CN213543887U - High-sensitivity low-hysteresis corrugated diaphragm and mounting structure - Google Patents
High-sensitivity low-hysteresis corrugated diaphragm and mounting structure Download PDFInfo
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- CN213543887U CN213543887U CN202021928958.4U CN202021928958U CN213543887U CN 213543887 U CN213543887 U CN 213543887U CN 202021928958 U CN202021928958 U CN 202021928958U CN 213543887 U CN213543887 U CN 213543887U
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Abstract
The utility model relates to a low hysteresis ripple diaphragm of high sensitivity and mounting structure, including the ripple membrane body, use the center as the original point on the ripple membrane body, with one heart equidistant several convex ripple rings of setting, the diameter of ripple membrane body is D, thickness is the delta, and the central plumb line distance of first convex ripple ring both sides circular arc ripple is X, and the centre of a circle of adjacent arc ripple ring is apart from the difference and is 0.5X, and ripple membrane body outside is the installation face. The utility model discloses the structural dimension relation of ripple diaphragm that (1) provided, succinct graceful, the suitability is strong, and the P-y (pressure-diaphragm displacement) characteristic of diaphragm is good. (2) The definition of the corrugation diameter R and the interval d of the corrugated diaphragm enables the forming die of the corrugated diaphragm to be very convenient to design and machine. (3) The arc wave structure on the single side enables one of the female die or the male die of the corrugated diaphragm to be capable of selecting a plane, reduces the requirement of pattern alignment of the female die and the male die in the processing process, and improves the yield.
Description
Technical Field
The utility model belongs to pressure sensor and instrument field, concretely relates to be applied to the metal corrugated diaphragm among diaphragm type pressure element.
Background
The metal corrugated diaphragm is an elastic thin-shell structure with the edge diameter D and the thickness delta and has symmetrical corrugations with the center of a circle. The corrugated metal diaphragm can be deformed in its direction of deflection y after being subjected to a pressure P.
Metal corrugated diaphragms are widely used in diaphragm type pressure elements and devices, such as the oil filled diaphragm type pressure sensor shown in fig. 1.
To increase the sensitivity of the diaphragm-type pressure element and reduce hysteresis, it is desirable to have a greater stroke y of the metal bellows diaphragm for the same pressure P and under the constraints of diameter dimension D and thickness δ.
In addition, since the metal corrugated membrane is very thin (delta is generally 0.02 mm-0.5 mm), the metal corrugated membrane mainly depends on punch forming, and the waveform and the size after forming are ensured by a die. The waveform of some large-stroke corrugated membranes selects a sine curve or a trapezoidal curve, features need to be processed on a female die and a male die, and strict centering is required, so that the challenges of dies and forming processes are large.
Therefore, how to increase the stroke y under the constraint of dimensional structure and make it easy to design the mold for processing and forming becomes a major problem in the field of high-performance and low-cost metal corrugated membranes.
Disclosure of Invention
The invention aims to provide a corrugated diaphragm with high sensitivity and low hysteresis, which can solve the problems of low sensitivity and high processing difficulty of the conventional corrugated diaphragm.
According to the technical scheme provided by the invention: the utility model provides a low hysteresis ripple diaphragm of high sensitivity, includes the ripple membrane body, use the center as the original point on the ripple membrane body, set up several arc ripple rings with one heart equidistant, the diameter of ripple membrane body is D, thickness is the delta, and the central plumb line distance of first arc ripple ring both sides circular arc ripple is X, and is adjacent the centre of a circle distance difference of arc ripple ring is 0.5X, the ripple membrane body outside is the installation face.
As a further improvement of the invention, the corrugated membrane body is circular, the center of the corrugated membrane body is a plane, and the mounting surface is a plane.
In a further improvement of the present invention, the radius of curvature of the circular arc corrugation is R, the distance from the center of the circular arc corrugation to the plane end of the corrugated film body is d, X is (4-6) d, d is (20-25) δ, and R-d is (3-5) δ.
As a further improvement of the invention, the corrugated diaphragm is formed in one step by processing a female die or a male die with the size equivalent to that of the corrugated diaphragm under a stamping process.
The utility model provides a low hysteresis ripple diaphragm mounting structure of high sensitivity, includes pressure core sintering seat, pressure core sintering seat upper end is opened there is the mounting groove, and the lower extreme is opened there is the low recess, go up installation several pressure chip in the mounting groove, through vertical several pin that sets up in the pressure core sintering seat, pressure core sintering seat upper end is connected as above the ripple diaphragm, the welding ring is connected on ripple diaphragm upper portion, the pressure chip passes through the pin, the ripple diaphragm with go up to fill between the mounting groove and pass press oil, it places the packing piece to go up the mounting groove.
As a further improvement of the invention, the filler piece is a ceramic material.
As a further improvement of the invention, a plurality of pressure chips are arranged in the upper mounting groove through a bonding agent, and the bonding agent is epoxy adhesive.
As a further improvement of the invention, a chip mounting groove is arranged in the upper mounting groove.
