CN213302648U - Precise adjusting device with finely adjustable reflection oblique angle - Google Patents
Precise adjusting device with finely adjustable reflection oblique angle Download PDFInfo
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- CN213302648U CN213302648U CN202022451805.1U CN202022451805U CN213302648U CN 213302648 U CN213302648 U CN 213302648U CN 202022451805 U CN202022451805 U CN 202022451805U CN 213302648 U CN213302648 U CN 213302648U
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Abstract
The utility model discloses a precision adjusting device with a reflection oblique angle capable of being finely adjusted, an angle transmission mechanism of the precision adjusting device comprises an adjusting arm, an oblique angle shaft and a reflector support; one end of the oblique angle shaft is fixedly provided with an adjusting arm, and the other end of the oblique angle shaft is fixedly provided with a reflector support; the fine adjustment mechanism comprises an adjustment stud and an adjustment support plate; the adjusting support plate is fixedly arranged on the frame; the adjusting stud is in screw fit with the adjusting support plate, and the front end part of the adjusting stud extends out of the adjusting support plate and is abutted with the adjusting arm; the axial positioning mechanism is opposite to the fine adjustment mechanism and can be rotatably arranged on the rack; the anti-shaking mechanism comprises an extension spring and fasteners fixedly connected to two ends of the extension spring, wherein one fastener is fixedly installed on the adjusting arm, and the other fastener is fixedly installed on the adjusting support plate. The precise adjusting device can precisely adjust the incident angle of the light and has the characteristics of simple structure and stable adjustment.
Description
Technical Field
The utility model relates to a light path fine adjustment technical field, concretely relates to accurate adjusting device that reflection oblique angle can be finely tuned.
Background
In a precision optical instrument, the phenomenon that a system needs to be slightly adjusted due to light angle errors caused by factors such as design, manufacture and debugging is very common. For example, in a michelson interferometer, the incidence angles of two beams of light are precisely adjusted, so that the two beams of light form an effective optical path difference, thereby generating an interference phenomenon. Due to the straight-line propagation characteristic of light, small deviations in the incident angle of the light may cause the light to form large deviations on the receiver. Therefore, the incident angle of light must be precisely adjusted to solve the problem of slight deviation of the incident angle.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a but accurate adjusting device that reflection oblique angle was finely tuned can the accurate adjustment light incident angle, makes the regulation precision of light incident angle reach 0.004 degree (1.44 angular seconds) to have simple structure and adjust stable characteristics.
The utility model adopts the following specific technical proposal:
a precise adjusting device with a finely adjustable reflection oblique angle comprises a frame, an angle transmission mechanism, a fine adjustment mechanism, an axial positioning mechanism and an anti-shaking mechanism;
the angle transmission mechanism comprises an adjusting arm, an oblique angle shaft and a reflector support; one end of the oblique angle shaft is fixedly provided with the adjusting arm, and the other end of the oblique angle shaft is fixedly provided with the reflector support; the bevel shaft penetrates through the through hole of the frame and is in clearance fit with the through hole;
the fine adjustment mechanism comprises an adjusting stud and an adjusting support plate; the adjusting support plate is fixedly arranged on the rack; the adjusting stud is in screw fit with the adjusting support plate, and the front end part of the adjusting stud extends out of the adjusting support plate and is abutted with the adjusting arm to drive the adjusting arm to swing;
the axial positioning mechanism is opposite to the fine adjustment mechanism and can be rotatably arranged on the rack, and one end, facing the fine adjustment mechanism, of the axial positioning mechanism is fixedly connected to the reflector support and used for axially positioning the reflector support;
the anti-shaking mechanism comprises an extension spring and fasteners fixedly connected to two ends of the extension spring, wherein one fastener is fixedly installed on the adjusting arm, and the other fastener is fixedly installed on the adjusting support plate.
Furthermore, the fine adjustment mechanism also comprises a top bead fixedly arranged at the front end part of the adjusting stud;
the adjusting arm is provided with a sliding groove on the surface of one side facing the adjusting stud;
the top bead is in sliding fit with the sliding groove.
Furthermore, the fine adjustment mechanism further comprises a locking nut in threaded fit with the adjusting stud, and the locking nut is used for locking the adjusting stud on the adjusting support plate.
