CN213366540U

CN213366540U - High-efficient belt cleaning device of silicon wafer

Info

Publication number: CN213366540U
Application number: CN202022819288.9U
Authority: CN
Inventors: 任怡雯; 李漢生; 蔡雪良
Original assignee: Kunshan Zhongchen Silicon Crystal Co ltd
Current assignee: Kunshan Zhongchen Silicon Crystal Co ltd; Kunshan Sino Silicon Technology Co Ltd
Priority date: 2020-11-30
Filing date: 2020-11-30
Publication date: 2021-06-04
Anticipated expiration: 2030-11-30

Abstract

The utility model belongs to the technical field of semiconductor production equipment, in particular to a silicon wafer high-efficiency cleaning device, which aims at the problem of low cleaning efficiency, the following proposal is provided, comprising a shell, wherein one side of the shell is fixedly provided with a second motor, the output shaft of the second motor extends into the shell, the output shaft of the second motor is fixedly provided with a first worm, one side of the first worm is fixedly provided with a lifting rod, one side of the first worm is meshed with a second worm wheel, the top of the second worm wheel is fixedly provided with a connecting rod, the utility model has simple structure, the top of the silicon wafer can be cleaned by rotating a brush, when the silicon wafer moves to the top of the lifting rod, the silicon wafer can be lifted and turned over, and can be corrected by two soft rubber clamps at the back and can be cleaned by a second rotating brush, simple operation and convenient use.

Description

High-efficient belt cleaning device of silicon wafer

Technical Field

The utility model relates to a semiconductor production equipment technical field especially relates to a high-efficient belt cleaning device of silicon wafer.

Background

In the existing round crystal manufacturing process, various organic compounds, metal impurities, particles and the like are attached to the surface of the round crystal, the cleanliness of the surface of the round crystal is one of important factors influencing the reliability of a semiconductor device, and the performance and the qualification rate of the semiconductor device are greatly reduced if the round crystal is not cleaned;

therefore, in the manufacturing process of the semiconductor device, 20% of steps are cleaning of the wafer, removing pollutants such as organic compounds, metal impurities and particles attached to the surface of the wafer, improving the performance and the yield of the semiconductor device, improving the cleaning efficiency of a plurality of existing cleaning devices and increasing the cost.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the problem of low cleaning efficiency in the prior art and providing a high-efficiency cleaning device for silicon wafers.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a high-efficient belt cleaning device of silicon wafer, includes the shell, one side fixed mounting of shell has the second motor, the output shaft of second motor extends to in the shell, fixed mounting has first worm on the output shaft of second motor, one side fixed mounting of first worm has the pole of lifting, one side meshing of first worm has the second worm wheel, the top fixed mounting of second worm wheel has the connecting rod, be equipped with first worm wheel in the shell, the connecting rod runs through first worm wheel and with first worm wheel fixed connection, the connecting rod rotates and connects on the top inner wall of shell, meshing has the second worm on the first worm wheel, the both sides of second worm all sliding connection has the pulling rod, and the both ends of two pulling rods all fixed mounting has the telescopic link, telescopic link fixed mounting is on the inner wall of shell, sliding connection has the flexible glue anchor clamps on the pulling rod, the soft rubber clamp is internally provided with threads, the top of one side of the pulling rod is fixedly provided with a bolt frame, the bolt frame is rotatably connected with a bolt which extends into the soft rubber clamp and is in threaded connection with the thread in the soft rubber clamp, the inner wall of the shell is rotatably connected with a rotating shaft, the bottom of the shell is fixedly provided with a base, a rotary wheel frame is fixedly arranged on one side of the top of the base, a rotary shaft which is the same as the shell is connected on the rotary wheel frame in a rotating way, a first conveyor belt and a second conveyor belt are simultaneously sleeved on the two rotating shafts, a belt is sleeved on an output shaft of the second motor, one end of the belt is sleeved on the rotating shaft, a rotating brush is fixedly arranged on the inner wall of the top of the shell, the rotary brush is fixedly provided with a plurality of water guns, the rotary brush is connected with the first conveying belt and the second conveying belt in a sliding mode, and the soft rubber clamp is connected with the first conveying belt and the second conveying belt in a sliding mode respectively.

