CN212669852U

CN212669852U - Crucible for drawing tubular crystal

Info

Publication number: CN212669852U
Application number: CN202020693452.3U
Authority: CN
Inventors: 刘建军
Original assignee: Individual
Current assignee: Individual
Priority date: 2020-04-30
Filing date: 2020-04-30
Publication date: 2021-03-09
Anticipated expiration: 2030-04-30

Abstract

The utility model provides a crucible for drawing tubulose crystal, relates to new material technical field, the utility model discloses a bottom at crucible overcoat (2) sets up crucible endotheca (6), then set up buffering inclined plane (4) on conical body (3) of crucible endotheca, can realize that polycrystalline silicon material (8) make the polycrystalline silicon material steady add the melting zone in reinforced in-process, avoided because of the serious situation of the melt fluctuation that arouses when reinforced, then be equipped with the chute between the outer fringe face of crucible endotheca and crucible overcoat inner fringe face, on the melt in the crucible flows out the tubulose seed crystal through the chute, and then realize the drawing of tubulose crystal, the utility model has the advantages of simple structure, production efficiency is high, with low costs, structural design is reasonable, is particularly suitable for promoting and applying on a large scale.

Description

Crucible for drawing tubular crystal

[ technical field ] A method for producing a semiconductor device

The utility model relates to a new material technical field, concretely relates to crucible for drawing tubulose crystal.

[ background of the invention ]

The new material industry has the characteristics of high technology density, high research and development investment, high added value of products, strong international property of production and market, wide application range, good development prospect and the like, the research and development level and the industrialization scale of the new material industry become important marks for measuring national economy, social development, scientific and technological progress and national defense strength, and all countries in the world, particularly developed countries, pay attention to the development of the new material industry. Taking a target as an example, a sputtering coating process based on the physical vapor deposition principle is widely applied to the technical fields of liquid crystal display equipment, solar cells, solar vacuum tubes, semiconductor chips and the like; the rotary target is a commonly used coating material in a sputtering coating process, generally consists of a tubular metal base material and a coating material layer, and is prepared by the normal method that the coating material layer is directly sprayed after the surface of the outer surface of the tubular metal base material is cleaned or sand blowing is finished. During use, the service life of the device is reduced. Meanwhile, the density is low, so that the power consumption is required to be reduced in the film coating process, and the production efficiency is influenced; meanwhile, due to the specific requirements of the spraying process, the purity of the used silicon powder is not enough, so that the overall purity of the target material is low, and the coating quality is affected.

The other process is to draw a hollow tube material on a complete ingot or bar-shaped material by a material drawing device, and bind the tube material on a tubular metal base material after grinding and polishing, and the process has the defects of low production efficiency, high production cost, short tube material length due to the limitation of the material drawing process and the like, and the cost limitation cannot be popularized and applied in a large range, so that the device for drawing the tubular crystal becomes the research direction of technicians in the field, and in the whole device, a crucible is one of important parts, so how to provide the crucible for drawing the tubular crystal becomes the long-term technical appeal of the technicians in the field.

[ summary of the invention ]

In view of the not enough of existence among the background art, the utility model discloses a crucible for drawing tubular crystal, the utility model discloses a set up the buffering inclined plane on the conical body of crucible endotheca, can realize that polycrystalline silicon material makes the polycrystalline silicon material steady add the crucible melt the region in reinforced in-process, then be equipped with the chute between the outer fringe face of crucible endotheca and crucible overcoat inner fringe face, solid particle in the crucible melts into the melt in melting the region, and the melt flows out on the tubulose seed crystal through the chute, and then realizes tubular crystal's drawing, the utility model has the advantages of simple structure, production efficiency is high, with low costs.

In order to achieve the purpose of the invention, the utility model adopts the following technical scheme:

a crucible for drawing tubular crystals comprises a crucible outer sleeve and a crucible inner sleeve, wherein the crucible inner sleeve is arranged at the bottom of the crucible outer sleeve, a conical body or a hemispherical body extending upwards is arranged on the crucible inner sleeve, and a material flowing groove is arranged between the outer edge surface of the crucible inner sleeve and the inner edge surface of the crucible outer sleeve to form the crucible for drawing tubular crystals.

The crucible for drawing the tubular crystal is characterized in that the width of the flowing groove is 0.01 mm-10 mm.

