CN213022245U - Device for off-line calibration of laser optical axis of Nikoni 8 lithography machine - Google Patents
Device for off-line calibration of laser optical axis of Nikoni 8 lithography machine Download PDFInfo
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- CN213022245U CN213022245U CN202021976050.0U CN202021976050U CN213022245U CN 213022245 U CN213022245 U CN 213022245U CN 202021976050 U CN202021976050 U CN 202021976050U CN 213022245 U CN213022245 U CN 213022245U
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Abstract
The utility model discloses a device that is used for off-line calibration niankai 8 lithography machine laser optical axis, it relates to laser calibration technical field. Preceding locating piece is as the front end positioning baffle of laser instrument, place at the holistic front side of device, the rear end positioning baffle of back locating piece as the laser instrument, place at the holistic rear side of device, preceding locating piece, a side locating piece has been placed respectively to the side of back locating piece, as the side position positioning baffle of laser instrument, preceding locating piece, the side locating piece, the surface of back locating piece all is provided with the bearing plane platform of placing the laser instrument, preceding locating piece, the side locating piece, the bottom of back locating piece all is provided with the connection face, the one end that the middle part the place ahead of preceding locating piece and side locating piece is close to the light source is provided with nearly some aperture mark, the one end of keeping away from the light source is provided with. The utility model discloses the calibration is easy and simple to handle and weak point consuming time, can observe the change of light directly perceivedly, and does not occupy the time of production facility, and application prospect is wide.
Description
Technical Field
The utility model relates to a laser instrument calibration technical field, concretely relates to a device that is used for off-line calibration niankang i8 lithography machine laser optical axis.
Background
At present, the laser of the photoetching machine is calibrated in the industry at present, the laser generally needs to be installed on the photoetching machine for on-line calibration and debugging, because the optical paths inside the photoetching machine are numerous, the change of light rays cannot be observed visually, the calibration is tedious, the consumed time is long, and a lot of time of production equipment can be occupied. In order to solve the problems, a novel device for off-line calibration of the laser optical axis of the Nikoni 8 lithography machine is particularly necessary.
Disclosure of Invention
To the not enough that exists on the prior art, the utility model aims to provide a device that is used for off-line calibration niankang i8 lithography machine laser optical axis, simple structure, reasonable in design, calibration easy and simple to handle and weak point consuming time, can observe the change of light directly perceivedly, and do not occupy the time of production facility, the practicality is strong, easily uses widely.
In order to achieve the above purpose, the present invention is realized by the following technical solution: a device for off-line calibration of a laser optical axis of a Nikon i8 lithography machine comprises a front positioning block, a side positioning block, a rear positioning block, a bearing plane platform, a connecting surface, a near point small hole mark and a far point small hole mark, wherein the front positioning block is used as a front end positioning baffle of the laser and is arranged on the front side of the whole device, the rear positioning block is used as a rear end positioning baffle of the laser and is arranged on the rear side of the whole device, the front positioning block, a side positioning block is respectively arranged on the side of the rear positioning block and serves as a side position positioning baffle of the laser, bearing plane platforms for placing the laser are arranged on the surfaces of the front positioning block, the side positioning block and the rear positioning block, connecting surfaces are arranged at the bottoms of the front positioning block, the side positioning block and the rear positioning block, a near point small hole mark is arranged at one end, close to the light source, in front of the middle of the front positioning block and the side positioning block, and a far point small hole mark is arranged at one end, far away from the light source, of the; the distance a between the front positioning block and the side positioning block on the corresponding side is 90mm, the distance b between the front positioning block and the rear positioning block is 416mm, the distance c between the two side positioning blocks is 416mm, the distance d between the rear positioning block and the side positioning block on the corresponding side is 66mm, and the distance e between the front positioning block and the near point small hole mark is 300 mm.
Preferably, the front positioning block, the side positioning block and the rear positioning block are fixed on the main supporting block through screws, so that fine adjustment of the positioning blocks is facilitated during assembly.
Preferably, the bearing plane tables on the surfaces of the front positioning block, the side positioning block and the rear positioning block are positioned on the same horizontal plane.
