CN213160130U - Tail gas treatment device in polycrystalline silicon production - Google Patents
Tail gas treatment device in polycrystalline silicon production Download PDFInfo
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- CN213160130U CN213160130U CN202021572257.1U CN202021572257U CN213160130U CN 213160130 U CN213160130 U CN 213160130U CN 202021572257 U CN202021572257 U CN 202021572257U CN 213160130 U CN213160130 U CN 213160130U
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Abstract
The utility model discloses a tail gas treatment device in polysilicon production, which belongs to the technical field of polysilicon production and comprises a hydrolysis tower, a first pickling tank connected with a tower kettle of the hydrolysis tower, and a leaching absorption tower, the second acid washing tank is connected with the tower kettle of the leaching absorption tower, the leaching washing tower and the third acid washing tank are connected with the leaching washing tower, a Venturi scrubber is arranged above the hydrolysis tower and connected with a tail gas inlet pipe, the Venturi scrubber is connected with a first washing pipe, a first washing pump is connected with the second acid washing tank, the hydrolysis tower is connected with the leaching absorption tower, a first nozzle is arranged on the leaching absorption tower and connected with a second washing pipe, the leaching absorption tower is connected with the leaching washing tower, a second nozzle is arranged on the leaching washing tower and connected with a first liquid supplementing pipe, an air outlet is formed in the leaching washing tower, and the first acid washing tank, the second acid washing tank and the third acid washing tank are sequentially connected. The utility model discloses reduce the use amount of liquid, can guarantee the treatment effect of tail gas again.
Description
Technical Field
The utility model relates to a polycrystalline silicon production technical field, concretely relates to tail gas processing apparatus in polycrystalline silicon production.
Background
The polycrystalline silicon material is an electronic material which takes silicon as a raw material and is purified to reach a certain purity through a series of physical and chemical reactions, is an extremely important intermediate product in the silicon product industry chain, is a main raw material for manufacturing silicon polished wafers, solar cells and high-purity silicon products, and is the most basic functional material in the semiconductor industry, the electronic information industry and the solar photovoltaic cell industry. The waste gas generated in the production process of the polycrystalline silicon industry contains a large amount of chlorosilane, and in order to effectively treat the waste gas and discharge the tail gas up to the standard, the traditional washing process is mainly adopted at home at present, namely industrial water is used for washing the flue gas, and the chlorosilane in the waste gas is hydrolyzed. The existing water washing method comprises the steps that flue gas sequentially passes through a hydrolysis tower and an elution tower, liquid flowing out of the hydrolysis tower and the elution tower is directly discharged to a water washing tank, water in the water washing tank is directly pumped back to the hydrolysis tower and the elution tower through a pump for recycling, and a small amount of liquid in the water washing tank is discharged and supplemented. However, the existing washing device still has poor leaching effect, and the treated tail gas still discharges harmful gases such as chlorosilane and the like.
SUMMERY OF THE UTILITY MODEL
The utility model discloses aim at solving the problem that exists among the prior art, provide a tail gas processing apparatus in polycrystalline silicon production, the utility model discloses liquid in the third pickling bath passes through the overflow mouth and gets into the second pickling bath, and liquid in the second pickling bath passes through the overflow mouth and gets into first pickling bath, and unnecessary liquid passes through the overflow mouth and emits into sewage treatment plant in the first pickling bath, and the concentration in third pickling bath, second pickling bath and the first pickling bath increases in proper order, and the liquid that adopts different concentrations hydrolysises the drip washing to tail gas, can reduce the use amount of liquid, can guarantee the treatment effect of tail gas again.
The utility model aims at realizing through the following technical scheme:
the utility model provides a tail gas processing apparatus in polycrystalline silicon production which characterized in that: comprises a hydrolysis tower, a first pickling tank connected with a hydrolysis tower kettle, a leaching absorption tower, a second pickling tank connected with the leaching absorption tower kettle, a leaching washing tower and a third pickling tank connected with the leaching washing tower, wherein a Venturi scrubber is arranged above the hydrolysis tower, a first air inlet on the Venturi scrubber is connected with a tail gas inlet pipe, a liquid inlet of the Venturi scrubber is connected with a first washing pipe, a first washing pump is arranged on the first washing pipe, a liquid inlet of the first washing pump is connected with the second pickling tank, a first gas outlet on the hydrolysis tower is connected with a second air inlet on the leaching absorption tower through a first gas connecting pipe, a first nozzle is arranged on the leaching absorption tower, the first nozzle is connected with a second washing pipe, a second washing pump is arranged on the second washing pipe, a liquid inlet of the second washing pump is connected with the third pickling tank, the second gas outlet on the elution absorption tower is connected with a third gas inlet on the elution washing tower through a second gas connecting pipe, a second nozzle is arranged on the elution washing tower, the second nozzle is connected with a first liquid supplementing pipe, a third gas outlet is arranged above the elution washing tower, an overflow port of a third pickling tank is connected with the second pickling tank, and the overflow port of the second pickling tank is connected with the first pickling tank.
