CN111948220A - Chip detection equipment - Google Patents
Chip detection equipment Download PDFInfo
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- CN111948220A CN111948220A CN202010956644.3A CN202010956644A CN111948220A CN 111948220 A CN111948220 A CN 111948220A CN 202010956644 A CN202010956644 A CN 202010956644A CN 111948220 A CN111948220 A CN 111948220A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
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Abstract
The invention provides a chip detection device, which relates to the technical field of chip detection, and comprises: the system comprises a sliding rail structure, an extraction device, a transportation device and an image acquisition and detection device; the extracting device is used for extracting the chip carrier plate in the cartridge clip and placing the chip carrier plate on the slide rail structure; the conveying device is used for conveying the chip carrier plate on the slide rail structure to the detection position or moving the chip carrier plate at the detection position out of the detection position; the image acquisition and detection device is positioned above the detection position and used for acquiring an image of the chip on the chip carrier plate and comparing the image with a standard image so as to acquire the defect of the chip on the chip carrier plate.
Description
Technical Field
The invention relates to the technical field of chip detection, in particular to a chip detection device.
Background
The chips are subjected to a series of inspections during processing to detect some defects. The defects are treated, so that the waste of materials and the generation of waste products can be avoided.
The existing chip detection method adopts manual screening, an operator takes a chip carrier plate out of a cartridge clip, each chip is observed by using a microscope, defects are detected one by one, products meeting requirements are left, and products not meeting the requirements are returned to corresponding stations for reprocessing.
Due to the randomness and uncertainty of manual detection, there is no way to ensure that all defects are detected, and manual detection cannot ensure the quality and quantity of all chips, so that missed detection or undetected detection is easy to occur; moreover, manual detection requires manual feeding and discharging of operators, and the process is very easy to pollute the chips, so that the detection quality and the detection efficiency are low.
Disclosure of Invention
The invention aims to provide chip detection equipment, which is used for relieving the problem that manual detection cannot ensure that all defects are detected, and the manual detection cannot ensure that all chips are detected with guaranteed quality and guaranteed quantity, so that the condition of missing detection or undetected detection is easy to occur; moreover, manual detection requires manual feeding and discharging of operators, and the process is very easy to pollute the chips, so that the detection quality and the detection efficiency are low.
The embodiment of the invention provides a chip detection device, which comprises: the system comprises a sliding rail structure, an extraction device, a transportation device and an image acquisition and detection device;
the extracting device is used for extracting the chip carrier plate in the cartridge clip and placing the chip carrier plate on the slide rail structure;
the conveying device is used for conveying the chip carrier plate on the slide rail structure to the detection position or moving the chip carrier plate at the detection position out of the detection position;
the image acquisition and detection device is positioned above the detection position and used for acquiring an image of the chip on the chip carrier plate and comparing the image with a standard image so as to acquire the defect of the chip on the chip carrier plate.
Further, the image acquisition and detection device comprises a mobile platform, an image acquisition mechanism and an annular light source;
the moving platform can drive the image acquisition mechanism to move along a first direction and a second direction, and a plane formed by the first direction and the second direction is vertical to the length direction of the slide rail structure;
the annular light source is connected to the lowest end of the image acquisition mechanism, and the circle center of the annular light source is coaxial with the optical axis of the image acquisition mechanism.
Further, the extraction device comprises a left-right conveying mechanism and a first clamping mechanism;
the left and right conveying mechanisms comprise conveying bases and linear driving modules, and the linear driving modules are used for driving the conveying bases to move along the length direction of the sliding rail structure; the first clamping mechanism is located on the transportation base and used for clamping the chip carrier plate in the cartridge clip.
Further, the slide rail structure comprises two parallel and spaced guide rails, and the first clamping mechanism is located below the slide rail structure;
the first clamping mechanism is movably connected with the transportation base, the extraction device comprises a first vertical driving mechanism, and the first vertical driving mechanism is used for driving the first clamping mechanism to vertically move.
Furthermore, the transportation base is connected with the first clamping mechanism through a connecting piece, one end of the connecting piece is hinged with the transportation base, and the other end of the connecting piece is hinged with the first clamping mechanism;
the first vertical driving mechanism comprises a compression spring, one end of the compression spring is connected with the connecting piece, the other end of the compression spring is connected with the transportation base, and the compression spring is used for enabling the first clamping mechanism to have the trend of moving upwards;
the connecting piece is provided with a stop block, and the stop block is abutted against the bottom surface of the guide rail; the bottom surface of the guide rail is provided with a guide boss, the surface of the guide boss, which faces the head end of the guide rail, is an inclined surface, the head end of the guide rail faces the tail end direction, the inclined surface inclines downwards, and the inclined surface is used for guiding the stop block to move upwards or downwards so that the first clamping mechanism ascends or descends.
