CN213483720U

CN213483720U - Special belt cleaning device of gallium arsenide substrate

Info

Publication number: CN213483720U
Application number: CN202022773081.2U
Authority: CN
Inventors: 彭怀忠; 樊海强; 曲元瑗; 王鼎
Original assignee: Xinzhou Zhongke Jingdian Information Material Co ltd
Current assignee: Xinzhou Zhongke Jingdian Information Material Co ltd
Priority date: 2020-11-25
Filing date: 2020-11-25
Publication date: 2021-06-18
Anticipated expiration: 2030-11-25

Abstract

The utility model particularly relates to a special belt cleaning device of gallium arsenide substrate belongs to gallium arsenide substrate cleaning technical field, and the problem that solve provides a quick special belt cleaning device of gallium arsenide substrate, and the scheme of adoption is: the pickling tank, the alkaline washing tank, the clean water tank and the drying tank are sequentially arranged from left to right, the cross beam is erected above the tank body, a transverse moving frame capable of reciprocating left and right along the cross beam is connected onto the cross beam, a transverse moving driving piece is arranged on the transverse moving frame, the lifting frame is connected onto the transverse moving frame in a sliding mode and used for driving the lifting frame to move up and down, a plurality of gallium arsenide substrate frames arranged side by side are connected to the lower portion of the lifting frame, the gallium arsenide substrate frames are connected with the lifting frame through springs, the springs are fixed through a horizontally arranged connecting plate, and a plurality of vibration drum hammers for vibrating the connecting plate are connected onto; the utility model discloses not only improve the cleaning efficiency of gallium arsenide substrate, and gallium arsenide substrate sanitization is thorough.

Description

Special belt cleaning device of gallium arsenide substrate

Technical Field

The utility model belongs to the technical field of the gallium arsenide substrate washs, concretely relates to special belt cleaning device of gallium arsenide substrate.

Background

The existing gallium arsenide substrate cleaning method generally removes particles and metal ions on the surface of a gallium arsenide substrate through acid cleaning, then takes out the gallium arsenide substrate, puts the gallium arsenide substrate in another tank for alkali cleaning, removes particles and organic matters on the surface of the gallium arsenide substrate, and then cleans the gallium arsenide substrate through ultrapure water to remove residual ions on the surface of the gallium arsenide substrate.

SUMMERY OF THE UTILITY MODEL

The utility model overcomes prior art exists not enough, provides a special belt cleaning device of gallium arsenide substrate, and the cleaning work of gallium arsenide substrate in different washing tanks is in batches in quick completion, has not only improved the cleaning efficiency of gallium arsenide substrate, and gallium arsenide substrate sanitization is thorough.

In order to solve the technical problem, the utility model discloses a technical scheme be: a special cleaning device for a gallium arsenide substrate comprises: support column, crossbeam, sideslip frame, sideslip driving piece, crane, lift driving piece, dry bath, clear water groove, alkali wash tank, descaling bath, gallium arsenide substrate holder, connecting plate and vibrations drum hammer, descaling bath, alkali wash tank, clear water groove and dry bath set gradually from left to right, the crossbeam erects in descaling bath, alkali wash tank, clear water groove and dry bath top, the crossbeam is supported fixedly by the support column, be connected with on the crossbeam and follow reciprocating motion about the crossbeam the sideslip frame, be provided with on the sideslip frame drive its reciprocating motion the sideslip driving piece, crane sliding connection in on the sideslip frame, the lift driving piece is used for driving the crane is followed reciprocating motion about the sideslip frame, the sub-unit connection of crane has a plurality of the gallium arsenide substrate holder that set up side by side, the gallium arsenide substrate holder with the crane all passes through spring coupling, the springs are horizontally arranged and fixed to the connecting plate, and the connecting plate is connected with a plurality of vibration drum hammers for vibrating the connecting plate. The transverse moving frame drives the gallium arsenide substrate frame to move among different groove bodies, and the vibration of the vibration drum hammer drives the gallium arsenide substrate frame to vibrate in the groove bodies, so that the relative motion between the cleaning liquid and the gallium arsenide substrate is increased, and the cleaning effect of the gallium arsenide substrate is improved.

