
On the basis of polarization detecting device shown in Fig. 3, the beam adjustment unit 20 of the polarization detecting device of the embodiment of the present invention is also wrapped
Include the encapsulating structure 22 positioned at reflecting surface second side;The encapsulating structure 22 and reflecting surface 212 constitute sealing space, the sealing space
Inside it is sealed with optically thinner medium 23.
Specifically, encapsulating structure 22 and reflecting surface 212 constitute in sealing space and are sealed with optically thinner medium 23, the optically thinner medium
23 can be selected according to the material of light modulation prism 21, the refractive index n of the optically thinner medium 232It should be less than the refractive index of light modulation prism
n1.Illustratively, when optically thinner medium 23 is water, light modulation prism 21 is chosen as barium crown glass (BaK2) or flint glass etc.;
When optically thinner medium 23 is air, light modulation prism 21 is chosen as K9 glass etc..In addition, optically thinner medium 23 can also be oil, resin
Deng, light modulation prism 21 also with optically thinner medium 23 variation and change.
It should be noted that Fig. 2 is only a kind of embodiment of the embodiment of the present invention, in the core for meeting the embodiment of the present invention
On the basis of heart inventive point, beam adjustment unit can be the combination of any device and/or optics microscope group.Illustratively, light beam
Adjusting unit can also include reflecting mirror.
Optionally, Fig. 5 is the structural schematic diagram of another polarization detecting device provided in an embodiment of the present invention.Such as Fig. 5, sheet
The beam adjustment unit 20 of the polarization detecting device packet of inventive embodiments includes reflecting mirror 24;Polarized incident light beam is through reflecting mirror 24
Reflecting surface 241 be totally reflected, and be projected to tested particle 40.
Wherein, optionally, polarized incident light beam is θ in the incidence angle that the reflecting surface 241 of reflecting mirror 24 is totally reflected;It should
Incidence angle θ meets:
Wherein, n1For the refractive index of the optically denser medium of the first side of the reflecting surface 241 of reflecting mirror 24, n2For away from the first side
Reflecting mirror 24 reflecting surface 241 second side optically thinner medium refractive index.Meanwhile the polarization scattering light beam of predetermined angle
Angle of scattering is β;Wherein, the θ of β=2.In this way, polarized incident light beam after the reflecting surface 241 of reflecting mirror 24 is totally reflected, polarizes
State will not change, so that unnecessary measurement error will not be introduced, can be improved the accuracy and reliability of Polarization Detection.
Wherein, the refractive index of the optically denser medium of the first side of the reflecting surface 241 of reflecting mirror 24 can be with tested 40 institute of particle
The refractive index for locating environment is identical or different, and the refractive index of the optically thinner medium of second side of the reflecting surface 241 of reflecting mirror 24 can also be with
It is identical or different with the refractive index of tested 40 local environment of particle.But the light of the first side of the reflecting surface 241 of reflecting mirror 24 is close
The refractive index of medium should be identical as the refractive index of propagation medium of polarized incident light beam that beam exit unit 10 provides.
Optionally, with continued reference to Fig. 5, beam adjustment unit further includes 241 second side of reflecting surface positioned at reflecting mirror 24
Encapsulating structure 22;The reflecting surface 241 of the encapsulating structure 22 and reflecting mirror 24 constitutes sealing space, seals in the sealing space
State optically thinner medium 23.
It should be noted that the ingredient and function of encapsulating structure 22 and optically thinner medium 23 can be tied with encapsulating in Fig. 4 in Fig. 5
Structure 22 and optically thinner medium 23 it is identical, working principle is similar with technical effect, and details are not described herein.
Simultaneously as tested particle 40 may have lesser size, to make the polarized incident light after being totally reflected
Beam can be projected on tested particle 40, can after polarized incident light beam is totally reflected by corresponding lens polymerization at one
Meet the focus of tested 40 size of particle.
Optionally, Fig. 6 is the structural schematic diagram of another polarization detecting device provided in an embodiment of the present invention;Fig. 7 is this
The structural schematic diagram for another polarization detecting device that inventive embodiments provide.Such as Fig. 6 and Fig. 7, beam adjustment unit 20 is also wrapped
Include plus lens 25.Wherein, such as Fig. 6, beam adjustment unit 20 includes light modulation prism 21 and plus lens 25, the light modulation prism 21
It is set gradually with plus lens 25 along optical path;Plus lens 25 is used to project the exit facet 213 of vertical light modulation prism 21 inclined
The outgoing beam that shakes focuses, and is projected to tested particle 40;Alternatively, beam adjustment unit 20 includes reflecting mirror 24 and convergence such as Fig. 7
Lens 25, reflecting mirror 24 and plus lens 25 are set gradually along optical path;Plus lens 25 is used for the reflecting surface 241 to reflecting mirror 24
The polarized reflection light beam of total reflection focuses, and is projected to tested particle 40.