Further, the linear driving module comprises a first left-right telescopic module and a second left-right telescopic module; the conveying base is connected with a sliding block in a sliding mode, the sliding direction of the sliding block is the same as the length direction of the sliding rail structure, and the first clamping mechanism and the second left-right telescopic module are fixed on the sliding block;
the first left-right telescopic module is connected with the transportation base and used for driving the transportation base, the sliding block and the first clamping mechanism to move transversely, and the second left-right telescopic module is connected with the sliding block and used for driving the sliding block and the first clamping mechanism to move transversely.
Furthermore, the first clamping mechanism comprises an upper clamping jaw, a lower clamping jaw and a first vertical driving mechanism, wherein the movable end of the first vertical driving mechanism is connected with the upper clamping jaw and is used for driving the upper clamping jaw to move towards or away from the lower clamping jaw;
the first vertical driving mechanism comprises a connecting rod, a magnet and an electromagnet, the magnet and the electromagnet are fixed on the lower end clamping jaw, and the magnet can move towards or away from the electromagnet along the opening and closing direction of the upper end clamping jaw and the lower end clamping jaw; one end of the connecting rod is connected with the magnet, and the other end of the connecting rod is hinged with the upper end clamping claw.
Furthermore, the slide rail structure comprises two parallel and spaced guide rails, the transportation device further comprises a second clamping mechanism and a left and right driving mechanism, and the left and right driving mechanism is used for driving the second clamping mechanism to move along the direction parallel to the guide rails;
a second clamping mechanism is arranged on the side surface of at least one guide rail, and comprises a first clamping jaw and a second clamping jaw which can be opened and closed, and a second vertical driving mechanism; the second clamping jaw comprises a second clamping edge positioned between the two guide rails; the first clamping jaw comprises a sliding groove, the sliding groove is buckled on the guide rail and comprises two groove walls which are arranged at intervals, and the groove wall positioned between the two guide rails is aligned with the second clamping edge to form a first clamping edge; and the second vertical driving mechanism is used for driving the first clamping jaw and the second clamping jaw to open and close.
Further, the second vertical driving mechanism comprises a telescopic cylinder, a first mounting seat, a sliding block, a connecting arm, a second mounting seat and a linkage gear;
the sliding block is connected with the first mounting seat in a sliding mode along the opening and closing direction of the first clamping jaw and the second clamping jaw, the first clamping jaw is connected with the sliding block, one end of the connecting arm is connected with the sliding block, the other end of the connecting arm is provided with a first rack portion, and the first rack portion is meshed with the linkage gear;
the linkage gear is rotationally connected to the second mounting seat, a second rack portion is arranged on the side wall of the second clamping jaw, the second rack portion is meshed with the linkage gear, and the first rack portion and the second rack portion are respectively located on two opposite sides of the linkage gear; the second clamping jaw is connected with the second mounting seat in a sliding mode along the opening and closing direction of the first clamping jaw and the second clamping jaw;
the telescopic cylinder is fixed on the first mounting seat, and the movable end of the telescopic cylinder is connected with the connecting arm and used for driving the connecting arm to move along the opening and closing directions of the first clamping jaw and the second clamping jaw.
Further, the slide rail structure still has initial position and ejection of compact position, the end of initial position is provided with first proximity switch, the end that detects the position sets up second proximity switch, the position of ejection of compact position is provided with third proximity switch, first proximity switch, second proximity switch and third proximity switch all with control actuating mechanism electricity and be connected.
