CN213037838U

CN213037838U - PVD support plate

Info

Publication number: CN213037838U
Application number: CN202021986306.6U
Authority: CN
Inventors: 张红星; 张小健; 樊天柱
Original assignee: Kunshan Zhengxing Electronic Technology Co ltd
Current assignee: Kunshan Zhengxing Electronic Technology Co ltd
Priority date: 2020-09-11
Filing date: 2020-09-11
Publication date: 2021-04-23
Anticipated expiration: 2030-09-11

Abstract

The utility model discloses a PVD support plate, including bottom plate and hinge, the bearing groove has been seted up on the positive surface of bottom plate, the bleeder vent has been seted up to the positive surface of bottom plate and the inner chamber that is located the bearing groove, the standing groove has been seted up to the bottom on the positive surface of bottom plate, the centre gripping groove has all been seted up to the both sides on the positive surface of bottom plate, the equal fixedly connected with spring in both sides of centre gripping inslot chamber, one side fixedly connected with connecting plate in centre gripping groove is kept away from to the spring, one side fixedly connected with antiskid ribbed tile of spring is kept away from. The utility model discloses a set up bottom plate, plywood, bleeder vent, bearing groove, standing groove, centre gripping groove, hinge, splint, three corner pads, square logical groove, spring, connecting plate, antiskid ribbed tile and telescopic link cooperation and use, solved current PVD support plate and did not have the function of stabilizing the centre gripping, easily lead to the silicon chip to remove at will, can't satisfy user's demand, reduced the problem of PVD support plate practicality.

Description

PVD support plate

Technical Field

The utility model relates to a PVD technical field specifically is a PVD support plate.

Background

PVD is physical vapor deposition, which means a technique of gasifying the surface of a material source into gaseous atoms, molecules, or partially ionizing them into ions under vacuum by using a physical method, and depositing a film having a specific function on the surface of a substrate by a low-pressure gas process, and the main methods of physical vapor deposition include vacuum evaporation, sputter coating, arc plasma coating, ion coating, molecular beam epitaxy, and the like.

In the process of sputtering coating, the PVD support plate is often used to place a silicon wafer needing to prepare a film, the existing PVD support plate does not have the function of stabilizing clamping, the silicon wafer is easy to move at will, the requirements of users cannot be met, and the practicability of the PVD support plate is reduced.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a PVD support plate possesses the advantage of stabilizing the centre gripping, has solved current PVD support plate and has not had the function of stabilizing the centre gripping, easily leads to the silicon chip to remove at will, can't satisfy user's demand, has reduced the problem of PVD support plate practicality.

In order to achieve the above object, the utility model provides a following technical scheme: a PVD carrier plate comprises a bottom plate and a hinge, wherein the front surface of the bottom plate is provided with a bearing groove, the front surface of the bottom plate and the inner cavity of the bearing groove are provided with air holes, the bottom of the front surface of the bottom plate is provided with a placing groove, the two sides of the front surface of the bottom plate are both provided with a clamping groove, the two sides of the inner cavity of the clamping groove are both fixedly connected with a spring, one side of the spring, which is far away from the clamping groove, is fixedly connected with a connecting plate, one side of the connecting plate, which is far away from the spring, is fixedly connected with anti-skid plates, the top and the bottom of one side of the two anti-skid plates, which are opposite to each other, are fixedly connected with telescopic rods, the top of the bottom plate is movably connected with a plywood through a hinge, the front surface of the plywood is provided with a square through groove matched with the bearing groove, the equal fixedly connected with triangle pad in four corners of square through groove inner chamber, the equal fixedly connected with in both sides on plywood positive surface presss from both sides the splint that the groove cooperation was used.

Preferably, the front surface of the inner cavity of the bearing groove is fixedly connected with a protective pad, and the surface of the protective pad is provided with a through hole matched with the air hole for use.

Preferably, the center department fixedly connected with plectrum at plywood top, the quantity of bearing groove is a plurality of.