Furthermore, the axial positioning mechanism comprises a supporting rotating shaft, a fixing nut and a shaft sleeve;
the supporting rotating shaft is arranged on the rack in a rotating fit manner, one end of the supporting rotating shaft is fixedly connected with the reflector support, and the other end of the supporting rotating shaft is in threaded fit with the fixing nut;
the supporting rotating shaft is provided with a shaft shoulder at one side facing the reflector support, and the shaft shoulders are respectively sleeved with one shaft sleeve between the machine frame and between the fixing nuts.
Further, the bushing includes a first bushing and a second bushing;
the first shaft sleeve is positioned between the shaft shoulder and the frame;
the second shaft sleeve is positioned between the rack and the fixing nut.
Further, the length of the first shaft sleeve is 10 mm;
the length of the second shaft sleeve is 5 mm.
Still further, the bearing further comprises a washer arranged between the fixing nut and the second shaft sleeve.
Still further, the fastener is a set screw.
Further, the adjusting support plate is mounted to the frame by a fixing screw.
Still further, the utility model also comprises an oblique angle reflector fixedly arranged on the reflector support.
Has the advantages that:
the utility model discloses a precision adjusting device includes frame, angle drive mechanism, fine-tuning, axial positioning mechanism and anti-shake mechanism, fine-tuning, angle drive mechanism and axial positioning mechanism install in the frame, anti-shake mechanism is used for keeping fine-tuning and angle drive mechanism's stable contact, the speculum support is installed on the bevel shaft of angle drive mechanism, convert the rotation of adjusting stud into the rotation of bevel shaft in the angle drive mechanism through fine-tuning, thereby drive the angular adjustment of speculum support; when the adjusting stud rotates for one week, the adjusting stud can generate displacement of a thread pitch in the axial direction, when the thread on the adjusting stud is a fine thread of M4, the thread pitch is 0.5mm, and calculation shows that the displacement generated by the adjusting stud rotating for 1 degree is 0.0014mm at the moment and is adjusted by micron-level precision, so that the light incidence angle can be precisely adjusted by adopting the precise adjusting device, the adjusting precision of the light incidence angle reaches 0.004 degree (1.44 arc seconds), and the device has the characteristics of simple structure and stable adjustment.
The precision adjusting device can be widely applied to structures requiring fine adjustment of incident light angles and can also be applied to other optical-mechanical structures requiring fine adjustment of light angles.
Drawings
Fig. 1 is a front view of the precision adjusting device of the present invention;
FIG. 2 is a top view of the fine adjustment apparatus of FIG. 1;
FIG. 3 is a schematic view of the fine adjustment mechanism of the fine adjustment apparatus of FIG. 1;
FIG. 4 is a schematic view of the angle driving mechanism of the fine adjustment apparatus of FIG. 1;
FIG. 5 is a schematic structural diagram of an anti-shake mechanism of the fine adjustment apparatus of FIG. 1;
fig. 6 is a schematic structural diagram of an axial positioning mechanism of the fine adjustment device in fig. 1.
Wherein, 1-frame, 2-angle transmission mechanism, 3-fine adjustment mechanism, 4-axial positioning mechanism, 5-anti-shaking mechanism, 21-adjusting arm, 22-oblique angle shaft, 23-reflector support, 24-sliding chute, 25-oblique angle reflector, 26-screw, 31-adjusting stud, 32-adjusting support plate, 33-top bead, 34-locking nut, 35-fixing screw, 41-supporting rotating shaft, 42-fixing nut, 43-first shaft sleeve, 44-second shaft sleeve, 45-shaft shoulder, 46-washer, 51-extension spring and 52-fastener
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings by way of examples.
