CN213424957U - Lifting device for quartz boat of diffusion furnace - Google Patents
Lifting device for quartz boat of diffusion furnace Download PDFInfo
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- CN213424957U CN213424957U CN202022600959.2U CN202022600959U CN213424957U CN 213424957 U CN213424957 U CN 213424957U CN 202022600959 U CN202022600959 U CN 202022600959U CN 213424957 U CN213424957 U CN 213424957U
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- quartz boat
- threaded rod
- plate
- box body
- diffusion furnace
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Abstract
The utility model provides a lifting device of quartz boat of diffusion furnace belongs to quartz boat technical field. The lifting device of the diffusion furnace quartz boat comprises a supporting mechanism and a lifting mechanism. The supporting mechanism comprises a box body, the lifting mechanism comprises a motor, a threaded rod, a sliding assembly, a first sealing plate, a sealing barrel, a second sealing plate, a round rod and a supporting plate, the motor is connected to one side of the box body, the threaded rod is installed on an output shaft of the motor, the threaded rod penetrates through and extends to the interior of the box body, and the threaded rod is in threaded connection with the sliding assembly. The utility model discloses a motor, threaded rod, slider, slide, support, bracing piece, first closing plate, second closing plate, sealed section of thick bamboo, round bar and layer board to reached the stable purpose of lift in-process, had the buffer power when going up and down to pause, difficult production is rocked when making the quartz boat, makes the silicon chip stable, improves the quality of silicon chip.
Description
Technical Field
The utility model relates to a quartz boat field particularly, relates to a elevating gear of diffusion furnace quartz boat.
Background
The diffusion furnace is one of important process equipment of the former process of a semiconductor production line, is used for diffusion, oxidation, annealing, alloy, sintering and other processes of industries such as large-scale integrated circuits, discrete devices, power electronics, photoelectric devices, optical fibers and the like, the quartz boat is used for bearing a silicon wafer in the diffusion process of a crystalline silicon solar cell, the silicon wafer is placed in a carrier of reaction in the diffusion furnace, the quartz boat has high temperature resistance and chemical stability, the lifting device of the quartz boat of the existing diffusion furnace is unstable in the lifting process, the silicon wafer is placed on the quartz boat, the quartz boat can pause in the lifting process, the quartz boat can be unstable in the moment of stopping, the silicon wafer is rocked, and the quality of the silicon wafer is.
SUMMERY OF THE UTILITY MODEL
In order to make up for above not enough, the utility model provides a lifting device of diffusion furnace quartz boat aims at improving the unstable problem of lift in-process.
The utility model discloses a realize like this:
the utility model provides a lifting device of a quartz boat of a diffusion furnace, which comprises a supporting mechanism and a lifting mechanism.
The supporting mechanism comprises a box body, the lifting mechanism comprises a motor, a threaded rod, a sliding assembly, a first sealing plate, a sealing barrel, a second sealing plate, a round rod and a supporting plate, the motor is connected to one side of the box body, the threaded rod is installed on an output shaft of the motor, the threaded rod runs through and extends to the inside of the box body, the threaded rod is in threaded connection with the sliding assembly, the first sealing plate is connected to one end of the sliding assembly, the sealing barrel is installed on the inner wall of the box body, the first sealing plate is in sliding connection with the inner wall of the sealing barrel, the second sealing plate is in sliding connection with the inner wall of the sealing barrel, the round rod is installed on one side of the second sealing plate, the round rod runs through and extends to the outside.
The utility model discloses a lifting device embodiment of diffusion furnace quartz boat, first closing plate with the second closing plate with a sealed section of thick bamboo inner wall interference fit, first closing plate with the second closing plate homoenergetic in slide in a sealed section of thick bamboo.
The utility model discloses an in the elevating gear embodiment of a diffusion furnace quartz boat, the slip subassembly includes slide, support, bracing piece and slider, the threaded rod screw thread run through in the slide, the support mounting in slide one side, the bracing piece connect in support one side, the slider install in the slide both sides.
The utility model discloses a lifting device embodiment of diffusion furnace quartz boat, the slide internal surface is seted up threaded hole, the screw hole with threaded rod threaded connection.
The utility model discloses a lifting device embodiment of diffusion furnace quartz boat, the spout has been seted up to the box inner wall, the shape of slider is the hemisphere type, slider sliding connection in the spout.