The gallium arsenide substrate holder comprises: vertical pin, top board, lower locating plate and gallium arsenide substrate draw-in groove, circular shape top board and lower locating plate correspond the setting from top to bottom, top board is fixed with corresponding spring lower extreme, evenly be connected with four between top board and the lower locating plate vertical pin, the tip of vertical pin with top board, lower locating plate can dismantle the connection, evenly be provided with a plurality ofly on the vertical pin and be used for joint gallium arsenide substrate the gallium arsenide substrate draw-in groove. The same gallium arsenide substrate is clamped in a gallium arsenide substrate clamping groove with the same horizontal height, a plurality of gallium arsenide substrates are sequentially arranged up and down, and the gallium arsenide substrates are positioned on the periphery of the gallium arsenide substrates through vertical stop rods.

The cross sliding frame comprises: go up navigation frame, lower navigation frame, gyro wheel and support rack, support the rack level set up in the crossbeam top, the last symmetric connection of support rack has a plurality ofly the gyro wheel, be fixed with on the crossbeam with gyro wheel matched with track, the gyro wheel can be followed track reciprocating motion, support the rack top and be fixed with go up the navigation frame, the below of support rack is fixed with down the navigation frame, the crane can be followed go up navigation frame, support rack, lower navigation frame reciprocating motion from top to bottom.

The crane includes: the guide wheel, the horizontal pole and the montant, the montant is two, one the lower extreme of montant with the one end of horizontal pole is fixed, another the lower extreme of horizontal pole with the other end of horizontal pole is fixed, the tip both sides of montant all are connected with the guide wheel, the guide wheel slip joint in go up on navigation frame, the lower navigation frame. The upper ends of the springs are fixed with the cross rod.

The lift drive includes: driving motor, gear motor, a rope reel, wire rope, lower pulley group and upper pulley group, the lower pulley group with the horizontal pole middle part is fixed, the upper pulley group with the lower pulley group set up relatively in on the support rack, the rope reel set up in one side of upper pulley group, the rope reel with the support rack passes through the bearing frame and connects, driving motor, gear motor are used for the drive rope reel rotation, driving motor's output shaft with gear motor's input is connected, gear motor's output with the coaxial fixed of rope reel, driving motor, gear motor with the support rack is fixed mutually, wire rope's one end is around locating on the rope reel, wire rope's the other end is walked around in proper order upper pulley group the lower pulley group and with the support rack is fixed.

The traverse drive includes: the double-shaft motor is arranged between two symmetrical rollers of the transverse moving frame, an output shaft of the double-shaft motor is coaxially fixed with the corresponding roller on the side through the driving shaft, and the double-shaft motor is fixed with the supporting rack.

The crossbeam is provided with a plurality of travel switches matched with the transverse moving frame. When the transverse moving frame is positioned above the pickling tank, the alkaline washing tank, the clear water tank and the drying tank, the lifting frame descends to perform cleaning or drying operation.

The special cleaning device for the gallium arsenide substrate is further connected with a controller and a power supply, the travel switch, the driving motor, the vibration drum hammer and the double-shaft motor are electrically connected with the controller, and the power supply provides power for the special cleaning device for the gallium arsenide substrate. The control process of the controller is as follows: firstly, a plurality of gallium arsenide substrates are arranged in a gallium arsenide substrate clamping groove of a vertical stop lever, a double-shaft motor drives a roller of a transverse moving frame to horizontally move on a rail, when the roller reaches the upper part of a pickling tank, the transverse moving frame touches a corresponding travel switch, a lifting frame descends, the gallium arsenide substrate frame enters the pickling tank, a vibration drum hammer vibrates the gallium arsenide substrate frame to improve the cleaning effect of the gallium arsenide substrates, after cleaning for a certain time, the lifting frame ascends, the transverse moving frame continuously moves along the rail, the cleaning process is carried out sequentially through an alkali washing tank and a clear water tank, and finally the gallium arsenide substrates enter a drying tank, the drying tank can be dried by hot air, and the cleaning and drying process of the gallium.

The pickling tank and the alkaline washing tank are respectively provided with an overflow tank and a return pipe, the overflow tank is used for receiving liquid overflowing from the corresponding tank body, one end of the return pipe is communicated with the bottom of the overflow tank, the other end of the return pipe is communicated with the corresponding tank body, the return pipe is used for conveying the liquid left after overflowing back to the corresponding tank body, and the return pipes are respectively connected with a water pump; the clean water tank is filled with flowing deionized water.