Preferably, a wafer door is rotatably connected to the housing, and a handle is fixedly mounted at the top of the wafer door and used for opening the housing and placing the silicon wafer into the housing.

Preferably, a first motor is fixedly installed at the top of the shell, an output shaft of the first motor extends into the shell, a rotating door is fixedly installed on the output shaft of the first motor, and the rotating door is in sliding connection with the inner wall of the top of the shell and is used for conveying the blocking silicon wafers and the silicon wafers into the shell one by one.

Preferably, a flow guide slope is fixedly installed on the inner wall of the shell, and a plurality of C-shaped grooves are formed in the second conveyor belt and used for guiding the silicon wafers to enter the C-shaped grooves in the second conveyor belt.

Preferably, a slide slope is fixedly arranged on one side of the top of the base and used for separating the silicon wafer from the cleaning device.

The utility model has the advantages that: one surface of the silicon wafer can be cleaned by rotating the hairbrush, and the rotating hairbrush is also provided with a water gun which can spray water to the hairbrush, so that the silicon wafer is cleaned;

the first worm is driven to rotate by the second motor, the lifting rod is driven by the first worm to rotate between the two conveyor belts, so that the silicon wafer can be turned over, and the other side which cannot be cleaned can be cleaned;

the first worm drives the second worm wheel to rotate, the second worm wheel drives the first worm wheel to rotate through the connecting rod and drives the second worm to rotate, the two pulling rods can be close to each other after the second worm rotates, the pulling rods can drive the two soft rubber clamps to close to each other, the positions of the silicon wafers are corrected on the two conveying belts, and the other side of the silicon wafers can be conveniently cleaned;

the utility model discloses simple structure can wash the top of silicon wafer through rotatory brush, can be lifted and turn-over when the silicon wafer removes the top to the pole of lifting, still can correct through two hou mian flexible glue anchor clamps to can wash the bottom of silicon wafer through the rotatory brush of second, easy operation, convenient to use.

Drawings

FIG. 1 is a front view of a high efficiency cleaning device for silicon wafers according to the present invention;

FIG. 2 is a top view of a conveyor belt of the high-efficiency cleaning device for silicon wafers according to the present invention;

FIG. 3 is a top view of the screw thread and screw rod engagement of the high-efficiency cleaning device for silicon wafers according to the present invention;

FIG. 4 is an enlarged schematic view of the structure A of the high-efficiency cleaning device for silicon wafers according to the present invention;

FIG. 5 is an enlarged schematic view of the structure B of the high-efficiency cleaning device for silicon wafers according to the present invention;

fig. 6 is an enlarged schematic view of a structure C of the high-efficiency silicon wafer cleaning device according to the present invention.