Preferably, the third gas outlet is connected with the gas inlet of the liquid seal tank through a third gas connecting pipe, the liquid inlet on the liquid seal tank is connected with a second liquid supplementing pipe, the gas outlet on the liquid seal tank is connected with an emptying pipe, the liquid outlet of the liquid seal tank is connected with a third pickling tank through a liquid outlet pipe, and the emptying pipe is provided with a detection port and a flame arrester.
Preferably, the hydrolysis tower is further provided with a third nozzle, a liquid inlet of the third nozzle is connected with a third washing pipe, the third washing pipe is further provided with a third washing pump, and a liquid inlet of the third washing pump is connected with the first pickling tank.
Preferably, pressure gauges are arranged on the hydrolysis tower, the leaching absorption tower and the leaching washing tower.
Preferably, the first pickling tank, the second pickling tank, the third pickling tank and the liquid seal tank are all provided with liquid level meters.
Preferably, the first washing pipe is further connected with a first circulation pipeline, the other end of the first circulation pipeline is connected with a fourth nozzle on the leaching absorption tower, and a second flow meter and a second flow regulating valve are arranged on the first circulation pipeline.
Preferably, the first liquid replenishing pipe is provided with a first flow meter and a first flow regulating valve.
Preferably, the second washing pipe is further connected with a second circulation pipeline, the other end of the second circulation pipeline is connected with a fifth nozzle on the washing and rinsing tower, and the second circulation pipeline is further provided with a third flow meter and a third flow regulating valve.
Preferably, the tail gas inlet pipe and the liquid seal tank are also provided with nitrogen inlet pipes.
Preferably, the tail gas inlet pipe is further provided with a fourth flowmeter and a fourth flow regulating valve.
The working principle is as follows: tail gas enters a hydrolysis tower through a Venturi scrubber through a tail gas inlet pipe, liquid in a second pickling tank enters the hydrolysis tower through a first washing pipe to carry out hydrolysis leaching, leached liquid enters a first pickling tank, gas after hydrolysis enters a leaching absorption tower through a first gas outlet and a first gas connecting pipe, liquid in a third pickling tank enters the leaching absorption tower through a second washing pipe and a first nozzle, the tail gas is leached by the liquid for the first time, the leached liquid enters a second pickling tank, the gas after the first leaching enters a leaching washing tower through a second gas outlet and a second gas connecting pipe, the liquid in a first liquid supplementing pipe enters the leaching washing tower through a second nozzle, the tail gas in the liquid is leached for the second time, the leached liquid enters a third pickling tank, and the gas after the second leaching enters a liquid sealing tank through a third gas outlet and a third gas connecting pipe, and the liquid enters the liquid seal tank through the second liquid supplementing pipe, and the gas after the secondary leaching enters the liquid seal tank from the liquid and is discharged through the vent pipe. The vent pipe is provided with a detection port, the indexes of vent tail gas are periodically detected, and the process parameters are further adjusted through the indexes, so that the tail gas treatment quality is ensured. Liquid in the third pickling bath enters the second pickling bath through the overflow port, liquid in the second pickling bath enters the first pickling bath through the overflow port, redundant liquid in the first pickling bath is discharged into the sewage treatment device through the overflow port, the concentrations in the third pickling bath, the second pickling bath and the first pickling bath are sequentially increased, liquid with different concentrations is adopted to hydrolyze and drip wash tail gas, the using amount of the liquid can be reduced, and the treatment effect of the tail gas can be guaranteed.