Preferably, the front surface of the inner cavity of the placing groove is fixedly connected with a first magnet, and the top of the front surface of the plywood is fixedly connected with a second magnet matched with the first magnet for use.

Preferably, the specification of the square through groove is equal to that of the bearing groove, and the number of the springs is several.

Compared with the prior art, the beneficial effects of the utility model are as follows:

1. the utility model discloses a set up bottom plate, plywood, bleeder vent, bearing groove, standing groove, centre gripping groove, hinge, splint, three corner pads, square logical groove, spring, connecting plate, antiskid ribbed tile and telescopic link cooperation and use, solved current PVD support plate and did not have the function of stabilizing the centre gripping, easily lead to the silicon chip to remove at will, can't satisfy user's demand, reduced the problem of PVD support plate practicality.

2. The utility model discloses a set up three corner pads, can play spacing and protective effect to the silicon chip, through setting up the plectrum, can the person of facilitating the use stir the plywood, through setting up the protection pad, can play the effect of protection for the bottom to the silicon chip, through setting up the telescopic link, can prevent that the connecting plate from removing along with the spring is random, through setting up the antiskid ribbed tile, can increase and the frictional force between the splint.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic front view of the structure of the clamping groove of the present invention;

FIG. 3 is a schematic bottom sectional view of the connection plate structure of the present invention;

fig. 4 is the main view of the standing groove structure of the present invention.

In the figure: 1 bottom plate, 2 plywood, 3 bleeder vents, 4 bearing grooves, 5 first magnet, 6 standing grooves, 7 centre gripping grooves, 8 hinges, 9 splint, 10 second magnet, 11 triangular pad, 12 square logical grooves, 13 springs, 14 connecting plates, 15 antiskid ribbed tile, 16 telescopic links.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "both ends", "one end", "the other end", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element to be referred must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "provided", "connected", and the like are to be construed broadly, such as "connected", which may be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The utility model provides a bottom plate 1, plywood 2, bleeder vent 3, bearing groove 4, first magnet 5, standing groove 6, centre gripping groove 7, hinge 8, splint 9, second magnet 10, triangular pad 11, square logical groove 12, spring 13, connecting plate 14, antiskid ribbed tile 15 and parts such as telescopic link 16 are general standard or the part that technical staff in the field knows, and its structure and principle all can learn through the technical manual or learn through conventional experimental method for technical staff in the field.

Referring to fig. 1-4, a PVD carrier comprises a base plate 1 and a hinge 8, wherein a plurality of carrier grooves 4 are formed on the front surface of the base plate 1, a protective pad is fixedly connected to the front surface of the inner cavity of the carrier groove 4, the protective pad can protect the bottom of a silicon wafer, the number of the carrier grooves 4 is several, vent holes 3 are formed on the front surface of the base plate 1 and the inner cavity of the carrier groove 4, through holes matched with the vent holes 3 are formed on the surface of the protective pad, a placement groove 6 is formed on the bottom of the front surface of the base plate 1, a first magnet 5 is fixedly connected to the front surface of the inner cavity of the placement groove 6, a second magnet 10 matched with the first magnet 5 is fixedly connected to the top of the front surface of the plywood 2, clamping grooves 7 are formed on both sides of the front surface of the base plate 1, springs 13 are fixedly connected to both sides of the inner cavity of the clamping grooves, one side of the spring 13, which is far away from the clamping groove 7, is fixedly connected with a connecting plate 14, one side of the connecting plate 14, which is far away from the spring 13, is fixedly connected with an antiskid plate 15, the friction force between the antiskid plate 15 and the clamping plate 9 can be increased by arranging the antiskid plates 15, the top and the bottom of one side, which is opposite to the antiskid plates 15, are both fixedly connected with telescopic rods 16, the connecting plate 14 can be prevented from moving along with the spring 13 by arranging the telescopic rods 16, the top of the bottom plate 1 is movably connected with a plywood 2 through hinges 8, the center of the top of the plywood 2 is fixedly connected with a shifting sheet, a user can conveniently shift the plywood 2 by arranging the shifting sheet, the front surface of the plywood 2 is provided with a square through groove 12 matched with the bearing groove 4, the specification of the square through groove 12 is equal to that of the bearing groove 4, four corners of an, plywood 2 equal fixedly connected with in both sides on positive surface and the splint 9 that the cooperation of centre gripping groove 7 was used, through setting up bottom plate 1, plywood 2, bleeder vent 3, bearing groove 4, standing groove 6, centre gripping groove 7, hinge 8, splint 9, three corner pads 11, square logical groove 12, spring 13, connecting plate 14, antiskid ribbed tile 15 and the 16 cooperation of telescopic link are used, the function that current PVD support plate does not have stable centre gripping has been solved, easily lead to the silicon chip to remove at will, can't satisfy user's demand, the problem of PVD support plate practicality has been reduced.

