CN213069473U - Motor series-parallel system for direct-writing photoetching machine - Google Patents
Motor series-parallel system for direct-writing photoetching machine Download PDFInfo
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- CN213069473U CN213069473U CN202022234271.7U CN202022234271U CN213069473U CN 213069473 U CN213069473 U CN 213069473U CN 202022234271 U CN202022234271 U CN 202022234271U CN 213069473 U CN213069473 U CN 213069473U
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Abstract
The utility model discloses a motor series-parallel system for direct writing lithography machine, include: granite marble; a plurality of scanning shafts, each scanning shaft having at least one scanning motor mover; the working suckers are arranged on the scanning shafts in a one-to-one correspondence manner; the first electric control system is connected with each scanning motor rotor of each scanning shaft and can be switched between a first state and a second state; when the first electric control system is in a first state, the first electric control system controls the rotors of the scanning motors of at least two scanning shafts to move simultaneously; when the first electric control system is in the second state, the first electric control system controls the rotor of the scanning motor of at least two scanning shafts to move independently. According to the utility model discloses a motor series parallel system for directly writing lithography machine can realize the synchronous motion of a plurality of scanning axles and the switching of independent motion, has advantages such as compatible strong, production efficiency height.
Description
Technical Field
The utility model belongs to the technical field of the lithography technique and specifically relates to a motor series-parallel system for direct writing lithography machine is related to.
Background
The photoetching machine is key equipment in the field of semiconductor and circuit board (PCB) production, wherein compared with the traditional photoetching machine, the direct-writing photoetching machine saves the process of manufacturing a film negative film or a photomask, and has the advantages of high productivity, high alignment precision and good exposure quality.
The application requirement of the direct-write lithography machine in the current production is more and more extensive, and the requirement of compatible exposure of a large substrate and a small substrate exists. The direct-write lithography machine needs a large-sized substrate with a large working chuck, and if the direct-write lithography machine exposes a small-sized substrate, the energy consumption is high if the working chuck with the same size is still used, and if the working chuck is repeatedly replaced, the production time is greatly reduced, and the direct-write lithography machine in the related art is difficult to be compatible with the exposure of the large substrate and the small substrate.
SUMMERY OF THE UTILITY MODEL
The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, an object of the present invention is to provide a series-parallel motor system for a direct-write lithography machine, which can realize the switching between the synchronous motion and the independent motion of a plurality of scanning shafts, and has the advantages of high compatibility, high production efficiency, etc.
In order to achieve the above object, according to the embodiment of the present invention, a series-parallel motor system for a direct-write lithography machine is provided, which includes: granite marble; a plurality of scanning axes; a step shaft; an optical path system; the scanning shafts are arranged on a granite marble base, and each scanning shaft is provided with at least one scanning motor rotor; the working suckers are arranged on the scanning shafts in a one-to-one correspondence manner; the stepping shaft is provided with at least two scanning motor rotors, and the light path system is arranged on the stepping shaft; the first electric control system is connected with each scanning motor rotor of each scanning shaft and can be switched between a first state and a second state; when the first electric control system is in a first state, the first electric control system controls the rotors of the scanning motors of at least two scanning shafts to move simultaneously; when the first electric control system is in the second state, the first electric control system controls the rotor of the scanning motor of at least two scanning shafts to move independently.
According to the utility model discloses a motor series parallel system for directly writing lithography machine can realize the synchronous motion of a plurality of scanning axles and the switching of independent motion, has advantages such as compatible strong, production efficiency height.
According to some embodiments of the utility model, first electrical system includes a plurality of first sub electrical system, and a plurality of first sub electrical system and a plurality of scanning motor active cell one-to-one ground is connected.
According to some embodiments of the invention, the step shaft has a plurality of step motor movers; the motor series-parallel system for the direct-write lithography machine further comprises: the stepping motor rotor drives the light path system to move; the second electric control system is connected with each stepping motor rotor and can be switched between a third state and a fourth state; when the second electric control system is in the third state, the second electric control system controls at least two rotors of the stepping motor to move simultaneously; when the second electric control system is in the fourth state, the second electric control system controls at least one step motor rotor to move independently.