The chip detection device provided by the embodiment of the invention comprises: the system comprises a sliding rail structure, an extraction device, a transportation device and an image acquisition and detection device; the extracting device is used for extracting the chip carrier plate in the cartridge clip and placing the chip carrier plate on the slide rail structure; the conveying device is used for conveying the chip carrier plate on the slide rail structure to the detection position or moving the chip carrier plate at the detection position out of the detection position; the image acquisition and detection device is positioned above the detection position and used for acquiring an image of the chip on the chip carrier plate and comparing the image with a standard image so as to acquire the defect of the chip on the chip carrier plate. The cartridge clip can be aligned with the head end of the slide rail structure, and then the chip carrier plate is extracted from the cartridge clip by using the extraction device and placed on the slide rail structure; then, the chip carrier plate is moved forwards by the conveying device, so that the chip carrier plate moves to a detection position below the image acquisition and detection device, the image of the chip is acquired by the image acquisition and monitoring device, the acquired image is compared with a standard image prestored in the system, the position where the detected chip has defects can be obtained, and the detected chip is continuously conveyed forwards by the conveying device and leaves the detection position. And then the next chip carrier plate is transported to the detection position by the transporting device for detection. In the process of extraction, transportation and detection, artificial participation is not involved, the risk of artificial pollution to the chip is reduced, and the efficiency and the quality of detection can be improved by replacing manpower with machinery.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a schematic diagram of a chip detection apparatus according to an embodiment of the present invention;
fig. 2 is a schematic view of a chip detection apparatus provided in an embodiment of the present invention (with a housing removed);
fig. 3 is a schematic diagram of an extraction device of a chip detection apparatus according to an embodiment of the present invention;
fig. 4 is a front view of an extracting device of the chip detecting apparatus provided by the embodiment of the invention;
FIG. 5 is a top view of an extracting device of a chip detecting apparatus according to an embodiment of the present invention;
FIG. 6 is a cross-sectional view taken along line A-A of FIG. 5;
FIG. 7 is an enlarged view of a portion of FIG. 6 at position B;
fig. 8 is a schematic view of a clamping mechanism of the chip detection apparatus provided in the embodiment of the present invention;
fig. 9 is a top view of a chip carrier board conveying device of the chip detection apparatus according to the embodiment of the present invention;
FIG. 10 is a schematic diagram of a second clamping mechanism of the chip detection apparatus according to the embodiment of the invention;
FIG. 11 is a front view of a second clamping mechanism of the chip inspection apparatus provided in the embodiment of the present invention;
fig. 12 is a side view of a second clamping mechanism of the chip inspection apparatus according to the embodiment of the invention.
Icon: 100-a slide rail structure; 110-a guide rail; 210-a transport base; 220-cartridge clip; 230-a first clamping mechanism; 240-a connector; 250-a compression spring; 261-a guide boss; 262-a stop block; 271-a first left-right expansion module; 272-a second left-right expansion module; 273-sliding block; 281-upper gripper jaw; 282-lower end gripper jaw; 283-connecting rods; 284-a magnet; 285-an electromagnet; 320-left and right driving mechanism; 330-a second clamping mechanism; 331-a first jaw; 3311-first clamping edge; 332-a second jaw; 3321-second clamping edge; 333-telescopic cylinder; 334-a first mount; 335-a slider; 336-connecting arm; 337-a second mount; 338-linked gear; 400-image acquisition detection means; 500-shell.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 to 12, the chip detection apparatus provided in the embodiment of the present invention includes: the slide rail structure 100, the extraction device, the transportation device and the image acquisition and detection device 400; the drawing device is used for drawing out the chip carrier plate in the cartridge clip 220 and placing the chip carrier plate on the slide rail structure 100; the transportation device is used for transporting the chip carrier on the slide rail structure 100 to the detection position, or moving the chip carrier at the detection position out of the detection position; the image acquisition and detection device 400 is located above the detection position and is used for acquiring an image of the chip on the chip carrier and comparing the image with a standard image so as to acquire the defect of the chip on the chip carrier.
As shown in fig. 2, the cartridge clip 220 may be aligned with the head end of the slide rail structure 100, and then the chip carrier board is extracted from the cartridge clip 220 by the extracting device and placed on the slide rail structure 100; then, the chip carrier plate is moved forward by the transporting device, so that the chip carrier plate moves to the detection position below the image acquisition and detection device 400, the image of the chip is acquired by the image acquisition and monitoring device, the acquired image is compared with a standard image prestored in the system, so that the position where the detected chip has defects can be obtained, and the detected chip is continuously transported forward by the transporting device, so as to leave the detection position. And then the next chip carrier plate is transported to the detection position by the transporting device for detection. In the process of extraction, transportation and detection, artificial participation is not involved, the risk of artificial pollution to the chip is reduced, and the efficiency and the quality of detection can be improved by replacing manpower with machinery.
The chip detection device further comprises a shell 500 completely covering the slide rail structure 100, the extraction device, the transportation device and the image acquisition detection device 400, an inlet and an outlet connected with the head end and the tail end of the slide rail structure 100 are arranged on the shell 500, a bracket is arranged at the inlet, and the bracket is used for supporting the cartridge clip 220.
