CN212780473U - Loading device for mask plate optical automatic detection - Google Patents
Loading device for mask plate optical automatic detection Download PDFInfo
- Publication number
- CN212780473U CN212780473U CN202021577171.8U CN202021577171U CN212780473U CN 212780473 U CN212780473 U CN 212780473U CN 202021577171 U CN202021577171 U CN 202021577171U CN 212780473 U CN212780473 U CN 212780473U
- Authority
- CN
- China
- Prior art keywords
- hole
- mask
- carrying
- reticle
- receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The utility model provides a mask version optical automated inspection's loading device, it includes: the mask plate positioning device comprises a moving platform, a first bearing clamp connected to the moving platform, a second bearing clamp connected to the first bearing clamp and provided with an accommodating groove for accommodating the mask plate, a light source arranged below the first bearing clamp and configured to emit light irradiated in the accommodating groove, and an objective lens arranged above the second bearing clamp and configured to be opposite to the light source; vacuum adsorption is carried out between the second bearing clamp and the first bearing clamp, and an opening used for vacuum adsorption of the mask plates is further formed in the bottom of the accommodating groove of the second bearing clamp.
Description
Technical Field
The utility model belongs to the technical field of mask version detection device, especially, relate to a mask version optics automated inspection's loading device.
Background
The mask is a high-precision plate with a micro-electrograph, and is made of a quartz glass or soda glass plate with a pure flat surface and a chromium layer, and the residual part after etching is the designed micro-electrograph. The automatic optical detection of the mask plate is realized by clamping the mask plate through a set of loading device and then automatically detecting common defects encountered in the production of the mask plate based on the optical principle.
The traditional loading device can only load and clamp specific rectangular-shaped reticles, and can only be assisted by manual detection for reticles with other shapes, so that the universality is poor.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a mask version optical automated inspection's loading device for solve the relatively poor problem of current loading device universality.
An aspect of the utility model provides a mask version optical automated inspection's loading device, loading device includes: and (4) moving the platform. And the first bearing clamp is connected to the mobile platform. And the second bearing clamp is connected to the first bearing clamp and is provided with an accommodating groove for accommodating the mask. A light source disposed below the first carrying jig and configured to emit light irradiated in the accommodating groove. And an objective lens disposed above the second carrying jig and configured to face the light source. The second bearing clamp and the first bearing clamp are in vacuum adsorption, and an opening for vacuum adsorption of the mask is further formed in the bottom of the accommodating groove of the second bearing clamp.
In an embodiment of the present invention, the holding tank is a through groove disposed on the second carrying fixture, and the inner side wall of the holding tank extends perpendicularly outwards to form a first carrying platform for carrying the mask.
In an embodiment of the present invention, a first through hole is formed on the first receiving platform, the opening is located at an upper end of the first through hole, a second through hole is formed on the second receiving fixture, a third through hole is formed on the first receiving fixture, and the third through hole is externally connected to a vacuum pumping device; the first through hole, the second through hole and the third through hole are communicated.
In an embodiment of the present invention, the first supporting fixture is provided with a connecting groove, the connecting groove is a through groove, the inner side wall of the connecting groove extends perpendicularly outwards to form a second receiving platform for supporting and connecting the second supporting fixture, and the third through hole is opened on the second receiving platform.
In an embodiment of the present invention, the light emitted from the light source can pass through the accommodating groove and enter the objective lens.
In an embodiment of the present invention, the shape of the receiving groove is identical to the shape of the mask to be connected, and the shape of the receiving groove is circular.
In an embodiment of the present invention, the shape of the holding tank is consistent with the shape of the mask to be connected, and the shape of the holding tank is one of an ellipse, a regular polygon and an irregular polygon.
In an embodiment of the present invention, the moving platform is configured to drive the first carrying clamp and the second carrying clamp to move, so that the light emitted from the light source moves in the area enclosed by the accommodating groove.
In an embodiment of the invention, the position of the light source and the objective lens is fixed.
Based on the loading device for the mask plate optical automatic detection provided by the utility model, the second bearing clamp is connected to the traditional first bearing clamp, and the second bearing clamp is provided with the mask plate which can accommodate the corresponding shape, thereby realizing the connection of different mask plates; in addition, the opening that sets up in the holding tank can carry out vacuum adsorption to the mask version of connecting in it, and then has guaranteed the stability of the connection of mask version, and in addition, light source and objective to and moving platform's setting can realize the optics automated inspection to the mask version of connecting in the holding tank.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the embodiments or the prior art descriptions will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive labor.