As shown in the structure of fig. 1 and 2, the utility model provides a fine adjustment device with a reflection bevel angle capable of being finely adjusted, which comprises a frame 1, an angle transmission mechanism 2, a fine adjustment mechanism 3, an axial positioning mechanism 4 and an anti-shaking mechanism 5; the frame 1 is the foundation of the whole precision adjusting device; the angle transmission mechanism 2, the fine adjustment mechanism 3 and the axial positioning mechanism 4 are all arranged on the frame 1;
as shown in the structure of fig. 4, the angle transmission mechanism 2 includes an adjusting arm 21, a bevel shaft 22 and a mirror support 23; one end of the oblique angle shaft 22 is fixedly provided with an adjusting arm 21, and the other end is fixedly provided with a reflector support 23; the bevel shaft 22 is arranged in the through hole of the frame 1 in a penetrating way and is in clearance fit with the through hole; the bevel shaft 22 is positioned between the adjusting arm 21 and the reflector support 23, the bevel shaft 22 and the adjusting arm 21 can be fixedly connected through a screw 26, and the bevel shaft 22 and the reflector support 23 can also be fixedly connected through a screw 26;
as shown in the structure of fig. 3, the fine adjustment mechanism 3 includes an adjustment stud 31 and an adjustment support plate 32; the adjusting support plate 32 is fixedly arranged on the frame 1, and the adjusting support plate 32 can be arranged on the frame 1 through a fixing screw 35; the adjusting stud 31 is in screw fit with the adjusting support plate 32, and the front end of the adjusting stud 31 extends out of the adjusting support plate 32 and abuts against the adjusting arm 21 to drive the adjusting arm 21 to swing; because the adjusting support plate 32 of the fine adjustment mechanism 3 is fixedly arranged on the frame 1, when the adjusting stud 31 and the adjusting support plate 32 are manually rotated to generate relative movement, the adjusting stud 31 can be axially displaced while rotating; the bevel shaft 22 in the angle transmission mechanism 2 may be designed with planes at both ends, wherein the normal direction of one end plane is parallel to the reflection plane of the bevel reflector 25, and the normal direction of the other end plane is in accordance with the axial direction of the adjusting stud 31; because the axial direction of the adjusting stud 31 can be the horizontal direction, the initial inclination angle of the bevel reflector 25 can be determined by determining the included angle value of two planes at two ends of the bevel shaft 22 during design;
as shown in the structure of fig. 6, the axial positioning mechanism 4 is opposite to the fine adjustment mechanism 3 and can be rotatably mounted on the frame 1, and one end facing the fine adjustment mechanism 3 is fixedly connected to the reflector holder 23 for axially positioning the reflector holder 23; an oblique angle reflector 25 is fixedly arranged on the reflector support 23;
as shown in the structure of fig. 5, the anti-shake mechanism 5 includes an extension spring 51 and fasteners 52 fixedly connected to both ends of the extension spring 51, wherein one fastener 52 is fixedly installed on the adjusting arm 21, and the other fastener 52 is fixedly installed on the adjusting support plate 32; the fastener 52 may be a set screw. The extension spring 51 is in an extension state, the extension spring 51 can generate a pulling force between the two fastening pieces 52, and the fastening pieces 52 transmit the pulling force to the adjusting arm 21 as the adjusting support plate 32 is fixed on the machine frame 1; therefore, the tension generated by the tension spring 51 forces the adjusting arm 21 in the angle drive mechanism 2 to be in a state of being in close contact with the adjusting stud 31 or the top ball 33 in the fine adjustment mechanism 3, so that the gap between the adjusting stud 31 or the top ball 33 and the adjusting arm 21 is eliminated, and the slight swing of the adjusting arm 21 caused by vibration can be eliminated;
in the above-mentioned precision adjusting device, because the adjusting stud 31 in the fine adjustment structure is screw-fitted with the adjusting support plate 32, linear motion displacement can be input by rotating the adjusting stud 31; the front end part of the adjusting stud 31 extends out of the adjusting support plate 32 and then is abutted against the adjusting arm 21, the oblique shaft 22 of the angle transmission mechanism 2 is in clearance fit with the rack 1, and the rotary motion of the adjusting stud 31 is converted into the micro-swing motion of the adjusting arm 21 through the angle transmission mechanism 2; because the reflector support 23 is fixedly arranged on the oblique angle shaft 22, the adjusting arm 21 drives the oblique angle shaft 22 to rotate in the swinging process, thereby realizing the synchronous rotation of the reflector support 23 and the fine adjustment of the reflection angle; the extension spring 51 of the anti-shake mechanism 5 is in a stretched state, and the fasteners 52 at the two ends are respectively connected to the adjusting arm 21 and the adjusting support plate 32, so that the adjusting stud 31 and the adjusting arm 21 are always kept in a contact state; the axial positioning mechanism 4 limits the axial direction of the reflector support 23, limits the movement of the reflector support 23 in the axial direction, and can avoid the influence on the emergent light due to the axial movement of the reflector support 23.
