CN213240317U - Impedance characteristic testing device for piezoelectric force-sensitive chip - Google Patents
Impedance characteristic testing device for piezoelectric force-sensitive chip Download PDFInfo
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- CN213240317U CN213240317U CN202020740142.2U CN202020740142U CN213240317U CN 213240317 U CN213240317 U CN 213240317U CN 202020740142 U CN202020740142 U CN 202020740142U CN 213240317 U CN213240317 U CN 213240317U
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Abstract
The utility model relates to a test device for impedance characteristics of a piezoelectric force-sensitive chip, which comprises a visual observation component and a micro-motion alignment platform connected with the visual observation component, wherein the micro-motion alignment platform is provided with a piezoelectric force-sensitive chip wafer, the micro-motion alignment platform is connected with an impedance tester, the impedance tester is electrically connected with a computer, a chip chuck of the visual observation device and the micro-motion alignment platform is suitable for testing the chip by arranging the visual observation component and the micro-motion alignment platform, a probe clamp can set special calibration parameters so as to inhibit white noise with 2 orders of magnitude, further improve the test accuracy, the impedance tester can directly test the chip by matching with an equivalent circuit model of the piezoelectric force-sensitive chip, improve the test frequency resolution with 6 orders of magnitude, and the impedance precision reaches 5 orders of magnitude, the computer can input a VBA program, can quickly realize the statistics and calculation of the measured data, and is beneficial to the batch test of the chips.
Description
Technical Field
The utility model relates to a chip characteristic test technical field specifically is a towards quick chip impedance characteristic test device of piezoelectric type power.
Background
The piezoelectric force sensitive chip is a sensor chip which works by utilizing the piezoelectric effect, and under the action of external force, a sensitive structure of the piezoelectric force sensitive chip generates modal vibration, and the inherent characteristics are changed, so that the size of the highly sensitive external force and the impedance characteristics are one of important indexes for judging whether the chip is qualified or not.
At present, the chip testing industry mainly focuses on the development of testing devices for IC chips, semiconductor chips and silicon-based MEMS chips, and the impedance test of passive elements mostly adopts LCR measuring instrument schemes, but the problems of low testing frequency resolution, single equivalent circuit model and the like exist.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a towards quick chip impedance characteristic testing arrangement of piezoelectric type power to it is relatively poor to solve among the prior art test frequency resolution and impedance precision, and fails effectual noise reduction, can't realize the problem of the impedance characteristic test of measurement data batch statistics and calculation.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a towards quick chip impedance characteristic testing arrangement of piezoelectricity type power, includes that the visual observation subassembly reaches the fine motion alignment platform of being connected with the visual observation subassembly, be provided with the quick chip wafer of piezoelectricity type power on the fine motion alignment platform, the fine motion is aimed at the platform and is connected with the impedance tester, the impedance tester electricity is connected with the computer.
Preferably, the visual observation assembly comprises a monitor, and one end of the monitor is electrically connected with a CCD camera.
Preferably, the micro-motion alignment platform comprises a zoom imaging camera, a micro-motion module is arranged at the lower end of the zoom imaging camera, a chip chuck is installed at the upper end of the micro-motion module, a probe clamp is arranged above the chip chuck, and a probe is installed on the probe clamp.
Preferably, the zoom imaging camera is electrically connected with the CCD camera.
Preferably, the chip chuck and the micro-motion platform are positioned by pins, and the piezoelectric type force-sensitive chip wafer is matched with the chip chuck.
Preferably, a piezoelectric type force-sensitive chip is disposed on the piezoelectric type force-sensitive chip wafer.
The utility model discloses possess following beneficial effect at least:
(1) the utility model relates to a towards quick chip impedance characteristic testing arrangement of piezoelectric type power, through being provided with visual observation subassembly and fine motion alignment platform, the chip (holding) chuck of visual observation device and fine motion alignment platform is applicable to the test of this type of chip to improve the accurate nature of device's test.
(2) The utility model relates to a towards quick chip impedance characteristic testing arrangement of piezoelectric type power, through being provided with probe anchor clamps, special demarcation parameter can be set for to probe anchor clamps to can restrain 2 numerical levels of white noise, further improve the accuracy of test.