The image acquisition detection device 400 comprises a mobile platform, an image acquisition mechanism and an annular light source; the moving platform can drive the image acquisition mechanism to move along a first direction and a second direction, and a plane formed by the first direction and the second direction is vertical to the length direction of the slide rail structure 100; the annular light source is connected to the lowest end of the image acquisition mechanism, and the circle center of the annular light source is coaxial with the optical axis of the image acquisition mechanism.
The image acquisition mechanism can be an industrial camera, the mobile platform can be a two-dimensional motion platform or a three-dimensional motion platform, in the embodiment, the mobile platform can move in two dimensions and can drive the image acquisition mechanism to move back and forth and up and down, the chip carrier plate is provided with a plurality of chips, and the image acquisition mechanism can acquire complete chip images in the back and forth direction by moving the image acquisition mechanism back and forth; the focusing of the image acquisition mechanism can be facilitated by vertically adjusting the image acquisition mechanism; because the conveying device can drive the chip carrier plate to move along the left and right directions, the image acquisition mechanism can acquire complete chip images on the chip carrier plate in the left and right directions. And an annular light source is fixed at the lowest end of the image acquisition mechanism, so that the light supplementing effect is achieved, and the shot image is clearer.
As shown in fig. 3 to 8, the extracting apparatus includes a left and right conveying mechanism and a first clamping mechanism 230; the left and right conveying mechanism comprises a conveying base 210 and a linear driving module, wherein the linear driving module is used for driving the conveying base 210 to move along the length direction of the sliding rail structure 100; the first clamping mechanism 230 is located on the transport base 210, and the first clamping mechanism 230 is used for clamping the chip carrier board in the cartridge 220.
The head end of the slide rail structure 100 is aligned with the outlet of the cartridge clip 220, then the first clamping mechanism 230 on the transport base 210 can be moved to the outlet of the cartridge clip 220 by using the left and right conveying mechanisms and simultaneously the first clamping mechanism 230 is opened, the chip carrier plate is clamped by using the first clamping mechanism 230, then the transport base 210 is reversely driven by using the left and right conveying mechanisms, so that the chip carrier plate can be pulled out of the cartridge clip 220 and slide on the slide rail structure 100, and then is conveyed to the detection station.
The slide rail structure 100 comprises two parallel and spaced guide rails 110, and the first clamping mechanism 230 is located below the slide rail structure 100; the first clamping mechanism 230 is movably connected to the transportation base 210, and the extraction device includes a first vertical driving mechanism for driving the first clamping mechanism 230 to move vertically.
In order to reduce the width of the extracting device, the first clamping mechanism 230 may be disposed below the slide rail structure 100, and after the first clamping mechanism 230 takes out the chip carrier from the cartridge clip 220, in order to not affect the subsequent chip carrier to continue moving along the slide rail structure 100, the first clamping mechanism 230 may be lowered below the slide rail structure 100, and when the first clamping mechanism 230 needs to be used, the first vertical driving mechanism is used to lift the first clamping mechanism 230, so that the mouth of the first clamping mechanism 230 is flush with the outlet of the cartridge clip 220.
The transportation base 210 is connected with the first clamping mechanism 230 through a connecting piece 240, one end of the connecting piece 240 is hinged with the transportation base 210, and the other end of the connecting piece 240 is hinged with the first clamping mechanism 230; the first vertical driving mechanism comprises a compression spring 250, one end of the compression spring 250 is connected with the connecting piece 240, the other end of the compression spring 250 is connected with the transportation base 210, and the compression spring 250 is used for enabling the first clamping mechanism 230 to have a tendency of moving upwards; the connecting piece 240 is provided with a stop block 262, and the stop block 262 is abutted against the bottom surface of the guide rail 110; the bottom surface of the guide rail 110 is provided with a guide boss 261, a surface of the guide boss 261 facing the head end of the guide rail 110 is an inclined surface, and the inclined surface inclines downwards from the head end to the tail end of the guide rail 110, and the inclined surface is used for guiding the stop block 262 to move upwards or downwards, so that the first clamping mechanism 230 ascends or descends.
