CN213022247U - Device for off-line calibration of laser optical axis of Nikoni 11 lithography machine - Google Patents
Device for off-line calibration of laser optical axis of Nikoni 11 lithography machine Download PDFInfo
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- CN213022247U CN213022247U CN202021976268.6U CN202021976268U CN213022247U CN 213022247 U CN213022247 U CN 213022247U CN 202021976268 U CN202021976268 U CN 202021976268U CN 213022247 U CN213022247 U CN 213022247U
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- locating piece
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Abstract
The utility model discloses a device that is used for off-line calibration niankai 11 lithography machine laser optical axis, it relates to laser calibration technical field. The front positioning block is a front end positioning baffle of a laser and is placed on the front side of the whole device, the front side positioning block is placed on the side edge of the front positioning block, the rear side positioning block is placed on the rear portion of the front side positioning block, the surfaces of the front positioning block, the front side positioning block and the rear side positioning block are respectively provided with an independent bearing plane platform, and the front positioning block and the front middle portion of the front side positioning block are sequentially provided with a near point small hole mark and a far point small hole mark. The utility model discloses a laser instrument optical axis off-line calibrating device that three main tributary supporting block combination formed simplifies the light path of photoetching machine inside complicacy into a straight line, can observe the change of light directly perceivedly, and the calibration is easy and simple to handle and weak point consuming time, does not occupy the time of production facility.
Description
Technical Field
The utility model relates to a laser instrument calibration technical field, concretely relates to a device that is used for off-line calibration niankang i11 lithography machine laser optical axis.
Background
At present, the laser of the photoetching machine is calibrated in the industry at present, the laser generally needs to be installed on the photoetching machine for on-line calibration and debugging, because the optical paths inside the photoetching machine are numerous, the change of light rays cannot be observed visually, the calibration is tedious, the consumed time is long, and a lot of time of production equipment can be occupied. Based on this, it is necessary to design a new device for off-line calibration of the laser optical axis of the niconi 11 lithography machine.
Disclosure of Invention
To the not enough that exists on the prior art, the utility model aims to provide a device that is used for off-line calibration niankang i11 lithography machine laser optical axis, structural design is reasonable, simplifies complicated lithography machine light path into a standard straight line, and the change of light can be observed directly perceivedly to calibration easy and simple to handle and weak point consuming time, and does not occupy the time of production facility, and the practicality is strong, easily uses widely.
In order to achieve the above purpose, the present invention is realized by the following technical solution: the utility model provides a device that is used for off-line calibration ni kang i11 lithography machine laser optical axis, including preceding locating piece, preceding side locating piece, back side locating piece, bear the weight of the plane platform, nearly little hole mark and far point little hole mark, preceding locating piece is the front end location baffle of laser instrument, place at the holistic front side of device, preceding side locating piece has been placed to the side of preceding locating piece, back side locating piece has been placed to the rear portion of preceding side locating piece, preceding side locating piece, the surface of back side locating piece all is provided with independent bearing the weight of the plane platform, preceding locating piece, preceding side locating piece, the bottom of back side locating piece is equipped with the connection face, near point little hole mark has been placed in proper order in the middle part the place ahead of preceding locating piece and preceding side locating piece, far.
Preferably, the distance a between the front positioning block and the front side positioning block is 20mm, the distance b between the front positioning block and the rear side positioning block is 210mm, the distance c between the front side positioning block and the rear side positioning block is 230mm, the distance d between the front positioning block and the near point pinhole mark is 300mm, and the distance e between the near point pinhole mark and the far point pinhole mark is not less than 4000 mm.
Preferably, the bearing plane tables on the surfaces of the front positioning block, the front side positioning block and the rear side positioning block are positioned on the same horizontal plane.
Preferably, the connecting surface adopts silica gel sponge as an intermediate connecting piece, so that the influence caused by environmental vibration and temperature change is eliminated.
The utility model has the advantages that: according to the laser bearing table and the laser structure of the Nikoni 11 lithography machine, the laser optical axis off-line calibration device formed by combining the three main support blocks is adopted, the complex optical path inside the lithography machine is simplified into a straight line, the change of light can be observed visually, the calibration operation is simple and convenient, the consumed time is short, and the time of production equipment is not occupied.
Drawings
The present invention will be described in detail with reference to the accompanying drawings and specific embodiments;
fig. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic structural view of a front positioning block of the present invention;
FIG. 3 is a schematic structural view of the front side positioning block of the present invention;
FIG. 4 is a schematic structural view of the rear side positioning block of the present invention;
fig. 5 is a schematic plan view of the present invention.
Detailed Description
In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.
Referring to fig. 1 to 5, the following technical solutions are adopted in the present embodiment: the utility model provides a device that is used for off-line calibration ni kang i11 lithography machine laser optical axis, including preceding locating piece 1, preceding side locating piece 2, back side locating piece 3, bear plane platform 4, near point aperture mark 5 and far point aperture mark 6, preceding locating piece 1 is the front end location baffle of laser instrument, place at the holistic front side of device, preceding side locating piece 2 has been placed to the side of preceding locating piece 1, back side locating piece 3 has been placed to the rear portion of preceding side locating piece 2, preceding locating piece 1, preceding side locating piece 2, the surface of back side locating piece 3 all is provided with independent bearing plane platform 4, preceding locating piece 1, preceding side locating piece 2, the bottom of back side locating piece 3 is equipped with and connects face 7, near point aperture mark 5 has been placed in proper order with the middle part the place ahead of preceding locating piece 1 and preceding side locating piece 2, far point aperture mark 6.