The positive progress effects of the invention are as follows:
(1) the structural size relation of the given corrugated diaphragm is concise and beautiful, the applicability is strong, and the P-y characteristic of the diaphragm is good. (2) The definition of the corrugation diameter R and the interval d of the corrugated diaphragm enables the forming die of the corrugated diaphragm to be very convenient to design and machine. (3) The arc wave structure on the single side enables one of a female die or a male die of the corrugated diaphragm to be capable of selecting a plane, and reduces the requirement of pattern alignment of the female die and the male die in the machining process.
Drawings
Fig. 1 is a structural diagram of the present invention.
Fig. 2 is a partially enlarged view of the body 1.
FIG. 3 is a P-y characteristic diagram of the present invention
FIG. 4 is a characteristic diagram of the original membrane P-y with the same diameter D, thickness delta and the same number of corrugation turns n
FIG. 5 is a schematic view of an application of a corrugated diaphragm mounting structure.
Detailed Description
The following further describes embodiments of the present invention with reference to the drawings.
In fig. 1-5, the corrugated diaphragm comprises a corrugated diaphragm body 4-1, a first arc-shaped corrugated ring 4-2, an arc-shaped corrugated ring 4-3, a mounting surface 4-4 and the like.
As shown in the figure 1-2, the invention is a high-sensitivity low-hysteresis corrugated diaphragm, the corrugated diaphragm 4 comprises a corrugated diaphragm body 4-1, the corrugated diaphragm body 4-1 is circular, a plurality of arc-shaped corrugated rings 4-3 are concentrically and equidistantly arranged on the corrugated diaphragm body 4-1 by taking the center as the origin, the diameter of the corrugated diaphragm body 4-1 is D and the thickness of the corrugated diaphragm body is delta, the distance of the central vertical line of the arc-shaped corrugations on the two sides of the first arc-shaped corrugated ring 4-2 is X, the difference of the distances of the centers of the adjacent arc-shaped corrugated rings 4-3 is 0.5X, the center of the corrugated diaphragm body 4-1 is a plane, the outermost side of the corrugated diaphragm body 4-1 is an installation surface 4-4, and when the high-sensitivity low-hysteresis corrugated. The mounting surface 4-4 is a plane.
The curvature radius of all the circular arc corrugations is R, the distance from the circle center of the circular arc to the plane end of the corrugated diaphragm is d, and the number of the corrugated circles is n.
X＝(4～6)d、d＝(20～25)δ、R-d＝(3～5)δ。
The corrugated diaphragm is formed at one time by processing a female die or a male die with the size equivalent to that of the corrugated diaphragm under a stamping process.
In a preferred embodiment of the present invention, X ═ 4 to 6 d, (20 to 25) δ, and R-d ═ 3 to 5 δ.
In actual use, R, D and the number of corrugation turns n are selected according to the diameter D and the thickness delta of the corrugated membrane.
Fig. 3 is the rigidity characteristic of this embodiment, fig. 4 is the same size specification, the rigidity characteristic of other wave forms, it can be seen that the utility model discloses under same pressure p, its stroke y compares the reference diaphragm (the trapezoidal wave of symmetry type) and has increased more than 33% to it is less to rise the hysteresis error of return stroke.
As shown in fig. 5, a corrugated diaphragm mounting structure, including pressure core body sintering seat 1, pressure core body sintering seat 1 upper end is opened has the mounting groove, the lower extreme is opened has the lower recess, go up the mounting groove and install several pressure chip 6 through binder 7, through vertical several pin 10 that sets up in the pressure core body sintering seat 1, corrugated diaphragm 4 is connected through welding process in the pressure core body sintering seat 1 upper end, welding ring 3 is connected through welding process in corrugated diaphragm 4 upper portion, pin 10 upper portion is located between corrugated diaphragm 4 and the last mounting groove, pressure chip 6 passes through lead wire 5 and connects pin 10 upper portion, fill pressure transmission oil 9 between corrugated diaphragm 4 and the last mounting groove. In order to reduce the influence of the temperature on the transmission oil 9 and improve the testing precision, a filling sheet 2 is placed in the upper mounting groove, and in the embodiment, the filling sheet 2 is made of a ceramic material and has the advantages of high hardness, good insulation, high temperature resistance, corrosion resistance and the like.
In the present embodiment, the pressure transmission oil 9 is silicone oil.
Welding edges 11 are arranged on two sides of the pressure core body sintering seat, and can be conveniently welded with a sensor connector and a sensor shell, so that the design of the sensor connector and the sensor shell is simplified.
The pressure core sintering seat 1 can be made of stainless steel or other types of alloys and integrally processed and formed to serve as a structural foundation.
In this embodiment, the number of the pressure chips 6 is 2, the pins 10 are divided into two rows, and the two rows are arranged on two sides of the pressure chip 6 in parallel, the number of the pins 2 is 10 or 8, and every 5 or 4 pins 2 form a channel, so that the two channels can be electrically connected to the two pressure chips at the same time. The pin 2 is made of iron-nickel alloy.
