CN212722002U - Laboratory is with wet electron chemistry article evaluation equipment of modularization fountain - Google Patents

Abstract

The utility model relates to a modular spray type wet electronic chemical evaluation device for laboratory, which comprises a processing device, a multi-cavity device and a conveying device which are matched with a controller; the treatment device comprises a plurality of spraying devices and a plurality of purging devices which are arranged at the top of the multi-cavity device; the multi-cavity device comprises a first module, a third module, a plurality of second modules, a third module and a first module which are sequentially connected, a spraying device or a purging device is arranged at the top of the second module in a matching mode, the top of the third module at the front end and the top of the third module at the rear end are respectively provided with the spraying device and the purging device, and the two third modules are symmetrical; the transport device cooperates with the second module and the third module. The utility model is suitable for small-batch product online verification in the development process of wet electronic chemicals, has high reference value, avoids evaluation deviation and fully satisfies simulation; the experimental scale is small, the installation cost is low, the materials can be evaluated in the field of wet electronic chemical development companies, the feedback speed is high, and the development speed of the wet electronic chemical is improved.

Description

Laboratory is with wet electron chemistry article evaluation equipment of modularization fountain

Technical Field

The utility model relates to a laboratory is with wet electronic chemicals evaluation equipment of modularization fountain.

Background

The wet electronic chemical is a technical chemical matched with a photoetching process, is mainly used for carrying out large-scale/ultra-large-scale integrated circuit production, and particularly comprises a solar panel, a display panel (comprising a liquid crystal display and an organic light-emitting diode display) and a chip (comprising a logic chip and a storage chip), has extremely low impurity content which is usually less than 100 ppb, and comprises pure substances, water or organic solution and formula products.

The manufacturing process of the integrated circuit is very precise, the yield of a single manufacturing process is low, and the cost is extremely high. Therefore, the materials used in each process are developed, replaced, and changed, which means short term throughput loss, and the changes may cause unpredictable situations. Meanwhile, the wet electronic chemical development end usually does not have evaluation conditions similar to those of the actual application end, and the evaluation result of an independent laboratory does not have reference value to the application end, so that the period of development and application of the wet electronic chemical is extremely long, and meanwhile, the developed data has poor reference to the application end.

On the other hand, the wet electronic chemical application end usually adopts actual production equipment to evaluate the application performance of the wet electronic chemical application end, however, the equipment usually has the characteristics of large size, high operation cost, small adjustable space of equipment parameters and the like, and is not suitable for product evaluation in the product development process. Therefore, developing an evaluation device that can be applied to a wet electronic chemical development process and perform evaluation of various conditions is important to accelerate the successful development of wet electronic chemicals.

Patent CN101055417A describes a shower apparatus that facilitates control of line width errors in patterned areas during wet development and etching; the spray device adopts spray heads formed by combining at least one spray head group with circumferential distribution, all the spray heads in the spray head group are arranged at equal intervals and are controlled by the same flow controller, and the flow of each spray head is the same; the nozzle groups distributed along different circumferences can be respectively controlled by different flow controllers, and the combined nozzles formed by the nozzle groups distributed along different circumferences can respectively set spraying parameters for different areas, coordinate the reaction degree between each part of the element to be processed and the spraying specific solution, and control the uniformity of line width errors. The spraying device is mainly suitable for developing processes of small-size round substrates in chip integrated circuits and is not suitable for wet electronic chemical evaluation processes on square substrates.

Patent CN202102214U discloses a TFT array substrate, a liquid crystal panel and a display device, wherein patterns for adjusting the flowing mode of the developing solution are added around each film layer in the TFT array substrate; therefore, when the developing solution is removed in the developing process, the developing solution flows through the pattern and changes the flowing mode, the problem that the concentration of the developing solution is uneven due to uneven flowing direction can be solved, and the developing solution is guaranteed to be distributed more evenly in the flowing direction of the whole TFT array substrate when the developing solution is removed. The developing machine table is only suitable for wet electronic chemicals which are evaluated in a flowing mode, is not suitable for wet electronic chemicals which need to be sprayed under certain pressure, is large in size, and is more suitable for being used in the large-size production process of a production line end.

