CN213264567U - Chip carrier plate transmission device and chip detection equipment - Google Patents

Chip carrier plate transmission device and chip detection equipment Download PDF

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Publication number
CN213264567U
CN213264567U CN202021980475.9U CN202021980475U CN213264567U CN 213264567 U CN213264567 U CN 213264567U CN 202021980475 U CN202021980475 U CN 202021980475U CN 213264567 U CN213264567 U CN 213264567U
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China
Prior art keywords
clamping
chip carrier
carrier plate
driving mechanism
chip
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CN202021980475.9U
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Chinese (zh)
Inventor
李英坤
赵鑫
张太鹏
陈龙
姜豪
刘风雷
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Zhejiang Crystal Optech Co Ltd
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Zhejiang Crystal Optech Co Ltd
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Abstract

The utility model provides a chip support plate transmission device and chip detection equipment relates to chip detection technology field, chip support plate transmission device includes: the two rails are arranged in parallel and at intervals and used for supporting the chip carrier plate; the chip carrier plate transmission device also comprises a clamping mechanism and a transverse driving mechanism, wherein the transverse driving mechanism is used for driving the clamping mechanism to move along the direction parallel to the track; a clamping mechanism is arranged on the side surface of at least one track, and comprises a first clamping claw and a second clamping claw which can be opened and closed, and a vertical driving mechanism; the second clamping claw comprises a second clamping part positioned between the two tracks; the first clamping claw comprises an avoiding groove which is positioned on the track and is buckled on the track, the avoiding groove comprises two groove walls which are arranged at intervals, and the groove wall positioned between the two tracks is aligned with the second clamping part to form a first clamping part; the vertical driving mechanism is used for driving the first clamping claw and the second clamping claw to open and close.