The beneficial effects of this technical scheme are as follows:
the utility model provides a pair of tail gas processing apparatus in polycrystalline silicon production, liquid in the third pickling bath passes through the overflow mouth and gets into the second pickling bath, liquid in the second pickling bath passes through the overflow mouth and gets into first pickling bath, unnecessary liquid passes through the overflow mouth and emits into sewage treatment plant in the first pickling bath, the third pickling bath, the concentration in second pickling bath and the first pickling bath increases in proper order, the liquid that adopts different concentrations carries out the drip washing of hydrolysising to tail gas, can reduce the use amount of liquid, can guarantee the treatment effect of tail gas again.
Two, the utility model provides a pair of tail gas processing apparatus in polycrystalline silicon production, the treatment effect of tail gas is further guaranteed in the use of liquid seal tank, and the detection mouth that sets up on the liquid seal tank blow-down pipe can regularly detect tail gas content, and convenient further adjustment process parameter guarantees tail gas treatment quality.
Thirdly, the utility model provides a pair of tail gas processing apparatus in polycrystalline silicon production, hydrolysis tower, drip washing absorption tower and drip washing tower are the sky tower, add the third nozzle on the hydrolysis tower, and the fourth nozzle is added to the drip washing absorption tower, adds the fifth nozzle in the drip washing tower, increases tail gas and the area of contact of liquid in hydrolysis tower, drip washing absorption tower and drip washing tower for it is more thorough to hydrolyze and drip washing, guarantees tail gas treatment effect. According to the tail gas detection index, the amount of liquid in the circulating pipeline is adjusted at any time, and the flow regulation of the liquid is realized through the cooperation of the flowmeter and the flow regulating valve.
Fourth, the utility model provides a pair of tail gas processing apparatus in polycrystalline silicon production, hydrolysis tower, drip washing absorption tower and drip washing tower set up the manometer, survey tower internal pressure at any time, guarantee safety in production.
Fifth, the utility model provides a pair of tail gas processing apparatus in polycrystalline silicon production, the nitrogen gas intake pipe is used for replacing the tail gas in the tower after blowing out, convenient the maintenance.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural diagram of the hydrolysis tower of the present invention;
FIG. 3 is a schematic structural view of the leaching absorption tower of the present invention;
FIG. 4 is a schematic structural view of the rinsing tower of the present invention;
wherein: 1. a hydrolysis tower; 1.2, a first gas connecting pipe; 1.3, a third nozzle; 1.4, a first air outlet; 2. a first pickling tank; 3. leaching the absorption tower; 3.1, a second air inlet; 3.2, a first nozzle; 3.3, a second air outlet; 3.4, a second gas connecting pipe; 3.5, a fourth nozzle; 4. a second acid washing tank; 5. washing the washing tower; 5.1, a third air inlet; 5.2, a second nozzle; 5.3, a third air outlet; 5.4, a fifth nozzle; 5.5, a third gas connecting pipe; 6. a third pickling tank; 7. a venturi scrubber; 7.1, a first air inlet; 8. a tail gas inlet pipe; 8.1, a fourth flow meter; 8.2, a fourth flow regulating valve; 9. a first wash pipe; 9.1, a first washing pump; 10. a second wash pipe; 10.1, a second washing pump; 11. a first liquid replenishing pipe; 11.1, a first flow meter; 11.2, a first flow regulating valve; 12. liquid sealing the tank; 12.1, a second liquid replenishing pipe; 12.2, an emptying pipe; 12.3, a liquid outlet pipe; 12.4, a detection port; 12.5, flame arrestors; 13. a third wash pipe; 13.1, a third washing pump; 14. a pressure gauge; 15. a liquid level meter; 16. a first recycle line; 16.1, a second flow meter; 16.2, a second flow regulating valve; 17. a second recycle line; 17.1, a third flow meter; 17.2, a third flow regulating valve; 18. and a nitrogen inlet pipe.
Detailed Description
The present invention will be described in further detail with reference to examples, but the present invention is not limited thereto.
