CN213022246U - Device for off-line calibration of laser optical axis of Nikon S204 photoetching machine - Google Patents
Device for off-line calibration of laser optical axis of Nikon S204 photoetching machine Download PDFInfo
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- CN213022246U CN213022246U CN202021976267.1U CN202021976267U CN213022246U CN 213022246 U CN213022246 U CN 213022246U CN 202021976267 U CN202021976267 U CN 202021976267U CN 213022246 U CN213022246 U CN 213022246U
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Abstract
The utility model discloses a device that is used for off-line calibration niakang S204 photoetching machine laser optical axis, it relates to laser calibration technical field. The right side and the rear side of the front positioning block are respectively provided with a side positioning block and a rear positioning block, the surfaces of the front positioning block, the rear positioning block and the side positioning block are respectively provided with an independent bearing plane platform, and the left side of the front positioning block is sequentially provided with a near point small hole mark and a far point small hole mark from near to far; the distance between the front positioning block and the side positioning block is 1mm, the distance between the front positioning block and the rear positioning block is 316mm, the distance between the side positioning block and the rear positioning block is 47mm, and the distance between the near point small hole mark and the far point small hole mark is not less than 4000 mm. The utility model discloses according to three-point one-line principle, simplify the light path of photoetching machine inside complicacy into a straight line, calibration is easy and simple to handle and weak point consuming time, can observe the change of light directly perceivedly, does not occupy the time of production facility.
Description
Technical Field
The utility model relates to a laser calibration technical field, concretely relates to a device that is used for off-line calibration niakang S204 photoetching machine laser optical axis.
Background
The laser of the existing photoetching machine in industry needs to be installed on the photoetching machine for online calibration and debugging, but because the internal optical paths of the photoetching machine are numerous, the change of light rays cannot be observed visually, the calibration is tedious, the consumed time is long, and much time of production equipment can be occupied. In order to solve the problems, it is particularly necessary to design a novel device for off-line calibration of the laser optical axis of the Nikon S204 lithography machine.
Disclosure of Invention
To the deficiency that exists on the prior art, the utility model aims to provide a device that is used for off-line calibration niakang S204 photoetching machine laser optical axis, simple structure, reasonable in design according to three-point an ray' S principle, simplifies the light path of photoetching machine inside complicacy into a straight line, and the change of light can be observed directly perceivedly and weak point consuming time to calibration operation, and does not occupy the time of production facility, easily uses widely.
In order to achieve the above purpose, the present invention is realized by the following technical solution: a device for off-line calibration of a laser optical axis of a Nikon S204 photoetching machine comprises a front positioning block, a bearing plane platform, a rear positioning block, a side positioning block, a near point small hole mark, a far point small hole mark and a connecting surface, wherein the side positioning block is arranged on the right side of the front positioning block, the rear positioning block is arranged on the rear side of the front positioning block, the surfaces of the front positioning block, the rear positioning block and the side positioning block are respectively provided with an independent bearing plane platform, the connecting surfaces are arranged at the bottoms of the front positioning block, the rear positioning block and the side positioning block, and the near point small hole mark and the far point small hole mark are sequentially placed on the left side of the front; the distance a between the front positioning block and the side positioning block is 1mm, the distance b between the front positioning block and the rear positioning block is 316mm, the distance c between the side positioning block and the rear positioning block is 47mm, the distance d between the right side edge of the side positioning block and the right side edge of the rear positioning block is 35mm, the distance e between the front positioning block and the near point small hole mark is 300mm, and the distance f between the near point small hole mark and the far point small hole mark is not less than 4000 mm.
Preferably, the bearing plane tables on the surfaces of the front positioning block, the rear positioning block and the side positioning block are positioned on the same horizontal plane, so that the calibration precision of the laser is improved.
Preferably, the connecting surface adopts silica gel sponge as an intermediate connecting piece, so that the influence caused by environmental vibration and temperature change is eliminated.
The utility model has the advantages that: according to the laser bearing table and the laser structure of the Nikon S204 photoetching machine, the laser optical axis off-line calibration device formed by combining the three main support blocks is adopted, the complex optical path inside the photoetching machine is simplified into a straight line, the observation in the debugging process is facilitated, the change of light can be observed visually, the calibration operation is simple and convenient, the debugging and calibration process is simple and clear, the consumed time is short, and the time of production equipment is not occupied completely.
Drawings
The present invention will be described in detail with reference to the accompanying drawings and specific embodiments;
fig. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic structural view of a front positioning block of the present invention;
fig. 3 is a schematic structural view of the rear positioning block of the present invention;
FIG. 4 is a schematic structural view of the side positioning block of the present invention;
fig. 5 is a schematic plan view of the present invention.
Detailed Description
In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.
Referring to fig. 1 to 5, the following technical solutions are adopted in the present embodiment: a device for off-line calibration of a laser optical axis of a Nikon S204 photoetching machine comprises a front positioning block 1, a bearing plane platform 2, a rear positioning block 3, a side positioning block 4, a near point small hole mark 5, a far point small hole mark 6 and a connecting surface 7, wherein the side positioning block 4 is arranged on the right side of the front positioning block 1, the rear positioning block 3 is arranged on the rear side of the front positioning block 1, the surfaces of the front positioning block 1, the rear positioning block 3 and the side positioning block 4 are respectively provided with the independent bearing plane platform 2, the connecting surface 7 is arranged at the bottom of the front positioning block 1, the rear positioning block 3 and the side positioning block 4, and the near point small hole mark 5 and the far point small hole mark 6 are sequentially placed on the left side of; the distance a between the front positioning block 1 and the side positioning block 4 is 1mm, the distance b between the front positioning block 1 and the rear positioning block 3 is 316mm, the distance c between the side positioning block 4 and the rear positioning block 3 is 47mm, the distance d between the right side edge of the side positioning block 4 and the right side edge of the rear positioning block 3 is 35mm, the distance e between the front positioning block 1 and the near point small hole mark 5 is 300mm, and the distance f between the near point small hole mark 5 and the far point small hole mark 6 is not less than 4000 mm.