The utility model discloses an in the elevating gear embodiment of a diffusion furnace quartz boat, the shape of support is concave type, the support inner wall is seted up flutedly, the threaded rod with groove clearance fit.
In the embodiment of the lifting device for the quartz boat of the diffusion furnace, the supporting mechanism further comprises supporting legs, the supporting legs are connected to one side of the box body, and the number of the supporting legs is four.
The utility model discloses a lifting device embodiment of diffusion furnace quartz boat, the second through-hole has been seted up to the box internal surface, the second through-hole with threaded rod clearance fit.
The utility model discloses a lifting device embodiment of diffusion furnace quartz boat, first through-hole has been seted up to the box internal surface, first through-hole sets up to two.
The utility model discloses a lifting device embodiment of diffusion furnace quartz boat, the third through-hole has been seted up to the box internal surface, the third through-hole sets up to two, the third through-hole with round bar clearance fit.
The utility model has the advantages that: the utility model discloses a lifting device of diffusion furnace quartz boat through above-mentioned design, when using, people turn on the motor, the motor can drive the threaded rod to rotate, the threaded rod can drive the slide through screw hole and slider and reciprocate, the slide can drive the support and reciprocate, the support can drive the bracing piece and reciprocate, the bracing piece can drive the first closing plate and reciprocate, first closing plate and second closing plate become airtight space through sealed tube, when the first closing plate reciprocates, the pressure between first closing plate and the second closing plate can drive the second closing plate to reciprocate, the second closing plate can drive the round bar and reciprocate, the round bar can drive the layer board and reciprocate, the quartz boat is placed on the layer board, thereby the layer board drives the quartz boat to reciprocate, when making the quartz boat reciprocate and stop, the pressure of first closing plate and second closing plate can produce the cushion force, the quartz boat can not shake during pausing, so that the purpose of stability in the lifting process is achieved, buffering force is generated during the lifting pausing, the quartz boat is not prone to shaking, the silicon wafer is stable, and the quality of the silicon wafer is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a schematic structural view of a lifting device of a quartz boat of a diffusion furnace according to an embodiment of the present invention;
fig. 2 is a schematic structural view of a supporting mechanism according to an embodiment of the present invention;
fig. 3 is a schematic structural view of a lifting mechanism provided in an embodiment of the present invention;
fig. 4 is a schematic structural view of a sliding assembly according to an embodiment of the present invention.
In the figure: 10-a support mechanism; 110-a box body; 120-support legs; 130-a first via; 140-a second via; 150-a chute; 160-third via; 20-a lifting mechanism; 210-a motor; 220-a threaded rod; 230-a sliding assembly; 231-a slide plate; 232-a scaffold; 233-support rods; 234-a slider; 235-a threaded hole; 236-a groove; 240 — a first seal plate; 250-a sealed cylinder; 260-a second sealing plate; 270-round bar; 280-pallet.
Detailed Description
To make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined to clearly and completely describe the technical solutions of the embodiments of the present invention, and obviously, the described embodiments are some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
Examples
Referring to fig. 1, the present invention provides a lifting device for a quartz boat of a diffusion furnace, which comprises a supporting mechanism 10 and a lifting mechanism 20.
Wherein, elevating system 20 sets up inside supporting mechanism 10, and supporting mechanism 10 is used for protecting elevating system 20, and elevating system 20 is used for driving the quartz boat and reciprocates, accomplishes the lift.
Referring to fig. 1 and 2, the supporting mechanism 10 includes a box 110, the supporting mechanism 10 further includes supporting legs 120, the supporting legs 120 are connected to one side of the box 110, specifically, the supporting legs 120 are fixedly connected to one side of the box 110 by welding, the number of the supporting legs 120 is four, the inner surface of the box 110 is provided with two first through holes 130, and the first through holes 130 are used for air intake and air outtake, so that air inside the box 110 circulates.