Patent CN206696590U describes a constant temperature developing machine, which comprises a temperature control device, a developing device, a pressure regulating device, a developing solution storage tank and a cleaning solution storage tank; the bottom of the developer liquid storage tank is provided with a heating disc, a refrigerating pipe is arranged in the developer liquid storage tank, the heating disc is electrically connected with a temperature control device, the refrigerating pipe is connected with a refrigerating compressor, the refrigerating compressor is electrically connected with the temperature control device, and a temperature sensor is arranged in the developer liquid storage tank; the two micro air pumps are respectively communicated with the developing solution storage tank and the cleaning solution storage tank through two pressure regulating pipelines; the developing solution storage tank and the cleaning solution storage tank are respectively communicated with the two nozzles through two connecting pipelines. The developing machine only uses a single spray head to carry out developing operation, and the developing uniformity is difficult to be well ensured.

Disclosure of Invention

To the problem that above-mentioned prior art exists, the utility model provides a laboratory is with wet electronic chemicals evaluation equipment of modularization fountain, the experimental scale is less, and the device is prepared the installation cost and is low, and the material can be examined and appraised in wet electronic chemicals development company on site, and the feedback is fast, and very big degree has improved the development speed of wet electronic chemicals.

In order to achieve the above object, the utility model discloses a following technical scheme realizes: a laboratory is with wet electron chemistry article appraising equipment of modularization fountain, the said appraising equipment includes processing unit, multi-chamber device, conveying appliance;

the treatment device comprises a plurality of spraying devices and a plurality of purging devices which are arranged at the top of the multi-cavity device;

the multi-cavity device comprises a first module, a third module, a plurality of second modules, a third module and a first module which are sequentially connected, the spraying device or the purging device is arranged at the top of the second module in a matching mode, the spraying device and the purging device are respectively arranged at the tops of the third modules at the front end and the rear end in a matching mode, and the two third modules are symmetrically arranged;

the conveying device is matched with the second module and the third module;

the processing device, the multi-cavity device and the conveying device are provided with controllers in a matching mode.

Preferably, an upper sealing plate and a side sealing plate are respectively arranged below the top and the side of the spraying device, the middle part in the spraying device is divided into an upper bin body and a lower bin body through a controllable sealing switch, and a plurality of spraying heads are arranged at the bottom of the lower bin body through mounting holes;

the side surface of the upper bin body is provided with an upper bin liquid inlet and an upper bin liquid outlet, and the side surface of the upper bin body is provided with an upper circulating pipe, two ends of which are respectively communicated with the space of the upper bin body;

a lower bin air inlet is formed in the side face of the lower bin body, and a lower circulating pipe with two ends respectively connected with the space of the lower bin body is arranged on the side face of the lower bin body; the controllable sealing switch is connected to a controller.

Preferably, the upper bin body is internally provided with a heat exchange disc in a matched manner, the heat exchange disc comprises a plurality of temperature-sensitive probes and a heat exchange tube which are arranged in a matched manner, and the temperature-sensitive probes and the heat exchange tube are arranged in a matched manner with the controller.

Preferably, the purging device comprises a shell and a pressure stabilizing bin matched with the shell, the top of the pressure stabilizing bin is provided with a plurality of air inlets, the bottom of the shell matched with the plurality of air inlets is provided with a plurality of air nozzles, the plurality of air inlets are communicated with the plurality of air nozzles in space, and a pressure monitoring sensor is arranged in the pressure stabilizing bin; the pressure monitoring sensor and the air tap are matched with the controller.

Preferably, the first module comprises a shell door and slots arranged on two sides in the shell door, the sealing cover plate is arranged in the slots in a sliding fit mode, and the sealing cover plate is provided with a lifting handle.

