CN212713841U

CN212713841U - Doping tool for secondary feeder of single crystal furnace

Info

Publication number: CN212713841U
Application number: CN202021526806.1U
Authority: CN
Inventors: 郑伟扬; 王思锋
Original assignee: Ningxia Gcl Crystal Technology Development Co ltd
Current assignee: Ningxia Gcl Crystal Technology Development Co ltd
Priority date: 2020-07-28
Filing date: 2020-07-28
Publication date: 2021-03-16
Anticipated expiration: 2030-07-28

Abstract

The utility model discloses a doping tool for a secondary feeder of a single crystal furnace, which comprises a funnel made of polytetrafluoroethylene and a flow guide pipe made of quartz; the bottom of funnel is equipped with the internal thread, the top of honeycomb duct is equipped with the external screw thread, and the funnel passes through interior external screw thread detachable with the honeycomb duct and is connected. A quartz lower opening reinforcing ring is arranged at the bottom of the flow guide pipe; the end part of the flow guide pipe close to the funnel is provided with a polytetrafluoroethylene protection ring, and a quartz support table is arranged below the protection ring. This doping frock adopts split type structural design, and its upper portion is the polytetrafluoroethylene funnel, and the lower part is the quartz honeycomb duct, and both adopt threaded connection can effectively reduce purchasing cost, and easily dismantle, assemble and wash. And only the lower quartz tube is replaced after the quartz tube is damaged, so that the use cost is reduced. The tool is made of high-purity materials, so that the pollution of the tool to polycrystalline silicon raw materials can be effectively avoided.

Description

Doping tool for secondary feeder of single crystal furnace

Technical Field

The utility model belongs to the single crystal preparation field, concretely relates to be used for single crystal growing furnace secondary feeder to add doping frock.

Background

The resistance of the single crystal silicon rod is mainly controlled by adding doping elements into the polycrystalline raw material by taking the master alloy as a carrier. With the development of the whole single crystal industry, the types of doping elements are changed, and the pure elements are mainly doped at present. Pure element is mostly tiny graininess, and in part producer adopted quartz funnel to lead into the charging means with pure element granule when using the secondary charging means, the quartz funnel that this scheme adopted easily collided with and damaged and purchasing cost is higher.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem that to prior art not enough, provide a simple structure, life height, easy maintenance in later stage and lower with adulterating frock of purchasing cost.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a doping tool for a secondary feeder of a single crystal furnace comprises a funnel made of polytetrafluoroethylene and a flow guide pipe made of quartz; the bottom of funnel is equipped with the internal thread, the top of honeycomb duct is equipped with the external screw thread, and the funnel passes through interior external screw thread detachable with the honeycomb duct and is connected.

Furthermore, a lower opening reinforcing ring is arranged at the bottom of the flow guide pipe and is made of quartz; the bottom of honeycomb duct is equipped with the external screw thread, and the lower mouthful of beaded finish inside is equipped with the internal thread, and the lower mouthful of beaded finish cup joints the bottom at the honeycomb duct through interior external screw thread detachable, and it plays the structure and strengthens, prevent that the quartz capsule lower mouth from colliding with the damage.

Further, the tip that the honeycomb duct is close to the funnel is equipped with the protection ring, and it is the polytetrafluoroethylene material, fixes on the honeycomb duct through the mode that cup joints, mainly plays protection quartz capsule, prevents that it from rocking the striking on quartzy charging means, plays the fixed action simultaneously, keeps this frock to be in charging means central point and puts.

Furthermore, the honeycomb duct is located the below of protection ring, still is equipped with the brace table of quartz material, the brace table is equipped with the internal thread, and the honeycomb duct is located the below of protection ring and is equipped with the external screw thread, and the brace table cup joints on the honeycomb duct through interior external screw thread detachable, and it is as the polytetrafluoroethylene protection ring that supports the top.

Preferably, the funnel comprises an upper conical part and a lower pipe body part, and the conical part and the pipe body part are integrally formed; the radius of an opening above the conical part is 60-80 mm; the outer diameter of the pipe body part is 40-50 mm.

