CN220779640U - Tail gas purification and accident hydrogen chloride treatment system in electronic grade hydrogen chloride production process - Google Patents
Tail gas purification and accident hydrogen chloride treatment system in electronic grade hydrogen chloride production process Download PDFInfo
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- CN220779640U CN220779640U CN202322473591.1U CN202322473591U CN220779640U CN 220779640 U CN220779640 U CN 220779640U CN 202322473591 U CN202322473591 U CN 202322473591U CN 220779640 U CN220779640 U CN 220779640U
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- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 title claims abstract description 537
- 229910000041 hydrogen chloride Inorganic materials 0.000 title claims abstract description 118
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 title claims abstract description 118
- 239000007789 gas Substances 0.000 title claims abstract description 110
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 37
- 238000000746 purification Methods 0.000 title claims abstract description 25
- 238000010521 absorption reaction Methods 0.000 claims abstract description 266
- 239000003513 alkali Substances 0.000 claims abstract description 84
- 239000002253 acid Substances 0.000 claims description 115
- 239000007788 liquid Substances 0.000 claims description 73
- 238000003860 storage Methods 0.000 claims description 40
- 239000012071 phase Substances 0.000 claims description 31
- 238000012856 packing Methods 0.000 claims description 12
- 239000000945 filler Substances 0.000 claims description 11
- 239000007791 liquid phase Substances 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 230000001105 regulatory effect Effects 0.000 claims description 8
- 239000008235 industrial water Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 238000012545 processing Methods 0.000 claims description 2
- 230000008676 import Effects 0.000 claims 1
- 238000009423 ventilation Methods 0.000 abstract description 8
- 238000004140 cleaning Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000004064 recycling Methods 0.000 description 3
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 239000007792 gaseous phase Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 239000011780 sodium chloride Substances 0.000 description 2
- 206010003497 Asphyxia Diseases 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 210000001508 eye Anatomy 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 210000004400 mucous membrane Anatomy 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 210000002345 respiratory system Anatomy 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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Abstract
The utility model relates to a tail gas purification and accident hydrogen chloride treatment system in the production process of electronic grade hydrogen chloride, which comprises the following components: the first hydrogen chloride absorption unit is used for bearing the primary absorption function of intermittent emission of the hydrogen chloride-containing noncondensable gas purification of the production system under the normal working condition and treatment of leaked hydrogen chloride gas under the accident working condition; the second hydrogen chloride absorption unit is used for bearing a secondary absorption function of purifying chlorine hydride-containing noncondensable gas intermittently discharged by the production system under normal working conditions and a secondary absorption and alkali absorption function of treating leaked hydrogen chloride gas under accident working conditions; meanwhile, the purifying function of trace hydrogen chloride existing in the circulating ventilation of the factory building is born. The utility model adopts two absorption units and three absorption sections in total, and can simultaneously meet the requirements of the production device on purifying and treating three different hydrogen chloride-containing tail gases under daily working conditions and accident working conditions; the utility model has the advantages of short treatment flow, high absorptivity, less equipment, small occupied area, low operation cost and safe and stable equipment operation.
Description
Technical Field
The utility model belongs to the technical field of hydrogen chloride tail gas treatment, and particularly relates to a tail gas purification and accident hydrogen chloride treatment system in an electronic grade hydrogen chloride production process.
Background
The electronic grade hydrogen chloride is hydrogen chloride gas with the purity of 99.99-99.9995 percent, is mainly applied to the production of large-scale integrated circuits in the semiconductor industry, such as monocrystalline silicon wafer gas phase polishing, epitaxial base corrosion and the like, and is also applied to medicine, chemical industry, metal surface treatment, hard alloy production and the like. The electronic grade hydrogen chloride is used as a high-end gas, has important application value in various fields, and along with the continuous development of technological progress and industrial production, the application range and the demand of the electronic grade hydrogen chloride are also continuously enlarged and improved.
The hydrogen chloride gas has asphyxia smell, has strong stimulation to the upper respiratory tract, corrodes eyes, skin and mucous membrane, is a highly hazardous medium, and the hydrogen chloride production factory is basically a full-closed factory, so that tail gas purification in the production of the treated hydrogen chloride is extremely important. In the production process, 3 working conditions mainly exist in the tail gas purification working section. Firstly, the interior of a factory building needs to be circularly ventilated, and trace hydrogen chloride possibly existing in the factory building is purified; secondly, the noncondensable gas in the production needs to be discharged periodically to maintain the normal production of the system, and the partial gas also needs to be purified and discharged up to the standard, and the working conditions are generally called normal working conditions. Thirdly, sudden abnormal working conditions in the production process, namely accident working conditions, such as leakage of a hydrogen chloride steel bottle or tripping of a safety valve of a production system, a large amount of hydrogen chloride can be leaked at the moment, and the leakage amount is generally 5-12 t/h according to different production scales of devices. The leakage amount of the accident working condition is large and the leakage time is variable, so the requirement on the accident hydrogen chloride treatment system is extremely high.