Preferably, the second module and the third module comprise a shell, a plurality of transverse plates are arranged in the middle of the inner side of the shell, sliding grooves are respectively arranged in the middle of two sides of the inner wall of the shell above the plurality of transverse plates in a matched mode, and a plurality of height fixing holes are formed in two side walls of the shell matched with the sliding grooves;

the top of the shell is provided with a mounting hole, and the spraying device or the blowing device is arranged on the shell in a matching way;

and a plurality of vent holes are formed in two side walls of the shell.

Preferably, the end faces of the sliding grooves facing the inner walls of the two sides of the shell are provided with a plurality of sliding groove fixing holes, and the height fixing holes and the sliding groove fixing holes are correspondingly arranged through connecting rods.

Preferably, baffles are arranged below transverse plates on the front end face of the front-end third module and the rear end face of the rear-end third module, and vertical plates and adjusting rods matched with the transverse plates are arranged at the end parts of the transverse plates on the baffles;

the vertical plate is uniformly provided with a plurality of first through holes, the adjusting rod comprises a cross rod and a fixing buckle, and the cross rod is sequentially provided with a fixing hole, a plurality of second through holes, an adjusting hole and an adjusting groove; the fixing buckle can movably penetrate through the adjusting groove, and the fixing buckle is matched with any first through hole in the adjusting rod.

Preferably, the conveying device comprises a storage device, a first rotating part and a second rotating part are arranged on two sides of the storage device in a matching manner, the first rotating part and the second rotating part are respectively hinged with a first connecting buckle and a second connecting buckle in a matching manner back to the storage device, and the first connecting buckle and the second connecting buckle are arranged in a matching manner with a sliding chute on the corresponding side;

a first rotating shaft is arranged between the first rotating piece and the first connecting buckle in a matched and penetrating manner, and a second rotating shaft is arranged between the second rotating piece and the second connecting buckle in a matched and penetrating manner;

the storage device comprises a storage frame, and a plurality of baffle grooves parallel to the transverse plates are arranged in the storage frame.

Preferably, two ends of the first rotating shaft and the second rotating shaft are respectively matched with a fixing hole and an adjusting hole in the third module at the front end and the rear end; the baffle groove is matched with the second through holes to penetrate through the driving shaft; the drive shaft is connected to a controller through a drive mechanism.

Borrow by above-mentioned scheme, the utility model discloses at least, have following advantage:

1. the modularized assembly mode is adopted, the online verification method is suitable for online verification of small-batch products in the development process of wet electronic chemicals, and the further verification of the products at the client side by the experimental result has obvious reference value improvement compared with a beaker experiment;

2. the mode of pressing gas out of the nozzles is adopted, and spraying operation is carried out in a mode that a single pipeline corresponds to the nozzles, so that the uneven use effect of wet electronic chemicals caused by the condition that the pressures above the nozzles at different positions are different is greatly reduced, and the evaluation deviation caused by the uneven use effect is avoided;

3. various parameters of wet electronic chemicals which are examined and evaluated in a spraying mode, including temperature, time, angle, pressure and the like, can be regulated and controlled, and the condition of simulating the application of an actual production line is fully met;

4. the experimental scale is less, and the device is prepared the installation cost and is low, and the material can be examined and appraised in wet electronic chemicals development company on spot, and the feedback speed is fast, has greatly improved the development speed of wet electronic chemicals.

Drawings

FIG. 1 is a block diagram of a laboratory modular spray wet electronic chemical evaluation device;

FIG. 2 is a view showing the structure of the shower apparatus of the present invention with the heat exchange plate removed;

FIG. 3 is a schematic structural view of a heat exchange plate part in the spray device of the present invention;

FIG. 4 is a structural diagram of the purging device of the present invention;

fig. 5 is a bottom view of the purging device of the present invention;

FIG. 6 is a block diagram of a first module of the present invention;

FIG. 7 is a block diagram of a second module of the present invention;

FIG. 8 is a block diagram of a third module of the present invention;

FIG. 9 is a view showing the structure of the carrying device of the present invention;

fig. 10 is a rotation pattern diagram of the conveyor according to the present invention.