It is worth noting that the distance e between the near point pinhole mark 5 and the far point pinhole mark 6 is not less than 4000mm, so that the calibration precision is ensured; the distance a between the front positioning block 1 and the front side positioning block 2 is 20mm, the distance b between the front positioning block 1 and the rear side positioning block 3 is 210mm, the distance c between the front side positioning block 2 and the rear side positioning block 3 is 230mm, and the distance d between the front positioning block 1 and the near point small hole mark 5 is 300 mm.
It should be noted that the bearing plane platforms 4 on the surfaces of the front positioning block 1, the front side positioning block 2 and the rear side positioning block 3 are located on the same horizontal plane.
In addition, the connecting surface 7 adopts silica gel sponge KG-48 as an intermediate connecting piece, and the silica gel sponge is rich in elasticity, has better heat resistance and can eliminate the influence caused by environmental vibration and temperature change.
This embodiment uses the laser plummer on the three independent support plane simulation lithography machine, the laser instrument is placed on this plane, need carry out standard location to the device during installation, preceding locating piece 1 is as the front end positioning baffle of laser instrument, use the screw fixation to the main tributary supporting block, preceding side locating piece 2, back side locating piece 3 is as the side position positioning baffle of laser instrument, use the screw fixation to the main tributary supporting block, do the fine setting during convenient assembly, this structure reduces material cost, and there is bigger bottom space, more convenient operation in the laser machine calibration process.
The operation of this embodiment for calibrating the laser is as follows: the method comprises the steps of placing a standard laser on a bearing plane platform 4, positioning the laser on a front positioning block 1, a front side positioning block 2 and a rear side positioning block 3, turning on a laser power supply after the laser is positioned, adjusting a calibration screw of the laser, placing a near point small hole mark 5 and a far point small hole mark 6 at a near point and a far point of a light path respectively and fixing, enabling light to penetrate through center holes of the near point small hole mark and the far point small hole mark, obtaining a standard optical axis line according to a three-point one-line principle, and completing calibration of the optical axis of the laser.
This embodiment has creatively used three independent supporting shoe to simulate the laser plummer of lithography machine, calibrate the laser under an off-line state, and the device is more convenient to operate according to three-point and one-line principle, simplify complicated lithography machine light path into a standard straight line, and the debugging calibration process is simpler and more clear, and the change of observation optical axis in the convenient debugging process greatly shortens the length of time of calibration, and simultaneously because whole calibration process is accomplished under the off-line state, does not occupy the time of production facility completely, and the user only need finely tune in the change installation of laser and even need not adjust just can resume production facility, therefore, the clothes hanger is strong in practicability, and has wide application prospect.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (3)
1. The utility model provides a device that is used for off-line calibration ni kang i11 lithography machine laser optical axis, a serial communication port, including preceding locating piece (1), preceding side locating piece (2), back side locating piece (3), bear platform (4), near point aperture mark (5) and far point aperture mark (6), preceding locating piece (1) is the front end positioning baffle of laser instrument, place in the holistic front side of device, preceding side locating piece (2) have been placed to the side of preceding locating piece (1), back side locating piece (3) have been placed to the rear portion of preceding side locating piece (2), preceding locating piece (1), preceding side locating piece (2), the surface of back side locating piece (3) all is provided with independent bearing platform (4), preceding locating piece (1), preceding side locating piece (2), the bottom of back side locating piece (3) is equipped with and connects face (7), near point aperture mark (5) have been placed in proper order in the middle part the place ahead of preceding locating piece (1) and preceding side locating piece (2) A far point pinhole marker (6); the distance a between the front positioning block (1) and the front side positioning block (2) is 20mm, the distance b between the front positioning block (1) and the rear side positioning block (3) is 210mm, the distance c between the front side positioning block (2) and the rear side positioning block (3) is 230mm, the distance d between the front positioning block (1) and the near point small hole mark (5) is 300mm, and the distance e between the near point small hole mark (5) and the far point small hole mark (6) is not less than 4000 mm.
2. The device for off-line calibration of the laser optical axis of a Nikoni 11 lithography machine according to claim 1, wherein the bearing platform (4) on the surface of the front positioning block (1), the front side positioning block (2) and the back side positioning block (3) are located on the same horizontal plane.
3. The device for off-line calibration of the laser optical axis of a niconi 11 lithography machine according to claim 1, wherein the connecting surface (7) is made of silicone sponge as an intermediate connecting member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021976268.6U CN213022247U (en) | 2020-09-11 | 2020-09-11 | Device for off-line calibration of laser optical axis of Nikoni 11 lithography machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021976268.6U CN213022247U (en) | 2020-09-11 | 2020-09-11 | Device for off-line calibration of laser optical axis of Nikoni 11 lithography machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213022247U true CN213022247U (en) | 2021-04-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021976268.6U Active CN213022247U (en) | 2020-09-11 | 2020-09-11 | Device for off-line calibration of laser optical axis of Nikoni 11 lithography machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213022247U (en) |
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- 2020-09-11 CN CN202021976268.6U patent/CN213022247U/en active Active
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