Description

Chip carrier plate transmission device and chip detection equipment
Technical Field
The utility model belongs to the technical field of the chip testing technique and specifically relates to a chip carrier plate transmission device and chip testing equipment are related to.
Background
The chip can be used for detecting some defects before leaving the factory, corresponding treatment can be carried out on the chip after the chip is found in time, and waste products can be avoided.
The existing method is realized in a manual screening mode, a worker takes out chips from a cartridge clip, each chip is observed under the assistance of a microscope, defects are detected one by one, qualified products are left, and unqualified products are returned to corresponding stations for re-processing.
The existing detection method needs manual operation to take and place the chip under a microscope, then observation is carried out under the microscope, secondary pollution is easily caused to the chip in the process of transferring the chip, the detection quality is difficult to guarantee, and the manual detection efficiency is very low. Moreover, due to the influence of the equipment space and the field environment, many technical methods and means cannot meet the purpose of moving the chip in a narrow space.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a chip support plate transmission device and chip check out test set to in having alleviated current detection method, the process of shifting the chip causes secondary pollution to the chip very easily, is difficult to guarantee detection quality and artifical detection efficiency is very low. In addition, due to the influence of the equipment space and the field environment, many technical methods and means cannot meet the technical problem of realizing the purpose of chip movement in a narrow space.
In a first aspect, an embodiment of the present invention provides a chip carrier plate transmission device, chip carrier plate transmission device includes: the chip carrier plate comprises two rails which are arranged in parallel and at intervals and are used for supporting the chip carrier plate;
the chip carrier plate transmission device also comprises a clamping mechanism and a transverse driving mechanism, wherein the transverse driving mechanism is used for driving the clamping mechanism to move along the direction parallel to the track;
a clamping mechanism is arranged on the side surface of at least one rail and comprises a first clamping claw and a second clamping claw which can be opened and closed, and a vertical driving mechanism; the second clamping claw comprises a second clamping part positioned between the two tracks; the first clamping claw comprises an avoiding groove, the avoiding groove is buckled on the rails and comprises two groove walls which are arranged at intervals, and the groove wall positioned between the two rails is aligned with the second clamping part to form a first clamping part; the vertical driving mechanism is used for driving the first clamping claw and the second clamping claw to open and close.
Further, the vertical driving mechanism is connected with the first clamping jaw or the second clamping jaw and used for driving one of the first clamping jaw or the second clamping jaw to move towards the other clamping jaw.
Furthermore, the vertical driving mechanism is respectively connected with the first clamping jaw and the second clamping jaw and used for driving the first clamping jaw and the second clamping jaw to move relatively.
Further, the vertical driving mechanism comprises a telescopic cylinder, a first fixed seat, a sliding block, a linkage arm, a second fixed seat and a transmission gear;
the sliding block is connected with the first fixing seat in a sliding mode along the opening and closing direction of the first clamping claw and the second clamping claw, the first clamping claw is connected with the sliding block, one end of the linkage arm is connected with the sliding block, the other end of the linkage arm is provided with a first rack portion, and the first rack portion is meshed with the transmission gear;
the transmission gear is rotationally connected to the second fixing seat, a second rack part is arranged on the side wall of the second clamping claw, the second rack part is meshed with the transmission gear, and the first rack part and the second rack part are respectively positioned on two opposite sides of the transmission gear; the second clamping claw is connected with the second fixed seat in a sliding manner along the opening and closing direction of the first clamping claw and the second clamping claw;
the telescopic cylinder is fixed on the first fixing seat, and the movable end of the telescopic cylinder is connected with the linkage arm and used for driving the linkage arm to move along the opening and closing directions of the first clamping jaw and the second clamping jaw.
Furthermore, first fixing base, sliding block and telescoping cylinder are located orbital side, second fixing base, drive gear are located orbital below.
Furthermore, all be provided with the direction inclined plane on the face that first clamping part and second clamping part faced each other, the direction inclined plane is located the head end of first clamping part and second clamping part, along the transmission direction of chip carrier plate, two distance between the direction inclined plane reduces gradually.
Further, the transverse driving mechanism is a lead screw motor module.
Further, the lead screw motor module comprises a lead screw, and the length of the lead screw is greater than or equal to that of the track.
Further, the rail is provided with a preparation position, a test position and a leaving position, a first proximity switch is arranged at the tail end of the preparation position, a second proximity switch is arranged at the tail end of the test position, a third proximity switch is arranged at the leaving position, and the first proximity switch, the second proximity switch and the third proximity switch are all electrically connected with the transverse driving mechanism.
In a second aspect, an embodiment of the present invention provides a chip detection apparatus, including the above chip carrier board transmission device.
