CN213536531U

CN213536531U - Feeding device of photoetching machine

Info

Publication number: CN213536531U
Application number: CN202022252099.8U
Authority: CN
Inventors: 杨光宇
Original assignee: Ruijie Xinsheng Tianjin Electronic Technology Co ltd
Current assignee: Ruijie Xinsheng Tianjin Electronic Technology Co ltd
Priority date: 2020-10-12
Filing date: 2020-10-12
Publication date: 2021-06-25
Anticipated expiration: 2030-10-12

Abstract

The utility model provides a material feeding unit of lithography machine belongs to lithography machine technical field. The turnover device comprises a supporting component, a conveying component and a turnover component, wherein a supporting frame in the supporting component is fixed on a supporting box. The first driving piece in the conveying assembly is fixed on the supporting frame, the mounting block is fixed on the first driving piece, the rack is fixed on the mounting block, the gear is in transmission connection with the rack, one end of the first rotating shaft is fixed on the gear, the other end of the first rotating shaft is fixed on the swinging rod, and the first rotating shaft is in rotation connection with the supporting frame. The mounting bracket among the upset subassembly is fixed in the one end of rocking bar, and the motor is fixed in one side of mounting bracket, and the one end of second pivot is fixed in the motor, and the other end and the mounting bracket of second pivot rotate to be connected, and second driving piece fixed mounting is in the second pivot, and sucking disc fixed mounting is in the second driving piece, sucking disc and air pump intercommunication, and air pump fixed mounting is in the inside of supporting box. The whole device has simple structure, convenient operation and low manufacturing cost, and realizes the automatic feeding of the photoetching machine.

Description

Feeding device of photoetching machine

Technical Field

The utility model relates to a lithography machine technical field particularly, relates to a material feeding unit of lithography machine.

Background

Lithography machines are also known as: a mask alignment exposure machine, an exposure system, a photolithography system, etc., are core equipment for manufacturing a chip. It uses the technology similar to photo printing to print the fine pattern on the mask plate on the silicon chip by the exposure of light.

When the photoetching machine is processed, a mechanical handle is needed to convey the silicon wafer from the outer side to the inner part of the photoetching machine for processing, but the existing mechanical handle for conveying is complex in structure and high in manufacturing cost.

SUMMERY OF THE UTILITY MODEL

In order to compensate the above deficiency, the utility model provides a material feeding unit of lithography machine aims at improving the problem that present manipulator structure for the pay-off is complicated, and manufacturing cost is high.

The utility model discloses a realize like this: the utility model provides a material feeding unit of lithography machine, including the supporting component, transport subassembly and upset subassembly, wherein, transport the transporting of subassembly installation realization material on the supporting component, the upset of upset unit mount realization material on transporting the subassembly.

The supporting component comprises a supporting box and a supporting frame, and the supporting frame is fixedly arranged at one end of the supporting box.

The conveying assembly comprises a first driving piece, an installation block, a rack, a gear, a first rotating shaft and a swing rod, the first driving piece is fixedly installed on the support frame, the installation block is fixedly installed on the first driving piece, one end of the rack is fixedly installed on the installation block, the gear is connected with the rack in a transmission mode, one end of the first rotating shaft is fixedly installed on the gear, the other end of the first rotating shaft is fixedly connected with the swing rod, and the first rotating shaft is rotatably connected with the support frame.

The upset subassembly includes mounting bracket, motor, second pivot, second driving piece, sucking disc and air pump, mounting bracket fixed mounting in the rocking bar is kept away from the one end of first pivot, motor fixed mounting in one side of mounting bracket, the one end fixed mounting of second pivot in the output shaft of motor, the other end of second pivot with the mounting bracket rotates to be connected, second driving piece fixed mounting in the second pivot, sucking disc fixed mounting in the second driving piece, the sucking disc with the air pump intercommunication, air pump fixed mounting in the inside of supporting box.

The utility model discloses an in the embodiment, the support frame is kept away from the one end tip fixed mounting of support box has the limiting plate, the limiting plate can with the rack is contradicted.

In an embodiment of the present invention, a sliding block is fixed to one side of the rack, a sliding groove is formed in the supporting frame, and the sliding block can be accommodated in the sliding groove and can slide along the sliding groove.