At present, most of the purifying devices adopted by production enterprises are made of polypropylene through multi-tower absorption, the purifying requirements of daily working conditions are mainly considered at the beginning of design, the processing requirements of accident states are not considered, and meanwhile, equipment is easy to age and low in safety coefficient. Along with the stricter national environmental protection policy, the new project needs to consider the accident hydrogen chloride treatment system, so how one set of system can efficiently treat the three working conditions, and meanwhile, the process is simple, and the operation cost is low, which is particularly urgent.
Disclosure of Invention
The utility model aims to provide a tail gas purification and accident hydrogen chloride treatment system in the electronic grade hydrogen chloride production process, so as to solve the problems of low safety coefficient and no accident hydrogen chloride treatment function of the existing purification device.
The utility model adopts the technical scheme that:
an exhaust gas purification and accident hydrogen chloride treatment system in an electronic grade hydrogen chloride production process comprises a first hydrogen chloride absorption unit and a second hydrogen chloride absorption unit which are communicated;
the first hydrogen chloride absorption unit comprises a primary hydrochloric acid absorption tower, a primary hydrochloric acid cooler, a primary hydrochloric acid circulating pump and a hydrochloric acid product tank; the concentrated acid absorption section is arranged in the primary hydrochloric acid absorption tower, the lower part of the primary hydrochloric acid absorption tower is communicated with the primary hydrochloric acid circulating pump, the outlet of the primary hydrochloric acid circulating pump is communicated with the primary hydrochloric acid cooler, the outlet of the primary hydrochloric acid circulating pump is also communicated with the hydrochloric acid product tank, and the primary hydrochloric acid cooler is communicated with the upper part of the primary hydrochloric acid absorption tower;
the second hydrogen chloride absorption unit comprises a secondary hydrochloric acid absorption tower, a secondary hydrochloric acid cooler, a secondary hydrochloric acid circulating pump, an alkali liquor circulating pump and an alkali liquor circulating tank; the dilute acid absorption section and the alkali liquor absorption section are sequentially arranged in the secondary hydrochloric acid absorption tower from bottom to top, the lower part of the dilute acid absorption section is communicated with a secondary hydrochloric acid circulating pump, the outlet of the secondary hydrochloric acid circulating pump is communicated with a secondary hydrochloric acid cooler, and the secondary hydrochloric acid cooler is communicated with the upper part of the dilute acid absorption section; the lower part of the alkali liquor absorption section is communicated with an alkali liquor circulation tank, the alkali liquor circulation tank is communicated with an alkali liquor circulation pump, and the outlet of the alkali liquor circulation pump is communicated with the upper part of the alkali liquor absorption section; the top end of the secondary hydrochloric acid absorption tower is provided with a gas phase outlet of the secondary hydrochloric acid absorption tower, and the gas phase outlet of the secondary hydrochloric acid absorption tower is communicated with a chimney through a tail gas fan.
The first hydrogen chloride absorption unit is used for bearing the primary absorption function of intermittent emission of the hydrogen chloride-containing noncondensable gas purification of the production system under the normal working condition and treatment of leaked hydrogen chloride gas under the accident working condition;
the second hydrogen chloride absorption unit is used for bearing a secondary absorption function of purifying chlorine hydride-containing noncondensable gas intermittently discharged by the production system under normal working conditions and a secondary absorption and alkali absorption function of treating leaked hydrogen chloride gas under accident working conditions; meanwhile, the purifying function of trace hydrogen chloride existing in the circulating ventilation of the factory building is born.
Preferably, the first hydrogen chloride absorption unit and the second hydrogen chloride absorption unit are respectively and electrically connected with a control system; the material outlet pipeline of the primary hydrochloric acid cooler is provided with a first thermometer, the circulating water inlet pipeline of the primary hydrochloric acid cooler is provided with a first regulating valve, and the first thermometer and the second regulating valve are electrically connected with a control system; the material outlet pipeline of the second-stage hydrochloric acid cooler is provided with a second thermometer, the circulating water inlet pipeline of the second-stage hydrochloric acid cooler is provided with a second regulating valve, and the second thermometer and the second regulating valve are electrically connected with the control system.