Taking the thread of the adjusting stud 31 as an example of a fine thread of M4, when the adjusting stud 31 adopts a fine thread of M4, the thread pitch is 0.5mm, and when the adjusting stud 31 rotates for one circle, the adjusting stud 31 can generate a displacement of the thread pitch in the axial direction, and it can be known through calculation that the displacement generated by every 1 degree rotation of the adjusting stud 31 is 0.0014mm, which is an adjustment with micron-scale precision, therefore, the light incidence angle can be precisely adjusted by adopting the precise adjusting device, so that the adjustment precision of the light incidence angle reaches 0.004 degree (1.44 angular seconds), and the device has the characteristics of simple structure and stable adjustment.
In a specific embodiment, as shown in the structure of fig. 3, the fine adjustment mechanism 3 further includes a top bead 33 fixedly mounted on the front end of the adjustment stud 31; the adjusting arm 21 is provided with a sliding groove 24 on one side surface facing the adjusting stud 31; the top bead 33 is in sliding engagement with the runner 24.
Since the adjusting support plate 32 is fixed on the frame 1, when the adjusting stud 31 rotates relative to the adjusting support plate 32, the adjusting stud 31 will move forward or backward; when the adjusting stud 31 is rotated clockwise, the top bead 33 inlaid at the front end of the adjusting stud 31 generates forward displacement; when the adjusting stud 31 is rotated counterclockwise, the top bead 33 fitted to the front end of the adjusting stud 31 is displaced rearward. Because the adjusting arm 21 is provided with the sliding groove 24, the top bead 33 can play a role of preventing torsion after being embedded with the sliding groove 24.
As shown in the structure of fig. 3, the fine adjustment mechanism 3 further includes a lock nut 34 threadedly engaged with the adjustment stud 31, and the lock nut 34 is used for locking the adjustment stud 31 to the adjustment support plate 32. After the adjusting stud 31 is adjusted to a desired angle, the locking nut 34 can be rotated to tightly abut against the front end surface of the adjusting support plate 32, so as to stop the adjusting stud 31.
Further, the axial positioning mechanism 4 includes a support rotating shaft 41, a fixing nut 42, and a shaft sleeve; the supporting rotating shaft 41 is arranged on the frame 1 in a rotating fit manner, one end of the supporting rotating shaft is fixedly connected with the reflector support 23, and the other end of the supporting rotating shaft is in threaded fit with the fixing nut 42; a shaft shoulder 45 is provided on the side of the support shaft 41 facing the mirror support 23, and a sleeve is respectively fitted on the support shaft 41 between the shaft shoulder 45 and the frame 1 and between the frame 1 and the fixing nut 42. The axial positioning mechanism 4 further includes a washer 46 disposed between the fixing nut 42 and the second bushing 44.
Further, the bushing includes a first bushing 43 and a second bushing 44; the first shaft sleeve 43 is positioned between the shaft shoulder 45 and the frame 1; the second shaft sleeve 44 is positioned between the frame 1 and the fixing nut 42; the length of the first bushing 43 is 10 mm; the second bushing 44 has a length of 5 mm. When the supporting rotating shaft 41 moves towards the left side of the page of fig. 2, the frame 1 prevents the shaft shoulder 45 from moving towards the left through the first shaft sleeve 43, so that the effect of limiting the supporting rotating shaft 41 to move towards the left is achieved; when the support rotation shaft 41 moves in the right direction of the page of fig. 2, the fixing nut 42 fixed to the shaft end restricts the support rotation shaft 41 from moving rightward by the washer 46 and the second bushing 44.
In addition to the above-described various embodiments, as shown in the structure of fig. 4, the fine adjustment device further includes a bevel reflector 25 fixedly attached to the reflector holder 23, and the bevel reflector 25 is fixedly bonded to the reflector holder 23 by an adhesive.
In the use process of the precision adjusting device, the adjusting arm 21 in the angle transmission mechanism 2 is driven by the displacement of the adjusting stud 31 or the top ball 33 in the fine adjusting mechanism 3 to generate a micro-angle swing, and the swing is transmitted to the reflector support 23 through the oblique angle shaft 22, so that the reflector support 23 generates a micro-angle rotation. Since the bevel mirror 25 is fixed to the mirror support 23 by an adhesive, the bevel mirror 25 follows the mirror support 23 to produce a synchronized action. According to the law of reflection of light, the reflected light ray and the incident light ray are on the same plane with the normal; the reflected light and the incident light are distributed on two sides of the normal; the angle of reflection is equal to the angle of incidence. When the angle of the incident light is determined, the direction of the reflecting plane is changed, and the emergent angle of the reflected light can be changed. Therefore, when the inclination angle of the oblique reflector 25 is adjusted finely, the emergent angle of the reflected light can be adjusted finely, thereby achieving the purpose of finely adjusting the emergent angle of the light.