In an embodiment of the present invention, the first driving member, the rack and the outside of the gear are provided with a protection cover, and the protection cover is fixedly installed on the supporting frame.

The utility model discloses an in one embodiment, the support frame is kept away from the one side of gear is fixed with two spacer pins, two the spacer pin homoenergetic with the rocking bar is contradicted.

The utility model discloses an in an embodiment, the second pivot is kept away from the one end fixing of motor has the rotation piece, the mounting bracket is kept away from the one side of motor is fixed with two stoppers, two the stopper homoenergetic with the rotation piece is contradicted.

In an embodiment of the present invention, the opening of the supporting box is hinged to a box door.

In an embodiment of the present invention, the door is fixed with a handle.

In an embodiment of the present invention, the bottom end of the supporting box is fixed with a self-locking universal wheel.

In an embodiment of the present invention, the first driving member and the second driving member are any one of an air pump, a hydraulic cylinder, or an electric push rod.

The utility model has the advantages that: the utility model discloses a material feeding unit of lithography machine who obtains through above-mentioned design, during the use, the sucking disc holds the silicon chip in the outside, then first driving piece promotes the rack forward, and then rack drive gear rotates, and the gear drives first pivot rotation, and then first pivot drives the pendulum rod rotation, and then the pendulum rod rotates to the opposite side from one side of support frame;

meanwhile, the motor drives the second rotating shaft to rotate, the second rotating shaft drives the second driving piece to rotate, the second driving piece drives the sucker to rotate, the sucker rotates when the swinging rod rotates, the sucker faces downwards at the moment, the second driving piece stretches out downwards, the sucker moves downwards until the sucker puts the silicon wafer on a workbench of the photoetching machine, and then the sucker stops working, so that feeding of the silicon wafer is realized.

The whole device has simple structure, convenient operation and low manufacturing cost, and realizes the automatic feeding of the photoetching machine.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

Fig. 1 is a schematic view of an overall structure provided by an embodiment of the present invention;

fig. 2 is a schematic structural view of a conveying assembly according to an embodiment of the present invention;

fig. 3 is a schematic view of an overall structure provided in the embodiment of the present invention;

fig. 4 is an exploded view of a transport assembly according to an embodiment of the present invention;

fig. 5 is an enlarged view of a portion a of fig. 4 according to the present invention;

fig. 6 is a schematic structural view of the turnover assembly according to an embodiment of the present invention.

In the figure: 100-a support assembly; 110-a support box; 111-a door; 1111-a handle; 112-self-locking universal wheels; 120-a support frame; 121-a limiting plate; 122-a chute; 123-a protective cover; 124-a limit pin; 200-a transport assembly; 210-a first drive member; 220-a mounting block; 230-a rack; 231-a slider; 240-gear; 250-a first rotating shaft; 260-rocking beam; 300-a flip assembly; 310-a mounting frame; 311-a limiting block; 320-a motor; 330-a second rotating shaft; 331-a rotation block; 340-a second driving member; 350-a sucker; 360-air pump.

Detailed Description

To make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined to clearly and completely describe the technical solutions of the embodiments of the present invention, and obviously, the described embodiments are some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

Examples

Referring to fig. 1, the present invention provides a technical solution: a feeding device of a lithography machine comprises a support assembly 100, a conveying assembly 200 and a turnover assembly 300, wherein the conveying assembly 200 is mounted on the support assembly 100 to realize conveying of materials, and the turnover assembly 300 is mounted on the conveying assembly 200 to realize turnover of the materials.

Referring to fig. 1 and 2, the support assembly 100 includes a support box 110 and a support frame 120, and the support frame 120 is fixedly mounted at an upper end of the support box 110 by bolts. When the support box is specifically arranged, a box door 111 is hinged to the opening of the support box 110, the box door 111 is used for preventing articles in the support box 110 from falling out, and a handle 1111 is fixed on the box door 111, so that the box door 111 can be conveniently opened by hand through the handle 1111. The bottom of the supporting box 110 is fixed with a self-locking universal wheel 112, which is convenient for moving and fixing the whole device and improves the mobility and flexibility of the device.