According to some embodiments of the utility model, the second electrical system includes a plurality of second sub electrical system, and a plurality of second sub electrical system and a plurality of step motor active cell one-to-one is connected.
According to some embodiments of the present invention, each of the scanning shafts further comprises a scanning motor stator, and the scanning motor stator of each of the scanning shafts is matched with a scanning motor mover; the step shaft further comprises a step motor stator, and the step motor stator is matched with the plurality of step motor rotors.
According to some embodiments of the invention, it is a plurality of the scanning axis is parallel to each other, every the scanning axis all with the step shaft mutually perpendicular.
According to some embodiments of the present invention, the stepping shaft further comprises a stepping shaft slide, the stepping motor rotor of the stepping shaft is mounted on the stepping shaft slide, and the optical path system is mounted on the stepping shaft slide; the scanning shaft further comprises a scanning shaft sliding seat, a rotor of a scanning motor of the scanning shaft is installed on the scanning shaft sliding seat, and the working sucker is installed on the scanning shaft sliding seat.
According to some embodiments of the present invention, the granite marble comprises: a base, the scanning shaft being mounted to the base; one end of the upright post is connected to the base; the beam is connected to the other end of the upright column, the stepping shaft is installed on the beam, and the scanning shaft is located between the base and the beam.
According to some embodiments of the present invention, a motor series-parallel system for a direct-write lithography machine further comprises: the supporting shafts are arranged on the scanning shafts in a one-to-one correspondence mode, the working suckers are arranged on the supporting shafts in a one-to-one correspondence mode, and each supporting shaft drives the corresponding working sucker to move along the length direction of the supporting shaft.
According to some embodiments of the present invention, the scanning axis is located the base with between the back shaft, the back shaft is located the work sucking disc with between the scanning axis, the work sucking disc is located the step shaft with between the back shaft.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic structural diagram of a series-parallel connection system of motors for a direct-write lithography machine according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a stepping shaft of a series-parallel motor system for a direct-write lithography machine according to an embodiment of the present invention.
Fig. 3 is a schematic structural diagram of a scan shaft of a series-parallel motor system for a direct-write lithography machine according to an embodiment of the present invention.
Fig. 4 is a schematic diagram illustrating the cooperation of a stepping motor rotor and a stepping motor stator in series for a motor series-parallel system of a direct-write lithography machine according to an embodiment of the present invention.
Fig. 5 is a schematic diagram illustrating the cooperation of the scan motor rotor and the scan motor stator in parallel for the motor series-parallel system of the direct-write lithography machine according to the embodiment of the present invention.
Fig. 6 is a schematic connection diagram of the motor set and the first electric control system when the first electric control system of the series-parallel connection system of the motors for the direct-write lithography machine is in the first state according to the embodiment of the present invention.
Fig. 7 is a schematic connection diagram of the motor and the first electronic control system when the first electronic control system of the series-parallel system of the motor for the direct-write lithography machine is in the second state according to the embodiment of the present invention.
Reference numerals:
a series-parallel system 1 for motors of a direct-write lithography machine,
A working sucker 200,
An optical path system 300,
A first electronic control system 400, a first sub-electronic control system 410,
A scanning shaft 600, a scanning motor mover 611, a scanning motor stator 612, a scanning shaft slide 613,
A stepping shaft 700, a stepping motor mover 711, a stepping motor stator 712, a stepping shaft slider 713,
A supporting shaft 800,
The device 900 is aligned.
Detailed Description
Embodiments of the present invention are described in detail below, and the embodiments described with reference to the drawings are exemplary.
In the description of the present invention, it is to be understood that the terms "center", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", and the like indicate orientations or positional relationships based on those shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
In the description of the present invention, "a plurality" means two or more.
A motor series-parallel system 1 for a direct-write lithography machine according to an embodiment of the present invention is described below with reference to the drawings.
