CN213223589U

CN213223589U - Automatic change plasma cleaning machine

Info

Publication number: CN213223589U
Application number: CN202021396785.6U
Authority: CN
Inventors: 邹军
Original assignee: Shenzhen Plasma Automation Equipment Co ltd
Current assignee: Shenzhen Plasma Automation Equipment Co ltd
Priority date: 2020-07-15
Filing date: 2020-07-15
Publication date: 2021-05-18
Anticipated expiration: 2030-07-15

Abstract

The utility model relates to an automatic change plasma cleaning machine, which comprises a bod, and set up the feeding mechanism on the organism, wiper mechanism and discharge mechanism, wiper mechanism includes the lower cover subassembly, the upper cover subassembly of multilayer electrode box and liftable, multilayer electrode box is located the vacuum cleaning cavity that forms between upper cover subassembly and the lower cover subassembly, feeding mechanism includes first driver, the second driver, push away material spare and installed part, first driver drive pushes away material spare and is straight reciprocating motion along the direction of ejection of compact box towards multilayer electrode box, second driver drive installed part is straight reciprocating motion in vertical direction, discharge mechanism includes the third driver, slider and a plurality of anchor clamps, third driver drive slider is straight reciprocating motion, anchor clamps are used for the product in the centre gripping ejection of compact box. This automatic change plasma cleaning machine sets up the multilayer electrode box that has a plurality of washing tanks to and the material pushing part and the anchor clamps that correspond, the multichip product transports simultaneously, washs, practices thrift the scavenging period, has greatly promoted the cleaning efficiency.

Description

Automatic change plasma cleaning machine

Technical Field

The utility model relates to an automatic change plasma cleaning machine technical field, especially relate to an automatic change plasma cleaning machine.

Background

A plasma cleaner, also called a plasma cleaner, or a plasma surface treatment apparatus, is a brand new high-tech technology, and achieves an effect that cannot be achieved by a conventional cleaning method by using plasma. IC package products (hereinafter, simply referred to as products) generally used for Lead frames (Lead frames, abbreviated as L/F) are cleaned before Wire bonding (Wire bonding) and before injection Molding (Molding);

as shown in fig. 1, in the existing automatic plasma cleaning machine, a piece of product to be cleaned taken out from a load tray is transported into a vacuum cleaning chamber through a transport rail by a transport mechanism (an arrow 1, an arrow 2, an arrow 3, and an arrow 4 indicate the motion of the transport mechanism) for cleaning, and after cleaning, the product is transported from the vacuum cleaning chamber into an unload material box through the transport rail by the transport mechanism.

In addition, the current plasma cleaning machine adopts a working mode of cleaning materials in a plane mode, and the efficiency is low when a product to be cleaned is taken one piece at a time for cleaning. Chinese patent CN106315136A discloses a high and low tray alternating mechanism of a sheet type plasma cleaning machine, which realizes feeding circulation by setting up two layers (individual) of trays which can slide in high and low, improves transportation efficiency by shortening the time of transporting the sheets, and although the trays are arranged in high and low two layers, the trays are also separately cleaned in high layer and bottom layer during cleaning, so as to improve cleaning efficiency. However, this structure only reduces some transportation time and has a limited improvement in cleaning efficiency.

SUMMERY OF THE UTILITY MODEL

Based on this, the problem that efficiency is lower in a mode that a current plasma cleaning machine takes a piece of product to be cleaned each time to clean. An automated plasma cleaning machine is provided. Can realize wasing the multi-disc product, very big improvement cleaning efficiency.

An automatic plasma cleaning machine comprises a machine body, a feeding mechanism, a cleaning mechanism and a discharging mechanism, wherein the feeding mechanism, the cleaning mechanism and the discharging mechanism are arranged on the machine body,

the cleaning mechanism comprises a lower cover component, a multilayer electrode box and a liftable upper cover component, the upper cover component covers the lower cover component to form a vacuum cleaning cavity, the multilayer electrode box is arranged on the lower cover component and is positioned in the vacuum cleaning cavity, the multilayer electrode box is horizontally provided with a plurality of cleaning tanks for placing products,