The crucible for drawing the tubular crystal is characterized in that the conical body is provided with a buffer inclined plane.

The crucible for drawing the tubular crystal has the replacement structure that a plurality of material flowing holes are arranged at the bottom of the inner crucible sleeve or the bottom of the inner edge surface of the outer crucible sleeve and are circularly arranged.

The crucible for drawing the tubular crystal is characterized in that the diameter of the material flowing hole is 0.01 mm-10 mm.

The crucible for drawing the tubular crystal is characterized in that a groove is arranged below the inner sleeve of the crucible.

The crucible for drawing the tubular crystal is sleeved with a hollow cylindrical structure.

The crucible for drawing the tubular crystal is characterized in that the bottom of the outer edge surface of the crucible outer sleeve is provided with a trapezoidal surface or a conical surface.

Due to the adoption of the technical scheme, the utility model discloses following beneficial effect has:

the utility model discloses a bottom at the crucible overcoat sets up the crucible endotheca, then set up the buffering inclined plane on the conical body of crucible endotheca, can realize that polycrystalline silicon material makes polycrystalline silicon material last steady adding to melting in the region at reinforced in-process, avoided the serious situation of the melt surface fluctuation that arouses when reinforced, then be equipped with the chute between the outer fringe face of crucible endotheca and crucible overcoat inner fringe face, on the melt in the crucible flowed out the tubulose seed crystal through the chute, and then realize the drawing of tubulose crystal, the utility model has the advantages of simple structure, production efficiency is high, with low costs, structural design is reasonable, be particularly suitable for popularization and application on a large scale.

[ description of the drawings ]

Fig. 1 is a schematic perspective view of the present invention;

FIG. 2 is a schematic sectional view of the present invention;

FIG. 3 is a schematic structural view of the hemispherical body of the present invention;

in the figure: 1. a connecting ring; 2. the crucible is sleeved; 3. a conical body; 4. a buffer bevel; 5. a groove; 6. sleeving a crucible; 7. a chute; 8. a polycrystalline silicon material; 9. a semi-spherical body.

[ detailed description ] embodiments

The present invention can be explained in more detail with reference to the following examples; however, the present invention is not limited to these examples.

It should be noted that the directions and positional relationships indicated by "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc. used in describing the structure of the present invention are only for convenience of description and simplification of description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and thus, should not be construed as limiting the present invention.

The crucible for drawing the tubular crystal comprises a crucible outer sleeve 2 and a crucible inner sleeve 6, wherein the upper end head of the crucible outer sleeve 2 is provided with a connecting ring 1 extending upwards, the outer edge surface of the connecting ring 1 is provided with an external thread for connecting an upper supporting rod, the bottom of the outer edge surface of the crucible outer sleeve 2 is provided with a trapezoidal surface or a conical surface, the purpose of the trapezoidal surface or the conical surface is to prevent molten liquid flowing out of a material flowing groove 7 from flowing to the outer edge surface of the crucible outer sleeve 2 along the bottom surface of the crucible outer sleeve 2 and then flowing to the outside of the tubular seed crystal from the outer edge surface of the crucible outer sleeve 2, and the outer diameter of a tubular crystal material can be limited by the arrangement of the trapezoidal surface or the conical surface; the crucible outer sleeve 2 is provided with a crucible inner sleeve 6 at the bottom, a groove 5 is arranged below the crucible inner sleeve 6, the purpose of the groove 5 is to limit the inner diameter size of the prepared tubular crystal material, that is, when the diameter of the groove 5 is set to 70mm, the inner diameter size of the prepared tubular crystal material is also 70mm, in practice, the groove 5 is not arranged below the crucible inner sleeve 6, and a melt guiding ring extending downwards can be arranged on the lower end surface of the crucible inner sleeve 6 to guide the melt to flow to seed crystals and the like.