Preferably, a concentrated acid liquid storage section is arranged below the concentrated acid absorption section, a first-stage hydrochloric acid absorption tower gas phase inlet is arranged above the concentrated acid liquid storage section, a concentrated acid outlet is arranged at the bottom of the concentrated acid liquid storage section, a groove type liquid distributor is arranged above the concentrated acid absorption section, the concentrated acid outlet is connected with the groove type liquid distributor through a pipeline, and a first-stage hydrochloric acid circulating pump and a first-stage hydrochloric acid cooler are arranged on the pipeline connecting the concentrated acid outlet and the liquid distributor; and a liquid phase inlet of the primary hydrochloric acid absorption tower is arranged above the concentrated acid absorption section.
Preferably, a dilute acid liquid storage section is arranged below the dilute acid absorption section, a gas phase inlet of a secondary hydrochloric acid absorption tower is arranged above the dilute acid liquid storage section, a dilute acid outlet is arranged at the bottom of the dilute acid liquid storage section, a first liquid distributor is arranged above the dilute acid absorption section, the dilute acid outlet is communicated with the first liquid distributor through a pipeline, and a secondary hydrochloric acid circulating pump and a secondary hydrochloric acid cooler are arranged on the pipeline connecting the dilute acid outlet and the first liquid distributor; a first liquid phase inlet is arranged above the dilute acid absorption section.
Preferably, an alkali liquor storage section is arranged below the alkali liquor absorption section, a riser is arranged in the alkali liquor storage section, an alkali liquor outlet is arranged at the bottom of the alkali liquor storage section, the alkali liquor outlet is connected with an alkali liquor circulation tank, a second liquid distributor is arranged above the alkali liquor absorption section, the alkali liquor circulation tank is communicated with the second liquid distributor through a pipeline, and an alkali liquor circulation pump is arranged on the pipeline connecting the alkali liquor circulation tank and the second liquid distributor; a second liquid phase inlet is arranged above the alkali liquor absorption section.
Preferably, a primary hydrochloric acid absorption tower gas phase outlet is arranged at the top of the primary hydrochloric acid absorption tower, the primary hydrochloric acid absorption tower gas phase outlet is communicated with a secondary hydrochloric acid absorption tower gas phase inlet, and the dilute acid liquid storage section is communicated with the concentrated acid liquid storage section.
Preferably, a filler is arranged in a concentrated acid absorption section of the primary hydrochloric acid absorption tower, and the filler is random packing or structured packing.
The concentrated acid absorption section is used for recycling the concentrated acid in the concentrated acid absorption section, absorbing the hydrogen chloride gas in a countercurrent way to form concentrated acid with larger concentration, and conveying the trace hydrogen chloride gas which is not absorbed to the secondary hydrochloric acid absorption tower.
Preferably, the dilute acid absorption section and the alkali liquid absorption section are respectively provided with corresponding fillers (the absorption forms are filler absorption), and the fillers are random packing or structured packing.
The dilute acid absorption section is used for recycling dilute acid in the dilute acid absorption section, absorbing hydrogen chloride gas in a countercurrent way to form dilute acid with larger concentration, and conveying trace hydrogen chloride gas which is not absorbed to the alkali liquor absorption section;
the alkali liquor absorption section is used for recycling alkali liquor in the alkali liquor absorption section, and is used for countercurrent absorption of hydrogen chloride gas to form saline alkali liquor, and the saline alkali liquor is sent to a fan after reaching the tail gas emission standard and is emptied through a chimney.
Preferably, a demister is arranged at the top of the secondary hydrochloric acid absorption tower, and a demister cleaning water inlet for connecting a water pipe of industrial water is arranged below the demister for cleaning the demister.
Preferably, the number of the primary hydrochloric acid circulating pump, the secondary hydrochloric acid circulating pump, the alkali liquor circulating pump and the tail gas fan is more than two respectively.
The utility model can handle the following three working conditions:
s1, normal working conditions: trace hydrogen chloride gas in the warm ventilation in the factory building is subjected to primary absorption, namely the gas is circularly absorbed by a dilute acid absorption section of a second hydrogen chloride absorption unit and is discharged after reaching standards;
s2, under normal working conditions: the hydrogen chloride gas intermittently discharged by the system is subjected to two-stage absorption, namely, the gas is circularly absorbed by a concentrated acid absorption section and a dilute acid absorption section of the first hydrogen chloride absorption unit and the second hydrogen chloride absorption unit, and the gas reaches the emission standard;
s3, accident conditions: the warm ventilation contains a large amount of hydrogen chloride, and the gas is circularly absorbed by a concentrated acid absorption section, a dilute acid absorption section and an alkali liquor absorption section of the first hydrogen chloride absorption unit and the hydrogen dichloride absorption unit after three-stage absorption, so that the gas reaches the standard and is discharged.