In the figure: 1. a processing device, 2, a multi-cavity device, 3, a conveying device, 11, a spraying device, 12, a blowing device, 21, a first module, 22, a second module, 23, a third module, 24, a housing, 25, a transverse plate, 26, a chute, 27, a height fixing hole, 28, a ventilation hole, 29, a chute fixing hole, 31, a first connecting buckle, 32, a first rotating piece, 33, a storage device, 34, a second rotating piece, 35, a second connecting buckle, 36, a first rotating shaft, 37, a second rotating shaft, 111, an upper sealing plate, 112, a lower sealing plate, 113, an upper cabin body, 114, a lower cabin body, 115, a spraying head, 116, a heat exchange plate, 121, a shell body, 122, a pressure stabilizing cabin, 211, a shell door, 212, a slot, 213, a cover plate, 214, a lifting handle, a vertical plate, 231, a baffle plate, 232, a vertical plate, 233, an adjusting rod, 234, a first through hole, 235, a cross rod, 236, a fixing buckle, 237, 238. the device comprises a second through hole 239, an adjusting hole 230, an adjusting groove 241, a mounting hole 331, a storage frame 332, a baffle groove 1131, an upper bin liquid inlet 1132, an upper bin liquid outlet 1133, an upper circulating pipe 1141, a lower bin air inlet 1142, a lower circulating pipe 1221, an air inlet 1222, an air nozzle 1161, a temperature sensing probe 1162 and a heat exchange pipe.

Detailed Description

The present invention will be further explained with reference to the accompanying drawings.

As shown in fig. 1 to 10, the laboratory is provided with a modular spray type wet electronic chemical evaluation device, which comprises a processing device 1, a multi-chamber device 2, a conveying device 3 and a controller, wherein the processing device 1, the multi-chamber device 2, the conveying device 3 and the controller are cooperatively arranged. The controller is configured to control the actions within the evaluation device as will be understood by those skilled in the art, and may be configured by those skilled in the art as desired.

The treatment device 1 comprises a plurality of spraying devices 11 and a plurality of purging devices 12 which are arranged at the top of the multi-cavity device 2; the processing apparatus is used for spraying a reagent into the corresponding multi-chamber apparatus 2 or performing a purging operation, and is repeatable.

The multi-cavity device 2 comprises a first module 21, a third module 23, a plurality of second modules 22, a third module 23 and the first module 21 which are sequentially connected, the spraying device 11 or the purging device 12 is arranged at the top of the second module 22 in a matching mode, the spraying device 11 and the purging device 12 are respectively arranged at the tops of the third modules 23 at the front end and the rear end in a matching mode, and the two third modules 23 are symmetrically arranged; after the second module 22 is combined with the spraying device 11 or the purging device 12, the second module can be randomly sequenced and assembled, different modules can meet the requirements of different process simulation through mutual combination and change of sequence, specifically, the second module 22 and the spraying device 11, or a combined module formed after the second module is combined with the purging device 12 can be singly, multiple, arranged in the same direction or in the reverse direction, so that different process simulation is met, and the actual use requirements of the spraying test of the wet electronic chemicals in a laboratory are fully met.

The conveyor 3 is arranged in cooperation with a second module 22 and a third module 23. The transport means 3 may control the overall transport of the wet electronic chemical within the apparatus.

The invention adopts a small modular combination mode, the inner and outer coating of high-cleanliness materials and adjustable spraying test conditions, and is a high-efficiency evaluation device developed aiming at the requirement of simulating certain large production line application conditions in the development process of wet electronic chemical products.