the feeding mechanism comprises a first driver, a second driver, a material pushing piece and an installation piece, the installation piece is used for placing a material discharging box, the first driver and the second driver are fixedly arranged on the machine body, the first driver is connected with the material pushing piece, the first driver drives the material pushing piece to do linear reciprocating motion along the direction of the material discharging box towards the multilayer electrode box, the second driver is connected with the installation piece, the second driver drives the installation piece to do linear reciprocating motion in the vertical direction,

discharge mechanism includes the third driver, slider and a plurality of anchor clamps, anchor clamps fixed set up in on the slider, the third driver with the slider is connected, the drive of third driver the slider is followed multilayer electrode box orientation go out the direction of magazine and be straight reciprocating motion, anchor clamps are used for the product in the centre gripping ejection of compact box.

In one embodiment, the multi-layer electrode cartridge is slidably disposed on the lower cover assembly.

In one embodiment, a fourth driver is fixedly arranged on the lower wall of the lower cover assembly, and a driving end of the fourth driver is provided with a connecting rod which is fixedly connected with the multilayer electrode box.

In one embodiment, the multi-layer electrode box comprises an electrode base plate and a plurality of electrode supports, wherein the electrode base plate is slidably arranged on the lower cover assembly and is electrically connected with the lower cover assembly, a mounting cavity is formed between every two electrode supports, and the electrode supports are provided with cleaning grooves arranged at intervals.

In one embodiment, the pushing part is provided with a plurality of pushing rods matched with the cleaning tank.

In one embodiment, the clamp is provided with a fifth driver, a first clamp and a second clamp, and the fifth driver drives the first clamp and the second clamp to open or close so that the first clamp and the second clamp form a plurality of clamping positions matched with the cleaning tank.

In one embodiment, the upper cover assembly comprises a support frame, a sixth driver and an upper cover plate, one end of the support frame is abutted to the machine body, the other end of the support frame is pivoted with the machine body through a bearing, the sixth driver is fixedly arranged on the support frame and is in driving connection with the upper cover plate, and the sixth driver drives the upper cover plate to do linear reciprocating motion towards the lower cover assembly in the vertical direction.

In one embodiment, the upper cover assembly further comprises a baffle plate, the baffle plate is fixedly arranged on the supporting frame, and the baffle plate is located between the material pushing part and the multilayer electrode box.

In one embodiment, a cartridge sensor is provided on the mount.

In one embodiment, the arrangement interval of the cleaning tanks is not less than 10 mm.

The automatic plasma cleaning machine is provided with the multilayer electrode box, the upper cover assembly and the vacuum cleaning cavity between the upper cover assembly and the lower cover assembly are internally provided with a plurality of cleaning grooves for placing products, the box body part is pushed out of the products of the material outlet box through the material pushing part, then the sliding part moves to enable the clamp to move and clamp the products, the products are moved and placed in the cleaning grooves, after all the cleaning grooves are filled with the products, the upper cover assembly covers the lower cover assembly, the multilayer electrode box filled with a plurality of products is cleaned in the vacuum cleaning cavity, and the products are pushed back to the material outlet box through the clamp after the cleaning is completed. Through the multilayer electrode box that sets up a plurality of washing tanks, realize that the multi-disc product washs simultaneously, practiced thrift the scavenging period, very big promotion the cleaning efficiency.

Drawings

FIG. 1 is a block diagram of a prior art automated plasma cleaning machine;

FIG. 2 is a schematic diagram of an automated plasma cleaning machine according to one embodiment;

FIG. 3 is a schematic structural view of a cleaning mechanism according to an embodiment;

FIG. 4 is a schematic structural view of a multilayer electrode cartridge according to one embodiment;

FIG. 5 is a schematic structural diagram of a discharging mechanism according to one embodiment;

FIG. 6 is a schematic structural view of a multilayer electrode cartridge according to another embodiment;

FIG. 7 is a partial schematic structural view of a discharge mechanism according to one embodiment;

FIG. 8 is a schematic structural view of a pusher according to one embodiment;

FIG. 9 is a schematic view of a lid assembly according to an embodiment.