FIG. 1 is a schematic diagram of a conventional reticle loader;
FIG. 2 is a schematic top view of a conventional reticle loader;
FIG. 3 is a schematic structural diagram of a reticle loading apparatus according to an embodiment of the present invention;
fig. 4 is a schematic top view of a reticle loading apparatus according to an embodiment of the present invention; and
fig. 5 is a schematic structural diagram of the first carrying clamp and the second carrying clamp of the mask loading device according to an embodiment of the present invention, which are engaged with each other and carry the mask.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in an orientation or positional relationship indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
The mask is a high-precision plate with a micro-electrograph, and is made of a quartz glass or soda glass plate with a pure flat surface and a chromium layer, and the residual part after etching is the designed micro-electrograph. Optical means are typically required to detect defects in the micro-pattern provided on the reticle 40.
Referring to fig. 1-5, in the embodiment of the present application, a loading device for automatic optical inspection of a reticle 40 is provided, and the loading device is used for fixing the reticle 40 to be inspected on the loading device and then moving along with an optical inspection device so as to accurately detect a micro defect on the reticle 40.
In an embodiment of the present application, the loading device includes: the platform 10 is moved. The first carrying clamp 20 is connected to the mobile platform 10, and the mobile platform 10 can drive the first carrying clamp 20 to move when moving; in this embodiment, the first load-bearing fixture 20 is preferably a fixture of a conventional reticle 40.
And the second bearing clamp 30 is further included, and the second bearing clamp 30 is connected to the first bearing clamp 20 and is provided with a containing groove 31 for containing the mask plate 40. In the application, the shape of the accommodating groove 31 can be adjusted according to the shape of the mask 40 to be detected, so that the mask 40 in different shapes can be connected, and the universality of the loading device can be realized.
In this embodiment, the second carrying fixture 30 is preferably detachably connected to the first carrying fixture 20, so that when the reticle 40 is in a conventional square shape, the reticle 40 can be directly connected to the first carrying fixture 20 for testing, and of course, the receiving slot 31 of the second carrying fixture 30 can also be compatible with the conventional shape of the reticle 40.
A light source 50 is further included, which is disposed below the first carrying clamp 20 and configured to emit light to irradiate in the accommodating groove 31, in this embodiment, the bottom of the light source 50 is fixed on a platform, and the top of the light source emits light to irradiate the reticle 40 to be inspected during inspection. Here, the emergent light preferably vertically irradiates on the mask to be detected; of course, a certain included angle may exist between the lower surface of the mask to be detected, and the included angle is not limited here. And an objective lens 60 disposed above the second carrying jig 30 and configured to face the light source 50. That is, when the reticle to be detected is not placed on the loading device, the light emitted from the light source is directly incident into the objective lens. When the loading device is used for placing the mask to be detected, the mask is illuminated by the light source in the observation area of the objective lens; so that minute defects on the reticle can be detected.
In the present embodiment, the positions of the light source 50 and the objective lens 60 are always unchanged, and when the reticle 40 is not attached, the light emitted from the light source 50 can pass through the accommodating groove 31 and enter the objective lens 60. Further, when the reticle 40 to be inspected is attached in the accommodating groove 31, the light source 50 emits light to irradiate the reticle 40 to be inspected, and then the presence or absence of a defect on the reticle 40 is optically detected by the objective lens 60 disposed above the second carrying jig 30.
In this embodiment, since the moving platform 10 can drive the first carrying clamp 20, and the light source 50 and the objective lens 60 have a structure with preferably fixed positions all the time, when the first carrying clamp 20 moves to drive the second carrying clamp 30 and the mask 40 to be detected to move, automatic optical detection of each region of the mask 40 to be detected can be realized. And this kind of detection can realize that the minimum detects the defect and be 1um, has promoted detection technology ability.
In this embodiment, the second carrying clamp 30 and the first carrying clamp 20 are vacuum-sucked, and the bottom of the accommodating groove 31 of the second carrying clamp 30 is further provided with an opening 311 for vacuum-sucking the reticle 40. The arrangement can realize that the mask 40 to be detected is vacuum-adsorbed in the accommodating groove 31, so as to realize fastening connection, and prevent the detection result from being influenced by abnormal movement of the mask 40 to be detected in the automatic optical detection process.
The loading device is arranged, the second bearing clamp 30 is connected to the traditional first bearing clamp 20, and the second bearing clamp 30 is provided with the mask 40 capable of accommodating the corresponding shape, so that connection of different masks 40 can be realized; in addition, the opening 311 arranged in the accommodating groove 31 can perform vacuum adsorption on the mask 40 connected therein, so that the stability of connection of the mask 40 is ensured, and in addition, the arrangement of the light source 50, the objective lens 60 and the moving platform 10 can realize optical automatic detection on the mask 40 connected in the accommodating groove 31.