The valve is arranged on the corresponding inlet and outlet pipelines and is electrically connected with the control system, so that the system can normally and stably operate under the daily working condition and the accident working condition.
The equipment provided by the utility model adopts a high corrosion-resistant and temperature-resistant material, so that the operation safety and stability of the equipment are ensured.
Compared with the prior art, the technical scheme provided by the utility model has the following beneficial effects:
1. the utility model adopts two absorption units and three absorption sections in total, and can simultaneously consider the purification treatment requirements of three different hydrogen chloride-containing tail gases of the daily working condition and the accident working condition of the production device, and has the advantages of short treatment flow, less equipment and low operation cost;
2. the secondary hydrochloric acid absorption tower is a combined tower, is water-alkali two-stage absorption, and has high absorption efficiency and small occupied area;
3. the utility model has the functions of tail gas purification and accident hydrogen chloride treatment, and can effectively ensure the safe and stable operation of equipment.
Drawings
FIG. 1 is a schematic flow diagram of an exhaust gas purification and accident hydrogen chloride treatment system in an electronic grade hydrogen chloride production process;
FIG. 2 is a schematic diagram of the structure of a primary hydrochloric acid absorption tower;
FIG. 3 is a schematic diagram of the structure of a secondary hydrochloric acid absorption tower;
in the figure: the device comprises a 1-primary hydrochloric acid absorption tower, a 2-primary hydrochloric acid circulating pump, a 4-hydrochloric acid product tank, a 5-secondary hydrochloric acid absorption tower, a 6-secondary hydrochloric acid circulating pump, a 8-alkaline liquor circulating pump, a 9-alkaline liquor circulating pump, a 10-alkaline liquor circulating tank, a 11-primary hydrochloric acid cooler, a 12-secondary hydrochloric acid cooler, 13-14-tail gas fans, a 15-chimney, a 201-circulating hydrochloric acid outlet, a 202-concentrated acid liquid storage section, a 203-concentrated acid absorption section, a 204-primary hydrochloric acid absorption tower liquid distributor, a 205-primary hydrochloric acid absorption tower gas phase outlet, a 206-primary hydrochloric acid absorption tower gas phase inlet, a 301-dilute acid outlet, a 302-dilute acid liquid storage section, a 303-dilute acid absorption section, a 304-primary liquid distributor, a 305-riser, a 306-alkaline liquor outlet, a 307-alkaline liquor absorption section, a 308-secondary liquid distributor, a 309-demister cleaning water inlet, a 310-demister, a 311-secondary hydrochloric acid absorption tower gas phase outlet, a 312-alkaline liquor storage section and a 313-secondary hydrochloric acid absorption tower gas phase inlet.
Detailed Description
The utility model will be further understood by reference to the following examples which are given to illustrate the utility model but are not intended to limit the scope of the utility model.
Referring to fig. 1 to 3, an exhaust gas purifying and accident hydrogen chloride treatment system in an electronic grade hydrogen chloride production process comprises a first hydrogen chloride absorption unit and a second hydrogen chloride absorption unit which are communicated.
The first hydrogen chloride absorption unit comprises a primary hydrochloric acid absorption tower 1, primary hydrochloric acid circulating pumps 2 and 3, a hydrochloric acid product tank 4 and a primary hydrochloric acid cooler 11, wherein a primary hydrochloric acid absorption tower gas phase inlet 206 is formed in the lower half part of the primary hydrochloric acid absorption tower, a primary hydrochloric acid absorption tower liquid phase outlet 201 is formed in the bottom end of the primary hydrochloric acid absorption tower, a primary hydrochloric acid absorption tower liquid distributor 204 is arranged in the position, close to the top end, of the interior of the primary hydrochloric acid absorption tower, the primary hydrochloric acid absorption tower liquid phase outlet 201 and the primary hydrochloric acid absorption tower liquid distributor 204 are connected through a pipeline, and the primary hydrochloric acid circulating pumps 2 and 3 and the primary hydrochloric acid cooler 11 are arranged on the pipeline connecting the primary hydrochloric acid absorption tower liquid phase outlet 201 and the primary hydrochloric acid absorption tower liquid distributor 204; the top of the primary hydrochloric acid absorption tower is provided with a primary hydrochloric acid absorption tower gas phase outlet 205, and the primary hydrochloric acid absorption tower gas phase outlet 205 is communicated with a secondary hydrochloric acid absorption tower gas phase inlet 313 through a pipeline.