Preferably, the connecting surface adopts silica gel sponge as an intermediate connecting piece, so that the influence caused by environmental vibration and temperature change can be eliminated conveniently.
Preferably, the distance f between the near point pinhole mark and the far point pinhole mark is not less than 4000mm, so that the calibration precision is ensured.
The utility model has the advantages that: according to the laser bearing table and the laser structure of the Nikoni 8 lithography machine, the laser optical axis off-line calibration device formed by combining the four main support blocks is adopted, the complex optical path inside the lithography machine is simplified into a straight line, the change of light can be observed visually, the calibration operation is simple and convenient, the consumed time is short, the time of production equipment is not occupied, and the application prospect is wide.
Drawings
The present invention will be described in detail with reference to the accompanying drawings and specific embodiments;
fig. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic structural view of a front positioning block of the present invention;
FIG. 3 is a schematic structural view of the side positioning block of the present invention;
fig. 4 is a schematic structural view of the rear positioning block of the present invention;
fig. 5 is a schematic plan view of the present invention.
Detailed Description
In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.
Referring to fig. 1 to 5, the following technical solutions are adopted in the present embodiment: a device for off-line calibration of a laser optical axis of a Nikon i8 lithography machine comprises a front positioning block 1, side positioning blocks 2, a rear positioning block 3, a bearing plane platform 4, a connecting surface 5, a near point small hole mark 6 and a far point small hole mark 7, wherein the front positioning block 1 is used as a front end positioning baffle of the laser and is placed on the front side of the whole device, the rear positioning block 3 is used as a rear end positioning baffle of the laser and is placed on the rear side of the whole device, the side positioning blocks 2 are respectively placed on the side edges of the front positioning block 1 and the rear positioning block 3 and are used as side position positioning baffles of the laser, the bearing plane platforms 4 for placing the laser are arranged on the surfaces of the front positioning block 1, the side positioning blocks 2 and the rear positioning block 3, the connecting surfaces 5 are arranged at the bottoms of the front positioning block 1, the side positioning block 2 and the rear positioning block 3, the near point small hole mark 6 is arranged at one end, a far point small hole mark 7 is arranged at one end far away from the light source, the near point small hole mark 6 is used as a mark point at one end of the laser beam light path close to the light source, the far point small hole mark 7 is used as a mark point at one end of the laser beam light path far away from the light source, and the distance f between the near point small hole mark 6 and the far point small hole mark 7 is not less than 4000mm, so that the calibration precision is ensured; the distance a between the front positioning block 1 and the side positioning block 2 on the corresponding side is 90mm, the distance b between the front positioning block 1 and the rear positioning block 3 is 416mm, the distance c between the two side positioning blocks 2 is 416mm, the distance d between the rear positioning block 3 and the side positioning block 2 on the corresponding side is 66mm, and the distance e between the front positioning block 1 and the near point small hole mark 6 is 300 mm.
It is worth noting that the bearing plane platforms 4 on the surfaces of the front positioning block 1, the side positioning block 2 and the rear positioning block 3 are located on the same horizontal plane, the bearing plane platforms 4 are used for placing lasers, the plane platforms are formed by three independent supporting surfaces, material cost is reduced, larger bottom space is provided, and operation in the laser machine calibration process is facilitated.
In addition, the connecting surface 5 adopts silica gel sponge as an intermediate connecting piece, and the silica gel sponge KG-48 is rich in elasticity, has better heat resistance, and can effectively eliminate the influence caused by environmental vibration and temperature change.
In the installation process of the specific embodiment, the device needs to be positioned in a standard mode. Firstly, a standard laser is placed on a bearing plane platform 4, the laser is positioned on a front positioning block 1, a side positioning block 2 and a rear positioning block 3, the front positioning block 1, the side positioning block 2 and the rear positioning block 3 are all fixed on a main supporting block through screws, fine adjustment is conveniently carried out on each positioning block during assembly, and the calibration precision is guaranteed; then, a laser power supply is turned on, a near point small hole mark 6 and a far point small hole mark 7 are respectively placed and fixed at a near point and a far point of a light path, and light rays pass through a mark central hole; according to the principle of three points and one line, a standard optical axis line is obtained.