Example 1
As a most basic embodiment of the present invention, the present embodiment discloses a tail gas treatment device in polysilicon production, as shown in fig. 1-4, comprising a hydrolysis tower 1, a first pickling tank 2 connected to the tower kettle of the hydrolysis tower 1, an elution absorption tower 3, a second pickling tank 4 connected to the tower kettle of the elution absorption tower 3, an elution washing tower 5, and a third pickling tank 6 connected to the elution washing tower 5, wherein a venturi scrubber 7 is disposed above the hydrolysis tower 1, a first gas inlet 7.1 of the venturi scrubber 7 is connected to a tail gas inlet pipe 8, a liquid inlet of the venturi scrubber 7 is connected to a first washing pipe 9, the first washing pipe 9 is provided with a first washing pump 9.1, a liquid inlet of the first washing pump 9.1 is connected to the second pickling tank 4, a first gas outlet of the hydrolysis tower 1 is connected to a second gas inlet 3.1 of the elution absorption tower 3 through a first gas connection pipe 1.2, be provided with first nozzle 3.2 on the elution absorption tower 3, first nozzle 3.2 links to each other with second washing pipe 10, be provided with second washing pump 10.1 on the second washing pipe 10, the inlet of second washing pump 10.1 links to each other with third pickling bath 6, second gas outlet 3.3 on the elution absorption tower 3 links to each other through third air inlet 5.1 on second gas connecting pipe 3.4 and the elution washing tower 5, be provided with second nozzle 5.2 on the elution washing tower 5, second nozzle 5.2 links to each other with first moisturizing liquid pipe 11, elution washing tower 5 top is provided with third gas outlet 5.3, the overflow mouth and the second pickling bath 4 of third pickling bath 6 link to each other, the overflow mouth and the first pickling bath 2 of second pickling bath 4 link to each other.
Example 2
As a preferred embodiment of the present invention, this embodiment discloses a tail gas treatment device in polysilicon production, as shown in fig. 1-4, comprising a hydrolysis tower 1, a first pickling tank 2 connected to the tower kettle of the hydrolysis tower 1, an elution absorption tower 3, a second pickling tank 4 connected to the tower kettle of the elution absorption tower 3, an elution washing tower 5, and a third pickling tank 6 connected to the elution washing tower 5, wherein a venturi scrubber 7 is disposed above the hydrolysis tower 1, a first gas inlet 7.1 of the venturi scrubber 7 is connected to a tail gas inlet pipe 8, a liquid inlet of the venturi scrubber 7 is connected to a first washing pipe 9, the first washing pipe 9 is provided with a first washing pump 9.1, a liquid inlet of the first washing pump 9.1 is connected to the second pickling tank 4, a first gas outlet of the hydrolysis tower 1 is connected to a second gas inlet 3.1 of the elution absorption tower 3 through a first gas connection pipe 1.2, be provided with first nozzle 3.2 on the elution absorption tower 3, first nozzle 3.2 links to each other with second washing pipe 10, be provided with second washing pump 10.1 on the second washing pipe 10, the inlet of second washing pump 10.1 links to each other with third pickling bath 6, second gas outlet 3.3 on the elution absorption tower 3 links to each other through third air inlet 5.1 on second gas connecting pipe 3.4 and the elution washing tower 5, be provided with second nozzle 5.2 on the elution washing tower 5, second nozzle 5.2 links to each other with first moisturizing liquid pipe 11, elution washing tower 5 top is provided with third gas outlet 5.3, the overflow mouth and the second pickling bath 4 of third pickling bath 6 link to each other, the overflow mouth and the first pickling bath 2 of second pickling bath 4 link to each other.
Preferably, third gas outlet 5.3 links to each other through the air inlet of third gas connecting pipe with liquid seal tank 12, the inlet on the liquid seal tank 12 links to each other with second fluid infusion pipe 12.1, gas outlet on the liquid seal tank 12 links to each other with blow-down pipe 12.2, the liquid outlet of liquid seal tank 12 passes through drain pipe 12.3 and links to each other with third pickling bath 6, be provided with detection mouth 12.4 and spark arrester 12.5 on the blow-down pipe 12.2.
Preferably, the hydrolysis tower 1 is further provided with a third nozzle 1.3, a liquid inlet of the third nozzle 1.3 is connected with a third washing pipe 13, the third washing pipe 13 is further provided with a third washing pump 13.1, and a liquid inlet of the third washing pump 13.1 is connected with the first pickling tank 2.