The second hydrogen chloride absorption unit comprises a second hydrochloric acid absorption tower 5, a second hydrochloric acid cooler 12, second hydrochloric acid circulating pumps 6 and 7, alkali liquor circulating pumps 8 and 9 and an alkali liquor circulating tank 10, wherein the second hydrochloric acid absorption tower is in two-stage absorption and comprises a dilute acid absorption section 303 and an alkali liquor absorption section 307, a second hydrochloric acid absorption tower gas phase inlet 313 is arranged at the lower half part of the second hydrochloric acid absorption tower, a second hydrochloric acid absorption tower dilute acid (circulating hydrochloric acid) outlet 301 is arranged at the bottom end of the second hydrochloric acid absorption tower, a second hydrochloric acid absorption tower first liquid distributor 304 is arranged at the position, close to the top end of the dilute acid absorption section, inside the second hydrochloric acid absorption tower, of the second hydrochloric acid absorption tower dilute acid outlet 301 and the second hydrochloric acid absorption tower first liquid distributor 304 are connected through a pipeline, and the second hydrochloric acid circulating pumps 6 and 7 and the second hydrochloric acid cooler 12 are arranged on the pipeline connecting the second hydrochloric acid absorption tower dilute acid outlet 301 and the second hydrochloric acid absorption tower first liquid distributor 304; the inside of alkali lye absorption section be equipped with riser 305, alkali lye absorption section bottom is equipped with (circulation) alkali lye export 306, connect alkali lye circulation tank 10, the top of alkali lye absorption section is equipped with second liquid distributor 308, connect through the pipeline between alkali lye circulation tank 10 and the second liquid distributor 308, be equipped with alkali lye circulation pump 8, 9 on the pipeline that connects alkali lye circulation tank 10 and second liquid distributor 308, the upper end of second hydrochloric acid absorption tower is equipped with the defroster 310 of second hydrochloric acid absorption tower, the top of second hydrochloric acid absorption tower is equipped with second hydrochloric acid absorption tower gaseous phase export 311, second hydrochloric acid absorption tower gaseous phase export 311 communicates with tail gas fan 13, 14 through the pipeline, tail gas fan 13, 14 communicates with chimney 15.
The lower part of the concentrated acid absorption section 203 is provided with a concentrated acid storage section 202, the upper part of the concentrated acid storage section is provided with a first-stage hydrochloric acid absorption tower gas phase inlet 206, the bottom is provided with a concentrated acid outlet 201, the upper part of the concentrated acid absorption section is provided with a first-stage hydrochloric acid absorption tower liquid distributor 204, the concentrated acid outlet 201 is connected with the first-stage hydrochloric acid absorption tower liquid distributor 204 through a pipeline, the pipeline connecting the concentrated acid outlet 201 and the first-stage hydrochloric acid absorption tower liquid distributor 204 is provided with first-stage hydrochloric acid circulating pumps 2 and 3 and a first-stage hydrochloric acid cooler 11, and the upper part of the concentrated acid absorption section is provided with a first-stage hydrochloric acid absorption tower liquid phase inlet.
The lower part of the dilute acid absorption section 303 is provided with a dilute acid storage section 302, the upper part of the dilute acid storage section 302 is provided with a gas phase inlet 313 of a secondary hydrochloric acid absorption tower, the bottom is provided with a dilute acid outlet 301, the upper part of the dilute acid absorption section 303 is provided with a first liquid distributor 304, the hydrochloric acid outlet 301 is connected with the first liquid distributor 304 through a pipeline, the pipeline connecting the hydrochloric acid outlet 301 and the first liquid distributor 304 is provided with secondary hydrochloric acid circulating pumps 6 and 7 and a secondary hydrochloric acid cooler 12, and the upper part of the dilute acid absorption section is provided with a first liquid phase inlet.
The lower side of the lye absorption section 307 is provided with a lye liquid storage section 312, the inside of the lye liquid storage section 312 is provided with a riser pipe 305, the bottom of the lye liquid storage section is provided with a lye outlet 306, the lye liquid storage section is connected with a lye circulation tank 10, the upper side of the lye absorption section 307 is provided with a second liquid distributor 308, the lye circulation tank 10 is connected with the second liquid distributor 308 through a pipeline, the pipelines connecting the lye circulation tank 10 and the second liquid distributor 308 are provided with lye circulation pumps 8 and 9, and the upper side of the lye absorption section is provided with a second liquid inlet.
The top of the secondary hydrochloric acid absorption tower is provided with a demister 310, and a demister cleaning water inlet 309 for connecting a water pipe of industrial water is arranged below the demister 310 and used for cleaning the demister.
An industrial water inlet and an alkali liquor inlet are arranged above the alkali liquor circulation tank 10 and are used for preparing alkali liquor with a certain concentration for hydrogen chloride absorption, an alkali liquor outlet is arranged below the alkali liquor circulation tank, and alkali liquor is discharged to a sewage system when the alkali liquor absorption is saturated.