As shown in fig. 1 to 7, a motor series-parallel system 1 for a direct-write lithography machine according to an embodiment of the present invention includes a granite marble 100, a work suction cup 200, a first electric control system 400, a stepping shaft 700, and a scanning shaft 600.
The plurality of scanning shafts 600 are installed on the granite marble 100, the plurality of working suction cups 200 are installed on the plurality of scanning shafts 600 in a one-to-one correspondence, and each of the working suction cups 200 is movable in an extending direction of the scanning shaft 600 corresponding thereto. The stepping shaft 700 is installed on the granite marble 100, and the stepping shaft 700 has at least one stepping motor mover 711.
Each scanning shaft 600 has at least one scanning motor mover 611, the first electronic control system 400 is connected with each scanning motor mover 611 of each scanning shaft 600, and the first electronic control system 400 is switchable between a first state and a second state. When the first electronic control system 400 is in the first state, the first electronic control system 400 controls the rotors 611 of the scanning motors of the at least two scanning shafts 600 to move simultaneously; when the first electronic control system 400 is in the second state, the first electronic control system 400 controls the scan motor movers 611 of the at least two scan shafts 600 to move independently.
For example, if one stepping shaft 700 is provided with a plurality of stepping motor movers 711, the plurality of stepping motor movers 711 of the stepping shaft 700 can be in a serial relationship, which can be called as motor serial connection; if each of the plurality of scanning shafts 600 has at least one scanning motor mover 611, the scanning motor movers 611 of the plurality of scanning shafts 600 are in parallel, which may be referred to as motor parallel. The driving force of each scanning shaft 600 can be increased by connecting the motors in series, and the driving force of the whole of the plurality of scanning shafts 600 can be increased by connecting the motors in parallel.
For example, when the direct write lithography machine exposes a large substrate (i.e. a substrate with a larger size), the first electronic control system 400 may be in the first state, the large substrate may be placed on two adjacent scanning shafts 600, and each scanning shaft 600 of the two scanning shafts 600 may be provided with two scanning motor movers 611, such that the scanning motor mover 611 of each scanning shaft 600 is connected in parallel with the scanning motor mover 611 of the other scanning shaft 600, and the large substrate is pushed together by the scanning motor movers 611 of the two scanning shafts 600, i.e. the scanning motor movers 611 of the two scanning shafts 600 simultaneously apply a thrust to the large substrate, such that the thrust applied to the large substrate by the direct write lithography machine of the motor series-parallel system 1 for a direct write lithography machine of the present invention is greater than that applied to the direct write lithography machine in the related art.
When the direct writing lithography machine exposes to the light to the little base plate (the little base plate of size ratio promptly), first electrical system 400 can the second state, little base plate can be placed in a scanning axle 600, and this scanning axle 600 can be equipped with ten scanning motor active cells 611, and ten scanning motor active cells 611 of this scanning axle 600 form the series connection like this, promote jointly through ten scanning motor active cells 611 respectively little base plate, ten scanning motor active cells 611 are right simultaneously little base plate applys thrust, compare the direct writing lithography machine in the correlation technique like this, the utility model discloses a motor series parallel system 1 for direct writing lithography machine can realize a plurality of scanning axle 600 individual motions, consequently uses the utility model discloses a direct writing lithography machine for motor series parallel system 1 of direct writing lithography machine is to the thrust of little base plate is bigger.
In some embodiments of the present invention, the first electronic control system 400 may include a plurality of first output points, a plurality of the first output points are connected to a plurality of scanning motor movers 611 in a one-to-one correspondence, and a plurality of the first output points may be simultaneously outputted to enable the plurality of sets of motors 610 to move synchronously, and each of the first output points may also be individually outputted to enable the scanning motor mover 611 connected thereto to move individually.
In other embodiments of the present invention, the first electronic control system 400 may include a plurality of first control assemblies working independently, and is the same as the first control assembly, which is connected to a plurality of scanning motor movers 611, the first control assembly may enable a plurality of scanning motor movers 611 to move synchronously, and a plurality of the first control assembly may also be connected to a plurality of scanning motor movers 611 in a one-to-one correspondence, and each of the first control assemblies outputs independently to enable the scanning motor mover 611 connected thereto to move independently.