In this embodiment, the transport base 210 and the first clamping mechanism 230 are connected by the connecting member 240 to form a parallelogram connecting member 240 mechanism, and a compression spring 250 is compressed between the connecting member 240 and the transport base 210, and the compression spring 250 can make the stop block 262 on the connecting member 240 always abut against the bottom surface of the guide rail 110. A guiding boss 261 is disposed at a position of the guide rail 110 away from the head end thereof and close to the length of the chip carrier board, and an inclined plane on the guiding boss 261 faces the head end of the guide rail 110 and is inclined downward, in this embodiment, the guiding boss 261 may be a trapezoid. Initially, the first clamping mechanism 230 is located below the guide rail 110, and the stop block 262 abuts on the bottom surface of the guide boss 261, and as the transportation base 210 moves toward the head end of the guide rail 110, the stop block 262 moves upward along the inclined surface, and the first clamping mechanism 230 also moves upward at the same time, so that the nozzle of the first clamping mechanism 230 can be flush with the outlet of the cartridge clip 220. On the contrary, when the first clamping mechanism 230 clamps the chip carrier and completely extracts the chip carrier, the second clamping mechanism 330 may open the nozzle, the stop block 262 moves onto the inclined plane again, and when the transportation base 210 continues to move in the direction away from the head end of the guide rail 110, the stop block 262 moves downward along the inclined plane, so as to drive the first clamping mechanism 230 to move downward, so as to move below the slide rail structure 100, and the clamped chip carrier may continue to move along the slide rail structure 100 without being affected by the first clamping mechanism 230.
The linear driving module comprises a first left-right telescopic module 271 and a second left-right telescopic module 272; a sliding block 273 is slidably connected to the transport base 210, the sliding direction of the sliding block 273 is the same as the length direction of the slide rail structure 100, and the first clamping mechanism 230 and the second left-right telescopic module 272 are fixed to the sliding block 273; the first left-right telescopic module 271 is connected with the transport base 210 and used for driving the transport base 210, the sliding block 273 and the first clamping mechanism 230 to move along the transverse direction, and the second left-right telescopic module 272 is connected with the sliding block 273 and used for driving the sliding block 273 and the first clamping mechanism 230 to move along the transverse direction.
In order to enable the first clamping mechanism 230 to smoothly clamp and release the chip carrier, in this embodiment, initially, the first left and right expansion modules 271 may be used to push the transport base 210, and the sliding block 273, the first clamping mechanism 230, and the second left and right expansion modules 272 on the transport base 210 are all pushed towards the head end of the guide rail 110, by setting the extension length of the first left and right expansion modules 271, the first clamping mechanism 230 may be stopped at a position close to the outlet of the cartridge clip 220, and then the first clamping mechanism 230 is controlled to open the nozzle, and then the first left and right expansion modules 271 are used to continue to push the sliding block 273 towards the front end of the guide rail 110, so that the nozzle of the first clamping mechanism 230 just moves to the edge of the chip carrier, and the first clamping mechanism 230 closes the nozzle to clamp the edge of the chip carrier. Then, the first left-right telescopic module 271 pulls the transportation base 210 reversely to completely draw out the chip carrier, at this time, the stop block 262 is located at the front end of the inclined plane of the guide boss 261, then, the first clamping mechanism 230 opens the clamping mouth, the second left-right telescopic module 272 continues to drive the sliding block 273 to move backwards, and the first clamping mechanism 230 moves downwards due to the interaction of the stop block 262 and the guide boss 261.
The first clamping mechanism 230 comprises an upper clamping jaw 281, a lower clamping jaw 282 and a first vertical driving mechanism, wherein a movable end of the first vertical driving mechanism is connected with the upper clamping jaw 281 and is used for driving the upper clamping jaw 281 to move towards or away from the lower clamping jaw 282; the first vertical driving mechanism comprises a connecting rod 283, a magnet 284 and an electromagnet 285, the magnet 284 and the electromagnet 285 are fixed on the lower clamping jaw 282, and the magnet 284 can move towards or away from the electromagnet 285 along the opening and closing direction of the upper clamping jaw 281 and the lower clamping jaw 282; one end of the connection rod 283 is connected to the magnet 284, and the other end is hinged to the upper clamping jaw 281.
The polarity of electromagnet 285 may be changed to repel magnet 284 or attract magnet 284. when electromagnet 285 repels magnet 284, magnet 284 pushes upper gripper jaw 281 upward through coupling rod 283, thereby spreading upper gripper jaw 281 and lower gripper jaw 282 apart; when the electromagnet 285 and the magnet 284 attract each other, the connecting rod 283 pulls the upper clamping claw 281 downward, so that the upper clamping claw 281 and the lower clamping claw 282 close to clamp the chip carrier.