Referring to fig. 2, the conveying assembly 200 includes a first driving member 210, a mounting block 220, a rack 230, a gear 240, a first rotating shaft 250 and a rocking bar 260, the first driving member 210 is fixedly mounted on a side surface of the supporting frame 120 by a bolt, and the first driving member 210 is any one of an air cylinder, a hydraulic cylinder or an electric push rod. The mounting block 220 is fixedly mounted at the end of the piston rod of the first driving member 210, one end of the rack 230 is fixedly mounted at the mounting block 220 by welding, the gear 240 is in meshed transmission connection with the rack 230, one end of the first rotating shaft 250 is fixedly mounted at the gear 240 by a key, the other end of the first rotating shaft 250 is fixedly connected with the swing rod 260 by a key, the swing rod 260 is arranged on the surface of the support frame 120 far away from the gear 240, and the first rotating shaft 250 is rotatably connected with the support frame 120 by a bearing.

Referring to fig. 3, in a specific configuration, two limit pins 124 are fixed on a surface of the supporting frame 120 away from the gear 240, the two limit pins 124 are disposed at a lower side of the rocking bar 260, and both the two limit pins 124 can abut against the rocking bar 260, so as to limit two positions of the rocking bar 260, and the rocking bar 260 can be in a horizontal state.

In addition, referring to fig. 4 and 5, a limiting plate 121 is fixedly mounted at the upper end of the support frame 120 through a bolt, and the limiting plate 121 can abut against the upper end of the rack 230 to limit the rack 230, so that the movement distance of the rack 230 is ensured, the rack 230 drives the gear 240 to rotate by 180 degrees, and the limiting and protecting effects are achieved. Specifically, a sliding block 231 is fixed to one side of the rack 230 through a bolt, the sliding groove 122 is formed in the support frame 120, the sliding block 231 can be accommodated in the sliding groove 122 and can slide along the sliding groove 122, and therefore limiting and guiding of the rack 230 during up-and-down sliding are achieved. It should be noted that the protective cover 123 is disposed outside the first driving element 210, the rack 230, and the gear 240, and the protective cover 123 is fixedly mounted on the supporting frame 120, so as to implement isolation protection for the first driving element 210, the rack 230, and the gear 240.

Referring to fig. 6, the tilting assembly 300 includes an installation frame 310, a motor 320, a second rotating shaft 330, a second driving member 340, a suction cup 350 and an air pump 360, the installation frame 310 is fixedly installed at one end of the swing rod 260 away from the first rotating shaft 250 by welding, the motor 320 is fixedly installed at one side of the installation frame 310 by bolts, one end of the second rotating shaft 330 is fixedly installed at an output shaft of the motor 320, the other end of the second rotating shaft 330 is rotatably connected with the installation frame 310, the second driving member 340 is fixedly installed in the middle of the second rotating shaft 330, and the second driving member 340 is any one of an air cylinder, a hydraulic cylinder or an electric push rod. The sucking disc 350 is fixedly installed at the end part of the piston rod of the second driving part 340, the sucking disc 350 is communicated with the air pump 360, and the air pump 360 is fixedly installed inside the supporting box 110 to realize the overturning of the sucking disc 350, so that the silicon wafer is overturned, and the silicon wafer is conveniently taken and placed.

Referring to fig. 6, in an embodiment of the present invention, a rotating block 331 is fixed to an end portion of the second rotating shaft 330 far away from the motor 320 through a bolt, two limiting blocks 311 are fixed to one side of the mounting frame 310 far away from the motor 320 through welding, the two limiting blocks 311 can both abut against the rotating block 331, so as to limit the second rotating shaft 330, and it is ensured that the rotating angle of the second rotating shaft 330 is 180 degrees, thereby achieving the positioning and protecting effects.

Specifically, the working principle of the feeding device of the photoetching machine is as follows: firstly, the air pump 360 is used for pumping air, then the suction cup 350 sucks the silicon wafer on the outer side, then the first driving part 210 pushes the rack 230 to slide upwards along the sliding groove 122, then the rack 230 drives the gear 240 to rotate, the gear 240 drives the first rotating shaft 250 to rotate for 180 degrees, further the first rotating shaft 250 drives the swing rod 260 to rotate for 180 degrees around the axis line of the first rotating shaft 250, further the swing rod 260 rotates from one side of the support frame 120 to the other side, and then the suction cup 350 on the support frame 120 enters the photoetching machine from the outer side;

meanwhile, the motor 320 drives the second rotating shaft 330 to rotate 180 degrees, the second rotating shaft 330 drives the second driving part 340 to rotate, the second driving part 340 drives the suction cup 350 to rotate 180 degrees around the axis of the second rotating shaft 330, when the swing rod 260 rotates 180 degrees, the suction cup 350 also rotates 180 degrees, the suction cup 350 faces downwards, the second driving part 340 extends downwards, the suction cup 350 moves downwards until the suction cup 350 puts the silicon wafer on the workbench of the photoetching machine, and then the suction cup 350 stops working, so that feeding of the silicon wafer is realized.