In summary, the above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A precise adjusting device with a finely adjustable reflection oblique angle is characterized by comprising a frame, an angle transmission mechanism, a fine adjustment mechanism, an axial positioning mechanism and an anti-shaking mechanism;
the angle transmission mechanism comprises an adjusting arm, an oblique angle shaft and a reflector support; one end of the oblique angle shaft is fixedly provided with the adjusting arm, and the other end of the oblique angle shaft is fixedly provided with the reflector support; the bevel shaft penetrates through the through hole of the frame and is in clearance fit with the through hole;
the fine adjustment mechanism comprises an adjusting stud and an adjusting support plate; the adjusting support plate is fixedly arranged on the rack; the adjusting stud is in screw fit with the adjusting support plate, and the front end part of the adjusting stud extends out of the adjusting support plate and is abutted with the adjusting arm to drive the adjusting arm to swing;
the axial positioning mechanism is opposite to the fine adjustment mechanism and can be rotatably arranged on the rack, and one end, facing the fine adjustment mechanism, of the axial positioning mechanism is fixedly connected to the reflector support and used for axially positioning the reflector support;
the anti-shaking mechanism comprises an extension spring and fasteners fixedly connected to two ends of the extension spring, wherein one fastener is fixedly installed on the adjusting arm, and the other fastener is fixedly installed on the adjusting support plate.
2. The fine adjustment apparatus of claim 1, wherein the fine adjustment mechanism further comprises a knob fixedly mounted to a front end of the adjustment stud;
the adjusting arm is provided with a sliding groove on the surface of one side facing the adjusting stud;
the top bead is in sliding fit with the sliding groove.
3. The fine adjustment apparatus of claim 2, wherein the fine adjustment mechanism further comprises a lock nut threadedly engaged with the adjustment stud for locking the adjustment stud to the adjustment support plate.
4. The fine adjustment apparatus of claim 1, wherein the axial positioning mechanism comprises a support shaft, a fixing nut, and a bushing;
the supporting rotating shaft is arranged on the rack in a rotating fit manner, one end of the supporting rotating shaft is fixedly connected with the reflector support, and the other end of the supporting rotating shaft is in threaded fit with the fixing nut;
the supporting rotating shaft is provided with a shaft shoulder at one side facing the reflector support, and the shaft shoulders are respectively sleeved with one shaft sleeve between the machine frame and between the fixing nuts.
5. The fine adjustment apparatus of claim 4, wherein the bushing comprises a first bushing and a second bushing;
the first shaft sleeve is positioned between the shaft shoulder and the frame;
the second shaft sleeve is positioned between the rack and the fixing nut.
6. A fine adjustment device according to claim 5, characterized in that the first sleeve has a length of 10 mm;
the length of the second shaft sleeve is 5 mm.
7. The fine adjustment apparatus of claim 6, further comprising a washer disposed between the fixing nut and the second bushing.
8. A fine adjustment device according to any of claims 1 to 7, wherein the fastener is a set screw.
9. A fine adjustment device according to any of claims 1-7, characterized in that the adjustment support plate is mounted to the machine frame by means of a fixing screw.
10. A fine adjustment device according to any of claims 1-7, further comprising a corner reflector fixedly mounted to the reflector support.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022451805.1U CN213302648U (en) | 2020-10-29 | 2020-10-29 | Precise adjusting device with finely adjustable reflection oblique angle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022451805.1U CN213302648U (en) | 2020-10-29 | 2020-10-29 | Precise adjusting device with finely adjustable reflection oblique angle |
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| Publication Number | Publication Date |
|---|---|
| CN213302648U true CN213302648U (en) | 2021-05-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202022451805.1U Active CN213302648U (en) | 2020-10-29 | 2020-10-29 | Precise adjusting device with finely adjustable reflection oblique angle |
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| CN (1) | CN213302648U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117233899A (en) * | 2023-11-14 | 2023-12-15 | 清华大学 | Optical path adjusting device and interference lithography equipment |
-
2020
- 2020-10-29 CN CN202022451805.1U patent/CN213302648U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117233899A (en) * | 2023-11-14 | 2023-12-15 | 清华大学 | Optical path adjusting device and interference lithography equipment |
| CN117233899B (en) * | 2023-11-14 | 2024-01-30 | 清华大学 | Optical path adjusting device and interference lithography equipment |
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