The slide rail structure 100 includes two parallel and spaced guide rails 110, the transportation device further includes a second clamping mechanism 330 and a left and right driving mechanism 320, and the left and right driving mechanism 320 is configured to drive the second clamping mechanism 330 to move along a direction parallel to the guide rails 110; a second clamping mechanism 330 is arranged on the side surface of at least one guide rail 110, and the second clamping mechanism 330 comprises a first clamping jaw 331 and a second clamping jaw 332 which can be opened and closed, and a second vertical driving mechanism; the second clamping jaw 332 comprises a second clamping edge 3321 located between the two rails 110; the first clamping jaw 331 comprises a sliding groove buckled on the guide rail 110, the sliding groove comprises two groove walls arranged at intervals, and the groove wall between the two guide rails 110 is aligned with the second clamping edge 3321 to form a first clamping edge 3311; the second vertical driving mechanism is used for driving the first clamping jaw 331 and the second clamping jaw 332 to open and close.
The left and right driving mechanism 320 can be a screw motor module, a motor is used as a power source to drive the screw to rotate, so that the sliding block on the screw moves along the length direction of the screw, and the second clamping mechanism 330 is fixed on the sliding block 273.
The second clamping jaw 332 comprises a second clamping edge 3321 located between the two rails 110; the first jaw 331 includes a sliding slot that snaps over the rail 110 and semi-wraps around the rail 110. The sliding groove includes two groove walls spaced apart from each other, and the groove wall between the two guide rails 110 is aligned with the second clamping edge 3321 to form a first clamping edge 3311. After being drawn out, the chip carrier is placed on the guide rail 110, the second clamping mechanism 330 on the guide rail 110 can clamp the chip carrier, and then the left and right driving mechanisms 320 can drive the chip carrier to move along the length direction of the guide rail 110 and move to the detection position, or drive the detected chip carrier to reach the discharge position. In addition, the structure formed by the first clamping edge 3311 and the second clamping edge 3321 of the second clamping mechanism 330 wraps the outer side of the guide rail 110, so that the space occupied by the second clamping mechanism 330 is reduced, and the product has a compact structure and occupies a small space through reasonable structural design.
The second vertical driving mechanism comprises a telescopic cylinder 333, a first mounting seat 334, a sliding block 335, a connecting arm 336, a second mounting seat 337 and a linkage gear 338; along the opening and closing direction of the first clamping jaw 331 and the second clamping jaw 332, the sliding block 335 is slidably connected with the first mounting seat 334, the first clamping jaw 331 is connected with the sliding block 335, one end of the connecting arm 336 is connected with the sliding block 335, the other end of the connecting arm 336 is provided with a first rack part, and the first rack part is meshed with the linkage gear 338; the linkage gear 338 is rotatably connected to the second mounting seat 337, a second rack portion is arranged on the side wall of the second clamping jaw 332, the second rack portion is engaged with the linkage gear 338, and the first rack portion and the second rack portion are respectively located on two opposite sides of the linkage gear 338; the second clamping jaw 332 is slidably connected with the second mounting seat 337 along the opening and closing direction of the first clamping jaw 331 and the second clamping jaw 332; the telescopic cylinder 333 is fixed on the first mounting seat 334, and the movable end of the telescopic cylinder 333 is connected with the connecting arm 336 and used for driving the connecting arm 336 to move along the opening and closing directions of the first clamping jaw 331 and the second clamping jaw 332.
In this embodiment, the second vertical driving mechanism is respectively connected to the first clamping jaw 331 and the second clamping jaw 332, and is configured to drive the first clamping jaw 331 and the second clamping jaw 332 to move relatively. The opening and closing of the second clamping mechanism 330 are realized by arranging the first clamping jaw 331 and the second clamping jaw 332 to move relatively/reversely, so that the chip carrier plates with different thicknesses can be adapted, and the problem that one of the first clamping jaw 331 and the second clamping jaw 332 cannot stop a chip on the carrier plate is avoided. The telescopic cylinder 333 drives the connecting arm 336 to move up and down, and when the connecting arm 336 moves down, the sliding block 273 directly connected with the connecting arm 336 drives the first clamping jaw 331 to move down; meanwhile, the connecting arm 336 drives the linkage gear 338 to rotate in the forward direction, and the linkage gear 338 drives the second clamping jaw 332 to move downwards, so that the second clamping mechanism 330 is unfolded; conversely, when the telescopic cylinder 333 drives the connecting arm 336 to move downwards, the second clamping mechanism 330 is closed to clamp the chip carrier.
Still have initial position and ejection of compact position on the slide rail structure 100, the end of initial position is provided with first proximity switch, the end that detects the position sets up second proximity switch, the position of ejection of compact position is provided with third proximity switch, first proximity switch, second proximity switch and third proximity switch all with control actuating mechanism 320 electricity and be connected.