Optionally, Fig. 8 is the structural schematic diagram of another polarization detecting device provided in an embodiment of the present invention.Such as Fig. 8, partially
The beam exit unit 10 for detection device of shaking includes the light source 11, the polarizer 12 and diaphragm 13 set gradually along optical path;Wherein, light
Source 11 is for providing natural light;The polarizer 12 is used to natural light being converted to polarised light;Diaphragm 13 is used to limit the light of polarised light
Beam, to provide polarized incident light beam.
Specifically, the natural light that light source 11 provides does not show polarization characteristic, it can be for along perpendicular to light wave transmissions direction
All possible direction of vibration, natural light need to be converted into polarised light by the polarizer 12, which for example can be line
Polarized incident light, elliptical polarization incident light or circularly polarized incident light.The beam cross section ruler for the polarised light that the polarizer 12 is converted
It is very little larger, its beam cross section can be limited by diaphragm 13, to obtain the polarized incident light beam of required sectional dimension.
Optionally, with continued reference to Fig. 8, the beam reception unit 30 of polarization detecting device includes receiving microscope group 31 and polarization spy
Survey device 32;The reception microscope group 31 includes the receiving lens 311 being oppositely arranged and collimation lens 322;The polarization scattering of predetermined angle
Light beam polymerize in the focus of receiving lens 311, and enters collimation lens 322 in focus diverging, is converted to parallel polarization light beam;Partially
Vibration detector 32 is for receiving the parallel polarization light beam.
It so, it is possible the polarization scattering light beam so that the received predetermined angle of beam reception unit 30 of polarization detecting device
With can be detected by polarization detector 32.The polarization detector 32 detects the polarization scattering light beam of predetermined angle
Method can for by calculate analyze scattering light Stokes vector, to indicate the light intensity of the polarization scattering light beam of predetermined angle
And polarization state.
Optionally, it is equal to receiving lens 311 with continued reference to Fig. 8, the distance between receiving lens 311 and collimation lens 312 S
Focal length f1With the focal length f of collimation lens 3122The sum of.
Specifically, receiving lens 311 converge the polarization scattering light beam of predetermined angle, the first intermediary image is formed.Due to connecing
Receive the focal length f that the distance between lens 311 and collimation lens 312 are receiving lens 3111With the focal length f of collimation lens 3122It
With, therefore the first intermediary image is located on the focal plane of receiving lens 311, the polarization scattering light beam of predetermined angle is in receiving lens
After 311 focus convergence, it is transformed into collimated light beam again by collimation lens 312, is received by polarization detector 32.This is parallel
The light beam of predetermined angle carries tested 40 microstructure information of particle, parallel default to this by polarization detector 32
The light beam of angle measures calculating, finally obtains the microstructure of tested particle 40.
Optionally, with continued reference to Fig. 8, receiving microscope group 31 further includes between receiving lens 311 and collimation lens 312
Aperture 313;The aperture center of the aperture 313 is overlapped with the focus of receiving lens 311;The aperture 313 is used for
Space filtering is carried out to the polarization scattering light beam for the predetermined angle that receiving lens 311 polymerize.Wherein, the aperture of aperture 313
Can be suitable with the diameter of tested particle 40, the aperture of the aperture 313 for example can be 100 μm.It so, it is possible so that default
The polarization scattering light beam of angle is the polarization scattering light beam of single tested particle 40, so that polarization detector 32 can be to individually quilt
The polarization scattering light beam of the predetermined angle of micrometer grain 40 carries out analytical calculation, to obtain the single microstructure for being tested particle 40
Information.
Polarization detecting device provided in an embodiment of the present invention, the optical axis of beam exit unit and the optical axis of beam reception unit
It is parallel to each other, and beam adjustment unit, the light beam regulation is arranged in the optical path between beam exit unit and beam reception unit
The polarized incident light beam that unit can control the offer of beam exit unit is projected to tested particle, and enables beam reception unit
Enough polarization scattering light beams for receiving the predetermined angle by being tested Particle Scattering, realize the inspection to the specific angle of scattering of tested particle
It surveys.Polarization detecting device structure provided in an embodiment of the present invention is simple, and lateral dimension is smaller, occupies little space, and is conducive to integrated adjust
School.
