CN213378358U

CN213378358U - Furnace tube accessory belt cleaning device

Info

Publication number: CN213378358U
Application number: CN202021810083.8U
Authority: CN
Inventors: 叶邵凤
Original assignee: Hangzhou Semiconductor Wafer Co Ltd
Current assignee: Hangzhou Semiconductor Wafer Co Ltd
Priority date: 2020-08-26
Filing date: 2020-08-26
Publication date: 2021-06-08
Anticipated expiration: 2030-08-26

Abstract

The utility model relates to a boiler tube accessory belt cleaning device, affiliated semiconductor silicon chip processing equipment washs technical field, including the washing tank, washing tank top be equipped with the frame, last frame and washing tank between be equipped with long washing cylinder mould and short washing cylinder mould, long washing cylinder mould and last frame between, short washing cylinder mould and last frame between all be equipped with the lift cylinder, lift cylinder and last frame between be equipped with the fixed sideslip track of last frame looks bolted connection, sideslip track and lift cylinder between all be equipped with and the sideslip track insert the sideslip cylinder of formula displacement connection mutually. Has the characteristics of simple structure, convenient operation and good running stability. The problem of washing liquid waste is solved. The cleaning liquid consumption is reasonably used, and the loss of the processing cost is avoided. The accessory is prevented from being damaged due to the collision phenomenon caused by random floating in the cleaning process.

Description

Furnace tube accessory belt cleaning device

Technical Field

The utility model relates to a semiconductor silicon chip processing equipment washs technical field, concretely relates to boiler tube accessory belt cleaning device.

Background

In the high-temperature heat treatment process, in order to avoid the silicon wafer from being polluted by the external environment, it is necessary to clean the furnace tube regularly. At present, the cleaning of high temperature furnace tube and fittings are performed in the same furnace tube cleaning machine, wherein HNO3, HF acid and pure water are needed. It is worth noting that the HNO3 and HF acids used are expensive, on the order of tens of chunks per liter.

The capacity of the furnace tube cleaning machine is designed only for cleaning the furnace tube. Each time the furnace tube is cleaned, the liquid level needs to be adjusted to about 250L to 300L to submerge the furnace tube. Take an Ar furnace as an example, wherein in addition to the furnace tube needs cleaning, the SiC boat and quartz Cap also need cleaning. At this time, a quartz Cap with a volume much smaller than that of the furnace tube cleaning machine is placed in the quartz Cap, the liquid level of the acid solution is still required to be adjusted to 250L to 300L, the Cap can be completely immersed, wherein more than half of the acid solution is redundant, and if a cleaning tank with a proper volume is used for cleaning the Cap, the cost is converted, and about every cleaning time, hundreds of yuan can be saved.

On the other hand, when the cleaning liquid is injected into a certain volume, the fitting like quartz Cap floats and is inevitably collided during the cleaning process.

Disclosure of Invention

The utility model discloses mainly solve and have the poor and extravagant not enough of washing liquid of operational stability among the prior art, provide a boiler tube accessory belt cleaning device, it has simple structure, convenient operation and the good characteristics of operational stability. The problem of washing liquid waste is solved. The cleaning liquid consumption is reasonably used, and the loss of the processing cost is avoided. The accessory is prevented from being damaged due to the collision phenomenon caused by random floating in the cleaning process.

The above technical problem of the present invention can be solved by the following technical solutions:

the utility model provides a boiler tube accessory belt cleaning device, includes the washing tank, washing tank top be equipped with the frame, last frame and washing tank between be equipped with long washing cylinder mould and short washing cylinder mould, long washing cylinder mould and last frame between, short washing cylinder mould and last frame between all be equipped with the lift cylinder, lift cylinder and last frame between be equipped with last frame looks bolted connection fixed sideslip track, sideslip track and lift cylinder between all be equipped with and the sideslip track with the sideslip track insert the sideslip cylinder of formula displacement connection mutually.

Preferably, the cleaning tank comprises a cleaning box body, a separation door is arranged in the cleaning box body, and a rotating shaft is arranged between one end of the separation door and the inner wall of the cleaning box body.

Preferably, the lower end of the cleaning box body is provided with a pair of liquid inlet pipes positioned at two ends of the separation door, and a plurality of spray pipes communicated with the cleaning box body in a penetrating way are arranged between the liquid inlet pipes and the cleaning box body.

Preferably, the liquid inlet pipe is provided with a liquid inlet valve in threaded sleeve connection with the liquid inlet pipe, and a one-way valve in flange-type sealing connection with the liquid inlet pipe is arranged between the liquid inlet valve and the spray washing pipe.

Preferably, the lower part of one side of the cleaning box body is provided with a pair of liquid discharge pipes positioned at two ends of the separation door, and the liquid discharge pipes are provided with liquid discharge valves in threaded sleeve connection with the liquid discharge pipes.

Preferably, both ends of the transverse moving track are provided with stop blocks which are movably contacted with the transverse moving cylinder.

The utility model discloses can reach following effect:

the utility model provides a boiler tube accessory belt cleaning device compares with prior art, has simple structure, convenient operation and the good characteristics of operating stability. The problem of washing liquid waste is solved. The cleaning liquid consumption is reasonably used, and the loss of the processing cost is avoided. The accessory is prevented from being damaged due to the collision phenomenon caused by random floating in the cleaning process.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is a schematic structural view of the cleaning tank of the present invention.

