CN212795003U

CN212795003U - ACT6 or 8-inch compatible ceramic arm

Info

Publication number: CN212795003U
Application number: CN202021538898.5U
Authority: CN
Inventors: 程焕鹏
Original assignee: Shanghai Lieth Precision Equipment Co ltd
Current assignee: Shanghai Lieth Precision Equipment Co ltd
Priority date: 2020-07-30
Filing date: 2020-07-30
Publication date: 2021-03-26
Anticipated expiration: 2030-07-30

Abstract

The utility model discloses a ACT6 or 8 very little compatible ceramic arm, including the mounting panel, the lower extreme of mounting panel is rotated and is connected with the rotation post, install rotary mechanism on the rotation post, the lower extreme of rotation post is fixed with the connecting plate, the lower extreme of connecting plate is equipped with two mounting grooves, be connected with ceramic arm through angle adjustment mechanism in the mounting groove, be equipped with the round chamber in the ceramic arm, be provided with buffer gear in the round chamber, ceramic arm's lower extreme is equipped with the adsorption plate of being connected with buffer gear, be equipped with adsorption apparatus in the adsorption plate. The utility model discloses rational in infrastructure, its form that adopts vacuum adsorption can compatible 6 cun and 8 absorption of cun wafer, has improved the high efficiency of transmission greatly.

Description

ACT6 or 8-inch compatible ceramic arm

Technical Field

The utility model relates to a ceramic arm technical field especially relates to ACT6 or 8 very little compatible ceramic arms.

Background

The wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because it has a circular shape. The ATC system is an important production system for wafers, and a ceramic arm is required to be used in the system to transport the wafers.

However, the existing ceramic arm cannot meet efficient transmission, most of the existing ceramic arms adopt a clamping means, the wafer is easily damaged by the clamping means, and the adaptability to the clamping process of the wafers of 6 inches and 8 inches is poor.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the shortcoming that exists among the prior art, and the ACT6 or the compatible ceramic arm of 8 cun that propose, its adoption vacuum adsorption's form can be compatible 6 cun and the absorption of 8 cun wafers, has improved the high efficiency of transmission greatly.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

ACT6 or 8 very little compatible ceramic arm, including the mounting panel, the lower extreme of mounting panel is rotated and is connected with the rotation post, install rotary mechanism on the rotation post, the lower extreme of rotation post is fixed with the connecting plate, the lower extreme of connecting plate is equipped with two mounting grooves, be connected with ceramic arm through angle adjustment mechanism in the mounting groove, be equipped with the circle chamber in the ceramic arm, the circle intracavity is provided with buffer gear, ceramic arm's lower extreme is equipped with the adsorption plate of being connected with buffer gear, be equipped with adsorption apparatus in the adsorption plate.

Preferably, the rotating mechanism comprises a motor installed at the lower end of the mounting plate, a first gear is fixed at the tail end of an output shaft of the motor, and a second gear meshed with the first gear is fixed on the outer wall of the rotating column.

Preferably, the angle adjusting mechanism comprises a hydraulic oil cylinder installed on the side wall of the connecting plate, the telescopic tail end of the hydraulic oil cylinder extends into the installation groove and is fixed with a rack, a rotating shaft is connected in the installation groove in a rotating mode and penetrates through the ceramic arm and is fixedly connected with the ceramic arm, and a third gear meshed with the rack is fixed on the outer wall of the rotating shaft.

Preferably, the buffer mechanism comprises a supporting plate arranged in the circular cavity, the upper end of the supporting plate is elastically connected with the inner top of the circular cavity through a spring, a connecting pipe penetrating through the circular cavity is fixed at the lower end of the supporting plate, and the connecting pipe is fixed with the upper end of the adsorption plate.

Preferably, adsorption apparatus constructs including setting up the negative pressure chamber in the adsorption plate, the bottom of adsorption plate bonds there is the silica gel pad, the equipartition has a plurality of adsorption holes that communicate with the negative pressure chamber on the silica gel pad, the connecting pipe is connected with the breathing pipe, the outside bottom of adsorption plate is equipped with the expansion mechanism.

Preferably, enlarge the mechanism including setting up many ring pipes in the adsorption plate, many communicate each other between the ring pipe and communicate with the negative pressure chamber through being responsible for, install the solenoid valve in the main pipe, the peripheral bottom of silica gel pad is equipped with a plurality of suction holes that communicate with the ring pipe.