Preferably, the outer diameter of the draft tube is 25-35 mm.

Preferably, the outer diameter of the lower opening reinforcing ring is 40-45 mm.

Preferably, the outer diameter of the protection ring is 185-195 mm.

Preferably, the outer diameter of the support table is 40-50 mm.

Has the advantages that:

the utility model discloses secondary charging ware adds doping frock adopts split type structural design, and its upper portion is the polytetrafluoroethylene funnel, and the lower part is quartzy honeycomb duct, and both adopt threaded connection can effectively reduce purchasing cost, and easily dismantle, assemble and wash. And only the lower quartz tube is replaced after the quartz tube is damaged, so that the use cost is reduced. The tool is made of high-purity materials, so that the pollution of the tool to polycrystalline silicon raw materials can be effectively avoided. The doping agent tool creatively combines two completely different materials together, the characteristics of the doping agent tool are exerted respectively, the polytetrafluoroethylene funnel material is flexible from the polytetrafluoroethylene funnel material, the polytetrafluoroethylene funnel material can be prevented from colliding with a quartz feeder, the quartz tube is high in purity and transparent, when the doping agent is poured from a hopper and then is drained to the middle part of the feeder through the quartz tube, the whole process of adding the doping agent can be observed in the whole process, the doping agent is guaranteed to be completely added into polycrystalline raw materials, and the stability and controllability of the resistance of a product are finally achieved.

Drawings

These and/or other advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings and the following detailed description.

FIG. 1 is a schematic structural diagram of the doping tool for the secondary feeder of the single crystal furnace.

Wherein each reference numeral represents: 1, a funnel; 11 a conical part; 12 a body portion; 2, a flow guide pipe; 3, a lower opening reinforcing ring; 4 a guard ring; 5, supporting the table; 6 quartz feeder; 7, polycrystalline raw materials; 8 dopant.

Detailed Description

The invention will be better understood from the following examples.

The drawings in the specification show the structure, ratio, size, etc. only for the purpose of matching with the content disclosed in the specification, so as to be known and read by those skilled in the art, and not for the purpose of limiting the present invention, so the present invention does not have the essential meaning in the art, and any structure modification, ratio relationship change or size adjustment should still fall within the scope covered by the technical content disclosed in the present invention without affecting the function and achievable purpose of the present invention. Meanwhile, the terms "upper", "lower", "front", "rear", "middle", and the like used in the present specification are for the sake of clarity only, and are not intended to limit the scope of the present invention, and changes or adjustments of the relative relationship thereof are also considered to be the scope of the present invention without substantial changes in the technical content.

As shown in figure 1, the doping tool for the secondary feeder of the single crystal furnace comprises a hopper 1, a flow guide pipe 2, a lower opening reinforcing ring 3, a protection ring 4 and a support table 5; funnel 1, protection ring 4 are the polytetrafluoroethylene material, and honeycomb duct 2, end opening reinforcing ring 3, brace table 5 are the quartz material.

The bottom of funnel 1 is equipped with the internal thread, and the top of honeycomb duct 2 is equipped with the external screw thread, and funnel 1 is connected through interior external screw thread detachable with honeycomb duct 2.

The bottom of honeycomb duct 2 is equipped with the external screw thread, and 3 inside internal threads that are equipped with of end opening beaded finish 3, and end opening beaded finish 3 cup joints in the bottom of honeycomb duct 2 through interior external screw thread detachable, and it plays the structure and strengthens, prevent that the quartz capsule end opening from colliding with the damage.

Protection ring 4 sets up in the tip that honeycomb duct 2 is close to funnel 1, fixes on honeycomb duct 2 through the mode that cup joints, mainly plays protection quartz capsule, prevents that it from rocking the striking on quartzy charging means, plays the fixed action simultaneously, keeps this frock to be in charging means central point and puts.

The support table 5 is positioned below the guide pipe 2 and positioned below the protection ring 4, is detachably sleeved on the guide pipe 2 through internal and external threads, and is used for supporting the polytetrafluoroethylene protection ring above.