The embodiment of the utility model provides a chip support plate transmission device includes: the chip carrier plate comprises two rails which are arranged in parallel and at intervals and are used for supporting the chip carrier plate; the chip carrier plate transmission device also comprises a clamping mechanism and a transverse driving mechanism, wherein the transverse driving mechanism is used for driving the clamping mechanism to move along the direction parallel to the track; a clamping mechanism is arranged on the side surface of at least one rail and comprises a first clamping claw and a second clamping claw which can be opened and closed, and a vertical driving mechanism; the second clamping claw comprises a second clamping part positioned between the two tracks; the first clamping claw comprises an avoiding groove, the avoiding groove is buckled on the rails and comprises two groove walls which are arranged at intervals, and the groove wall positioned between the two rails is aligned with the second clamping part to form a first clamping part; the vertical driving mechanism is used for driving the first clamping claw and the second clamping claw to open and close. The chip carrier plate is placed on the rail after being taken out, the clamping mechanism on the rail can clamp the chip carrier plate, then the transverse driving mechanism can drive the chip carrier plate to move along the length direction of the rail and can move to the detection position, or drive the detected chip carrier plate to reach the leaving position, and in the conveying process, the chip carrier plate is not manually conveyed, so that the artificial pollution to the chip is avoided, and the detection quality and the detection efficiency are improved. And the structure that fixture's first clamping part and second clamping part formed wraps up in orbital outside, has reduced fixture's space that occupies, through reasonable structural design, makes product compact structure, and the space occupies for a short time.
The embodiment of the utility model provides a chip testing equipment includes foretell chip carrier plate transmission device, because the utility model provides a chip testing equipment has quoted foretell chip carrier plate transmission device, so, the embodiment of the utility model provides a chip testing equipment also possesses chip carrier plate transmission device's advantage.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a top view of a chip carrier board conveying apparatus according to an embodiment of the present invention;
fig. 2 is a schematic view of a clamping mechanism of a chip carrier board conveying device according to an embodiment of the present invention;
fig. 3 is a front view of a clamping mechanism of a chip carrier transport apparatus according to an embodiment of the present invention;
fig. 4 is a side view of a clamping mechanism of a chip carrier transport apparatus according to an embodiment of the present invention.
Icon: 100-track; 200-a lateral drive mechanism; 300-a clamping mechanism; 310-a first gripper jaw; 311-a first clamping part; 320-a second gripper jaw; 321-a second clamping part; 330-telescopic cylinder; 340-a first fixed seat; 350-a slider; 360-linkage arm; 370-a second fixed mount; 380-transmission gear.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that, as the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. appear, the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, but does not indicate or imply that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" as appearing herein are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In addition, in the description of the embodiments of the present invention, unless otherwise explicitly specified or limited, the terms "connected" and "connected" should be interpreted broadly, e.g., as being fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
As shown in fig. 1-4, the chip carrier plate transmission device provided in the embodiment of the present invention includes: the two rails 100 are arranged in parallel and at intervals, and the two rails 100 are used for supporting a chip carrier plate. The intersection of the inner side wall and the top surface of the guide rail may be provided with an "L" -shaped limiting groove, and the limiting grooves on the two rails 100 are opposite to each other for supporting the chip carrier.
The chip carrier plate transmission device further comprises a clamping mechanism 300 and a transverse driving mechanism 200, wherein the transverse driving mechanism 200 is used for driving the clamping mechanism 300 to move along a direction parallel to the track 100. The transverse driving mechanism can be a screw rod motor module, a motor is used as a power source to drive a screw rod to rotate, so that a sliding block on the screw rod moves along the length direction of the screw rod, and the clamping mechanism 300 is fixed on the sliding block.
At least one of the rails 100 is provided with a clamping mechanism 300 on the side, the clamping mechanism 300 comprises a first clamping claw 310 and a second clamping claw 320 which can be opened and closed, and a vertical driving mechanism for driving the first clamping claw 310 and the second clamping claw 320 to be opened and closed.
The second clamping claw 320 comprises a second clamping part 321 positioned between the two rails 100; the first gripper jaw 310 includes an avoidance groove that snaps over the rail 100 and semi-wraps the rail 100. The avoiding groove comprises two groove walls arranged at intervals, and the groove wall between the two rails 100 is aligned with the second clamping part 321 to form the first clamping part 311.
The chip carrier plate is placed on the rail 100 after being taken out, the clamping mechanism 300 on the rail 100 can clamp the chip carrier plate, then the transverse driving mechanism 200 can drive the chip carrier plate to move along the length direction of the rail 100 and can move to the detection position, or drive the detected chip carrier plate to reach the leaving position, and in the conveying process, the chip carrier plate is not manually conveyed, so that the artificial pollution to the chip is avoided, and the detection quality and the detection efficiency are improved. Moreover, the structure formed by the first clamping part 311 and the second clamping part 321 of the clamping mechanism 300 is wrapped on the outer side of the track 100, so that the space occupied by the clamping mechanism 300 is reduced, and the product is compact in structure and small in occupied space through reasonable structural design.
In other embodiments, the vertical driving mechanism is connected to the first clamping jaw 310 or the second clamping jaw 320, and is used for driving one of the first clamping jaw 310 or the second clamping jaw 320 to move towards the other clamping jaw. Specifically, the vertical drive mechanism may be coupled to only one of the first gripper jaw 310 and the second gripper jaw 320, with the other stationary.