The absorption forms of the concentrated acid absorption section 203, the dilute acid absorption section 303 and the alkali liquor absorption section 307 are all filler absorption, and the filler is random packing or structured packing.
Based on the tail gas purification and accident hydrogen chloride treatment system in the electronic grade hydrogen chloride production process, the following three working conditions can be treated:
s1, a first normal working condition: trace hydrogen chloride gas in the warm ventilation in the factory building is subjected to primary absorption, namely the gas is circularly absorbed by a dilute acid absorption section of a second hydrogen chloride absorption unit and is discharged after reaching standards;
s2, a second normal working condition: the hydrogen chloride gas intermittently discharged by the system is subjected to two-stage absorption, namely, the gas is circularly absorbed by a concentrated acid absorption section and a dilute acid absorption section of the first hydrogen chloride absorption unit and the second hydrogen chloride absorption unit, and the gas reaches the emission standard;
s3, accident conditions: the warm ventilation contains a large amount of hydrogen chloride, and the gas is circularly absorbed by a concentrated acid absorption section, a dilute acid absorption section and an alkali liquor absorption section of the first hydrogen chloride absorption unit and the hydrogen dichloride absorption unit after three-stage absorption, so that the gas reaches the standard and is discharged.
The tail gas purification and accident hydrogen chloride treatment system in the electronic grade hydrogen chloride production process comprises the following specific steps:
1) Normal condition one: the trace hydrogen chloride gas in the warm ventilation in the factory building enters a gas phase inlet 313 of the secondary hydrochloric acid absorption tower through an air pipe, the dilute hydrochloric acid in a liquid storage section of the secondary hydrochloric acid absorption tower is conveyed to a first liquid distributor 304 of the secondary hydrochloric acid absorption tower through secondary hydrochloric acid circulating pumps 6 and 7 and a secondary hydrochloric acid cooler 12, the circulating dilute acid is evenly distributed in a dilute acid absorption section 303, the trace hydrogen chloride gas and the circulating dilute acid are fully contacted and absorbed in the dilute acid absorption section 303, and the tail gas after purification and standard reaching is led to a chimney through a fan for high-altitude emission after being defogged through a secondary hydrochloric acid absorption tower defogger 310.
2) And a second normal working condition: the intermittent discharging hydrogen chloride gas of the system enters a gas phase inlet 206 of a primary hydrochloric acid absorption tower through an air pipe, concentrated hydrochloric acid in a liquid storage section of the primary hydrochloric acid absorption tower is conveyed to a liquid distributor 204 of the primary hydrochloric acid absorption tower through primary hydrochloric acid circulating pumps 2 and 3 and a primary hydrochloric acid cooler 11, the circulating hydrochloric acid is evenly distributed in a concentrated acid absorption section 203, the hydrogen chloride gas and the circulating hydrochloric acid are fully contacted and absorbed on the concentrated acid absorption section 203, unabsorbed trace hydrogen chloride gas is continuously conveyed to a gas phase inlet 313 of the lower half section of the secondary hydrochloric acid absorption tower, dilute hydrochloric acid in the liquid storage section of the secondary hydrochloric acid absorption tower is conveyed to a first liquid distributor 304 of the secondary hydrochloric acid absorption tower through secondary hydrochloric acid circulating pumps 6 and 7 and a secondary hydrochloric acid cooler 12, the circulating dilute acid is evenly distributed in the dilute acid absorption section 303, the trace hydrogen chloride gas and the circulating dilute acid are further contacted and absorbed in the dilute acid absorption section 303, and tail gas after purification reaching standards is defogged by the secondary hydrochloric acid absorption tower defogger 310 and then is led to a chimney through a fan to be discharged at high altitude.