In order to facilitate the positioning of the pressure chip 6 in the upper mounting groove, a chip mounting groove is provided in the upper mounting groove. The pressure chip 6 is mounted in the chip mounting recess by means of an adhesive 7.
The adhesive 7 is a patch adhesive in this embodiment.
The connection, sealing and insulation of the pin 10 and the pressure core body sintering seat 1 are realized by the sealing glass in a sintering mode. The material of the sealing glass 3 includes borosilicate glass, soda lime glass, and low-silica glass.
An oil injection channel is arranged in the pressure core body sintering seat 1, one end of the oil injection channel is communicated with the upper mounting groove, and the other end of the oil injection channel is communicated with the lower groove and is blocked by a sealing ball 8.
The working process of the invention is as follows:
after the corrugated diaphragm 4 is pressurized, the pressure transmitting oil 9 is compressed or expanded, the pressure transmitting oil 9 acts on the pressure chip 6, the pressure chip 6 transmits an electric signal corresponding to the pressure to the pin 10 through the lead 5, and the pin 10 is transmitted to the electric connector of a user.
It should be noted that the embodiments of the present invention are only used for illustrating the structural solution of the present invention, and are not limited thereto. Although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the structure and the scheme described in the foregoing embodiments can be modified, or some technical features can be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention, which should be construed in accordance with the substance of the present invention.
Claims (8)
1. A high-sensitivity low-hysteresis corrugated diaphragm is characterized in that: the corrugated diaphragm comprises a corrugated diaphragm body (4-1), wherein the center is used as an original point on the corrugated diaphragm body (4-1), a plurality of arc-shaped corrugated rings (4-3) are arranged at the same center and the same difference, the diameter of the corrugated diaphragm body (4-1) is D, the thickness of the corrugated diaphragm body is delta, the distance between the center perpendicular lines of the arc corrugations on the two sides of the first arc-shaped corrugated ring (4-2) is X, the distance between the centers of the arc corrugations (4-3) is adjacent to the distance between the centers of the arc corrugations (4-3) is 0.5X, and the outermost side of the corrugated diaphragm body (4-1) is provided with an installation.
2. The high-sensitivity low-hysteresis corrugated diaphragm of claim 1, wherein: the corrugated film body (4-1) is circular, the center of the corrugated film body (4-1) is a plane, and the mounting surface (4-4) is a plane.
3. The high-sensitivity low-hysteresis corrugated diaphragm of claim 1, wherein: the curvature radius of the circular arc corrugation is R, the distance from the center of the circular arc corrugation to the plane end of the corrugated film body (4-1) is d, X = (4-6) d, d = (20-25) delta and R-d = (3-5) delta.
4. The high-sensitivity low-hysteresis corrugated diaphragm of claim 1, wherein: the corrugated diaphragm is formed at one time by processing a female die or a male die with the size equivalent to that of the corrugated diaphragm under a stamping process.
5. The utility model provides a low hysteresis ripple diaphragm mounting structure of high sensitivity which characterized in that: the structure comprises a pressure core body sintering seat (1), wherein an upper mounting groove is formed in the upper end of the pressure core body sintering seat (1), a lower groove is formed in the lower end of the pressure core body sintering seat, a plurality of pressure chips (6) are mounted in the upper mounting groove, a plurality of pins (10) are vertically arranged in the pressure core body sintering seat (1), the upper end of the pressure core body sintering seat (1) is connected with the corrugated diaphragm (4) according to any one of claims 1-4, the upper part of the corrugated diaphragm (4) is connected with a welding ring (3), the pressure chips (6) are connected with the pins (10) through leads (5), transmission oil (9) is filled between the corrugated diaphragm (4) and the upper mounting groove, and the filling piece (2) is placed in the upper mounting groove.
6. The high-sensitivity low-hysteresis corrugated diaphragm mounting structure of claim 5, wherein: the filling sheet (2) is made of ceramic material.
7. The high-sensitivity low-hysteresis corrugated diaphragm mounting structure of claim 5, wherein: a plurality of pressure chips (6) are arranged in the upper mounting groove through a bonding agent (7), and the bonding agent (7) is epoxy adhesive.
8. The high-sensitivity low-hysteresis corrugated diaphragm mounting structure of claim 5, wherein: and a chip mounting groove is arranged in the upper mounting groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021928958.4U CN213543887U (en) | 2020-09-07 | 2020-09-07 | High-sensitivity low-hysteresis corrugated diaphragm and mounting structure |
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| CN202021928958.4U CN213543887U (en) | 2020-09-07 | 2020-09-07 | High-sensitivity low-hysteresis corrugated diaphragm and mounting structure |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113551826A (en) * | 2021-07-22 | 2021-10-26 | 西人马联合测控（泉州）科技有限公司 | Pressure sensor and preparation method thereof |
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- 2020-09-07 CN CN202021928958.4U patent/CN213543887U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113551826A (en) * | 2021-07-22 | 2021-10-26 | 西人马联合测控（泉州）科技有限公司 | Pressure sensor and preparation method thereof |
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