When the chip carrier is located at the initial position, the first proximity switch is triggered, and if the second proximity switch is not triggered at this time, the left-right driving mechanism 320 may drive the second clamping mechanism 330 to move to the initial position, and transport the chip carrier at the initial position to the detection position, and the first proximity switch, the second proximity switch, and the third proximity switch may detect whether there is a chip carrier at each position, and if the proximity switch at a certain position does not detect a chip carrier, the second clamping mechanism 330 may move the chip carrier at the previous position to the next position, so that the transfer is continued all the time.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.
Claims (10)
1. A chip detection apparatus, characterized in that the chip detection apparatus comprises: the device comprises a sliding rail structure (100), an extraction device, a transportation device and an image acquisition and detection device (400);
the extracting device is used for extracting the chip carrier plate in the cartridge (220) and placing the chip carrier plate on the slide rail structure (100);
the conveying device is used for conveying the chip carrier plate on the slide rail structure (100) to the detection position or moving the chip carrier plate at the detection position out of the detection position;
the image acquisition and detection device (400) is positioned above the detection position and used for acquiring an image of the chip on the chip carrier and comparing the image with a standard image so as to acquire the defect of the chip on the chip carrier.
2. The chip detection apparatus according to claim 1, wherein the image capturing detection device (400) comprises a mobile platform, an image capturing mechanism and a ring light source;
the mobile platform can drive the image acquisition mechanism to move along a first direction and a second direction, and the plane formed by the first direction and the second direction is vertical to the length direction of the slide rail structure (100);
the annular light source is connected to the lowest end of the image acquisition mechanism, and the circle center of the annular light source is coaxial with the optical axis of the image acquisition mechanism.
3. The apparatus for inspecting a chip according to claim 1, wherein said extracting means includes a left-right conveying mechanism and a first holding mechanism (230);
the left and right conveying mechanism comprises a conveying base (210) and a linear driving module, and the linear driving module is used for driving the conveying base (210) to move along the length direction of the sliding rail structure (100); the first clamping mechanism (230) is located on the transportation base (210), and the first clamping mechanism (230) is used for clamping the chip carrier plate in the cartridge (220).
4. The chip detection apparatus according to claim 3, wherein the slide rail structure (100) comprises two parallel and spaced rails (110), the first clamping mechanism (230) being located below the slide rail structure (100);
the first clamping mechanism (230) is movably connected with the transportation base (210), the extraction device comprises a first vertical driving mechanism, and the first vertical driving mechanism is used for driving the first clamping mechanism (230) to move vertically.
5. The chip detection apparatus according to claim 4, wherein the transport base (210) is connected to the first clamping mechanism (230) through a connecting member (240), one end of the connecting member (240) is hinged to the transport base (210), and the other end of the connecting member (240) is hinged to the first clamping mechanism (230);
the first vertical driving mechanism comprises a compression spring (250), one end of the compression spring (250) is connected with the connecting piece (240), the other end of the compression spring (250) is connected with the transportation base (210), and the compression spring (250) is used for enabling the first clamping mechanism (230) to have the upward movement tendency;
a stop block (262) is arranged on the connecting piece (240), and the stop block (262) is abutted against the bottom surface of the guide rail (110); be provided with direction boss (261) on the bottom surface of guide rail (110), direction boss (261) orientation the face of guide rail (110) head end is the inclined plane, certainly the head end of guide rail (110) is to the tail end direction, the inclined plane downward sloping, the inclined plane is used for guiding backstop piece (262) upwards or downstream, so that first fixture (230) rise or descend.
6. The chip detection apparatus according to claim 5, wherein the linear driving module comprises a first left-right expansion module (271) and a second left-right expansion module (272); a sliding block (273) is connected to the transportation base (210) in a sliding manner, the sliding direction of the sliding block (273) is the same as the length direction of the sliding rail structure (100), and the first clamping mechanism (230) and the second left-right telescopic module (272) are fixed to the sliding block (273);
the first left-right telescopic module (271) is connected with the transportation base (210) and used for driving the transportation base (210), the sliding block (273) and the first clamping mechanism (230) to move along the transverse direction, and the second left-right telescopic module (272) is connected with the sliding block (273) and used for driving the sliding block (273) and the first clamping mechanism (230) to move along the transverse direction.