In the invention, the surfaces/interfaces in contact with the wet electronic chemicals in all the modules are coated/wrapped with high-purity polytetrafluoroethylene or soluble polytetrafluoroethylene materials, and meanwhile, in the process of spraying treatment, the interior of the cavity is sealed, and volatile components are discharged out of the system through the evacuation port, so that the wet chemicals can be prevented from being interfered by possible pollutants in the environment, such as ions, particles, organic matters and the like, in the test process, and the experimental referential property is ensured.

The spraying device 11 comprises an upper bin body 113 and a lower bin body 114, the upper bin body 113 and the lower bin body 114 are independent from each other, but controllable sealing switches are arranged in the upper bin body and the lower bin body and are connected with each other, wherein the upper bin body 113 is a constant temperature groove lined with high-purity polytetrafluoroethylene or soluble polytetrafluoroethylene materials, a heat exchange tube 1162 and 4-6 corresponding groups of temperature sensing probes 1161 can be arranged according to application requirements, and the temperature control precision can reach +/-1 ℃;

an upper bin liquid inlet 1131 is arranged above the upper bin body 113, and an upper bin liquid outlet 1132 is arranged below the upper bin body; the lower bin body 114 is lined with high-purity polytetrafluoroethylene or soluble polytetrafluoroethylene material, the outer layer is pressure-resistant stainless steel, the specific type of the stainless steel can be determined according to requirements, the specific type can be 430/304/316L, generally, the stainless steel material of 316L can be selected, and the pressure-resistant range is 1.0-3.0 MPa; a certain amount of spray head mounting holes in a square matrix form are arranged at the bottom of the lower bin body 114 to mount the spray heads 115, pressurized gas enters through a lower bin body gas inlet 1141 at the upper part, liquid stored in the bin is uniformly pressed out at a certain pressure, and the spray heads 115 can be selected according to the required pressure, spraying form and wet electronic chemical type;

during the whole operation, the upper bin 113 and the lower bin 114 can be circulated inside the bin through the upper circulation pipe 1133 and the lower circulation pipe 1142, respectively.

The purge device 12 has a distributed air inlet 1221 and a gas nozzle 1222, and a generally preferred purge gas is purified air or nitrogen; a pressure stabilizing chamber 122 with a pressure monitoring sensor is arranged between the purge gas inlet 1221 and the air nozzle 1222, and the pressure of purging can be determined by adjusting the pressure in the chamber of the pressure stabilizing chamber 122; the air nozzle 1222 can determine the model and the corresponding pressure according to the specific process requirement to be simulated, and the position of the blowing air knife can be adjusted to the position entering the cavity or the position leaving the cavity according to the requirement.

The first module 21 adopts a sealing mode of an electrically controllable switch, and a water-swelling polymer material is coated in a contact surface, so that after the conveying component is completely arranged in the multi-cavity device 2, the sprayed liquid medicine cannot splash out, and meanwhile, the first module can also be used for a tail end sealing measure; in actual operation, the storage frame 331 can be taken out after opening the door after no liquid is sprayed out of the cavity by the sealing mode of the electric control switch, so that the safety problem of possible operators is avoided.

The second module 22 consists of an upper spray chamber and a lower circulating chamber, the upper part and the lower part are completely communicated and supported by a plurality of transverse plate 25 structures, and the supporting structures are stainless steel coated with high-purity polytetrafluoroethylene or soluble polytetrafluoroethylene materials; a pair of sliding chutes 26 which are used for the transportation parts of the transportation device 3 to slide in parallel are arranged in the spray chamber on the transverse plate 25, and when the second modules 22 or the third modules 23 with different numbers are combined with each other, the sliding chutes 26 can be connected with each other to form a continuous and uniform sliding track; two side walls of the second module 22 are provided with height fixing holes 27 for fixing the height of the chute 26, so that the spraying height can be adjusted as required before spraying, and the side walls of the second module 22 are also provided with vent holes 28 for exhausting volatile chemicals; the corresponding end faces between the slide groove 26 and the housing 24 are correspondingly connected through a connecting rod, and butt positioning is performed between the height fixing hole 27 and the slide groove fixing hole 29.