It is worth noting that the connecting surface 7 adopts the silica gel sponge KG-48 as an intermediate connecting piece, is rich in elasticity, has better heat resistance, and can effectively eliminate the influence caused by environmental vibration and temperature change.
This embodiment adopts preceding locating piece 1 as the front end positioning baffle of laser instrument, back locating piece 3 is as the rear end positioning baffle of laser instrument, side locating piece 4 is as the side position positioning baffle of laser instrument, three locating piece all uses the screw fixation to main tributary supporting block, do the fine setting when convenient assembly, preceding locating piece 1, back locating piece 3, the bearing plane platform 2 on side locating piece 4 surface is located same horizontal plane, improve the laser instrument calibration accuracy, bearing plane platform 2 comprises three independent holding surface jointly, during the calibration, the laser instrument is placed on this bearing plane platform 2, simultaneously, the device adopts near point aperture mark 5 to be close to the mark point of light source one end as the laser beam light path, far point aperture mark 6 keeps away from the mark point of light source one end as the laser beam light path. When the device is used for calibrating the laser, the operation flow is as follows: the laser is placed on a bearing plane platform 2, the laser is positioned through a front positioning block 1, a rear positioning block 3 and a side positioning block 4, after the laser is positioned, a power supply of the laser is turned on, a calibration screw of the laser is adjusted, small hole marks are respectively placed and fixed at a near point and a far point of a light path, light rays penetrate through the centers of a near point small hole mark 5 and a far point small hole mark 6, a standard optical axis line is obtained according to the three-point one-line principle, and the calibration of the optical axis of the laser is completed.
This embodiment adopts the laser plummer on the three independent support plane simulation lithography machine, conveniently calibrates the laser instrument under the state of off-line, the device is according to three-point one-line principle, simplify complicated lithography machine light path into a standard straight line, conveniently observe the change of optical axis in the debugging process, shorten the length of calibration, because whole calibration process is accomplished under the off-line state, do not occupy the time of production facility completely, the user only need finely tune in the change installation of laser instrument and even need not adjust just can resume production facility. Meanwhile, the device has the advantages of low material cost, larger bottom space, more convenience for operation in the calibration process of the laser machine and wide market application prospect.
The basic principles and the main features of the invention and the advantages of the invention have been shown and described above. It will be understood by those skilled in the art that the present invention is not limited to the above embodiments, and that the foregoing embodiments and descriptions are provided only to illustrate the principles of the present invention without departing from the spirit and scope of the present invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (3)
1. A device for off-line calibration of a laser optical axis of a Nikon S204 photoetching machine is characterized by comprising a front positioning block (1), a bearing plane platform (2), a rear positioning block (3), side positioning blocks (4), near point small hole marks (5), far point small hole marks (6) and a connecting surface (7), wherein the side positioning block (4) is arranged on the right side of the front positioning block (1), the rear positioning block (3) is arranged on the rear side of the front positioning block (1), the surfaces of the front positioning block (1), the rear positioning block (3) and the side positioning blocks (4) are respectively provided with the independent bearing plane platform (2), the connecting surface (7) is arranged at the bottoms of the front positioning block (1), the rear positioning block (3) and the side positioning blocks (4), and the near point small hole marks (5) and the far point small hole marks (6) are sequentially placed on the left side of the front positioning block (; the distance a between the front positioning block (1) and the side positioning block (4) is 1mm, the distance b between the front positioning block (1) and the rear positioning block (3) is 316mm, the distance c between the side positioning block (4) and the rear positioning block (3) is 47mm, the distance (d) between the right side edge of the side positioning block (4) and the right side edge of the rear positioning block (3) is 35mm, the distance e between the front positioning block (1) and the near point small hole mark (5) is 300mm, and the distance f between the near point small hole mark (5) and the far point small hole mark (6) is not less than 4000 mm.
2. The device according to claim 1, wherein the surface bearing platform (2) of the front positioning block (1), the rear positioning block (3) and the side positioning block (4) are located at the same horizontal plane.
3. The device for off-line calibration of the laser optical axis of a Nikon S204 lithography machine according to claim 1, wherein the connecting surface (7) uses a silicone sponge as an intermediate connecting member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021976267.1U CN213022246U (en) | 2020-09-11 | 2020-09-11 | Device for off-line calibration of laser optical axis of Nikon S204 photoetching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021976267.1U CN213022246U (en) | 2020-09-11 | 2020-09-11 | Device for off-line calibration of laser optical axis of Nikon S204 photoetching machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213022246U true CN213022246U (en) | 2021-04-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021976267.1U Active CN213022246U (en) | 2020-09-11 | 2020-09-11 | Device for off-line calibration of laser optical axis of Nikon S204 photoetching machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213022246U (en) |
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2020
- 2020-09-11 CN CN202021976267.1U patent/CN213022246U/en active Active
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