According to the utility model discloses a motor series parallel system 1 for directly writing lithography machine, through locating a plurality of scanning axles 600 with a plurality of work sucking discs 200 one-to-one, and every scanning axle 600 has at least one scanning motor active cell 611, first electrical system 400 is connected with every scanning motor active cell 611 of every scanning axle 600, and first electrical system 400 is changeable between first state and second state. When the first electronic control system 400 is in the first state, the first electronic control system 400 controls the rotors 611 of the scanning motors of the at least two scanning shafts 600 to move simultaneously; when the first electronic control system 400 is in the second state, the first electronic control system 400 controls the scan motor mover 611 of the at least one scan shaft 600 to move independently. When the motor series-parallel system 1 for the direct-write lithography machine exposes a large substrate (i.e., a substrate with a larger size), the large substrate can be placed on the plurality of working suckers 200 at the same time, and the first electric control system 400 controls the plurality of working suckers 200 on which the large substrate is placed to move in the first state, so that the motor series-parallel system 1 for the direct-write lithography machine can scan and expose the large substrate conveniently; when the motor series-parallel system 1 for the direct-write lithography machine exposes a small substrate (i.e., a substrate with a larger size), the small substrate can be placed on only one working sucker 200, the first electric control system 400 is in the second state, and the first electric control system 400 controls the movement of the working sucker 200 on which the small substrate is placed, so that the energy is saved, and the production cost is reduced. The motor series-parallel system 1 for the direct-write lithography machine can easily expose a large substrate and a small substrate, has strong compatibility, does not need to replace a working sucker, and has high production efficiency.
So, according to the utility model discloses a motor series parallel system 1 that is used for directly writing lithography machine that motor series parallel can realize the synchronous motion of a plurality of scanning axles and the switching of independent motion, has advantages such as compatible strong, production efficiency height.
For example, the granite marble 100 may be made of a granite material, and since the granite material is easily processed and molded, the surface of the granite marble 100 made of the granite material has good planarity. The work chuck 200 may be provided with a through hole (not shown) along its thickness, the through hole may be connected to a vacuum pump (not shown), when a substrate is placed on the work chuck 200, the vacuum pump starts to work to extract air between the substrate and the work chuck 200, so that the substrate is fixed to the work chuck 200 under the action of air pressure.
According to some embodiments of the present invention, as shown in fig. 4, the motor series-parallel system 1 for a direct-write lithography machine further includes at least one optical system 300 and a second electronic control system (not shown, refer to the first electronic control system 400).
The stepping shaft 700 has a plurality of stepping motor movers 711, the optical path system 300 is mounted on the stepping shaft 700 and connected to the stepping motor movers 711, and the stepping motor movers 711 drive the optical path system 300 to move. The second electric control system is connected with each stepping motor rotor 711, and the second electric control system can be switched between a third state and a fourth state, wherein when the second electric control system is in the third state, the second electric control system controls at least two stepping motor rotors 711 to move simultaneously; when the second electronic control system is in the fourth state, the second electronic control system controls at least one stepping motor rotor 711 to move independently.
For example, the second controller may include a plurality of second output points, the plurality of second output points are connected to the plurality of stepping motor movers 711 in a one-to-one correspondence manner, the plurality of second output points may be output simultaneously to enable the plurality of stepping motor movers 711 to move synchronously, and each of the second output points may also be output separately to enable each of the stepping motor movers 711 to move separately.