In this embodiment, the vertical driving mechanism is respectively connected to the first clamping jaw 310 and the second clamping jaw 320, and is configured to drive the first clamping jaw 310 and the second clamping jaw 320 to move relatively.
Specifically, the vertical driving mechanism comprises a telescopic cylinder 330, a first fixed seat 340, a sliding block 350, a linkage arm 360, a second fixed seat 370 and a transmission gear 380; along the opening and closing direction of the first clamping jaw 310 and the second clamping jaw 320, the sliding block 350 is connected with the first fixing seat 340 in a sliding manner, the first clamping jaw 310 is connected with the sliding block 350, one end of the linkage arm 360 is connected with the sliding block 350, the other end of the linkage arm 360 is provided with a first rack portion, and the first rack portion is meshed with the transmission gear 380; the transmission gear 380 is rotatably connected to the second fixing base 370, a second rack portion is arranged on a side wall of the second clamping jaw 320, the second rack portion is meshed with the transmission gear 380, and the first rack portion and the second rack portion are respectively located on two opposite sides of the transmission gear 380; the second clamping jaw 320 is slidably connected with the second fixing seat 370 along the opening and closing direction of the first clamping jaw 310 and the second clamping jaw 320; the telescopic cylinder 330 is fixed on the first fixing seat 340, and a movable end of the telescopic cylinder 330 is connected with the linkage arm 360, and is used for driving the linkage arm 360 to move along the opening and closing directions of the first clamping jaw 310 and the second clamping jaw 320.
The opening and closing of the clamping mechanism 300 are realized by arranging the first clamping claw 310 and the second clamping claw 320 to move relatively/reversely, so that the chip carrier with different thicknesses can be adapted, and the problem that one of the first clamping claw 310 and the second clamping claw 320 does not stop a carrier chip is avoided. The telescopic cylinder 330 drives the linkage arm 360 to move up and down, and when the linkage arm 360 moves down, the sliding block directly connected with the linkage arm 360 drives the first clamping jaw 310 to move down; meanwhile, the linkage arm 360 drives the transmission gear 380 to rotate in the forward direction, and the transmission gear 380 drives the second clamping jaw 320 to move downwards, so that the clamping mechanism 300 is unfolded; conversely, when the telescopic cylinder 330 drives the linkage arm 360 to move downwards, the clamping mechanism 300 is closed to clamp the chip carrier.
The first fixing seat 340, the sliding block 350 and the telescopic cylinder 330 are located on the side surface of the track 100, and the second fixing seat 370 and the transmission gear 380 are located below the track 100. Through reasonable spatial position design, can set up vertical actuating mechanism in track 100's side and below, the product structure is compacter, and space utilization is higher.
All be provided with the direction inclined plane on the face that first clamping part 311 and second clamping part 321 faced each other, the direction inclined plane is located the head end of first clamping part 311 and second clamping part 321, along the transmission direction of chip carrier plate, two distance between the direction inclined plane reduces gradually.
In the process of transmitting the chip carrier plate from the head end to the tail end of the track 100, the guiding inclined plane can guide the chip carrier plate to enter between the upper clamping part and the lower clamping part, so that the probability of collision between the clamping mechanism 300 and the chip carrier plate is reduced.
The lead screw motor module comprises a lead screw, and the length of the lead screw is greater than or equal to that of the track 100. So that the range of motion of the clamping mechanism 300 covers the entire track 100.
The track 100 is provided with a preparation position, a test position and a departing position, wherein a first proximity switch is arranged at the tail end of the preparation position, a second proximity switch is arranged at the tail end of the test position, a third proximity switch is arranged at the departing position, and the first proximity switch, the second proximity switch and the third proximity switch are all electrically connected with the transverse driving mechanism 200.
When the chip carrier is located at the preparation position, the first proximity switch is triggered, and if the second proximity switch is not triggered at this time, the lateral driving mechanism may drive the clamping mechanism 300 to move to the preparation position, and transport the chip carrier at the preparation position to the testing position, and the first proximity switch, the second proximity switch and the third proximity switch may detect whether there is a chip carrier at each position, and if the proximity switch at a certain position does not detect a chip carrier, the clamping mechanism 300 may move the chip carrier at the previous position to the next position, so that the transfer is continued all the time.
The embodiment of the utility model provides a chip testing equipment includes foretell chip carrier plate transmission device, because the utility model provides a chip testing equipment has quoted foretell chip carrier plate transmission device, so, the embodiment of the utility model provides a chip testing equipment also possesses chip carrier plate transmission device's advantage.
Finally, it should be noted that: the above embodiments are only specific embodiments of the present invention, and are not intended to limit the technical solution of the present invention, and the protection scope of the present invention is not limited thereto, although the present invention is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: those skilled in the art can still modify or easily conceive of changes in the technical solutions described in the foregoing embodiments or make equivalent substitutions for some technical features within the technical scope of the present disclosure; such modifications, changes or substitutions do not substantially depart from the spirit and scope of the embodiments of the present invention, and are intended to be included within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. A chip carrier plate transmission device is characterized by comprising: the chip carrier plate comprises two rails (100) which are arranged in parallel and at intervals, wherein the two rails (100) are used for supporting the chip carrier plate;