Example 3
As a preferred embodiment of the present invention, this embodiment discloses a tail gas treatment device in polysilicon production, as shown in fig. 1-4, comprising a hydrolysis tower 1, a first pickling tank 2 connected to the tower kettle of the hydrolysis tower 1, an elution absorption tower 3, a second pickling tank 4 connected to the tower kettle of the elution absorption tower 3, an elution washing tower 5, and a third pickling tank 6 connected to the elution washing tower 5, wherein a venturi scrubber 7 is disposed above the hydrolysis tower 1, a first gas inlet 7.1 of the venturi scrubber 7 is connected to a tail gas inlet pipe 8, a liquid inlet of the venturi scrubber 7 is connected to a first washing pipe 9, the first washing pipe 9 is provided with a first washing pump 9.1, a liquid inlet of the first washing pump 9.1 is connected to the second pickling tank 4, a first gas outlet of the hydrolysis tower 1 is connected to a second gas inlet 3.1 of the elution absorption tower 3 through a first gas connection pipe 1.2, be provided with first nozzle 3.2 on the elution absorption tower 3, first nozzle 3.2 links to each other with second washing pipe 10, be provided with second washing pump 10.1 on the second washing pipe 10, the inlet of second washing pump 10.1 links to each other with third pickling bath 6, second gas outlet 3.3 on the elution absorption tower 3 links to each other through third air inlet 5.1 on second gas connecting pipe 3.4 and the elution washing tower 5, be provided with second nozzle 5.2 on the elution washing tower 5, second nozzle 5.2 links to each other with first moisturizing liquid pipe 11, elution washing tower 5 top is provided with third gas outlet 5.3, the overflow mouth and the second pickling bath 4 of third pickling bath 6 link to each other, the overflow mouth and the first pickling bath 2 of second pickling bath 4 link to each other.
Preferably, third gas outlet 5.3 links to each other through the air inlet of third gas connecting pipe with liquid seal tank 12, the inlet on the liquid seal tank 12 links to each other with second fluid infusion pipe 12.1, gas outlet on the liquid seal tank 12 links to each other with blow-down pipe 12.2, the liquid outlet of liquid seal tank 12 passes through drain pipe 12.3 and links to each other with third pickling bath 6, be provided with detection mouth 12.4 and spark arrester 12.5 on the blow-down pipe 12.2.
Preferably, the hydrolysis tower 1 is further provided with a third nozzle 1.3, a liquid inlet of the third nozzle 1.3 is connected with a third washing pipe 13, the third washing pipe 13 is further provided with a third washing pump 13.1, and a liquid inlet of the third washing pump 13.1 is connected with the first pickling tank 2.
Preferably, pressure gauges 14 are arranged on the hydrolysis tower 1, the leaching absorption tower 3 and the leaching washing tower 5.
Preferably, the first pickling tank 2, the second pickling tank 4, the third pickling tank 6 and the liquid seal tank 12 are all provided with liquid level meters 15.
Preferably, the first washing pipe 9 is further connected to a first circulation line 16, the other end of the first circulation line 16 is connected to a fourth nozzle 3.5 on the leaching absorption tower 3, and the first circulation line 16 is provided with a second flow meter 16.1 and a second flow regulating valve 16.2.
Preferably, a first flow meter 11.1 and a first flow regulating valve 11.2 are arranged on the first liquid replenishing pipe 11.
Preferably, the second washing pipe 10 is further connected to a second circulation line 17, the other end of the second circulation line 17 is connected to a fifth nozzle 5.4 of the rinsing and washing tower 5, and the second circulation line 17 is further provided with a third flow meter 17.1 and a third flow regulating valve 17.2.
Preferably, a nitrogen inlet pipe 18 is further arranged on the tail gas inlet pipe 8 and the liquid seal tank 12.
Preferably, the exhaust gas inlet pipe 8 is further provided with a fourth flowmeter 8.1 and a fourth flow regulating valve 8.2.
The working principle is as follows: tail gas enters a hydrolysis tower 1 through a venturi scrubber 7 through a tail gas inlet pipe 8, liquid in a second acid washing tank 4 enters the hydrolysis tower 1 through a first washing pipe 9 to carry out hydrolysis leaching, the leached liquid enters a first acid washing tank 2, gas after hydrolysis enters a leaching absorption tower 3 through a first gas outlet and a first gas connecting pipe 1.2, liquid in a third acid washing tank 6 enters the leaching absorption tower 3 through a second washing pipe 10 and a first nozzle 3.2, the liquid carries out first leaching on the tail gas, the leached liquid enters the second acid washing tank 4, the once leached gas enters a leaching washing tower 5 through a second gas outlet 3.3 and a second gas connecting pipe 3.4, the liquid in a first liquid supplementing pipe 11 enters a leaching tower 5 through a second nozzle 5.2, the tail gas in the liquid carries out second leaching, the leached liquid enters the third acid washing tank 6, the twice leached gas enters a sealing tank 12 through a third gas outlet 5.3 and a third gas connecting pipe, the liquid enters the liquid seal tank 12 through the second liquid supplementing pipe 12.1, and the gas after the secondary leaching enters the liquid seal tank 12 from the liquid and is discharged through the discharge pipe 12.2. And a detection port 12.4 is arranged at the position of the vent pipe 12.2, the indexes of vent tail gas are periodically detected, and the process parameters are further adjusted through the indexes, so that the tail gas treatment quality is ensured. Liquid in the third pickling bath 6 enters the second pickling bath 4 through the overflow port, liquid in the second pickling bath 4 enters the first pickling bath 2 through the overflow port, redundant liquid in the first pickling bath 2 is discharged into the sewage treatment device through the overflow port, the third pickling bath 6, the concentration in the second pickling bath 4 and the first pickling bath 2 is increased in sequence, the liquid with different concentrations is adopted to hydrolyze and elute tail gas, the use amount of the liquid can be reduced, and the treatment effect of the tail gas can be ensured.