When the laser off-line calibration is carried out in the specific embodiment, the laser is placed on the bearing platform 4 and is positioned on the front positioning block 1, the side positioning block 2 and the rear positioning block 3, after the laser is positioned, the power supply of the laser is turned on, the calibration screw of the laser is adjusted, light passes through the centers of the near point small hole mark 6 and the far point small hole mark 7, and the calibration of the optical axis of the laser is completed.
The specific embodiment aims at the laser bearing table of the Nikon i8 photoetching machine, the laser bearing table of the off-line calibration photoetching machine is simulated by combining four independent supporting blocks, the laser is calibrated in an off-line state more conveniently, and the debugging and calibration process is simple and clear. The device simplifies the complicated light path inside the photoetching machine into a standard straight line according to the principle of three points and one line, is convenient to observe the change of an optical axis in the debugging process, greatly shortens the calibration time, does not occupy the time of production equipment completely because the whole calibration process is completed in an off-line state, can restore the production equipment only by fine adjustment or even without adjustment in the replacement and installation process of a laser, has high reliability and wide market application prospect.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (5)
1. The utility model provides a device that is used for off-line calibration ni kang i8 lithography machine laser optical axis, a serial communication port, including preceding locating piece (1), side locating piece (2), back locating piece (3), bear platform (4), connect face (5), nearly some aperture mark (6), far point aperture mark (7), preceding locating piece (1) is as the front end positioning baffle of laser instrument, place in the holistic front side of device, back locating piece (3) are as the rear end positioning baffle of laser instrument, place in the holistic rear side of device, preceding locating piece (1), a side locating piece (2) has been placed respectively to the side of back locating piece (3), as the side position positioning baffle of laser instrument, the surface of preceding locating piece (1), side locating piece (2), back locating piece (3) all is provided with the bearing platform (4) of placing the laser instrument, preceding locating piece (1), The bottoms of the side positioning blocks (2) and the rear positioning block (3) are respectively provided with a connecting surface (5), the front positioning block (1) and the front part of the middle part of the side positioning block (2) are provided with a near point small hole mark (6) at one end close to the light source, and the front part of the middle part of the side positioning block (2) is provided with a far point small hole mark (7); the distance a between the front positioning block (1) and the side positioning block (2) on the corresponding side is 90mm, the distance b between the front positioning block (1) and the rear positioning block (3) is 416mm, the distance c between the two side positioning blocks (2) is 416mm, the distance d between the rear positioning block (3) and the side positioning block (2) on the corresponding side is 66mm, and the distance e between the front positioning block (1) and the near point small hole mark (6) is 300 mm.
2. The apparatus according to claim 1, wherein the front positioning block (1), the side positioning block (2), and the rear positioning block (3) are fixed on the main support block by screws.
3. The device for off-line calibration of the laser optical axis of a Nikoni 8 lithography machine according to claim 1, wherein the bearing platform (4) on the surface of the front positioning block (1), the side positioning blocks (2) and the rear positioning block (3) are located on the same horizontal plane.
4. The device for off-line calibration of the laser optical axis of a niconi 8 lithography machine according to claim 1, wherein the connecting surface (5) is a silicone sponge as an intermediate connecting member.
5. The device for off-line calibration of the laser optical axis of a Nikoni 8 lithography machine according to claim 1, wherein the distance f between the near point pinhole mark (6) and the far point pinhole mark (7) is not less than 4000 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021976050.0U CN213022245U (en) | 2020-09-11 | 2020-09-11 | Device for off-line calibration of laser optical axis of Nikoni 8 lithography machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021976050.0U CN213022245U (en) | 2020-09-11 | 2020-09-11 | Device for off-line calibration of laser optical axis of Nikoni 8 lithography machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213022245U true CN213022245U (en) | 2021-04-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021976050.0U Active CN213022245U (en) | 2020-09-11 | 2020-09-11 | Device for off-line calibration of laser optical axis of Nikoni 8 lithography machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213022245U (en) |
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2020
- 2020-09-11 CN CN202021976050.0U patent/CN213022245U/en active Active
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