In the figure: the cleaning machine comprises a long cleaning net cage 1, an upper frame 2, a transverse moving rail 3, a lifting cylinder 4, a transverse moving cylinder 5, a stop block 6, a short cleaning net cage 7, a cleaning groove 8, a spray cleaning pipe 9, a liquid inlet pipe 10, a one-way valve 11, a liquid inlet valve 12, a liquid discharge valve 13, a liquid discharge pipe 14, a rotating shaft 15, a cleaning box body 16 and a partition door 17.

Detailed Description

The technical solution of the present invention is further specifically described below by way of examples and with reference to the accompanying drawings.

Example (b): as shown in fig. 1 and 2, a cleaning device for furnace tube fittings comprises a cleaning tank 8, wherein the cleaning tank 8 comprises a cleaning tank body 16, a separation door 17 is arranged in the cleaning tank body 16, and a rotating shaft 15 is arranged between one end of the separation door 17 and the inner wall of the cleaning tank body 16. The lower end of the cleaning box body 16 is provided with a pair of liquid inlet pipes 10 positioned at two ends of a partition door 17, a liquid inlet valve 12 in threaded sleeve joint with the liquid inlet pipe 10 is arranged on the liquid inlet pipe 10, and a one-way valve 11 in flange type sealing connection with the liquid inlet pipe 10 is arranged between the liquid inlet valve 12 and the spray cleaning pipe 9. 45 spray pipes 9 which are distributed in an array form and are communicated with the cleaning box body 16 in a penetrating way are arranged between the liquid inlet pipe 10 and the cleaning box body 16. A pair of discharge pipes 14 positioned at two ends of the partition door 17 are arranged at the lower part of one side edge of the cleaning box body 16, and a discharge valve 13 which is in threaded sleeve joint with the discharge pipes 14 is arranged on the discharge pipes 14. An upper frame 2 is arranged above the cleaning tank 8, a long cleaning mesh cage 1 and a short cleaning mesh cage 7 are arranged between the upper frame 2 and the cleaning tank 8, lifting cylinders 4 are arranged between the long cleaning mesh cage 1 and the upper frame 2 and between the short cleaning mesh cage 7 and the upper frame 2, a transverse moving rail 3 fixedly connected with the upper frame 2 through bolts is arranged between the lifting cylinders 4 and the upper frame 2, and stop blocks 6 movably contacted with the transverse moving cylinder 5 are arranged at two ends of the transverse moving rail 3. And a traversing cylinder 5 which is in inserted displacement connection with the traversing rail 3 is arranged between the traversing rail 3 and the lifting cylinder 4.

In conclusion, the furnace tube fitting cleaning device has the characteristics of simple structure, convenience in operation and good running stability. The problem of washing liquid waste is solved. The cleaning liquid consumption is reasonably used, and the loss of the processing cost is avoided. The accessory is prevented from being damaged due to the collision phenomenon caused by random floating in the cleaning process.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without deviating from the basic characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

In conclusion, the above description is only the specific embodiment of the present invention, but the structural features of the present invention are not limited thereto, and any person skilled in the art can make changes or modifications within the scope of the present invention.

Claims

1. The utility model provides a boiler tube accessory belt cleaning device which characterized in that: including washing tank (8), washing tank (8) top be equipped with frame (2), last frame (2) and washing tank (8) between be equipped with long washing cylinder mould (1) and short washing cylinder mould (7), long washing cylinder mould (1) and last frame (2) between, short washing cylinder mould (7) and last frame (2) all are equipped with lift cylinder (4), lift cylinder (4) and last frame (2) between be equipped with cross sliding rail (3) fixed with last frame (2) looks bolted connection, cross sliding rail (3) and lift cylinder (4) between all be equipped with cross sliding rail (3) between cross sliding rail (3) and cross sliding cylinder (5) of inserting the formula displacement connection mutually.

2. The furnace tube fitting cleaning apparatus of claim 1, wherein: the cleaning tank (8) comprises a cleaning tank body (16), a separation door (17) is arranged in the cleaning tank body (16), and a rotating shaft (15) is arranged between one end of the separation door (17) and the inner wall of the cleaning tank body (16).

3. The furnace tube fitting cleaning apparatus of claim 2, wherein: the cleaning box is characterized in that a pair of liquid inlet pipes (10) which are positioned at two ends of the partition door (17) are arranged at the lower end of the cleaning box body (16), and a plurality of spraying and cleaning pipes (9) which are communicated with the cleaning box body (16) in a penetrating way are arranged between the liquid inlet pipes (10) and the cleaning box body (16).

4. The furnace tube fitting cleaning apparatus of claim 3, wherein: the liquid inlet pipe (10) is provided with a liquid inlet valve (12) which is in threaded sleeve joint with the liquid inlet pipe (10), and a one-way valve (11) which is in flange-type sealing connection with the liquid inlet pipe (10) is arranged between the liquid inlet valve (12) and the spray washing pipe (9).

5. The furnace tube fitting cleaning apparatus of claim 2, wherein: a pair of liquid discharge pipes (14) positioned at two ends of the separating door (17) are arranged at the lower part of one side edge of the cleaning box body (16), and a liquid discharge valve (13) in threaded sleeve joint with the liquid discharge pipes (14) is arranged on the liquid discharge pipes (14).

6. The furnace tube fitting cleaning apparatus of claim 1, wherein: and stop blocks (6) movably contacted with the transverse moving cylinder (5) are arranged at the two ends of the transverse moving track (3).