In general, a liquid outlet (not shown) may be provided at the bottom of the circulation chamber, and may be connected to the upper spraying device 11 in the form of a circulation pipe, or may directly discharge the liquid.

Most of the structures of the third module 23 are the same as those of the second module 22, and the third module can also be used as a spraying or blowing device, meanwhile, a position fixing module matched with the angle adjustment of the conveying device is arranged on the outward transverse plate 25 of the third module, the position fixing module comprises a vertical plate 232 used for adjusting in the vertical direction, and an adjusting rod 233 capable of rotating in a certain sector area around a shaft, the contact angle between the storage frame 331 and the sprayed liquid is adjusted by raising the height of one end of the conveying device 3 and fixing the height of the other end, and the adjustable angle range is 0-45 degrees.

The conveying device 3 comprises a first connecting buckle 31, a first rotating piece 32, a storage 33, a second rotating piece 34 and a second connecting buckle 35, wherein the left side and the right side of the storage 33 are respectively connected with the first rotating piece 32 and the second rotating piece 34, the first rotating piece 32 is matched with the first connecting buckle 31 through a first rotating shaft 36, and the second rotating piece 34 is matched with the second connecting buckle 35 through a second rotating shaft 37; in fact, the first rotating member 32 and the first connecting buckle 31, and the second rotating member 34 and the second connecting buckle 35 are respectively in a hinge structure;

the storage 33 comprises a storage frame 331 and a plurality of gear slots 332, wherein the gear slots 332 are uniformly arranged in the storage frame 331 and are responsible for angle adjustment work of the conveying device 3 in the conveying process; specifically, the two ends of the first rotating shaft 36 and the second rotating shaft 37 are respectively matched with the fixing hole 237 and the adjusting hole 239 in the third module 23 at the front end and the rear end to support the two sides, so as to turn over the whole storage 33, and the baffle groove 332 penetrates through the driving shaft and is respectively matched with the second through hole 238, so that the controller controls the driving mechanism, and further controls the driving shaft to perform the whole transmission operation of the storage 33.

In the invention, two embodiments are provided, wherein A is taken as a first module, B is taken as a second module, and C is taken as a third module.

Example 1: developer solution product verification scheme

Module combination (according to the process sequence): A1-C1-B-C2-A2

1) Installing the machine in a yellow light environment;

2) c1 and B are provided with constant-pressure spraying modules, and C2 is provided with a purging module;

3) calculating, setting and adjusting the position of the platform sliding groove, and installing and fixing the substrate conveying platform;

4) adding 10L of developing solution products to be evaluated into a constant-pressure spraying module on the C1, and adding 10L of deionized water into a constant-pressure spraying module on the B;

5) adjusting the angle of the substrate conveying platform to be 5 degrees, adjusting the developing time to be 60s, setting the constant temperature of the developing solution to be 23 ℃, the spraying pressure of the developing solution to be normal pressure, the spraying pressure of the deionized water to be normal pressure, and the blowing pressure of an air knife to be 0.5 MPa;

6) recording the pretreatment conditions of the placed substrate;

7) starting a developing solution evaluation experiment;

8) and collecting the experimental substrate, slicing, and judging the using effect of the developing solution product according to the detection result of the scanning electron microscope.