Referring to fig. 1, 2 and 3, the lifting mechanism 20 includes a motor 210, a threaded rod 220, a sliding assembly 230, a first sealing plate 240, a sealing cylinder 250, a second sealing plate 260, a round rod 270 and a supporting plate 280, the motor 210 is connected to one side of the box body 110, specifically, the motor 210 is fixedly connected to one side of the box body 110 by a screw, the threaded rod 220 is installed on an output shaft of the motor 210, specifically, the threaded rod 220 is fixedly installed on the output shaft of the motor 210 by welding, the threaded rod 220 extends into the box body 110 by penetrating, the threaded rod 220 is connected to the sliding assembly 230 by a screw, the first sealing plate 240 is connected to one end of the sliding assembly 230, specifically, the first sealing plate 240 is fixedly connected to one end of the sliding assembly 230 by gluing, the first sealing plate 240 is a rubber plate, the sealing cylinder 250 is installed on an inner wall of the box body 110, specifically, the sealing cylinder, second sealing plate 260 sliding connection is in sealed section of thick bamboo 250 inner wall, round bar 270 is installed in second sealing plate 260 one side, it is specific, round bar 270 is through gluing fixed mounting in second sealing plate 260 one side, second sealing plate 260 is the rubber slab, round bar 270 runs through and extends to the box 110 outside, layer board 280 is connected in round bar 270 one end, it is specific, layer board 280 passes through welded fastening and connects in round bar 270 one end, motor 210 is used for driving threaded rod 220 and rotates, then it reciprocates to drive first sealing plate 240 through sliding component 230, first sealing plate 240 drives second sealing plate 260 through sealed section of thick bamboo 250 and reciprocates, second sealing plate 260 drives layer board 280 through round bar 270 and reciprocates, first sealing plate 240, sealed section of thick bamboo 250 and second sealing plate 260 can form the cushion effect, cushion when the quartz boat pauses, improve the quality of silicon chip.
In some specific embodiments, the first sealing plate 240 and the second sealing plate 260 are in interference fit with the inner wall of the sealing cylinder 250, both the first sealing plate 240 and the second sealing plate 260 can slide in the sealing cylinder 250, the second through hole 140 is formed in the inner surface of the box body 110, the second through hole 140 is in clearance fit with the threaded rod 220, the third through hole 160 is formed in the inner surface of the box body 110, two third through holes 160 are formed, and the third through hole 160 is in clearance fit with the round rod 270.
Referring to fig. 1, 3 and 4, the sliding assembly 230 includes a sliding plate 231, a bracket 232, a support rod 233 and a sliding block 234, the threaded rod 220 is threaded through the sliding plate 231, the bracket 232 is mounted on one side of the sliding plate 231, specifically, the bracket 232 is mounted on one side of the sliding plate 231 by welding, the support rod 233 is connected to one side of the bracket 232, specifically, the support rod 233 is connected to one side of the bracket 232 by welding, the sliding block 234 is mounted on two sides of the sliding plate 231, specifically, the sliding block 234 is mounted on two sides of the sliding plate 231 by welding, and the sliding plate 231 drives the bracket 232 and the support rod.
In some specific embodiments, a threaded hole 235 is formed in an inner surface of the sliding plate 231, the threaded hole 235 is in threaded connection with the threaded rod 220, a sliding groove 150 is formed in an inner wall of the box body 110, the sliding block 234 is shaped like a hemisphere, the sliding block 234 is slidably connected to the sliding groove 150, the bracket 232 is shaped like a concave shape, a groove 236 is formed in an inner wall of the bracket 232, the threaded rod 220 is in clearance fit with the groove 236, and the sliding groove 150 is used for limiting movement of the sliding block 234, so that the sliding plate 231 can move up and down along.
The working principle of the lifting device of the diffusion furnace quartz boat is as follows: when in use, people turn on the motor 210, the motor 210 can drive the threaded rod 220 to rotate, the threaded rod 220 can drive the sliding plate 231 to move up and down through the threaded hole 235 and the sliding block 234, the sliding plate 231 can drive the bracket 232 to move up and down, the bracket 232 can drive the supporting rod 233 to move up and down, the supporting rod 233 can drive the first sealing plate 240 to move up and down, the first sealing plate 240 and the second sealing plate 260 form a closed space through the sealing cylinder 250, when the first sealing plate 240 moves up and down, the pressure between the first sealing plate 240 and the second sealing plate 260 can drive the second sealing plate 260 to move up and down, the second sealing plate 260 can drive the round rod 270 to move up and down, the round rod 270 can drive the supporting plate 280 to move up and down, the quartz boat is placed on the supporting plate 280, thereby driving the quartz boat to move up and down, when the, the quartz boat can not shake during pausing, so that the purpose of stability in the lifting process is achieved, buffering force is generated during the lifting pausing, the quartz boat is not prone to shaking, the silicon wafer is stable, and the quality of the silicon wafer is improved.