The funnel 1 comprises an upper conical part 11 and a lower pipe body part 12, and the conical part 11 and the pipe body part 12 are integrally formed; the radius of an upper opening of the conical part 11 is 70 mm; the outer diameter of the body portion 12 is 46 mm. The outer diameter of the draft tube 2 is 30 mm. The outer diameter of the lower opening reinforcing ring 3 is 40 mm. The outer diameter of the guard ring 4 is 190 mm. The outer diameter of the support table 5 is 40 mm.

During the use, install suitable for reading reinforcing ring 3 and brace table 5 on honeycomb duct 2 earlier, then install polytetrafluoroethylene protection ring 4 and polytetrafluoroethylene funnel 1 in proper order again, accomplish the installation of this frock promptly. Then, the tool is vertically placed into a quartz feeder 6 with a polycrystalline raw material 7 arranged below, and a doping agent 8 is slowly added into a polytetrafluoroethylene funnel 1.

The utility model provides a thought and method that is used for single crystal growing furnace secondary charging ware to add doping frock specifically realizes that this technical scheme's method and approach are many, above only the utility model discloses a preferred embodiment should point out, to ordinary technical personnel in this technical field, does not deviate from the utility model discloses under the prerequisite of principle, can also make a plurality of improvements and moist decorations, these improvements and moist decorations should also be regarded as the utility model's protection scope. All the components not specified in the present embodiment can be realized by the prior art.

Claims

1. A doping tool for a secondary feeder of a single crystal furnace is characterized by comprising a funnel (1) made of polytetrafluoroethylene and a flow guide pipe (2) made of quartz; the bottom of funnel (1) is equipped with the internal thread, the top of honeycomb duct (2) is equipped with the external screw thread, and funnel (1) is connected through interior external screw thread detachable with honeycomb duct (2).

2. The doping tool for the secondary feeder of the single crystal furnace as claimed in claim 1, wherein the bottom of the draft tube (2) is provided with a lower opening reinforcing ring (3) which is made of quartz; the bottom of honeycomb duct (2) is equipped with the external screw thread, and end opening beaded finish (3) is inside to be equipped with the internal thread, and end opening beaded finish (3) cup joints the bottom at honeycomb duct (2) through interior external screw thread detachable.

3. The doping tool for the secondary feeder of the single crystal furnace as claimed in claim 2, wherein the end of the flow guide pipe (2) close to the hopper (1) is provided with a protection ring (4) which is made of polytetrafluoroethylene and is fixed on the flow guide pipe (2) in a sleeved mode.

4. The doping tool for the secondary feeder of the single crystal furnace according to claim 3, wherein the guide pipe (2) is located below the protection ring (4), a support table (5) made of quartz is further arranged, the support table (5) is provided with internal threads, external threads are arranged below the protection ring (4) of the guide pipe (2), and the support table (5) is detachably sleeved on the guide pipe (2) through the internal threads and the external threads.

5. The secondary feeder doping tool for the single crystal furnace as claimed in claim 4, wherein the hopper (1) comprises an upper conical part (11) and a lower pipe body part (12), and the conical part (11) and the pipe body part (12) are integrally formed; the radius of an opening above the conical part (11) is 60-80 mm; the outer diameter of the pipe body part (12) is 40-50 mm.

6. The doping tool for the secondary feeder of the single crystal furnace as claimed in claim 5, wherein the outer diameter of the flow guide pipe (2) is 25-35 mm.

7. The doping tool for the secondary feeder of the single crystal furnace as claimed in claim 6, wherein the outer diameter of the lower opening reinforcing ring (3) is 40-45 mm.

8. The doping tool for the secondary feeder of the single crystal furnace as claimed in claim 6, wherein the outer diameter of the protection ring (4) is 185-195 mm.

9. The doping tool for the secondary feeder of the single crystal furnace as claimed in claim 6, wherein the support table (5) has an outer diameter of 40-50 mm.