Detailed Description

In order to make the above objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, as those skilled in the art will be able to make similar modifications without departing from the spirit and scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

As shown in fig. 2, an automatic plasma cleaning machine includes a machine body 10, a feeding mechanism 20, a cleaning mechanism 30 and a discharging mechanism 40, wherein the feeding mechanism 20, the cleaning mechanism 30 and the discharging mechanism 40 are disposed on the machine body 10. The body 10 includes a housing, which is fitted over the exterior of the feeding mechanism 20, the cleaning mechanism 30, and the discharging mechanism 40.

The feeding mechanism 20 comprises a first driver 210, a second driver 220, a pushing element 230 and a mounting element 240, the mounting element 240 is used for placing the material discharging box 50, the first driver 210 and the second driver 220 are fixedly arranged on the machine body 10, the first driver 210 is connected with the pushing element 230, the first driver 210 drives the pushing element 230 to do linear reciprocating motion along the direction of the material discharging box 50 towards the multilayer electrode box 320, the second driver 220 is connected with the mounting element 240, and the second driver 220 drives the mounting element 240 to do linear reciprocating motion in the vertical direction. The first driver 210 is used to push out the product 60 from the magazine 50, so that a portion of the product protrudes from the magazine 50 for the clamping of the clamp of the discharging mechanism 40. The second driver 220 is used to adjust the height of the mount 240 in the vertical direction so that the first driver 210 pushes out products 60 placed at different heights of the magazine 50. The commercially available outlet boxes 50 usually have a plurality of layers of equally spaced holding grooves, and one outlet box can hold a plurality of products 60. The mounting member 240 has a discharge mounting slot in which the discharge box 50 is located. To facilitate detection of the cartridge 50, a cartridge sensor is provided on the mount 240. The driving end of the second driver 220 is also provided with a lift sensor for sensing and recognizing the height of the installation member 240.

As shown in fig. 2, 3 and 4, the cleaning mechanism 30 includes a lower cover assembly 310, a multi-layer electrode cartridge 320 and a liftable upper cover assembly 330, the upper cover assembly 330 covers the lower cover assembly 310 to form a vacuum cleaning chamber 340, the multi-layer electrode cartridge 320 is disposed on the lower cover assembly 310 and located in the vacuum cleaning chamber 340, and the multi-layer electrode cartridge 320 has a plurality of cleaning tanks 321 for placing the products 60 in a horizontal direction. The contact portion of the multi-layered electrode can 320 and the bottom cap assembly 310 is electrically connected, and the contact portion is made of a conductive material such as copper, aluminum, etc.

As shown in fig. 5, the discharging mechanism 40 includes a third driver 410, a sliding member 420 and a plurality of clamps 430, the clamps 430 are fixedly disposed on the sliding member 420, the third driver 410 is connected to the sliding member 420, the third driver 410 drives the sliding member 420 to reciprocate linearly along the direction of the multi-layer electrode cartridge 320 toward the discharging box 50, and the clamps 430 are used for clamping the product 60 in the discharging box 50. The slider 420 is a doorframe structure.

The automatic plasma cleaning machine is provided with a multi-layer electrode box 320, a vacuum cleaning cavity 340 between an upper cover component 330 and a lower cover component 310, wherein the multi-layer electrode box 320 is provided with a plurality of cleaning grooves 321 for placing products 60 in the horizontal direction, the products 60 in the material outlet box 50 are pushed out of the box body part through a material pushing component 230, then a sliding component 420 moves to enable a clamp 430 to move and clamp the products 60, the products are moved and placed in the cleaning grooves 321, after all the cleaning grooves 321 are filled with the products 60, the upper cover component 330 covers the lower cover component 310, the multi-layer electrode box 320 containing the products 60 is cleaned in the vacuum cleaning cavity 340, and the products 60 are pushed back to the material outlet box 50 through the clamp 430 after the cleaning is completed. Through setting up multilayer electrode box 320 that has a plurality of washing tanks 321, realize that the multi-disc product 60 washs simultaneously, practiced thrift the scavenging period, very big promotion cleaning efficiency.