Example 2: developing solution-etching solution product combined verification scheme

Module combination (according to the process sequence): A1-C1-B1-B2-B3-B4-C2-A2

1) Installing the machine in a yellow light environment;

2) constant-pressure spraying modules are arranged on C1, B1, B3 and B4-, and purging modules are arranged on B2 and C2;

3) calculating, setting and adjusting the position of the platform sliding groove, and installing and fixing the substrate conveying platform;

4) adding 10L of developing solution products to be evaluated into a constant-pressure spraying module on the C1, adding 10L of deionized water into a constant-pressure spraying module on the B1, adding 10L of etching solution products to be evaluated into a constant-pressure spraying module on the B3, and adding 10L of deionized water into a constant-pressure spraying module on the B4;

5) adjusting the angle of the substrate conveying platform to be 5 degrees, adjusting the developing time to be 60s, setting the constant temperature of the developing solution to be 23 ℃, the spraying pressure of the developing solution to be normal pressure, the spraying pressure of the deionized water to be normal pressure, and the blowing pressure of an air knife to be 0.5 MPa;

6) adjusting the etching time to 40s, setting the constant temperature of the etching liquid to 45 ℃, the spraying pressure of the etching liquid to 0.3MPa, the spraying pressure of the deionized water to normal pressure, and the blowing pressure of an air knife to 0.5 MPa;

7) recording the pretreatment conditions of the placed substrate;

8) beginning to perform a developing solution-etching solution combined evaluation experiment;

9) collecting the experimental substrate, slicing, and judging the using effect of the developing solution and the etching solution products according to the detection result of the scanning electron microscope.

The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the scope of the invention, i.e. the present invention is intended to cover all equivalent variations and modifications within the scope of the present invention.

Claims (10)

1. The laboratory is with wet electron chemistry article appraising equipment of modularization fountain, characterized by that, the said appraising equipment includes the processing unit (1), the multi-chamber device (2), the conveying appliance (3);

the treatment device (1) comprises a plurality of spraying devices (11) and a plurality of purging devices (12) which are arranged at the top of the multi-cavity device (2);

the multi-cavity device (2) comprises a first module (21), a third module (23), a plurality of second modules (22), a third module (23) and the first module (21), wherein the first module (21), the third module (23), the plurality of second modules (22), the third module (23) and the first module (21) are sequentially connected, the spraying device (11) or the purging device (12) are arranged at the top of the second module (22) in a matched mode, the spraying device (11) and the purging device (12) are respectively arranged at the top of the third module (23) at the front end and the rear end in a matched mode, and the two third modules (23) are;

the conveying device (3) is matched with the second module (22) and the third module (23);

the processing device (1), the multi-cavity device (2) and the conveying device (3) are provided with controllers in a matching mode.

2. The laboratory is with the wet electronic chemical appraisal equipment of modular fountain type in claim 1, characterized by that, the top and side of the said spray means (11) are equipped with the upper seal plate (111) and side seal plate (112) respectively below, the said spray means (11) inner middle part is divided into upper cabin body (113) and lower cabin body (114) through the controllable seal switch, several shower heads (115) are set up in the bottom of the said lower cabin body (114) through the mounting hole;

an upper bin liquid inlet (1131) and an upper bin liquid outlet (1132) are arranged on the side surface of the upper bin body (113), and an upper circulating pipe (1133) with two ends respectively communicated with the upper bin body (113) in space is arranged on the side surface of the upper bin body (113);

a lower bin air inlet (1141) is formed in the side surface of the lower bin body (114), and a lower circulating pipe (1142) with two ends respectively connected with the lower bin body (114) in space is formed in the side surface of the lower bin body (114); the controllable sealing switch is connected to a controller.

3. The laboratory is with wet electron chemistry article evaluation equipment of modularization fountain of claim 2, characterized in that, the cooperation is established in upper storehouse body (113) and is changed thermal disk (116), it is including a plurality of temperature-sensing probe (1161) and heat exchange tube (1162) that the cooperation was established to change thermal disk (116), a plurality of temperature-sensing probe (1161) and heat exchange tube (1162) and controller cooperation setting.