The second controller 500 may include a plurality of second control assemblies working independently, the same second control assembly is connected to a plurality of stepper motor movers 711, the second control assembly outputs to enable the plurality of stepper motor movers 711 to move synchronously, the plurality of second control assemblies may also be respectively connected to the plurality of stepper motor movers 711, and each second control assembly may also output separately to enable each stepper motor mover 711 to move separately
The stepping shaft 700 is provided with a plurality of stepping motor movers 711, when the second controller 500 controls the plurality of stepping motor movers 711 to move synchronously, the thrust on the whole of the optical path system 300 can be increased, and further, the exposure unit can be added to the optical path system 300, and the exposure efficiency of the large substrate can be increased by adding the exposure unit, so that the working efficiency of the motor series-parallel system 1 for the direct writing lithography machine is improved. When the second controller controls each of the stepping motor movers 711 to move independently, the exposure units in the optical path system 300 may be respectively disposed on the different stepping motor movers 711, so that each of the stepping motor movers 711 drives the exposure unit to move correspondingly, the diversity of the exposure modes of the motor series-parallel system 1 for the direct-write lithography machine for the substrate is increased, and the applicability of the motor series-parallel system 1 for the direct-write lithography machine is improved.
According to some embodiments of the present invention, as shown in fig. 7, the first electronic control system 400 includes a plurality of first sub-controllers 410, and the plurality of first sub-controllers 410 are connected to the plurality of scanning motor movers 611 in a one-to-one correspondence manner. The second controller includes a plurality of second sub-controllers (not shown in the drawings, and reference may be made to the first sub-controller 410), and the plurality of second sub-controllers are connected to the plurality of stepping motor movers 711 in a one-to-one correspondence.
For example, as shown in fig. 6, when the first electronic control system 400 is in the first state, that is, when the first electronic control system 400 controls the scanning motor movers 611 of multiple scanning shafts 600 to move synchronously, the control lines of the scanning motor movers 611 of at least two scanning shafts 600 may be simultaneously connected to the same first sub-controller 410; when the first electronic control system 400 is in the second state, that is, when the first electronic control system 400 controls the scanning motor rotors 611 of at least one scanning shaft 600 to move individually, the control lines of the plurality of scanning motor rotors 611 of each scanning shaft 600 may be connected to the plurality of first sub-controllers 410, so that the switching between the synchronous movement and the individual movement of the scanning motor rotors 611 of the plurality of scanning shafts 600 may be achieved only by changing the connection manner of the scanning motor rotors 611 of the plurality of scanning shafts 600 and the first sub-controllers 410. Thus, the motor series-parallel system 1 for the direct-write lithography machine is simple in structure.
When the second electronic control system is in the third state, the plurality of stepping motor movers 711 may be simultaneously connected to one second sub-electronic control system; when the second electronic control system is in the fourth state, the plurality of stepping motor movers 711 may be respectively connected to different second sub electronic control systems. Therefore, the switching between the synchronous motion and the single motion of the multiple stepping motor movers 711 can be realized only by changing the wiring mode of the multiple stepping motor movers 711. Thus, the motor series-parallel system 1 for the direct-write lithography machine is simple in structure.
According to some embodiments of the present invention, as shown in fig. 4 and 5, each scanning shaft 600 further comprises a scanning motor stator 612, the scanning motor stator 612 of each scanning shaft 600 cooperates with a scanning motor rotor 611, the stepping shaft 700 further comprises a stepping motor stator 712, and the stepping motor stator 712 cooperates with a plurality of stepping motor rotors 711. Thus each scan motor mover 611 and scan motor stator 612 constitutes a motor and each step motor mover 711 and step motor stator 712 constitutes a step motor, which may be linear motors. Each scan motor stator 612 extends in a length direction of the scan shaft 600 corresponding thereto, and the step motor stator 712 extends in a length direction of the step shaft 700.
According to some embodiments of the utility model, as shown in fig. 1, be parallel to each other between a plurality of scanning axles 600, a plurality of scanning axles 600 are unanimous to a plurality of work sucking discs 200's direction of promotion like this, and a plurality of scanning axles 600 are right through a plurality of work sucking discs 200 this moment the driving force of big base plate is the biggest, and it can be right to have further guaranteed that the motor cluster parallel system 1 that is used for directly writing the lithography machine is the driving force of big base plate. Each scanning axis 600 is perpendicular to the stepping axis 700, so that the moving direction of the optical path system 300 is parallel to the width direction or the length direction of the substrate placed on the working chuck 200, thereby ensuring that the size of the optical path system 300 is small and simultaneously realizing the complete exposure of the optical path system 300 to the substrate.