Four stop lever clamping grooves are uniformly formed in the upper positioning plate and the lower positioning plate, and the end portions of the vertical stop levers are clamped in the corresponding stop lever clamping grooves. The stop lever clamping grooves correspond to the vertical stop levers one by one.

Compared with the prior art, the utility model following beneficial effect has.

One, the utility model discloses a but set up sideslip and the gallium arsenide substrate frame that goes up and down on descaling bath, alkali wash groove, clear water groove and drying bath, quick completion is gallium arsenide substrate cleaning work in different washing tanks in batches, has made things convenient for gallium arsenide substrate's cleaning work, has improved gallium arsenide substrate's cleaning efficiency.

Two, the utility model discloses a gallium arsenide substrate frame makes things convenient for getting of gallium arsenide substrate in batches to put through the vertical pin of detachable, top board and lower locating plate for this device single can wash gallium arsenide substrate in batches.

Three, the utility model discloses a gallium arsenide substrate holder passes through the mode of spring soft joint with the crane of upper end, and is connected with vibrations drum hammer on the crane, and drive gallium arsenide substrate holder vibrates in the washing liquid to increase the relative motion between washing liquid and the gallium arsenide substrate, improve the cleaning performance of gallium arsenide substrate.

Drawings

The present invention will be further described with reference to the accompanying drawings.

Fig. 1 is a front view of the special cleaning device for gallium arsenide substrate of the present invention.

Figure 2 is the front view of the lifting frame of the utility model.

Figure 3 is the right side view of the lifting frame of the utility model.

Fig. 4 is a front view of the cross sliding frame of the present invention.

Fig. 5 is a schematic structural view of the lifting driving member of the present invention.

Fig. 6 is a schematic structural view of the traverse driving member of the present invention.

Fig. 7 is an enlarged view of the position a of the present invention.

Fig. 8 is a top view of the upper positioning plate of the present invention.

In the figure: the device comprises a support column 1, a cross beam 2, a travel switch 3, a traversing frame 4, a lifting frame 5, a track 6, a drying tank 7, a clear water tank 8, a return pipe 9, an overflow tank 10, an alkaline washing tank 11, a pickling tank 12, a gallium arsenide substrate frame 13, a gallium arsenide substrate 14, a guide wheel 15, a spring 16, a connecting plate 17, a vibration drum hammer 18, a lower pulley block 19, an upper navigation frame 20, a lifting driving piece 21, a roller 22, a support rack 23, a lower navigation frame 24, a driving motor 25, a speed reduction motor 26, a rope winding drum 27, a steel wire rope 28, an upper pulley block 29, an upper pulley block 30, a controller 31, a driving shaft 32, a double-shaft motor 33, a vertical stop lever 34, an upper positioning plate 35, a stop lever clamping groove 36, a gallium arsenide substrate clamping groove 37, a cross rod 38 and a vertical post.

Detailed Description

The following is a further description with reference to specific examples.

A special cleaning device for a gallium arsenide substrate comprises: support column 1, crossbeam 2, sideslip frame 4, sideslip driving piece, crane 5, lift driving piece 21, drying bath 7, clear water groove 8, alkali wash tank 11, descaling bath 12, gallium arsenide substrate frame 13, connecting plate 17 and vibrations drum hammer 18, descaling bath 12, alkali wash tank 11, clear water groove 8 and drying bath 7 set gradually from left to right, crossbeam 2 erects in descaling bath 12, alkali wash tank 11, clear water groove 8 and drying bath 7 top, crossbeam 2 by support column 1 supports fixedly, be connected with on crossbeam 2 and follow crossbeam 2 left and right reciprocating motion sideslip frame 4, be provided with on sideslip frame 4 and drive its reciprocating motion's sideslip driving piece, crane 5 sliding connection in on sideslip frame 4, lift driving piece 21 is used for driving crane 5 follows sideslip frame 4 up-and-down reciprocating motion, the sub-unit connection of crane 5 has a plurality of that set up side by side gallium arsenide substrate frame 13, gallium arsenide substrate frame 13 with crane 5 all connects through spring 16, and is a plurality of spring 16 sets up through the level connecting plate 17 is fixed mutually, be connected with two on the connecting plate 17 and be used for vibrations connecting plate 17 vibrations drum 18. The transverse moving frame 4 drives the gallium arsenide substrate frame 13 to move among different groove bodies, and the vibration of the vibration drum hammer 18 drives the gallium arsenide substrate frame 13 to vibrate in the groove bodies, so that the relative movement between the cleaning liquid and the gallium arsenide substrate 14 is increased, and the cleaning effect of the gallium arsenide substrate 14 is improved.