It should be noted that the specific model specification of the motor 210 needs to be determined by type selection according to the actual specification of the device, and the specific type selection calculation method adopts the prior art in the field, so detailed description is omitted.
The power supply of the motor 210 and its principle will be clear to a person skilled in the art and will not be described in detail here.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A lifting device of a quartz boat of a diffusion furnace is characterized by comprising
A support mechanism (10), the support mechanism (10) comprising a case (110);
the lifting mechanism (20), the lifting mechanism (20) comprises a motor (210), a threaded rod (220), a sliding assembly (230), a first sealing plate (240), a sealing cylinder (250), a second sealing plate (260), a round rod (270) and a supporting plate (280), the motor (210) is connected to one side of the box body (110), the threaded rod (220) is installed on an output shaft of the motor (210), the threaded rod (220) penetrates through the box body (110) and extends into the box body (110), the threaded rod (220) is in threaded connection with the sliding assembly (230), the first sealing plate (240) is connected to one end of the sliding assembly (230), the sealing cylinder (250) is installed on the inner wall of the box body (110), the first sealing plate (240) is in sliding connection with the inner wall of the sealing cylinder (250), and the second sealing plate (260) is in sliding connection with the inner wall of the sealing cylinder (250), the round rod (270) is installed at one side of the second sealing plate (260), the round rod (270) penetrates and extends to the outside of the box body (110), and the supporting plate (280) is connected to one end of the round rod (270).
2. The lifting device for the quartz boat of the diffusion furnace as claimed in claim 1, wherein the first sealing plate (240) and the second sealing plate (260) are in interference fit with the inner wall of the sealing cylinder (250), and both the first sealing plate (240) and the second sealing plate (260) can slide in the sealing cylinder (250).
3. The lifting device for the quartz boat of the diffusion furnace of claim 1, wherein the sliding assembly (230) comprises a sliding plate (231), a bracket (232), a supporting rod (233) and a sliding block (234), the threaded rod (220) is threaded through the sliding plate (231), the bracket (232) is installed on one side of the sliding plate (231), the supporting rod (233) is connected to one side of the bracket (232), and the sliding block (234) is installed on two sides of the sliding plate (231).
4. The lifting device for the quartz boat of the diffusion furnace as claimed in claim 3, wherein the inner surface of the sliding plate (231) is provided with a threaded hole (235), and the threaded hole (235) is in threaded connection with the threaded rod (220).
5. The lifting device for the quartz boat of the diffusion furnace as claimed in claim 3, wherein a sliding groove (150) is formed on the inner wall of the box body (110), the slider (234) is shaped like a hemisphere, and the slider (234) is slidably connected to the sliding groove (150).
6. The lifting device for the quartz boat of the diffusion furnace as claimed in claim 3, wherein the shape of the bracket (232) is concave, a groove (236) is formed on the inner wall of the bracket (232), and the threaded rod (220) is in clearance fit with the groove (236).
7. The quartz boat lifting device of a diffusion furnace as claimed in claim 1, wherein the supporting mechanism (10) further comprises supporting legs (120), the supporting legs (120) are connected to one side of the box body (110), and the number of the supporting legs (120) is four.
8. The lifting device for the quartz boat of the diffusion furnace as claimed in claim 1, wherein the inner surface of the box body (110) is provided with a second through hole (140), and the second through hole (140) is in clearance fit with the threaded rod (220).
9. The lifting device for the quartz boat of the diffusion furnace as claimed in claim 1, wherein the inner surface of the box body (110) is provided with two first through holes (130), and the number of the first through holes (130) is two.
10. The lifting device for the quartz boat of the diffusion furnace as claimed in claim 1, wherein the inner surface of the box body (110) is provided with three through holes (160), two third through holes (160) are provided, and the third through holes (160) are in clearance fit with the round rods (270).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022600959.2U CN213424957U (en) | 2020-11-11 | 2020-11-11 | Lifting device for quartz boat of diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022600959.2U CN213424957U (en) | 2020-11-11 | 2020-11-11 | Lifting device for quartz boat of diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213424957U true CN213424957U (en) | 2021-06-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022600959.2U Active CN213424957U (en) | 2020-11-11 | 2020-11-11 | Lifting device for quartz boat of diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213424957U (en) |
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2020
- 2020-11-11 CN CN202022600959.2U patent/CN213424957U/en active Active
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