According to some embodiments of the utility model, as shown in fig. 1, a motor series parallel system 1 for directly writing lithography machine still includes a plurality of back shafts 800, and a plurality of back shafts 800 are installed in a plurality of scanning axles 600 one-to-one, and a plurality of work sucking discs 200 are installed in a plurality of back shafts 800 one-to-one, have reduced the probability that appears rocking when work sucking disc 200 removes. Moreover, the supporting shaft 800 drives the working suction cups 200 to move along the length direction of the supporting shaft 800, the supporting shaft 800 can adjust the distance between each working suction cup 200 and the optical path system 300 according to the thickness of the substrate, that is, the supporting shaft 800 can adjust the distance between the substrate and the optical path system 300 according to the thickness of the substrate, so that the substrate is located at the optimal exposure position of the optical path system 300, and the motor serial-parallel system 1 for the direct-write lithography machine can be ensured to be capable of performing exposure molding on substrates with different thicknesses, and the exposure molding quality is good.
According to some embodiments of the present invention, as shown in fig. 1, the granite marble 100 includes a base 110, a beam 120, and a pillar 130. The scanning shaft 600 is installed on the base 110, the stepping shaft 700 is installed on the beam 120, the scanning shaft 600 is located between the base 110 and the beam 120, one end of the upright 130 is connected to the base 110 and the other end is connected to the beam 120. The number of the upright posts 130 may be multiple, and the upright posts 130 are respectively disposed on two opposite sides of the base 110. The column 130 is connected to the base 110 and the beam 120, respectively, so that the structural stability of the whole motor series-parallel system 1 for the direct-write lithography machine is increased.
Further, each scanning shaft 600 is located between the base 110 and the supporting shaft 800 corresponding thereto, each supporting shaft 800 is located between the work chuck 200 corresponding thereto and the scanning shaft 600 corresponding thereto, and each work chuck 200 is located between the stepping shaft 700 corresponding thereto and the supporting shaft 800 corresponding thereto. In other words, each work chuck 200 is located between the scanning shaft 600 and the stepping shaft 700 corresponding thereto, and each support shaft 800 is located at a side of the work chuck 200 corresponding thereto facing the scanning shaft 600 corresponding thereto. This facilitates exposure of the optical path system 300 to the substrate.
According to some embodiments of the present invention, as shown in fig. 2 and fig. 3, the step shaft 700 further includes a step shaft sliding base 713, the step shaft sliding base 713 is slidably installed on the beam 120, the step shaft stepping motor stator 712 is fixed on the beam 120, the step shaft stepping motor rotor 711 is installed on the step shaft sliding base 713, and the optical system 300 is installed on the step shaft sliding base 713. Thus, the contact area between the stepping shaft 700 and the optical path system 300 is increased by the arrangement of the stepping shaft sliding seat 713, and the optical path system 300 is prevented from being relatively moved with the stepping shaft 700 when the load is too large or the movement distance is too long, so that the overall stability of the motor series-parallel system 1 for the direct-write lithography machine is increased.
The scan shaft 600 further includes a scan shaft slide 613, the scan shaft slide 613 is slidably mounted on the base 110, the scan shaft scan motor stator 612 is fixed on the base 110, the scan shaft scan motor rotor 611 is mounted on the scan shaft slide 613, and the work chuck 200 is mounted on the scan shaft slide 613. Thus, the contact area between the scanning shaft 600 and the working sucker 200 is increased by the arrangement of the scanning shaft sliding seat 613, the relative movement between the working sucker 200 and the scanning shaft when the stress is too large or the movement distance is too long is prevented, and the overall stability of the motor series-parallel system 1 for the direct-writing photoetching machine is further increased.