In an embodiment of the present invention, the accommodating groove 31 is a through groove disposed on the second supporting fixture 30, and an inner sidewall of the accommodating groove 31 extends perpendicularly outward to form a first supporting platform for supporting the mask 40. Furthermore, before testing, a user places the mask 40 to be tested on the first receiving platform in the receiving groove 31, and at this time, the outer periphery of the mask 40 preferably fits the inner side wall of the receiving groove 31.
In an embodiment of the present invention, the first receiving platform is provided with a first through hole 32, the opening 311 is located at the upper end of the first through hole 32, the second receiving fixture 30 is provided with a second through hole 33, the first receiving fixture 20 is provided with a third through hole 21, and the third through hole 21 is externally connected to a vacuum pumping device; the first through hole 32, the second through hole 33 and the third through hole 21 communicate. In this embodiment, the upper opening of the first through hole 32 is located on the upper surface of the first receiving platform, and the lower opening of the first through hole 32 is located on the lower surface of the first receiving platform and is butted with the upper opening of the second through hole 33; similarly, the lower end opening of the second through hole 33 is butted with the upper end opening of the third through hole 21, and the lower end opening of the third through hole 21 is externally connected with a vacuum extractor 70, so that when the mask 40 to be detected is placed in the accommodating groove 31 and is positioned on the first receiving table, air in the first through hole 32, the second through hole 33 and the third through hole 21 is sucked out through the vacuum extractor 70, and the mask 40 to be detected is tightly attached to the first receiving table.
In this embodiment, the first through hole 32 and the second through hole 33 may also be integrated.
In an embodiment of the present invention, the first carrying fixture 20 is provided with a connecting groove 22, the connecting groove 22 is also a through groove, the inner sidewall of the connecting groove 22 extends vertically outwards to form a second carrying platform for supporting and connecting the second carrying fixture 30, and the third through hole 21 is opened on the second carrying platform.
In an embodiment of the present invention, the shape of the receiving groove 31 is the same as the shape of the mask 40 to be attached, and the shape of the receiving groove 31 is circular. This arrangement can solve the problem that the conventional loading device cannot fix the circular reticle 40.
In another embodiment of the present invention, the shape of the receiving groove 31 is identical to the shape of the reticle 40 to be attached, and the shape of the receiving groove 31 is one of an ellipse, a regular polygon and an irregular polygon. That is, the shape of the accommodating groove 31 can be customized according to the shape of the mask 40 to be detected, so that the problems of low detection efficiency and low defect detection capability caused by the incompatibility of the shape of the mask 40 and the shape of the accommodating groove 31 are solved.
In the utility model discloses a still another embodiment, still preferably be provided with adjusting device in this holding tank 31, adjusting device includes the bearing structure that can stretch out or withdraw for the inside wall of this holding tank 31, and this bearing structure's front end still is provided with the elasticity butt piece, and then relies on the elasticity performance of elasticity butt piece and the outer peripheral edges of the mask plate 40 that awaits measuring of different shapes to carry out the butt to keep this connection and the fixed of the mask plate 40 that awaits measuring.
In another embodiment of the present invention, the shape of the receiving groove 31 on the second carrying clamp 30 may be fixed to fit a certain shape of the mask 40, for example, an oval receiving groove may be correspondingly adapted to receive the oval mask 40; other shapes can be analogized, and the description is omitted.
In an embodiment of the present invention, the movable platform 10 is configured to drive the first carrying clamp 20 and the second carrying clamp 30 to move, so that the light emitted from the light source 50 moves in the area enclosed by the accommodating groove 31. So that each area of reticle 40 to be inspected can be automatically optically inspected.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not intended to limit the present invention, and all modifications, equivalents, improvements, etc. made within the spirit and principles of the present invention should be included within the scope of the present invention.
Claims (9)
1. A loading device for mask plate optical automatic detection is characterized by comprising:
a mobile platform;
the first bearing clamp is connected to the mobile platform;
the second bearing clamp is connected to the first bearing clamp and is provided with an accommodating groove for accommodating the mask;
a light source disposed below the first carrying jig and configured to emit light irradiated in the accommodating groove; and
an objective lens disposed above the second carrying jig and configured to face the light source;
the second bearing clamp and the first bearing clamp are in vacuum adsorption, and an opening for vacuum adsorption of the mask is further formed in the bottom of the accommodating groove of the second bearing clamp.
2. The loading device for the optical automatic mask detection according to claim 1, wherein the receiving groove is a through groove disposed on the second carrying clamp, and an inner side wall of the receiving groove extends perpendicularly outwards to form a first carrying platform for carrying the mask.
3. The loading device for reticle optical automatic detection according to claim 2, wherein the first receiving stage is provided with a first through hole, the opening is located at an upper end of the first through hole, the second receiving fixture is provided with a second through hole, the first receiving fixture is provided with a third through hole, and the third through hole is externally connected with a vacuum pumping device; the first through hole, the second through hole and the third through hole are communicated.