Compared with the prior art, the utility model, its beneficial effect does:

1. through setting up adsorption apparatus and enlarging the mechanism, can utilize the adsorbed form of vacuum negative pressure, the quick absorption lives the wafer to can compatible 6 cun with 8 cun absorption of wafer.

2. Through setting up buffer gear and silica gel pad, can not damaged at the protection wafer of absorption in-process maximize.

3. Through setting up angle adjustment mechanism and rotary mechanism, can realize angle modulation according to the transmission position fast to adopt the form of two ceramic arms to improve transmission efficiency greatly.

Drawings

FIG. 1 is a schematic structural view of an ACT6 or 8-inch compatible ceramic arm according to the present invention;

FIG. 2 is a schematic side view of an ACT6 or 8 inch compatible ceramic arm according to the present invention;

fig. 3 is an enlarged schematic view of a structure at a position a of an ACT6 or 8-inch compatible ceramic arm according to the present invention.

In the figure: the device comprises a mounting plate 1, a rotating column 2, a motor 3, a second gear 4, a first gear 5, a connecting plate 6, a mounting groove 7, a rack 8, a third gear 9, a ceramic arm 10, a spring 11, a connecting pipe 12, an air suction pipe 13, an adsorption plate 14, a negative pressure cavity 15, a silica gel pad 16, an adsorption hole 17, a hydraulic oil cylinder 18, an annular pipe 19, an electromagnetic valve 20 and an air suction hole 21.

Detailed Description

In order to make the above objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention can be embodied in many different forms other than those specifically described herein, and it will be apparent to those skilled in the art that similar modifications can be made without departing from the spirit and scope of the invention, and it is therefore not to be limited to the specific embodiments disclosed below.

It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not represent the only embodiments.

Referring to fig. 1-3, ACT6 or 8 cun compatible ceramic arm, including mounting panel 1, the lower extreme of mounting panel 1 rotates and is connected with the rotation post 2, install rotary mechanism on the rotation post 2, rotary mechanism is including installing the motor 3 at mounting panel 1 lower extreme, the output shaft end of motor 3 is fixed with first gear 5, the outer wall of rotation post 2 is fixed with second gear 4 with first gear 5 meshing, starter motor 3 drives first gear 5 and rotates, first gear 5 drives second gear 4 and rotates, drive ceramic arm 10 through rotation post 2 and connecting plate 6 and rotate to the opposite side and realize the transmission, the ceramic arm 10 that does not adsorb this moment carries out work, transmission efficiency has been improved greatly.

The lower extreme of rotating post 2 is fixed with connecting plate 6, the lower extreme of connecting plate 6 is equipped with two mounting grooves 7, be connected with ceramic arm 10 through angle adjustment mechanism in the mounting groove 7, angle adjustment mechanism is including installing hydraulic cylinder 18 on the lateral wall of connecting plate 6, hydraulic cylinder 18's flexible end extends to in mounting groove 7 and is fixed with rack 8, 7 internal rotations in mounting groove are connected with the pivot, the pivot runs through ceramic arm and rather than fixed connection, the outer wall of pivot is fixed with third gear 9 with rack 8 meshing, can be according to the actual position of transmission, it drives rack 8 and removes to start hydraulic cylinder 18, rack 8 drives gear 9 and rotates, drive ceramic arm 10 through the pivot and rotate to the relevant position.

A round cavity is arranged in the ceramic arm 10, a buffer mechanism is arranged in the round cavity, the buffer mechanism comprises a supporting plate arranged in the round cavity, the upper end of the supporting plate is elastically connected with the inner top of the round cavity through a spring 11, a connecting pipe 12 penetrating through the round cavity is fixed at the lower end of the supporting plate, the connecting pipe 12 is fixed at the upper end of an adsorption plate 14, the lower end of the ceramic arm 10 is provided with an adsorption plate 14 connected with the buffer mechanism, an adsorption mechanism is arranged in the adsorption plate 14, the adsorption mechanism comprises a negative pressure cavity 15 arranged in the adsorption plate 14, a silica gel pad 16 is bonded at the bottom of the adsorption plate 14, a plurality of adsorption holes 17 communicated with the negative pressure cavity 15 are uniformly distributed on the silica gel pad 16, the connecting pipe 12 is connected with an air suction pipe 13, an expansion mechanism is arranged at the bottom of the outer side of the adsorption plate 14, the expansion mechanism comprises a plurality of annular pipes 19 arranged in the adsorption plate 14, install solenoid valve 20 in being responsible for, the peripheral bottom of silica gel pad 16 is equipped with a plurality of suction holes 21 with the intercommunication of ring pipe 19, if need adsorb 8 very big wafers, only need open solenoid valve 20, through suction holes 21 expand the adsorption range can.