Other constructions and operations of the motor series-parallel system 1 for a direct-write lithography machine according to an embodiment of the present invention are known to those skilled in the art and will not be described in detail herein.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. A series-parallel motor system for a direct-write lithography machine, comprising:
granite marble;
a plurality of scanning shafts mounted to the granite marble, each of the scanning shafts having at least one scanning motor mover;
the plurality of working suckers are arranged on the plurality of scanning shafts in a one-to-one correspondence manner;
a stepping shaft installed on the granite marble, the stepping shaft having at least one stepping motor mover;
the first electric control system is connected with each scanning motor rotor of each scanning shaft, and the first electric control system is switchable between a first state and a second state;
when the first electric control system is in the first state, the first electric control system controls the rotors of the scanning motors of at least two scanning shafts to move simultaneously;
when the first electric control system is in the second state, the first electric control system controls the rotor of the scanning motor of at least one scanning shaft to move independently.
2. The motor series-parallel system for a direct-write lithography machine according to claim 1, wherein said first electronic control system comprises a plurality of first sub-electronic control systems, and the plurality of first sub-electronic control systems are connected with the plurality of scanning motor movers in a one-to-one correspondence.
3. The motor series-parallel system for a direct write lithography machine according to claim 1, wherein said stepping shaft has a plurality of stepping motor movers;
the motor series-parallel system for the direct-write lithography machine further comprises:
the stepping motor rotor drives the light path system to move;
the second electric control system is connected with each stepping motor rotor and can be switched between a third state and a fourth state;
when the second electric control system is in the third state, the second electric control system controls at least two rotors of the stepping motor to move simultaneously;
when the second electric control system is in the fourth state, the second electric control system controls at least one step motor rotor to move independently.
4. The motor series-parallel system for a direct-write lithography machine according to claim 3, wherein said second electronic control system comprises a plurality of second sub-electronic control systems, and the plurality of second sub-electronic control systems are connected with the plurality of stepping motor movers in a one-to-one correspondence.
5. The motor series-parallel system for a direct write lithography machine according to claim 3, wherein each of said scanning shafts further comprises a scanning motor stator, the scanning motor stator of each of said scanning shafts cooperating with a scanning motor mover;
the step shaft further comprises a step motor stator, and the step motor stator is matched with the plurality of step motor rotors.
6. A motor series-parallel system for a direct write lithography machine according to claim 3, wherein a plurality of said scanning axes are parallel to each other, each of said scanning axes being perpendicular to said stepping axis.
7. The motor series-parallel system for a direct-write lithography machine according to claim 3, wherein said stepping shaft further comprises a stepping shaft slide, a stepping motor mover of said stepping shaft is mounted to said stepping shaft slide, and said optical path system is mounted to said stepping shaft slide;
the scanning shaft further comprises a scanning shaft sliding seat, a rotor of a scanning motor of the scanning shaft is installed on the scanning shaft sliding seat, and the working sucker is installed on the scanning shaft sliding seat.
8. The series-parallel motor system for a direct-write lithography machine according to claim 3, characterized in that said granite marble comprises:
a base, the scanning shaft being mounted to the base;
one end of the upright post is connected to the base;
the beam is connected to the other end of the upright column, the stepping shaft is installed on the beam, and the scanning shaft is located between the base and the beam.
9. The motor series-parallel system for a direct-write lithography machine according to claim 8, further comprising:
the supporting shafts are arranged on the scanning shafts in a one-to-one correspondence mode, the working suckers are arranged on the supporting shafts in a one-to-one correspondence mode, and each supporting shaft drives the corresponding working sucker to move along the length direction of the supporting shaft.
10. The system of claim 9, wherein the scan shaft is positioned between the base and the support shaft, the support shaft is positioned between the work chuck and the scan shaft, and the work chuck is positioned between the stepper shaft and the support shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022234271.7U CN213069473U (en) | 2020-10-09 | 2020-10-09 | Motor series-parallel system for direct-writing photoetching machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022234271.7U CN213069473U (en) | 2020-10-09 | 2020-10-09 | Motor series-parallel system for direct-writing photoetching machine |
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| CN213069473U true CN213069473U (en) | 2021-04-27 |
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| CN202022234271.7U Active CN213069473U (en) | 2020-10-09 | 2020-10-09 | Motor series-parallel system for direct-writing photoetching machine |
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| Country | Link |
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2020
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