4. The loading device for reticle optical automatic detection according to claim 3, wherein the first carrying clamp is provided with a connecting groove, the connecting groove is a through groove, an inner side wall of the connecting groove extends vertically outwards to form a second carrying platform for supporting and connecting the second carrying clamp, and the third through hole is opened on the second carrying platform.
5. A reticle optical automated inspection load device in accordance with claim 2, wherein light from the light source can pass through the receiving pocket and enter the objective lens.
6. The reticle optical automated inspection load device of claim 1, wherein the receiving slot is shaped to conform to the shape of the reticle to be attached and the receiving slot is circular in shape.
7. A reticle optical automated inspection load device in accordance with claim 1, wherein the receiving pocket is shaped to conform to the shape of the reticle to be attached, and the receiving pocket is shaped to be one of an ellipse, a regular polygon and an irregular polygon.
8. The reticle optical automated inspection load device of any one of claims 1 to 7, wherein the moving platform is configured to drive the first and second load-bearing clamps to move such that light emitted by the light source moves within an area enclosed by the receiving slot.
9. A reticle optical automated inspection load device in accordance with claim 8, wherein the position of the light source and the objective lens is fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021577171.8U CN212780473U (en) | 2020-07-31 | 2020-07-31 | Loading device for mask plate optical automatic detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021577171.8U CN212780473U (en) | 2020-07-31 | 2020-07-31 | Loading device for mask plate optical automatic detection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212780473U true CN212780473U (en) | 2021-03-23 |
Family
ID=75049867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021577171.8U Active CN212780473U (en) | 2020-07-31 | 2020-07-31 | Loading device for mask plate optical automatic detection |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212780473U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113758420A (en) * | 2021-09-08 | 2021-12-07 | 深圳市龙图光电有限公司 | Mask plate auxiliary static image measuring device and mask plate static image measuring system |
-
2020
- 2020-07-31 CN CN202021577171.8U patent/CN212780473U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113758420A (en) * | 2021-09-08 | 2021-12-07 | 深圳市龙图光电有限公司 | Mask plate auxiliary static image measuring device and mask plate static image measuring system |
| CN113758420B (en) * | 2021-09-08 | 2022-06-14 | 深圳市龙图光电有限公司 | Mask plate auxiliary static image measuring device and mask plate static image measuring system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI498542B (en) | Optical inspection device | |
| CN212780473U (en) | Loading device for mask plate optical automatic detection | |
| JPH10116760A (en) | Aligner and substrate holding device | |
| CN1078550A (en) | Non-contacting position detecting apparatus | |
| JP2006329714A (en) | Lens inspection apparatus | |
| JP2005156537A5 (en) | ||
| KR20040007141A (en) | Multi- Utilizing Holder Of Particle Inspection Device And Inspection Method Thereof | |
| CN104362108B (en) | Photoelectric testing device | |
| CN217085514U (en) | Chip limiting bearing table for mask alignment exposure machine | |
| KR101358564B1 (en) | Probe card positioning mechanism and inspection apparatus | |
| CN212515342U (en) | Loading device for mask plate optical automatic detection | |
| TWI458040B (en) | Pellicle handling jig | |
| CN212903831U (en) | Clamping device for ultra-thin polarizer inspection | |
| KR101720012B1 (en) | Suction jig | |
| CN210690004U (en) | Tool for measuring offset of optical axis and mechanical axis of lens | |
| JP2014241357A (en) | Substrate holding device, optical device, and substrate holding method | |
| CN211043166U (en) | Auxiliary carrier plate for photomask detection | |
| KR20100077127A (en) | Semiconductor substrate and method for inspecting semiconductor substrate | |
| JP2002039745A (en) | Method and device for inspecting wafer shape | |
| TWI311088B (en) | Means and method for centering and flatting of workpiece | |
| CN218498048U (en) | Wafer chuck and wafer alignment detection device | |
| CN208443340U (en) | A kind of thin material product automatic detection device | |
| JP3918937B2 (en) | Specimen support table, surface mount optical isolator inspection apparatus using the same, and method of using the inspection apparatus | |
| CN215599041U (en) | Detection device for silicon carbide wafer | |
| CN216791590U (en) | Optical lens decentration detection device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 518000 The first floor of plant 4 #, Shengzuozhi Science and Technology Industrial Park, north of Xinyu Road, Shajing Street, Bao'an District, Shenzhen, Guangdong Patentee after: Shenzhen Longtu Optical Mask Co.,Ltd. Address before: 518000 The first floor of plant 4 #, Shengzuozhi Science and Technology Industrial Park, north of Xinyu Road, Shajing Street, Bao'an District, Shenzhen, Guangdong Patentee before: SHENZHEN LONGTU PHOTOMASK CO.,LTD. |