The beneficial effects of this technical scheme are as follows:
the utility model provides a pair of tail gas processing apparatus in polycrystalline silicon production, liquid in the third pickling bath 6 passes through the overflow mouth and gets into second pickling bath 4, liquid in the second pickling bath 4 passes through the overflow mouth and gets into first pickling bath 2, unnecessary liquid passes through the overflow mouth and emits into sewage treatment plant in the first pickling bath 2, third pickling bath 6, the concentration in second pickling bath 4 and the first pickling bath 2 increases in proper order, the liquid that adopts different concentrations hydrolysises drip washing to tail gas, can reduce the use amount of liquid, can guarantee the treatment effect of tail gas again.
The use of liquid seal tank 12 further guarantees the treatment effect of tail gas, and the detection mouth 12.4 that sets up on 12.2 blow-down pipes of liquid seal tank 12 can regularly detect tail gas content, and the convenient further adjustment process parameter guarantees tail gas treatment quality. The hydrolysis tower 1, the leaching absorption tower 3 and the leaching washing tower 5 are all empty towers, the third nozzle 1.3 is additionally arranged on the hydrolysis tower 1, the fourth nozzle 3.5 is additionally arranged on the leaching absorption tower 3, the fifth nozzle 5.4 is additionally arranged in the leaching washing tower 5, the contact area of tail gas and liquid in the hydrolysis tower 1, the leaching absorption tower 3 and the leaching washing tower 5 is increased, hydrolysis and leaching are more thorough, and the tail gas treatment effect is ensured. According to the tail gas detection index, the amount of liquid in the circulating pipeline is adjusted at any time, and the flow regulation of the liquid is realized through the cooperation of the flowmeter and the flow regulating valve. The hydrolysis tower 1, the leaching absorption tower 3 and the leaching washing tower 5 are provided with pressure gauges 14, so that the pressure in the towers can be observed at any time, and the safe production can be ensured. The nitrogen inlet pipe 18 is used for replacing tail gas in the tower after the furnace is stopped, so that the maintenance is convenient.
The above is only the preferred embodiment of the present invention, not to the limitation of the present invention in any form, all the technical matters of the present invention all fall into the protection scope of the present invention to any simple modification and equivalent change of the above embodiments.
Claims (10)
1. The utility model provides a tail gas processing apparatus in polycrystalline silicon production which characterized in that: comprises a hydrolysis tower (1), a first pickling tank (2) connected with a tower kettle of the hydrolysis tower (1), an elution absorption tower (3), a second pickling tank (4) connected with the tower kettle of the elution absorption tower (3), an elution washing tower (5) and a third pickling tank (6) connected with the elution washing tower (5), wherein a Venturi scrubber (7) is arranged above the hydrolysis tower (1), a first air inlet (7.1) on the Venturi scrubber (7) is connected with a tail gas inlet pipe (8), a liquid inlet of the Venturi scrubber (7) is connected with a first washing pipe (9), a first washing pump (9.1) is arranged on the first washing pipe (9), a liquid inlet of the first washing pump (9.1) is connected with the second pickling tank (4), a first air outlet (1.4) on the hydrolysis tower (1) is connected with a second air inlet (3.1) on the elution absorption tower (3) through a first gas connecting pipe (1.2), the leaching absorption tower (3) is provided with a first nozzle (3.2), the first nozzle (3.2) is connected with a second washing pipe (10), a second washing pump (10.1) is arranged on the second washing pipe (10), a liquid inlet of the second washing pump (10.1) is connected with a third pickling tank (6), a second air outlet (3.3) on the leaching absorption tower (3) is connected with a third air inlet (5.1) on the leaching washing tower (5) through a second air connecting pipe (3.4), the washing tower (5) is provided with a second nozzle (5.2), the second nozzle (5.2) is connected with the first liquid replenishing pipe (11), a third air outlet (5.3) is arranged above the washing tower (5), an overflow port of the third pickling tank (6) is connected with the second pickling tank (4), an overflow port of the second pickling tank (4) is connected with the first pickling tank (2).