The gallium arsenide substrate holder 13 includes: vertical pin 33, top board 34, lower locating plate and gallium arsenide substrate draw-in groove 36, circular the top board 34 corresponds the setting from top to bottom with lower locating plate, top board 34 is fixed with corresponding 16 lower extremes of spring, evenly be connected with four between top board 34 and the lower locating plate vertical pin 33, the tip of vertical pin 33 with top board 34, lower locating plate can dismantle the connection, evenly be provided with a plurality ofly on the vertical pin 33 and be used for joint gallium arsenide substrate 14 gallium arsenide substrate draw-in groove 36. The same gallium arsenide substrate 14 is clamped in the gallium arsenide substrate clamping groove 36 with the same horizontal height, a plurality of gallium arsenide substrates 14 are arranged in sequence from top to bottom, and the gallium arsenide substrate 14 is positioned on the periphery of the gallium arsenide substrate 14 through the vertical stop lever 33.

The traverse frame 4 includes: go up navigation frame 20, lower navigation frame 24, gyro wheel 22 and support rack 23, support rack 23 level set up in 2 tops of crossbeam, support rack 23 goes up the symmetric connection has a plurality ofly gyro wheel 22, be fixed with on the crossbeam 2 with gyro wheel 22 matched with track 6, gyro wheel 22 can be followed track 6 reciprocating motion, support rack 23 top is fixed with go up navigation frame 20, the below of support rack 23 is fixed with lower navigation frame 24, crane 5 can be followed go up navigation frame 20, support rack 23, lower navigation frame 24 reciprocating motion from top to bottom.

The crane 5 comprises: the guide wheel 15, the horizontal pole 37 and the montant 38, the montant 38 is two, one the lower extreme of montant 38 with the one end of horizontal pole 37 is fixed, another the lower extreme of horizontal pole 37 with the other end of horizontal pole 37 is fixed, the tip both sides of montant 38 all are connected with guide wheel 15, guide wheel 15 slip joint in go up navigation frame 20, down navigation frame 24 on. The upper ends of the springs 16 are fixed to the cross bar 37.

The lifting drive 21 comprises: driving motor 25, gear motor 26, rope reel 27, wire rope 28, lower pulley group 19 and upper pulley group 29, lower pulley group 19 with horizontal pole 37 middle part is fixed, upper pulley group 29 with lower pulley group 19 set up relatively in on the support rack 23, rope reel 27 set up in one side of upper pulley group 29, rope reel 27 with support rack 23 passes through the bearing frame and connects, driving motor 25, gear motor 26 are used for the drive 27 rotations of rope reel, driving motor 25's output shaft with gear motor 26's input is connected, gear motor 26's output with rope reel 27 is coaxial fixed, driving motor 25, gear motor 26 with support rack 23 is fixed mutually, wire rope 28's one end is around locating on rope reel 27, wire rope 28's the other end is walked around in proper order upper pulley group 29, The lower pulley block 19 is fixed to the support stand 23.

The traverse drive includes: the transverse moving frame 4 comprises a driving shaft 31 and a double-shaft motor 32, the double-shaft motor 32 is arranged between two symmetrical rollers 22 of the transverse moving frame 4, an output shaft of the double-shaft motor 32 and the roller 22 on the corresponding side are coaxially fixed through the driving shaft 31, and the double-shaft motor 32 is fixed with the supporting rack 23.

And a plurality of travel switches 3 matched with the transverse moving frame 4 are arranged on the transverse beam 2. When the transverse moving frame 4 is positioned above the pickling tank 12, the alkaline washing tank 11, the clear water tank 8 and the drying tank 7, the lifting frame 5 descends to perform cleaning or drying operation.