the chip carrier plate transmission device further comprises a clamping mechanism (300) and a transverse driving mechanism (200), wherein the transverse driving mechanism (200) is used for driving the clamping mechanism (300) to move along the direction parallel to the track (100);
a clamping mechanism (300) is arranged on the side surface of at least one rail (100), the clamping mechanism (300) comprises a first clamping claw (310) and a second clamping claw (320) which can be opened and closed, and a vertical driving mechanism; the second clamping claw (320) comprises a second clamping part (321) positioned between the two rails (100); the first clamping claw (310) comprises an avoiding groove, the avoiding groove is buckled on the rail (100) and comprises two groove walls which are arranged at intervals, and the groove wall between the two rails (100) is aligned with the second clamping part (321) to form a first clamping part (311); the vertical driving mechanism is used for driving the first clamping claw (310) and the second clamping claw (320) to open and close.
2. The chip carrier plate conveying device according to claim 1, wherein the vertical driving mechanism is connected with the first gripper jaw (310) or the second gripper jaw (320) and is used for driving one of the first gripper jaw (310) or the second gripper jaw (320) to move towards the other one.
3. The chip carrier plate conveying device according to claim 2, wherein the vertical driving mechanism is connected to the first gripper jaw (310) and the second gripper jaw (320) respectively, and is used for driving the first gripper jaw (310) and the second gripper jaw (320) to move relatively.
4. The chip carrier plate transmission device according to claim 3, wherein the vertical driving mechanism comprises a telescopic cylinder (330), a first fixed seat (340), a sliding block (350), a linkage arm (360), a second fixed seat (370) and a transmission gear (380);
along the opening and closing direction of the first clamping jaw (310) and the second clamping jaw (320), the sliding block (350) is connected with the first fixing seat (340) in a sliding mode, the first clamping jaw (310) is connected with the sliding block (350), one end of the linkage arm (360) is connected with the sliding block (350), the other end of the linkage arm (360) is provided with a first rack portion, and the first rack portion is meshed with the transmission gear (380);
the transmission gear (380) is rotatably connected to the second fixing seat (370), a second rack portion is arranged on the side wall of the second clamping claw (320), the second rack portion is meshed with the transmission gear (380), and the first rack portion and the second rack portion are respectively positioned on two opposite sides of the transmission gear (380); the second clamping claw (320) is connected with the second fixed seat (370) in a sliding mode along the opening and closing direction of the first clamping claw (310) and the second clamping claw (320);
the telescopic cylinder (330) is fixed on the first fixing seat (340), and the movable end of the telescopic cylinder (330) is connected with the linkage arm (360) and used for driving the linkage arm (360) to move along the opening and closing directions of the first clamping jaw (310) and the second clamping jaw (320).
5. The chip carrier plate transmission device according to claim 4, wherein the first fixing seat (340), the sliding block (350) and the telescopic cylinder (330) are located at the side of the track (100), and the second fixing seat (370) and the transmission gear (380) are located below the track (100).
6. A chip carrier transport apparatus according to claim 4, wherein the first clamping portion (311) and the second clamping portion (321) are provided with guiding slopes on their surfaces facing each other, the guiding slopes being located at the head ends of the first clamping portion (311) and the second clamping portion (321), the distance between the two guiding slopes decreasing along the transport direction of the chip carrier.
7. The chip carrier transport apparatus according to claim 1, wherein the lateral driving mechanism (200) is a lead screw motor module.
8. The chip carrier transport apparatus according to claim 7, wherein the lead screw motor module comprises a lead screw, and the length of the lead screw is greater than or equal to the length of the track (100).
9. The chip carrier transport apparatus according to claim 1, wherein the track (100) has a ready position, a testing position and a leaving position, the ready position has a first proximity switch at the end, the testing position has a second proximity switch at the end, the leaving position has a third proximity switch at the end, and the first proximity switch, the second proximity switch and the third proximity switch are electrically connected to the lateral driving mechanism (200).
10. A chip detection apparatus, characterized by comprising the chip carrier board transmission device according to any one of claims 1-9.
CN202021980475.9U 2020-09-11 2020-09-11 Chip carrier plate transmission device and chip detection equipment Active CN213264567U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202021980475.9U CN213264567U (en) 2020-09-11 2020-09-11 Chip carrier plate transmission device and chip detection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202021980475.9U CN213264567U (en) 2020-09-11 2020-09-11 Chip carrier plate transmission device and chip detection equipment

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Publication Number Publication Date
CN213264567U true CN213264567U (en) 2021-05-25

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CN202021980475.9U Active CN213264567U (en) 2020-09-11 2020-09-11 Chip carrier plate transmission device and chip detection equipment

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113148639A (en) * 2021-05-28 2021-07-23 浙江水晶光电科技股份有限公司 Feed bin clamping device and support plate output equipment
CN116559633A (en) * 2023-07-10 2023-08-08 华羿微电子股份有限公司 Semiconductor chip high temperature test box

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113148639A (en) * 2021-05-28 2021-07-23 浙江水晶光电科技股份有限公司 Feed bin clamping device and support plate output equipment
CN113148639B (en) * 2021-05-28 2023-08-25 浙江水晶光电科技股份有限公司 Feed bin clamping device and carrier plate output equipment
CN116559633A (en) * 2023-07-10 2023-08-08 华羿微电子股份有限公司 Semiconductor chip high temperature test box
CN116559633B (en) * 2023-07-10 2023-09-29 华羿微电子股份有限公司 Semiconductor chip high temperature test box

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