In the figure: the device comprises a shell 1, a soft rubber clamp 2, a landslide 3, a wheel frame 4, a first worm wheel 5, a lifting rod 6, a second worm wheel 7, a base 8, a belt 9, a rotating shaft 10, a first conveying belt 11, a flow guide slope 12, a handle 13, a wafer door 14, a first motor 15, a rotating door 16, a rotating brush 17, a water gun 18, a telescopic rod 19, a second motor 20, a first worm 21, a second conveying belt 22, a bolt frame 23, a bolt 24, a pulling rod 25, a connecting rod 26 and a second worm 27.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Referring to fig. 1-6, a silicon wafer high-efficiency cleaning device comprises a housing 1, a second motor 20 is fixedly installed on one side of the housing 1, an output shaft of the second motor 20 extends into the housing 1, a first worm 21 is fixedly installed on an output shaft of the second motor 20, a lifting rod 6 is fixedly installed on one side of the first worm 21, a second worm wheel 7 is engaged on one side of the first worm 21, a connecting rod 26 is fixedly installed on the top of the second worm wheel 7, a first worm wheel 5 is arranged in the housing 1, the connecting rod 26 penetrates through the first worm wheel 5 and is fixedly connected with the first worm wheel 5, the connecting rod 26 is rotatably connected to the inner wall of the top of the housing 1, a second worm 27 is engaged on the first worm wheel 5, pulling rods 25 are slidably connected to both sides of the second worm 27, telescopic rods 19 are fixedly installed on both ends of the two pulling rods 25, the telescopic rods 19 are fixedly installed on the inner wall, a flexible glue clamp 2 is connected on a pulling rod 25 in a sliding manner, threads are arranged in the flexible glue clamp 2, a bolt frame 23 is fixedly arranged at the top of one side of the pulling rod 25, a bolt 24 is connected on the bolt frame 23 in a rotating manner, the bolt 24 extends into the flexible glue clamp 2 and is in threaded connection with the threads in the flexible glue clamp 2, a rotating shaft 10 is connected on the inner wall of a shell 1 in a rotating manner, a base 8 is fixedly arranged at the bottom of the shell 1, a rotating wheel frame 4 is fixedly arranged at one side of the top of the base 8, a rotating shaft 10 which is the same as the shell 1 is connected on the rotating wheel frame 4 in a rotating manner, a first conveying belt 11 and a second conveying belt 22 are simultaneously sleeved on the two rotating shafts 10, a belt 9 is sleeved on an output shaft of a second motor 20, one end of the belt 9 is sleeved on the rotating shaft 10, a rotating brush 17 is fixedly arranged on the inner wall of the top of the shell 1, the soft rubber clamp 2 is respectively connected with the first conveyor belt 11 and the second conveyor belt 22 in a sliding manner; a wafer door 14 is rotatably connected to the shell 1, and a handle 13 is fixedly arranged at the top of the wafer door 14 and used for opening the shell 1 and putting a silicon wafer into the shell 1; a first motor 15 is fixedly installed at the top of the shell 1, an output shaft of the first motor 15 extends into the shell 1, a rotating door 16 is fixedly installed on the output shaft of the first motor 15, and the rotating door 16 is in sliding connection with the inner wall of the top of the shell 1 and is used for conveying the barrier silicon wafers and the silicon wafers into the shell one by one; a flow guide slope 12 is fixedly arranged on the inner wall of the shell 1, and a plurality of C-shaped grooves are formed in the second conveyor belt 22 and used for guiding the silicon wafers to enter the C-shaped grooves in the second conveyor belt 22; a slide slope 3 is fixedly arranged on one side of the top of the base 8 and used for separating the silicon wafer from the cleaning device.