The special cleaning device for the gallium arsenide substrate is further connected with a controller 30 and a power supply, the travel switch 3, the driving motor 25, the vibration drum hammer 18 and the double-shaft motor 32 are electrically connected with the controller 30, and the power supply provides power for the special cleaning device for the gallium arsenide substrate. The control process of the controller 30 is as follows: firstly, a plurality of gallium arsenide substrates 14 are arranged in a gallium arsenide substrate clamping groove 36 of a vertical stop lever 33, a double-shaft motor 32 drives a roller 22 of a transverse frame 4 to horizontally move on a rail 6, when the roller reaches the upper part of a pickling tank 12, the transverse frame 4 touches a corresponding travel switch 3, a lifting frame 5 descends, the gallium arsenide substrate frame 13 enters the pickling tank 12, a vibration drum hammer 18 vibrates the gallium arsenide substrate frame 13 to improve the cleaning effect of the gallium arsenide substrate 14, after cleaning for a certain time, the lifting frame 5 ascends, the transverse frame 4 continues to move along the rail 6, the cleaning process is carried out through an alkaline washing tank 11 and a clear water tank 8 in sequence, and finally the cleaning process enters a drying tank 7, the drying tank can be dried by hot air, and the cleaning and drying process of the gallium arsenide substrate.

An overflow trough 10 and a return pipe 9 are arranged on each of the pickling tank 12 and the alkaline washing tank 11, the overflow trough 10 is used for receiving liquid overflowing from the corresponding tank body, one end of the return pipe 9 is communicated with the bottom of the overflow trough 10, the other end of the return pipe 9 is communicated with the corresponding tank body, the return pipe 9 is used for conveying the liquid overflowing and left back to the corresponding tank body, and the return pipes 9 are connected with water pumps; the clean water tank 8 is filled with flowing deionized water.

Four stop lever clamping grooves 35 are uniformly formed in the upper positioning plate 34 and the lower positioning plate, and the end portions of the vertical stop levers 33 are clamped in the stop lever clamping grooves 35.

The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. It will be apparent to those skilled in the art that modifications and improvements can be made to the above-described embodiments without departing from the spirit and scope of the invention. Accordingly, it will be appreciated that those skilled in the art, upon attaining an understanding of the foregoing may readily produce alterations to, variations of, and equivalents to these embodiments without departing from the spirit and scope of the present invention as defined by the appended claims.

Claims

1. A special cleaning device for a gallium arsenide substrate is characterized by comprising: support column (1), crossbeam (2), sideslip frame (4), sideslip driving piece, crane (5), lift driving piece (21), drying bath (7), clear water groove (8), alkali wash tank (11), descaling bath (12), gallium arsenide substrate frame (13), connecting plate (17) and vibrations drum hammer (18), descaling bath (12), alkali wash tank (11), clear water groove (8) and drying bath (7) set gradually from left to right, crossbeam (2) erects in descaling bath (12), alkali wash tank (11), clear water groove (8) and drying bath (7) top, crossbeam (2) is supported fixedly by support column (1), be connected with on crossbeam (2) can follow crossbeam (2) left and right reciprocating motion sideslip frame (4), be provided with on sideslip frame (4) and drive its reciprocating motion's sideslip driving piece, crane (5) sliding connection in on sideslip frame (4), lift driving piece (21) are used for the drive crane (5) are followed reciprocating motion about sideslip frame (4), the sub-unit connection of crane (5) has a plurality of that set up side by side gallium arsenide substrate holder (13), gallium arsenide substrate holder (13) with crane (5) all are connected through spring (16), and are a plurality of spring (16) set up through the level connecting plate (17) are fixed mutually, be connected with a plurality of vibrations that are used for on connecting plate (17) vibrations drum hammer (18).

2. The special cleaning device for gallium arsenide substrate as claimed in claim 1, wherein said gallium arsenide substrate holder (13) comprises: vertical pin (33), top board (34), lower locating plate and gallium arsenide substrate draw-in groove (36), circular top board (34) and lower locating plate correspond the setting from top to bottom, top board (34) are fixed with corresponding spring (16) lower extreme, evenly be connected with four between top board (34) and the lower locating plate vertical pin (33), the tip of vertical pin (33) with top board (34), lower locating plate can dismantle the connection, evenly be provided with a plurality ofly on vertical pin (33) and be used for joint gallium arsenide substrate (14) gallium arsenide substrate draw-in groove (36).