When the utility model is used, the mounting plate 1 is connected with the telescopic end of the cylinder, the cylinder is started to drive the whole body to move downwards, the silica gel pad 16 is attached to the wafer and can adapt to the surface of the wafer with a certain curve, the arranged spring 11 can provide buffer, the air suction pipe 13 is connected with the air pump, the air pump is started to pump the air in the negative pressure cavity 15 away to be close to vacuum, at the moment, the wafer can be adsorbed by the adsorption holes 17 under the action of negative pressure, the motor 3 is started to drive the first gear 5 to rotate, the first gear 5 drives the second gear 4 to rotate, the ceramic arm 10 is driven to rotate to the other side by the rotating column 2 and the connecting plate 6 to realize transmission, the ceramic arm 10 which is not adsorbed works at the moment, the transmission efficiency is greatly improved, according to the actual position of transmission, the hydraulic oil cylinder 18 is started to drive the rack 8 to move, the rack 8 drives the gear 9 to rotate, and the ceramic arm 10 is driven to rotate to the corresponding position through the rotating shaft; if a wafer with 8 inches larger size needs to be adsorbed, the electromagnetic valve 20 is opened, and the adsorption range is expanded through the air suction hole 21.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

The utility model provides a ACT6 or 8 very little compatible ceramic arm, including mounting panel (1), its characterized in that, the lower extreme of mounting panel (1) is rotated and is connected with rotation post (2), install rotary mechanism on rotation post (2), the lower extreme of rotating post (2) is fixed with connecting plate (6), the lower extreme of connecting plate (6) is equipped with two mounting grooves (7), be connected with ceramic arm (10) through angle adjustment mechanism in mounting groove (7), be equipped with the circle chamber in ceramic arm (10), the circle intracavity is provided with buffer gear, the lower extreme of ceramic arm (10) is equipped with adsorption plate (14) of being connected with buffer gear, be equipped with adsorption apparatus in adsorption plate (14).
2. An ACT6 or 8 inch compatible ceramic arm according to claim 1, wherein the rotating mechanism comprises a motor (3) mounted at the lower end of the mounting plate (1), a first gear (5) is fixed at the end of the output shaft of the motor (3), and a second gear (4) meshed with the first gear (5) is fixed on the outer wall of the rotating column (2).
3. The ACT6 or 8-inch compatible ceramic arm according to claim 1, wherein the angle adjusting mechanism comprises a hydraulic cylinder (18) mounted on a side wall of the connecting plate (6), a telescopic end of the hydraulic cylinder (18) extends into the mounting groove (7) and is fixed with a rack (8), a rotating shaft is rotatably connected in the mounting groove (7), the rotating shaft penetrates through the ceramic arm and is fixedly connected with the ceramic arm, and a third gear (9) meshed with the rack (8) is fixed on an outer wall of the rotating shaft.
4. The ACT6 or 8-inch compatible ceramic arm as claimed in claim 1, wherein the damping mechanism comprises a supporting plate disposed in the circular cavity, the upper end of the supporting plate is elastically connected to the inner top of the circular cavity via a spring (11), a connecting tube (12) passing through the circular cavity is fixed to the lower end of the supporting plate, and the connecting tube (12) is fixed to the upper end of the absorbing plate (14).
5. The ACT6 or 8-inch compatible ceramic arm according to claim 4, wherein the adsorption mechanism comprises a negative pressure cavity (15) disposed in the adsorption plate (14), a silicone pad (16) is bonded to the bottom of the adsorption plate (14), a plurality of adsorption holes (17) communicated with the negative pressure cavity (15) are uniformly distributed on the silicone pad (16), the connection pipe (12) is connected with the air suction pipe (13), and an expansion mechanism is disposed at the bottom of the outer side of the adsorption plate (14).
6. The ACT6 or 8-inch compatible ceramic arm according to claim 5, wherein the expanding mechanism comprises a plurality of annular tubes (19) disposed in the adsorption plate (14), the annular tubes (19) are communicated with each other and with the negative pressure chamber (15) through a main tube, the main tube is internally provided with an electromagnetic valve (20), and the peripheral bottom of the silicone pad (16) is provided with a plurality of suction holes (21) communicated with the annular tubes (19).