During the use, the user will treat the silicon chip of coating film and place in bearing groove 4, turn over plywood 2 and laminate with bottom plate 1 through the plectrum and under hinge 8's effect afterwards, make second magnet 10 insert in standing groove 6, second magnet 10 and first magnet 5's surface contact and with first magnet 5 attract each other, make splint 9 insert in the centre gripping groove 7 simultaneously, antiskid ribbed tile 15, connecting plate 14 and telescopic link 16 outwards remove, spring 13 is compressed, carry out the centre gripping to splint 9, thereby it is spacing to carry out plywood 2, triangular pad 11 carries out the centre gripping to the four corners of placing silicon chip in bearing groove 4, thereby carry out spacing fixed to the silicon chip in bearing groove 4, the user moves bottom plate 1 to the regional coating film of coating film afterwards can.

In summary, the following steps: this PVD support plate, through setting up bottom plate 1, plywood 2, bleeder vent 3, bearing groove 4, standing groove 6, centre gripping groove 7, hinge 8, splint 9, three corner pads 11, square logical groove 12, spring 13, connecting plate 14, antiskid ribbed tile 15 and the 16 cooperation use of telescopic link, solved current PVD support plate and did not have the function of stabilizing the centre gripping, easily lead to the silicon chip to remove at will, can't satisfy user's demand, reduced the problem of PVD support plate practicality.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. PVD carrier plate comprising a base plate (1) and a hinge (8), characterized in that: the front surface of the bottom plate (1) is provided with a bearing groove (4), the front surface of the bottom plate (1) and an inner cavity positioned in the bearing groove (4) are provided with vent holes (3), the bottom of the front surface of the bottom plate (1) is provided with a placing groove (6), two sides of the front surface of the bottom plate (1) are provided with clamping grooves (7), two sides of the inner cavity of the clamping grooves (7) are fixedly connected with springs (13), one side of each spring (13) far away from the clamping groove (7) is fixedly connected with a connecting plate (14), one side of each connecting plate (14) far away from the springs (13) is fixedly connected with anti-skid plates (15), the tops and bottoms of opposite sides of the two anti-skid plates (15) are fixedly connected with telescopic rods (16), the top of the bottom plate (1) is movably connected with a plywood (2) through hinges (8), the front surface of the plywood (2) is provided with a square, the four corners of the inner cavity of the square through groove (12) are fixedly connected with triangular pads (11), and the two sides of the front surface of the plywood (2) are fixedly connected with clamp plates (9) matched with the clamping grooves (7).

2. The PVD carrier plate of claim 1, wherein: the front surface of the inner cavity of the bearing groove (4) is fixedly connected with a protective pad, and a through hole matched with the air hole (3) is formed in the surface of the protective pad.

3. The PVD carrier plate of claim 1, wherein: the center department fixedly connected with plectrum at plywood (2) top, the quantity of bearing groove (4) is a plurality of.

4. The PVD carrier plate of claim 1, wherein: the positive surface fixed connection of standing groove (6) inner chamber has first magnet (5), the top fixed connection on plywood (2) positive surface has second magnet (10) with first magnet (5) cooperation use.

5. The PVD carrier plate of claim 1, wherein: the specification of the square through groove (12) is equal to that of the bearing groove (4), and the number of the springs (13) is a plurality.