4. The laboratory is with the wet electronic chemical evaluation equipment of modular fountain type in claim 1, characterized by, that said blowing device (12) includes the body (121) and the steady pressure storehouse (122) that cooperates with body (121) to set up, there are several air intakes (1221) on the top of the steady pressure storehouse (122), cooperate with several air intakes (1221) there are several air taps (1222) at the bottom of body (121), several air intakes (1221) and several air taps (1222) space intercommunication, there are pressure monitoring sensors in the steady pressure storehouse (122); the pressure monitoring sensor and the air tap (1222) are matched with the controller.

5. The laboratory spray-type wet electronic chemical evaluation device according to claim 1, wherein the first module (21) comprises a housing door (211) and slots (212) disposed on both sides inside the housing door (211), a closing cover plate (213) is slidably fitted into the slots (212), and a handle (214) is disposed on the closing cover plate (213).

6. The laboratory is with wet electronic chemical evaluation equipment of modularization fountain of claim 1, characterized in that, the second module (22) and the third module (23) include the outer casing (24), the inside middle part of the outer casing (24) is equipped with several horizontal plates (25), the middle part of the both sides of inner wall of the outer casing (24) above several horizontal plates (25) is fitted with and set up the concrete chute (26) separately, cooperate with the concrete chute (26) the both sides wall of the outer casing (24) to be equipped with several height fixing holes (27);

the top of the shell (24) is provided with a mounting port (241), and the spraying device (11) or the blowing device (12) is arranged on the shell (24) in a matching way with the mounting port (241);

and a plurality of vent holes (28) are formed in two side walls of the shell (24).

7. The laboratory is with wet electronic chemicals evaluation equipment of modularization fountain of claim 6, characterized in that, be equipped with a plurality of spout fixed orifices (29) on the terminal surface of spout (26) towards shell (24) both sides inner wall, high fixed orifices (27) and spout fixed orifices (29) are through the connecting rod corresponding the setting.

8. The laboratory is with wet electronic chemicals evaluation equipment of modularization fountain of claim 6, characterized by, the diaphragm (25) of the front end face of the third module (23) of front end and the rear end face of the third module (23) of rear end has the back plate (231) down, the end of the said diaphragm (25) on the back plate sets up the cooperating riser (232) and adjusts the pole (233);

a plurality of first through holes (234) are uniformly formed in the vertical plate (232), the adjusting rod (233) comprises a cross rod (235) and a fixing buckle (236), and a fixing hole (237), a plurality of second through holes (238), an adjusting hole (239) and an adjusting groove (230) are sequentially formed in the cross rod (235); the fixing buckle (236) can movably penetrate through the adjusting groove (230), and the fixing buckle (236) is matched with any one first through hole (234) in the adjusting rod (233).

9. The laboratory spray-type wet electronic chemical evaluation device according to claim 8, wherein the conveyor device (3) comprises a storage (33), a first rotating member (32) and a second rotating member (34) are arranged on two sides of the storage (33) in a matching manner, the first rotating member (32) and the second rotating member (34) are respectively hinged with a first connecting buckle (31) and a second connecting buckle (35) in a matching manner, and the first connecting buckle (31) and the second connecting buckle (35) are arranged in a matching manner with the sliding chute (26) on the corresponding side, and the first connecting buckle (32) and the second connecting buckle (35) are arranged on two sides of the storage (33) in a matching manner;

a first rotating shaft (36) is arranged between the first rotating piece (32) and the first connecting buckle (31) in a matched and penetrating manner, and a second rotating shaft (37) is arranged between the second rotating piece (34) and the second connecting buckle (35) in a matched and penetrating manner;

the storage device (33) comprises a storage frame (331), and a plurality of baffle grooves (332) parallel to the transverse plate (25) are arranged in the storage frame (331).

10. The laboratory spray-type wet electronic chemical evaluation device according to claim 9, wherein both ends of the first and second rotating shafts (36, 37) are respectively fitted with fixing holes (237) and adjusting holes (239) in the third modules (23) at the front and rear ends; the baffle groove (332) is matched with the second through holes (238) to penetrate through the driving shaft; the drive shaft is connected to a controller through a drive mechanism.

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