(3) The utility model relates to a towards quick chip impedance characteristic testing arrangement of piezoelectricity type power, through being provided with impedance tester and computer, impedance tester, the equivalent circuit model who matches the quick chip of piezoelectricity type power can directly test this chip, improves 6 orders of magnitude of test frequency resolution, the impedance precision reaches 5 orders of magnitude, the computer can input VBA procedure, can realize the statistics and the calculation of measured data fast, be favorable to the batchization test of chip.
Drawings
FIG. 1 is a schematic view of the whole structure of the impedance characteristic testing device for piezoelectric force-sensitive chips of the present invention;
fig. 2 is a schematic view of the top view structure of the medium-voltage type force-sensitive piezoelectric chip of the present invention.
In the reference symbols: 1. a visual observation assembly; 11. a monitor; 12. a CCD camera; 2. a micro-motion alignment platform; 21. a zoom imaging camera; 22. a micromotion module; 23. a chip chuck; 24. a probe; 25. a probe holder; 3. an impedance tester; 4. a computer; 5. a piezoelectric type force sensitive chip wafer; 51. piezoelectric force sensitive chip.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
Examples
Referring to fig. 1-2, the present invention provides a technical solution: a testing device for impedance characteristics of a piezoelectric type force-sensitive chip comprises a visual observation assembly 1 and a micro-motion alignment platform 2 connected with the visual observation assembly 1, wherein a piezoelectric type force-sensitive chip wafer 5 is arranged on the micro-motion alignment platform 2, the micro-motion alignment platform 2 is connected with an impedance tester 3, the impedance tester 3 is electrically connected with a computer 4, the impedance tester 3 is a special instrument which can display frequency on a horizontal axis and frequency signal amplitude on a vertical axis, the special instrument is provided with an equivalent circuit model R, L, C, C0 matched with impedance characteristic tests of the piezoelectric type force-sensitive chip 51, provides a frequency test resolution of 1uHz and impedance measurement accuracy of +/-0.1, the computer 4 is provided with EXCEL office software, a program compiled by using VBA language is used for reading chip test original data of the impedance tester 3 through a data line, and carries out calculation and batch statistics on the data, so that the piezoelectric type force-sensitive chip 51 can be tested more conveniently.
The visual observation assembly 1 comprises a monitor 11, one end of the monitor 11 is electrically connected with a CCD camera 12, the monitor 11 adopts an LCD display screen, the size is 20inch, the working resolution is 1920 × 1080, the CCD camera 12 adopts an industrial camera, 500 ten thousand pixels and 2/3in 15 fps.
Wherein, the fine motion is aimed at platform 2 and is included zooming formation of image camera 21, the lower extreme that zooms formation of image camera 21 is provided with fine motion module 22, chip (holding) chuck 23 is installed to fine motion module 22's upper end, the top of chip (holding) chuck 23 is provided with probe anchor clamps 25, install probe 24 on the probe anchor clamps 25, zoom formation of image camera 21 optional zoom multiplying power (1 ~ 10) times, fine motion module 22 stroke scope can be selected according to chip (holding) chuck 23 size, if (4-10) in, the adjustment precision reaches the micron order, BNC interface is chooseed for use to probe anchor clamps 25, impedance 50 omega, make the installation to the quick chip 51 of piezoelectricity type force more stable, the test accuracy promotes greatly.
Wherein, the zooming imaging camera 21 is electrically connected with the CCD camera 12, which is convenient for using the device.
Wherein, chip (holding) chuck 23 adopts the pin location with fine motion platform 2, and the quick chip wafer of piezoelectricity type power 5 and the chip (holding) chuck 23 phase-match for the use of device is more stable.
Wherein, the piezoelectric type force sensitive chip 51 is arranged on the piezoelectric type force sensitive chip wafer 5, which is convenient for testing the device.