Because the action of transport mechanism needs the space, present cleaning machine all is provided with pan feeding runner and ejection of compact runner and transports for the position of letting out 2 charging trays for pan feeding runner and ejection of compact runner can be very long. Meanwhile, an interval needs to be reserved between the vacuum cleaning cavity 340 and the feeding flow channel and between the vacuum cleaning cavity 340 and the discharging flow channel, or the feeding flow channel discharging flow channel is set to be rotatable to form an interval, so that the vacuum cleaning cavity 340 can be formed after the upper cover assembly is abutted to the lower cover conveying mechanism. The feeding runner and the discharging runner are arranged, and an interval is reserved, so that the existing cleaning machine is large in size, multiple in parts, complex in structure and high in failure rate. As shown in fig. 6, in one embodiment, the multi-layered electrode cartridge 320 is slidably disposed on the lower cover assembly 310. Like this, multilayer electrode box 320 can slide for lower cover subassembly 310, both can directly roll off the scope of lower cover subassembly and upper cover subassembly, and direct butt joint goes out the product of magazine 50, need not to set up pan feeding runner and ejection of compact runner, has simplified the structure to reduce the fault rate, accelerated conveying efficiency, reduced the volume of whole machine. Preferably, a fourth driver (not shown) is fixedly disposed on the lower wall of the lower cover assembly 310, a driving end of the fourth driver is provided with a connecting rod 311, and the connecting rod 311 is fixedly connected to the multi-layered electrode cartridge 320. The fourth driver drives the multi-layered electrode cartridge 320 to slide on the lower cover assembly 310. The connection bar 311 may be rectangular or "U" shaped to facilitate bypassing the lower cover assembly 310. For example, the bottom of the mounting member 240 is provided with a movable groove 241 corresponding to the connection rod 311 to facilitate the movement of the connection rod 311.

As shown in fig. 6, in order to improve the cleaning efficiency of the multi-layered product of the multi-layered electrode cartridge 320, in one embodiment, the multi-layered electrode cartridge 320 includes an electrode base plate 322 and a plurality of electrode holders 323, the electrode base plate 322 is slidably disposed on the bottom cover assembly 310, and the electrode base plate 322 is electrically connected to the bottom cover assembly 310, and a mounting cavity is formed between every two electrode holders 323. And the electrode holder 323 is provided with a plurality of cleaning tanks 321 arranged at intervals. For example, the plurality of washing tanks 321 are uniformly distributed in the vertical direction. A plurality of washing tanks 321 are provided to place a plurality of products. Further, in order to avoid reduction in cleaning effect due to simultaneous cleaning of a plurality of products, the interval between the cleaning grooves 321 is not less than 10 mm.

The interval of the wash bowl 321 is the same as the interval of the placement bowl of the discharge box 50. Each cleaning groove 321 and the placing groove of one material discharging box 50 are on the same horizontal plane, so that the operation is convenient. Preferably, the pushing member 230 is provided with a plurality of pushing rods 231 matched with the cleaning groove 321. For example, the push rods 231 are spaced apart, and each push rod 231 corresponds to one of the cleaning tanks 321 and is located on the same horizontal plane. It is convenient to push out more than two products from the placing groove of the discharging box 50 at a time to make the products partially convex. As shown in fig. 3 and 7, further, the clamp 430 is provided with a fifth driver 431, a plurality of first clamps 432 and a plurality of second clamps 433, and the fifth driver 431 drives the first clamps 432 and the second clamps 433 to open or close, so that a plurality of clamping positions 434 matched with the washing tub 321 are formed by the first clamps 432 and the second clamps 433. Each of the first clamp 432 and the second clamp 433 is adapted to clamp a protruding portion of a product so as to simultaneously move and pull more than two products into the washing tank 321.

As shown in fig. 7, in order to prevent machine failure or damage caused by material jamming, the fixture 430 is provided with a bump connector 434, one end of the bump connector 434 is fixedly arranged on the slider 420, a sliding rod (not shown) and a material jamming sensor 4341 are arranged on the bump connector 434, a spring 4342 is arranged on the sliding rod, a part of the fifth driver 431 is fixed on the sliding rod, and the spring 4342 abuts against the fifth driver 431. When material jamming occurs, the spring 4342 plays a role in buffering, the fifth driver 431 displaces in the sliding rod 4341, and the material jamming sensor 4341 sends an alarm signal to the fifth driver 431. Bump guard connector 434 is fixedly disposed on slider 420.