3) Accident conditions: the warm ventilation contains a large amount of hydrogen chloride, the hydrogen chloride enters a gas phase inlet 206 of a primary hydrochloric acid absorption tower through an air pipe, industrial water of a secondary hydrochloric acid absorption tower is continuously fed in, hydrochloric acid in a liquid storage section of the primary hydrochloric acid absorption tower is conveyed to a liquid distributor 204 of the primary hydrochloric acid absorption tower through primary hydrochloric acid circulating pumps 2 and 3 and a primary hydrochloric acid cooler 11, circulating hydrochloric acid is evenly distributed in a concentrated acid absorption section 203, hydrogen chloride gas and the circulating hydrochloric acid are fully contacted and absorbed on the concentrated acid absorption section 203, the primary hydrochloric acid absorption tower is continuously conveyed to the outside of the boundary through the primary hydrochloric acid circulating pumps 2 and 3, unabsorbed hydrogen chloride gas is continuously conveyed to a gas phase inlet 313 of the lower half section of the secondary hydrochloric acid absorption tower, hydrochloric acid in the liquid storage section of the secondary hydrochloric acid absorption tower is conveyed to a first liquid distributor 304 of the secondary hydrochloric acid absorption tower through secondary hydrochloric acid circulating pumps 6 and 7 and a secondary hydrochloric acid cooler 12, the circulating hydrochloric acid is evenly distributed in the dilute acid absorption section 303, the hydrogen chloride gas and the circulating dilute acid are further contacted and absorbed in the dilute acid absorption section 303, the hydrochloric acid in the liquid storage section of the secondary hydrochloric acid absorption tower is conveyed to the primary hydrochloric acid absorption tower through overflow connection, the trace hydrogen chloride which is not absorbed in the dilute acid absorption section of the secondary hydrochloric acid absorption tower is conveyed to the alkali liquor absorption section 307 through the riser 305, the alkali liquor in the liquid storage section of the secondary hydrochloric acid absorption tower is conveyed to the alkali liquor circulation tank 10 through overflow, the alkali liquor in the alkali liquor circulation tank is conveyed to the second liquid distributor 308 of the secondary hydrochloric acid absorption tower through the alkali liquor circulation pumps 8 and 9, the circulating alkali liquor is evenly distributed in the packing layer 307, the hydrogen chloride gas and the circulating alkali liquor are fully contacted and absorbed on the packing layer 307, the tail gas after absorption reaches the standard is defogged through the secondary hydrochloric acid absorption tower defogger 310, and the air is led to the chimney through a fan for high-altitude discharge.
The present utility model has been described in detail with reference to the embodiments, but the description is only the preferred embodiments of the present utility model and should not be construed as limiting the scope of the utility model. All equivalent changes and modifications within the scope of the present utility model should be considered as falling within the scope of the present utility model.
Claims (10)
1. A tail gas purification and accident hydrogen chloride treatment system in the production process of electronic grade hydrogen chloride is characterized in that: the system comprises a first hydrogen chloride absorption unit and a second hydrogen chloride absorption unit which are communicated;
the first hydrogen chloride absorption unit comprises a primary hydrochloric acid absorption tower, a primary hydrochloric acid cooler, a primary hydrochloric acid circulating pump and a hydrochloric acid product tank; the concentrated acid absorption section is arranged in the primary hydrochloric acid absorption tower, the lower part of the primary hydrochloric acid absorption tower is communicated with the primary hydrochloric acid circulating pump, the outlet of the primary hydrochloric acid circulating pump is communicated with the primary hydrochloric acid cooler, the outlet of the primary hydrochloric acid circulating pump is also communicated with the hydrochloric acid product tank, and the primary hydrochloric acid cooler is communicated with the upper part of the primary hydrochloric acid absorption tower;
the second hydrogen chloride absorption unit comprises a secondary hydrochloric acid absorption tower, a secondary hydrochloric acid cooler, a secondary hydrochloric acid circulating pump, an alkali liquor circulating pump and an alkali liquor circulating tank; the dilute acid absorption section and the alkali liquor absorption section are sequentially arranged in the secondary hydrochloric acid absorption tower from bottom to top, the lower part of the dilute acid absorption section is communicated with a secondary hydrochloric acid circulating pump, the outlet of the secondary hydrochloric acid circulating pump is communicated with a secondary hydrochloric acid cooler, and the secondary hydrochloric acid cooler is communicated with the upper part of the dilute acid absorption section; the lower part of the alkali liquor absorption section is communicated with an alkali liquor circulation tank, the alkali liquor circulation tank is communicated with an alkali liquor circulation pump, and the outlet of the alkali liquor circulation pump is communicated with the upper part of the alkali liquor absorption section; the top end of the secondary hydrochloric acid absorption tower is provided with a gas phase outlet of the secondary hydrochloric acid absorption tower, and the gas phase outlet of the secondary hydrochloric acid absorption tower is communicated with a chimney through a tail gas fan.
2. The tail gas purification and accident hydrogen chloride treatment system in the production process of electronic grade hydrogen chloride according to claim 1, wherein: the first hydrogen chloride absorption unit and the second hydrogen chloride absorption unit are respectively and electrically connected with the control system; the material outlet pipeline of the primary hydrochloric acid cooler is provided with a first thermometer, the circulating water inlet pipeline of the primary hydrochloric acid cooler is provided with a first regulating valve, and the first thermometer and the second regulating valve are electrically connected with a control system; the material outlet pipeline of the second-stage hydrochloric acid cooler is provided with a second thermometer, the circulating water inlet pipeline of the second-stage hydrochloric acid cooler is provided with a second regulating valve, and the second thermometer and the second regulating valve are electrically connected with the control system.