Specifically, when the utility model is used, the piezoelectric type force sensitive chip wafer 12 with the test function is firstly placed on the chip chuck 23, the visual observation assembly 1 is powered on, the CCD camera 12 is opened, the zoom imaging lens 21 is adjusted, the micromotion module 22 is controlled to simultaneously observe the monitor 11 with naked eyes, the probe 24 is aligned with the chip test electrode, the clamp end of the coaxial probe clamp 25 capable of inhibiting white noise by 2 orders of magnitude is connected with the probe 24, the BNC coaxial end is connected with the input end of the impedance tester 3, the impedance tester 3 of the piezoelectric type force sensitive chip 51 matched with the equivalent circuit model R, L, C, C0 is powered on, the preheating is carried out for 30 minutes, the probe clamp 25 is operated to carry out open circuit and short circuit calibration in sequence, the calibration of the impedance tester 3 and the probe clamp 25 is completed, the probe 24 is contacted with the chip test end after the parameter setting of the impedance tester 3 is completed, trigger test switch and accomplish the chip test, test data keeps in computer 4 in step, and the quick chip 51 of piezoelectricity type power accomplishes the test back, opens the program and the operation of VBA language establishment, and this program can calculate the impedance characteristic to statistics test index and chip serial number compare with prior art the utility model discloses can realize measured data's statistics and calculation fast, be favorable to the batched test of chip, until accomplishing whole work order.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above, it will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, but that the invention may be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a towards quick chip impedance characteristic testing arrangement of piezoelectricity type power, its characterized in that, including visual observation subassembly (1) and the fine motion alignment platform (2) of being connected with visual observation subassembly (1), be provided with quick chip wafer of piezoelectricity type (5) on fine motion alignment platform (2), fine motion alignment platform (2) are connected with impedance tester (3), impedance tester (3) electricity is connected with computer (4).
2. A piezoelectric type force-sensitive chip impedance characteristic testing device according to claim 1, wherein: the visual observation assembly (1) comprises a monitor (11), and one end of the monitor (11) is electrically connected with a CCD camera (12).
3. A piezoelectric type force-sensitive chip impedance characteristic testing device according to claim 1, wherein: the micro-motion alignment platform (2) comprises a zoom imaging camera (21), a micro-motion module (22) is arranged at the lower end of the zoom imaging camera (21), a chip chuck (23) is installed at the upper end of the micro-motion module (22), a probe clamp (25) is arranged above the chip chuck (23), and a probe (24) is installed on the probe clamp (25).
4. A piezoelectric type force-sensitive chip impedance characteristic testing device according to claim 3, wherein: the zooming imaging camera (21) is electrically connected with the CCD camera (12).
5. A piezoelectric type force-sensitive chip impedance characteristic testing device according to claim 3, wherein: the chip chuck (23) and the micro-motion alignment platform (2) are positioned by pins, and the piezoelectric type force sensitive chip wafer (5) is matched with the chip chuck (23).
6. A piezoelectric type force-sensitive chip impedance characteristic testing device according to claim 5, wherein: the piezoelectric type force sensitive chip wafer (5) is provided with a piezoelectric type force sensitive chip (51).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020740142.2U CN213240317U (en) | 2020-04-30 | 2020-04-30 | Impedance characteristic testing device for piezoelectric force-sensitive chip |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020740142.2U CN213240317U (en) | 2020-04-30 | 2020-04-30 | Impedance characteristic testing device for piezoelectric force-sensitive chip |
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| Publication Number | Publication Date |
|---|---|
| CN213240317U true CN213240317U (en) | 2021-05-18 |
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| CN202020740142.2U Active CN213240317U (en) | 2020-04-30 | 2020-04-30 | Impedance characteristic testing device for piezoelectric force-sensitive chip |
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- 2020-04-30 CN CN202020740142.2U patent/CN213240317U/en active Active
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Effective date of registration: 20240620 Address after: Room 101 and 102, 1st Floor, Building 6, No. 500 Huibang Road, Qingpu District, Shanghai, 201799 Patentee after: Shanghai Jirui Xinghan Sensing Technology Co.,Ltd. Country or region after: China Address before: Room 208, area D, 2 / F, building 1, No.480 Huapu Road, Qingpu District, Shanghai 201700 Patentee before: SHANGHAI ZHAOQING SENSOR TECHNOLOGY Co.,Ltd. Country or region before: China |