As shown in fig. 1 and 8, the pushing member 230 further includes a pushing cylinder 232, the pushing cylinder 232 is connected to the push rod 231, and the pushing cylinder 232 is provided with an infrared sensor 233 for sensing a product of the magazine 50. Wherein, the distance between the push rod 231 and the push rod 231 is not less than 10 mm.

As shown in fig. 9, in order to solve the problem that the upper and

lower cover assemblies

330 and 310 are inconvenient to repair. In one embodiment, the upper cover assembly 330 includes a supporting frame 331, a sixth driver 332 and an upper cover plate 333, one end of the supporting frame 331 abuts against the machine body 10, the other end of the supporting frame 331 is pivotally connected to the machine body 10 through a bearing, the sixth driver 332 is fixedly disposed on the supporting frame 331, the sixth driver 332 is in driving connection with the upper cover plate 333, and the sixth driver 332 drives the upper cover plate 333 to make a linear reciprocating motion in a vertical direction towards the lower cover assembly 310. The other end of the supporting frame 331 is pivotally connected to the machine body 10 through the bearing 335, so that the supporting frame 331 can be turned 20 to 60 degrees, and the maintenance work such as maintenance and adjustment of the upper cover assembly 330 and the lower cover assembly 310 is facilitated.

In order to prevent the discharging box 50 from being dragged out of the mounting member 240 by the product, in one embodiment, the upper cover assembly 330 further includes a baffle 334, the baffle 334 is fixedly disposed on the supporting frame 331, and the baffle 334 is located between the pushing member 230 and the multi-layer electrode cartridge 320. When the cover assembly 330 is separated from the cover assembly 310, the baffle 334 abuts against the upper end of the outlet box 50.

The first driver 210, the second driver 220, the third driver 410, the fourth driver, the fifth driver 431 and the sixth driver 332 may be air cylinders or motors, and are controlled by a PLC controller, and may be commercially available as needed.

The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims

1. An automatic plasma cleaning machine is characterized by comprising a machine body, a feeding mechanism, a cleaning mechanism and a discharging mechanism, wherein the feeding mechanism, the cleaning mechanism and the discharging mechanism are arranged on the machine body,

2. The automated plasma cleaner of claim 1, wherein the multi-layered electrode cartridge is slidably disposed on the lower lid assembly.

3. The automatic plasma cleaning machine of claim 2, wherein a fourth driver is fixedly disposed on the lower wall of the lower lid assembly, and a connecting rod is disposed at a driving end of the fourth driver and is fixedly connected to the multi-layered electrode cartridge.

4. The automatic plasma cleaning machine according to claim 1, wherein the multi-layered electrode box comprises an electrode base plate and a plurality of electrode holders, the electrode base plate is slidably disposed on the lower cover assembly and electrically connected to the lower cover assembly, a mounting cavity is formed between every two electrode holders, and the electrode holders are provided with cleaning slots disposed at intervals.

5. The automatic plasma cleaning machine of claim 1, wherein the pushing member is provided with a plurality of pushing rods matched with the cleaning tank.

6. The automatic plasma cleaning machine of claim 1, wherein the clamp is provided with a fifth driver, a first clamp and a second clamp, the fifth driver drives the first clamp and the second clamp to open or close, so that the first clamp and the second clamp form a plurality of clamping positions matched with the cleaning tank.

7. The automatic plasma cleaning machine of claim 1, wherein the upper cover assembly comprises a support frame, a sixth driver and an upper cover plate, one end of the support frame abuts against the machine body, the other end of the support frame is pivoted with the machine body through a bearing, the sixth driver is fixedly arranged on the support frame, the sixth driver is in driving connection with the upper cover plate, and the sixth driver drives the upper cover plate to make linear reciprocating motion towards the lower cover assembly in the vertical direction.

8. The automatic plasma cleaning machine of claim 7, wherein the upper cover assembly further comprises a baffle plate fixedly disposed on the support frame, the baffle plate being located between the pusher and the multi-layered electrode cartridge.

9. The automated plasma cleaner of claim 1, wherein a cartridge sensor is disposed on the mount.

10. The automated plasma cleaning machine according to claim 1, wherein the cleaning tanks are provided at intervals of not less than 10 mm.