3. A cleaning device special for gallium arsenide substrate according to claim 2, wherein said traversing carriage (4) comprises: go up navigation frame (20), lower navigation frame (24), gyro wheel (22) and support rack (23), support rack (23) level set up in crossbeam (2) top, the symmetry is connected with a plurality ofly on support rack (23) gyro wheel (22), be fixed with on crossbeam (2) with gyro wheel (22) matched with track (6), gyro wheel (22) can be followed track (6) reciprocating motion, support rack (23) top is fixed with go up navigation frame (20), the below of support rack (23) is fixed with lower navigation frame (24), crane (5) can be followed go up navigation frame (20), support rack (23), lower navigation frame (24) reciprocating motion from top to bottom.

4. A cleaning device special for gallium arsenide substrate according to claim 3 wherein said lifting frame (5) comprises: leading wheel (15), horizontal pole (37) and montant (38), montant (38) are two, one the lower extreme of montant (38) with the one end of horizontal pole (37) is fixed, another the lower extreme of horizontal pole (37) with the other end of horizontal pole (37) is fixed, the tip both sides of montant (38) all are connected with leading wheel (15), leading wheel (15) slip joint in go up navigation frame (20), down on navigation frame (24).

5. A special cleaning device for GaAs substrate according to claim 4, wherein the lifting drive member (21) comprises: a driving motor (25), a speed reducing motor (26), a rope drum (27), a steel wire rope (28), a lower pulley block (19) and an upper pulley block (29), the lower pulley block (19) is fixed with the middle part of the cross rod (37), the upper pulley block (29) and the lower pulley block (19) are oppositely arranged on the supporting rack (23), the rope drum (27) is arranged on one side of the upper pulley group (29), the rope drum (27) is connected with the support rack (23) through a bearing seat, the driving motor (25) and the reducing motor (26) are used for driving the rope drum (27) to rotate, one end of the steel wire rope (28) is wound on the rope drum (27), and the other end of the steel wire rope (28) sequentially bypasses the upper pulley block (29), the lower pulley block (19) and is fixed with the supporting rack (23).

6. The apparatus of claim 5, wherein the traverse driving member comprises: the transverse moving frame is characterized by comprising a driving shaft (31) and a double-shaft motor (32), the double-shaft motor (32) is arranged between two symmetrical rollers (22) of the transverse moving frame (4), an output shaft of the double-shaft motor (32) and the roller (22) on the corresponding side are coaxially fixed through the driving shaft (31), and the double-shaft motor (32) is fixed with the supporting rack (23).

7. The cleaning device special for the gallium arsenide substrate as claimed in claim 6, wherein a plurality of travel switches (3) matched with the traverse frame (4) are arranged on the cross beam (2).

8. The special cleaning device for the gallium arsenide substrate as claimed in claim 7, wherein a controller (30) and a power supply are further connected to the special cleaning device for the gallium arsenide substrate, the travel switch (3), the driving motor (25), the vibration drum hammer (18) and the double-shaft motor (32) are all electrically connected to the controller (30), and the power supply provides power for the special cleaning device for the gallium arsenide substrate.

9. The special cleaning device for the gallium arsenide substrate according to claim 8, wherein an overflow tank (10) and a return pipe (9) are arranged on each of the pickling tank (12) and the alkaline washing tank (11), the overflow tank (10) is used for receiving liquid overflowing from the corresponding tank body, one end of the return pipe (9) is communicated with the bottom of the overflow tank (10), the other end of the return pipe (9) is communicated with the corresponding tank body, the return pipe (9) is used for conveying the overflowing liquid back to the corresponding tank body, and the return pipe (9) is connected with a water pump; and flowing deionized water is adopted in the clean water tank (8).

10. The special cleaning device for gallium arsenide substrates as claimed in claim 9, wherein four bar slots (35) are uniformly arranged on the upper positioning plate (34) and the lower positioning plate, and the ends of the vertical bars (33) are engaged in the corresponding bar slots (35).