In the utility model, when the silicon wafer is needed to be cleaned, the wafer door 14 is firstly opened, the silicon wafer is put into the shell 1 through the wafer door 14, and is blocked by the revolving door 16, at this time, the first motor 15 and the second motor 20 can be started, when the first motor 15 is started, the revolving door 16 is driven to rotate, at this time, the silicon wafer slides into the C-shaped groove on the second conveyor belt 22 through the diversion slope 12, when the second motor 20 is started, the first conveyor belt 11 and the second conveyor belt 22 are driven to work through the belt 9, when the silicon wafer moves to the first rotating brush 17, the rotating brush 17 can clean the top of the silicon wafer, after the cleaning is completed, the silicon wafer can move to the top of the first worm 21, at this time, the first worm 21 is driven by the second motor 20 and drives the lifting rod 6 to rotate between the first conveyor belt 11 and the second conveyor belt 22, when the silicon wafer is rotated to be in contact with the silicon wafer, the silicon wafer is lifted upwards, when the lifting rod 6 is rotated to be in a vertical state, the silicon wafer is turned over, and then the silicon wafer moves between the two soft rubber clamps 2, the silicon wafer is pushed to the middle of the first conveyor belt 11 and the second conveyor belt 22 by the two soft rubber clamps 2 and enters the C-shaped groove on the second conveyor belt 22 again, when the first worm 5 rotates, the second worm wheel 7 is driven to rotate, the second worm wheel 7 drives the connecting rod 26 to rotate on the inner wall of the shell 1, at the moment, the first worm wheel 5 is driven to rotate and drives the second worm 27 to rotate, when the second worm 27 rotates, the circular bulges at the two sides of the second worm 27 move in the sliding groove on the pulling rod 25 and pull the two pulling rods 25 to approach each other, the pulling rod 25 drives the two soft rubber clamps 2 to approach each other, at the moment, the effect of pushing the silicon wafer on the two conveyor belts is achieved, simultaneously can also move the interval between two flexible glue anchor clamps 2 of pole 25 internal rotation adjustment through the pulling for promote the silicon wafer of different size of a dimension, silicon wafer continues to remove after correcting the completion, will wash the bottom of silicon wafer when second rotatory brush 17, easy operation, convenient to use.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. The high-efficiency silicon wafer cleaning device comprises a shell (1) and is characterized in that a second motor (20) is fixedly mounted on one side of the shell (1), an output shaft of the second motor (20) extends into the shell (1), a first worm (21) is fixedly mounted on the output shaft of the second motor (20), a lifting rod (6) is fixedly mounted on one side of the first worm (21), a second worm wheel (7) is meshed on one side of the first worm (21), a connecting rod (26) is fixedly mounted at the top of the second worm wheel (7), a first worm wheel (5) is arranged in the shell (1), the connecting rod (26) penetrates through the first worm wheel (5) and is fixedly connected with the first worm wheel (5), the connecting rod (26) is rotatably connected to the inner wall of the top of the shell (1), a second worm (27) is meshed on the first worm wheel (5), the two sides of the second worm (27) are both connected with pulling rods (25) in a sliding manner, telescopic rods (19) are both fixedly mounted at two ends of the two pulling rods (25), the telescopic rods (19) are fixedly mounted on the inner wall of the shell (1), the pulling rods (25) are connected with soft rubber clamps (2) in a sliding manner, threads are arranged in the soft rubber clamps (2), one side top of each pulling rod (25) is fixedly provided with a bolt frame (23), each bolt frame (23) is connected with a bolt (24) in a rotating manner, each bolt (24) extends into each soft rubber clamp (2) and is connected with threads in each soft rubber clamp (2), the inner wall of the shell (1) is connected with a rotating shaft (10) in a rotating manner, the bottom of the shell (1) is fixedly provided with a base (8), and one side of the top of each base (8) is fixedly provided with a rotating wheel frame (4), the utility model discloses a flexible glue conveyor belt, including shell (1), runner frame (4), cover simultaneously on two pivot (10) and be connected with pivot (10) the same with shell (1), the cover is equipped with first conveyer belt (11) and second conveyer belt (22) on the output shaft of second motor (20), a pot head of belt (9) is established on pivot (10), fixed mounting has rotatory brush (17) on the top inner wall of shell (1), fixed mounting has a plurality of squirt (18) on rotatory brush (17), rotatory brush (17) and first conveyer belt (11) and second conveyer belt (22) sliding connection, flexible glue anchor clamps (2) respectively with first conveyer belt (11) and second conveyer belt (22) sliding connection.

2. The silicon wafer high-efficiency cleaning device according to the claim 1, characterized in that a wafer door (14) is rotatably connected on the housing (1), and a handle (13) is fixedly installed on the top of the wafer door (14).

3. The silicon wafer high-efficiency cleaning device according to the claim 1, characterized in that the first motor (15) is fixedly installed on the top of the casing (1), the output shaft of the first motor (15) extends into the casing (1), the revolving door (16) is fixedly installed on the output shaft of the first motor (15), and the revolving door (16) is connected with the inner wall of the top of the casing (1) in a sliding way.

4. The silicon wafer high-efficiency cleaning device according to claim 1, characterized in that a flow guiding slope (12) is fixedly arranged on the inner wall of the shell (1), and a plurality of C-shaped grooves are formed on the second conveyor belt (22).

5. A silicon wafer high efficiency cleaning device according to claim 1, characterized in that a slide slope (3) is fixedly installed on one side of the top of said base (8).