2. The device for treating tail gas in the production of polycrystalline silicon according to claim 1, wherein: third gas outlet (5.3) link to each other with the air inlet of liquid seal tank (12) through third gas connecting pipe (5.5), inlet on liquid seal tank (12) links to each other with second liquid supply pipe (12.1), gas outlet on liquid seal tank (12) links to each other with blow-down pipe (12.2), the liquid outlet of liquid seal tank (12) passes through drain pipe (12.3) and links to each other with third pickling bath (6), be provided with on blow-down pipe (12.2) and detect mouth (12.4) and back-fire relief device (12.5).
3. The device for treating tail gas in the production of polycrystalline silicon according to claim 1, wherein: still be provided with third nozzle (1.3) on the tower of hydrolysising (1), the inlet of institute third nozzle (1.3) links to each other with third washing pipe (13), still be provided with third washing pump (13.1) on third washing pipe (13), the inlet of shown third washing pump (13.1) links to each other with first pickling bath (2).
4. The device for treating tail gas in the production of polycrystalline silicon according to claim 1, wherein: pressure gauges (14) are arranged on the hydrolysis tower (1), the leaching absorption tower (3) and the leaching washing tower (5).
5. The device for treating tail gas in the production of polycrystalline silicon according to claim 2, wherein: and liquid level meters (15) are arranged on the first pickling tank (2), the second pickling tank (4), the third pickling tank (6) and the liquid seal tank (12).
6. The device for treating tail gas in the production of polycrystalline silicon according to claim 1, wherein: the first washing pipe (9) is also connected with a first circulating pipeline (16), the other end of the first circulating pipeline (16) is connected with a fourth nozzle (3.5) on the leaching absorption tower (3), and a second flow meter (16.1) and a second flow regulating valve (16.2) are arranged on the first circulating pipeline (16).
7. The device for treating tail gas in the production of polycrystalline silicon according to claim 1, wherein: the first liquid supplementing pipe (11) is provided with a first flow meter (11.1) and a first flow regulating valve (11.2).
8. The device for treating tail gas in the production of polycrystalline silicon according to claim 1, wherein: the second washing pipe (10) is also connected with a second circulating pipeline (17), the other end of the second circulating pipeline (17) is connected with a fifth nozzle (5.4) on the washing and rinsing tower (5), and a third flow meter (17.1) and a third flow regulating valve (17.2) are further arranged on the second circulating pipeline (17).
9. The device for treating tail gas in the production of polycrystalline silicon according to claim 1, wherein: and a nitrogen inlet pipe (18) is also arranged on the tail gas inlet pipe (8) and the liquid seal tank (12).
10. The device for treating tail gas in the production of polycrystalline silicon according to claim 9, wherein: and a fourth flowmeter (8.1) and a fourth flow regulating valve (8.2) are further arranged on the tail gas inlet pipe (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021572257.1U CN213160130U (en) | 2020-08-03 | 2020-08-03 | Tail gas treatment device in polycrystalline silicon production |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021572257.1U CN213160130U (en) | 2020-08-03 | 2020-08-03 | Tail gas treatment device in polycrystalline silicon production |
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| Publication Number | Publication Date |
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| CN213160130U true CN213160130U (en) | 2021-05-11 |
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| CN202021572257.1U Active CN213160130U (en) | 2020-08-03 | 2020-08-03 | Tail gas treatment device in polycrystalline silicon production |
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2020
- 2020-08-03 CN CN202021572257.1U patent/CN213160130U/en active Active
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Assignee: Sichuan Yongxiang Energy Technology Co.,Ltd. Assignor: SICHUAN YONGXIANG NEW ENERGY Co.,Ltd. Contract record no.: X2023510000014 Denomination of utility model: A tail gas treatment device for polycrystalline silicon production Granted publication date: 20210511 License type: Common License Record date: 20230816 |