Note that the above is only a better embodiment of the present invention and the applied technical principle.It will be appreciated by those skilled in the art that
The invention is not limited to the specific embodiments described herein, be able to carry out for a person skilled in the art it is various it is apparent variation,
It readjusts, be combined with each other and substitutes without departing from protection scope of the present invention.Therefore, although by above embodiments to this
Invention is described in further detail, but the present invention is not limited to the above embodiments only, is not departing from present inventive concept
In the case of, it can also include more other equivalent embodiments, and the scope of the invention is determined by the scope of the appended claims.
Claims (12)
1. a kind of polarization detecting device, which is characterized in that including beam exit unit, the light beam regulation list set gradually along optical path
Member and beam reception unit;
The beam exit unit is for providing polarized incident light beam;
The beam adjustment unit is projected to tested particle for controlling the polarized incident light beam;
The beam reception unit is for receiving the inclined of predetermined angle of the polarized incident light after the tested Particle Scattering
Shake scattered beam;
Wherein, the optical axis of the beam exit unit is parallel with the optical axis of the beam reception unit.
2. polarization detecting device according to claim 1, which is characterized in that the beam adjustment unit includes light modulation rib
Mirror;
The light modulation prism includes at least the plane of incidence, reflecting surface and exit facet;
The plane of incidence of the vertical light modulation prism of the polarized incident light beam enters the light modulation prism, in the light modulation prism
Reflecting surface is totally reflected;In the vertical light modulation rib of the polarized incident light beam of the reflecting surface total reflection of the light modulation prism
The exit facet of mirror projects, and is projected to the tested particle.
3. polarization detecting device according to claim 1, which is characterized in that the beam adjustment unit includes reflecting mirror;
The polarized incident light beam is totally reflected through the reflecting surface of the reflecting mirror, and is projected to tested particle.
4. polarization detecting device according to claim 2 or 3, which is characterized in that the beam adjustment unit further includes converging
Poly- lens;
When the beam adjustment unit includes the light modulation prism and the plus lens, the light modulation prism and the convergence
Lens are set gradually along optical path;
The polarization outgoing beam that the plus lens is used to project the exit facet of the vertical light modulation prism focuses, and is projected to
The tested particle;
Alternatively, when the beam adjustment unit includes the reflecting mirror and the plus lens, the reflecting mirror and the remittance
Poly- lens are set gradually along optical path;
The polarized reflection light beam that the plus lens is used for the reflecting surface total reflection to the reflecting mirror focuses, and is projected to described
Tested particle.
5. polarization detecting device according to claim 2 or 3, which is characterized in that the polarized incident light beam is all-trans
The incidence angle penetrated is θ;The incidence angle θ meets:
Wherein, n1For the refractive index of the optically denser medium of the first side of the reflecting surface, n2For away from the reflection of first side
The refractive index of the optically thinner medium of the second side in face;
The angle of scattering of the polarization scattering light beam of the predetermined angle is β;Wherein, the θ of β=2.
6. polarization detecting device according to claim 5, which is characterized in that the beam adjustment unit further includes being located at institute
State the encapsulating structure of reflecting surface second side;
The encapsulating structure and the reflecting surface constitute sealing space, are sealed with the optically thinner medium in the sealing space.
7. polarization detecting device according to claim 5, which is characterized in that angle of scattering β=120 °;The incidence angle
θ=60 °.
8. polarization detecting device according to claim 2, which is characterized in that the light modulation prism includes prism.
9. polarization detecting device according to claim 1, which is characterized in that the beam exit unit includes along the light
Light source, the polarizer and the diaphragm that road is set gradually;
The light source is for providing natural light;
The polarizer is used to the natural light being converted to polarised light;
The diaphragm is used to limit the light beam of the polarised light, to provide the polarized incident light beam.
10. polarization detecting device according to claim 1, which is characterized in that the beam reception unit includes receiving mirror
Group and polarization detector;
The reception microscope group includes the receiving lens being oppositely arranged and collimation lens;
The polarization scattering light beam of the predetermined angle polymerize in the focus of the receiving lens, and dissipates in focus and enter the standard
Straight lens are converted to parallel polarization light beam;
The polarization detector is for receiving the parallel polarization light beam.
11. polarization detecting device according to claim 10, which is characterized in that the reception microscope group further includes positioned at described
Aperture between receiving lens and the collimation lens;
The aperture center of the aperture is overlapped with the focus of the receiving lens;The aperture is used for the reception
The polarization scattering light beam of the predetermined angle of lens polymerization carries out space filtering.
12. polarization detecting device according to claim 10, which is characterized in that the receiving lens and the collimation lens
The distance between be equal to the receiving lens focal length f1With the focal length f of the collimation lens2The sum of.
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CN201910251927.5A CN109916515A (en) | 2019-03-29 | 2019-03-29 | A kind of polarization detecting device |
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