3. The tail gas purifying and accident hydrogen chloride treatment system in the production process of electronic grade hydrogen chloride according to claim 1 or 2, wherein: a concentrated acid liquid storage section is arranged below the concentrated acid absorption section, a gas phase inlet of the primary hydrochloric acid absorption tower is arranged above the concentrated acid liquid storage section, a concentrated acid outlet is arranged at the bottom of the concentrated acid liquid storage section, a primary hydrochloric acid absorption tower liquid distributor is arranged above the concentrated acid absorption section, the concentrated acid outlet is communicated with the primary hydrochloric acid absorption tower liquid distributor through a pipeline, and a primary hydrochloric acid circulating pump and a primary hydrochloric acid cooler are arranged on the pipeline connecting the concentrated acid outlet and the primary hydrochloric acid absorption tower liquid distributor; and a liquid phase inlet of the primary hydrochloric acid absorption tower is arranged above the concentrated acid absorption section.
4. A tail gas purification and accident hydrogen chloride treatment system in the production of electronic grade hydrogen chloride according to claim 3, wherein: the dilute acid absorption device comprises a dilute acid absorption section, a dilute acid distributor, a pipeline, a second hydrochloric acid circulating pump and a second hydrochloric acid cooler, wherein the dilute acid storage section is arranged below the dilute acid absorption section, the gas phase inlet of the second hydrochloric acid absorption tower is arranged above the dilute acid storage section, the dilute acid outlet is arranged at the bottom of the dilute acid storage section, the first liquid distributor is arranged above the dilute acid absorption section, the dilute acid outlet is communicated with the first liquid distributor through the pipeline, and the pipeline connecting the dilute acid outlet and the first liquid distributor is provided with the second hydrochloric acid circulating pump and the second hydrochloric acid cooler; a first liquid phase inlet is arranged above the dilute acid absorption section.
5. The tail gas purifying and accident hydrogen chloride treatment system in the production process of electronic grade hydrogen chloride according to claim 4, wherein: the lower part of the alkali liquor absorption section is provided with an alkali liquor storage section, the inside of the alkali liquor storage section is provided with a riser, the bottom of the alkali liquor storage section is provided with an alkali liquor outlet, the alkali liquor outlet is connected with an alkali liquor circulation tank, the upper part of the alkali liquor absorption section is provided with a second liquid distributor, the alkali liquor circulation tank is communicated with the second liquid distributor through a pipeline, and the pipeline connecting the alkali liquor circulation tank and the second liquid distributor is provided with an alkali liquor circulation pump; a second liquid phase inlet is arranged above the alkali liquor absorption section.
6. The tail gas purifying and accident hydrogen chloride processing system in the production process of electronic grade hydrogen chloride according to claim 5, wherein: the top of the primary hydrochloric acid absorption tower is provided with a primary hydrochloric acid absorption tower gas phase outlet, the primary hydrochloric acid absorption tower gas phase outlet is communicated with a secondary hydrochloric acid absorption tower gas phase inlet, and the dilute acid liquid storage section is communicated with the concentrated acid liquid storage section.
7. The tail gas purification and accident hydrogen chloride treatment system in the production process of electronic grade hydrogen chloride according to claim 1, wherein: the concentrated acid absorption section of the primary hydrochloric acid absorption tower is internally provided with a filler, wherein the filler is random packing or regular packing.
8. The tail gas purification and accident hydrogen chloride treatment system in the production process of electronic grade hydrogen chloride according to claim 1, wherein: the dilute acid absorption section and the alkali liquor absorption section are respectively provided with corresponding filler, and the filler is random packing or regular packing.
9. The tail gas purification and accident hydrogen chloride treatment system in the production process of electronic grade hydrogen chloride according to claim 1, wherein: the top of second grade hydrochloric acid absorption tower be equipped with the defroster, the defroster below is equipped with the defroster wash water import that is used for connecting the water pipe of industrial water.
10. The tail gas purification and accident hydrogen chloride treatment system in the production of electronic grade hydrogen chloride according to claim 9, wherein: the number of the primary hydrochloric acid circulating pump, the secondary hydrochloric acid circulating pump, the alkali liquor circulating pump and the tail gas fan is more than two respectively.
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| CN202322473591.1U CN220779640U (en) | 2023-09-12 | 2023-09-12 | Tail gas purification and accident hydrogen chloride treatment system in electronic grade hydrogen chloride production process |
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| CN202322473591.1U CN220779640U (en) | 2023-09-12 | 2023-09-12 | Tail gas purification and accident hydrogen chloride treatment system in electronic grade hydrogen chloride production process |
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