7. The apparatus for detecting chips as claimed in claim 6, wherein the first clamping mechanism (230) comprises an upper clamping jaw (281), a lower clamping jaw (282) and a first vertical driving mechanism, the movable end of the first vertical driving mechanism is connected with the upper clamping jaw (281) for driving the upper clamping jaw (281) to move towards or away from the lower clamping jaw (282);
the first vertical driving mechanism comprises a connecting rod (283), a magnet (284) and an electromagnet (285), the magnet (284) and the electromagnet (285) are fixed on the lower end clamping jaw (282), and the magnet (284) can move towards or away from the electromagnet (285) along the opening and closing direction of the upper end clamping jaw (281) and the lower end clamping jaw (282); one end of the connecting rod (283) is connected with the magnet (284), and the other end is hinged with the upper clamping claw (281).
8. The chip detection apparatus according to claim 1, wherein the slide rail structure (100) comprises two parallel and spaced guide rails (110), the transportation device further comprises a second clamping mechanism (330) and a left-right driving mechanism (320), and the left-right driving mechanism (320) is configured to drive the second clamping mechanism (330) to move in a direction parallel to the guide rails (110);
a second clamping mechanism (330) is arranged on the side surface of at least one guide rail (110), and the second clamping mechanism (330) comprises a first clamping jaw (331) and a second clamping jaw (332) which can be opened and closed, and a second vertical driving mechanism; the second jaw (332) comprises a second clamping edge (3321) located between the two rails (110); the first clamping jaw (331) comprises a sliding groove which is buckled on the guide rail (110) and comprises two groove walls which are arranged at intervals, and the groove wall between the two guide rails (110) is aligned with the second clamping edge (3321) to form a first clamping edge (3311); the second vertical driving mechanism is used for driving the first clamping jaw (331) and the second clamping jaw (332) to open and close.
9. The chip detection apparatus according to claim 8, wherein the second vertical driving mechanism comprises a telescopic cylinder (333), a first mounting seat (334), a sliding block (335), a connecting arm (336), a second mounting seat (337), and a linkage gear (338);
along the opening and closing directions of the first clamping jaw (331) and the second clamping jaw (332), the sliding block (335) is connected with the first mounting seat (334) in a sliding mode, the first clamping jaw (331) is connected with the sliding block (335), one end of the connecting arm (336) is connected with the sliding block (335), the other end of the connecting arm (336) is provided with a first rack portion, and the first rack portion is meshed with the linkage gear (338);
the linkage gear (338) is rotatably connected to the second mounting seat (337), a second rack portion is arranged on the side wall of the second clamping jaw (332), the second rack portion is meshed with the linkage gear (338), and the first rack portion and the second rack portion are respectively positioned on two opposite sides of the linkage gear (338); the second clamping jaw (332) is connected with the second mounting seat (337) in a sliding mode along the opening and closing direction of the first clamping jaw (331) and the second clamping jaw (332);
the telescopic cylinder (333) is fixed on the first mounting seat (334), the movable end of the telescopic cylinder (333) is connected with the connecting arm (336) and used for driving the connecting arm (336) to move along the opening and closing directions of the first clamping jaw (331) and the second clamping jaw (332).
10. The chip detection apparatus according to claim 8, wherein the slide rail structure (100) further has an initial position and a discharging position, the initial position is provided with a first proximity switch at the end, the detection position is provided with a second proximity switch at the end, the discharging position is provided with a third proximity switch at the end, and the first proximity switch, the second proximity switch and the third proximity switch are electrically connected to the left and right driving mechanism (320).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010956644.3A CN111948220A (en) | 2020-09-11 | 2020-09-11 | Chip detection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010956644.3A CN111948220A (en) | 2020-09-11 | 2020-09-11 | Chip detection equipment |
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| Publication Number | Publication Date |
|---|---|
| CN111948220A true CN111948220A (en) | 2020-11-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010956644.3A Pending CN111948220A (en) | 2020-09-11 | 2020-09-11 | Chip detection equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112834527A (en) * | 2020-12-31 | 2021-05-25 | 江苏理工学院 | QFN chip image acquisition device and image acquisition method thereof |
| CN116242780A (en) * | 2023-05-11 | 2023-06-09 | 山东工业职业学院 | Computer chip detection equipment and method based on image recognition |
-
2020
- 2020-09-11 CN CN202010956644.3A patent/CN111948220A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112834527A (en) * | 2020-12-31 | 2021-05-25 | 江苏理工学院 | QFN chip image acquisition device and image acquisition method thereof |
| CN116242780A (en) * | 2023-05-11 | 2023-06-09 | 山东工业职业学院 | Computer chip detection equipment and method based on image recognition |
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