It should be noted that the specific model specifications of the first driving element 210, the second driving element 340, the motor 320 and the air pump 360 need to be determined by type selection according to the actual specification of the device, and the specific type selection calculation method adopts the prior art, so detailed description is omitted.

The power supply of the first driving member 210, the second driving member 340, the motor 320 and the air pump 360 and the principle thereof will be apparent to those skilled in the art and will not be described in detail herein.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A feeding device of a photoetching machine is characterized by comprising

The supporting component (100) comprises a supporting box (110) and a supporting frame (120), wherein the supporting frame (120) is fixedly arranged at one end of the supporting box (110);

the conveying assembly (200) comprises a first driving piece (210), an installation block (220), a rack (230), a gear (240), a first rotating shaft (250) and a swing rod (260), wherein the first driving piece (210) is fixedly installed on the supporting frame (120), the installation block (220) is fixedly installed on the first driving piece (210), one end of the rack (230) is fixedly installed on the installation block (220), the gear (240) is in transmission connection with the rack (230), one end of the first rotating shaft (250) is fixedly installed on the gear (240), the other end of the first rotating shaft (250) is fixedly connected with the swing rod (260), and the first rotating shaft (250) is in rotation connection with the supporting frame (120);

the turnover assembly (300), the turnover assembly (300) comprises a mounting rack (310), a motor (320), a second rotating shaft (330), a second driving piece (340), a suction cup (350) and an air pump (360), the mounting rack (310) is fixedly arranged at one end of the swinging rod (260) far away from the first rotating shaft (250), the motor (320) is fixedly arranged at one side of the mounting rack (310), one end of the second rotating shaft (330) is fixedly arranged at an output shaft of the motor (320), the other end of the second rotating shaft (330) is rotatably connected with the mounting rack (310), the second driving piece (340) is fixedly arranged on the second rotating shaft (330), the sucker (350) is fixedly arranged on the second driving piece (340), the sucker (350) is communicated with the air pump (360), the air pump (360) is fixedly arranged inside the support box (110).

2. The feeding device of the lithography machine according to claim 1, wherein a limiting plate (121) is fixedly mounted at an end of the supporting frame (120) far away from the supporting box (110), and the limiting plate (121) can abut against the rack (230).

3. The feeding device of the lithography machine according to claim 1, wherein a sliding block (231) is fixed on one side of the rack (230), a sliding slot (122) is formed in the support frame (120), and the sliding block (231) can be accommodated in the sliding slot (122) and can slide along the sliding slot (122).

4. The feeding device of the lithography machine according to claim 1, wherein a protective cover (123) is disposed outside the first driving member (210), the rack (230) and the gear (240), and the protective cover (123) is fixedly mounted on the supporting frame (120).

5. The feeding device of the lithography machine according to claim 1, wherein two limit pins (124) are fixed on one surface of the supporting frame (120) far away from the gear (240), and both limit pins (124) can be abutted against the swinging rod (260).

6. The feeding device of the lithography machine according to claim 1, wherein a rotating block (331) is fixed to an end portion of the second rotating shaft (330) far away from the motor (320), two limiting blocks (311) are fixed to a surface of the mounting frame (310) far away from the motor (320), and both the two limiting blocks (311) can abut against the rotating block (331).

7. The feeding device of the lithography machine according to claim 1, wherein a door (111) is hinged to the opening of the supporting box (110).

8. The feeding device of lithography machine according to claim 7, wherein a handle (1111) is fixed on the box door (111).

9. The feeding device of lithography machine according to claim 1, wherein a self-locking universal wheel (112) is fixed at the bottom end of the support box (110).

10. The feeding device of the lithography machine according to claim 1, wherein the first driving member (210) and the second driving member (340) are any one of an air pump, a hydraulic cylinder and an electric push rod.