Further, in specific implementation, the crucible outer sleeve 2 and the crucible inner sleeve 6 can be arranged into an integral barrel-shaped structure, then an annular groove which is concave upwards is arranged below the barrel bottom of the barrel-shaped structure, a plurality of holes which penetrate through the barrel bottom of the barrel-shaped structure are arranged at the bottom of the annular groove, a fluid trough 7 is formed by the holes and the annular groove, or the crucible outer sleeve 2 and the crucible inner sleeve 6 are arranged into a split structure, and a plurality of connecting blocks are arranged between the inner edge surface of the crucible outer sleeve 2 and the outer edge surface of the crucible inner sleeve 6 at intervals to connect the crucible outer sleeve 2 and the crucible inner sleeve 6 into a whole; the upper surface of the crucible inner sleeve 6 is provided with a conical body 3 or a hemispherical body 9 which extends upwards, as shown in figures 1 and 3, when the hemispherical body 9 is arranged on the crucible inner sleeve 6, the crucible inner sleeve 6 and the hemispherical body 9 can be of a hollow structure or a solid structure, when the crucible is a solid structure, a groove 5 must be arranged below the crucible inner sleeve 6, the cone 3 is arranged to form a V-shaped opening between the outer wall of the crucible inner sleeve 6 and the inner wall of the crucible outer sleeve 2, the polycrystalline silicon material 8 is arranged in the V-shaped opening, the conical body 3 is provided with a buffer inclined plane 4, the buffer inclined plane 4 can eliminate a platform formed on the upper part of the crucible inner sleeve 6, which is beneficial to the polycrystalline silicon material 8 to directly enter the V-shaped opening, a material flowing groove 7 is arranged between the outer edge surface of the crucible inner sleeve 6 and the inner edge surface of the crucible outer sleeve 2 to form the crucible for drawing the tubular crystal.

In specific implementation, the width of the chute 7 is 0.01 mm-10 mm. Furthermore, the alternative structure of the material flowing groove 7 is that a plurality of material flowing holes are arranged at the bottom of the crucible inner sleeve 6 or the bottom of the inner edge surface of the crucible outer sleeve 2, and the diameter of each material flowing hole is 0.01 mm-10 mm.

Further, buffering inclined plane 4 can make the contained angle of buffering inclined plane 4 and the central axis of conical body 3 set up to 0 ~ 90 when specifically setting up.

Further, in order to reduce the contact area between the molten silicon material and the graphite, the material of the hemispherical body 9 may be selected to be quartz.

The utility model discloses when concrete implementation, in adding the V-arrangement mouth that 2 inner walls of crucible overcoat and 3 outer walls of conical body formed with polycrystalline silicon material 8, start the heater that the crucible periphery set up, melt into the melt in the V-arrangement mouth at polycrystalline silicon material 8 under the effect of heater to crucible heating, melt after the melting through on flowing through silo 7 flows the tubulose seed crystal, and then realize the drawing of tubulose crystal.

The part of the utility model not detailed is prior art.

The embodiments selected for the purpose of disclosing the invention, are presently considered to be suitable, it being understood, however, that the invention is intended to cover all variations and modifications of the embodiments, which fall within the scope of the concept and invention.

Claims

1. A crucible for drawing a tubular crystal, comprising an outer crucible shell (2) and an inner crucible shell (6), characterized in that: the crucible for drawing the tubular crystal is characterized in that a crucible inner sleeve (6) is arranged at the bottom of the crucible outer sleeve (2), a conical body (3) or a hemispherical body (9) extending upwards is arranged on the crucible inner sleeve (6), and a material flowing groove (7) is arranged between the outer edge surface of the crucible inner sleeve (6) and the inner edge surface of the crucible outer sleeve (2).

2. A crucible for drawing a tubular crystal as set forth in claim 1, wherein: the width of the material flowing groove (7) is 0.01 mm-10 mm.

3. A crucible for drawing a tubular crystal as set forth in claim 1, wherein: and a buffer inclined plane (4) is arranged on the conical body (3).

4. A crucible for drawing a tubular crystal as set forth in claim 1, wherein: the alternative structure of the material flowing groove (7) is that a plurality of material flowing holes are arranged at the bottom of the crucible inner sleeve (6) or the bottom of the inner edge surface of the crucible outer sleeve (2), and the plurality of material flowing holes are circularly arranged.

5. A crucible for pulling a tubular crystal as set forth in claim 4, wherein: the diameter of the material flowing hole is 0.01 mm-10 mm.

6. A crucible for drawing a tubular crystal as set forth in claim 1, wherein: and a groove (5) is arranged below the crucible inner sleeve (6).

7. A crucible for drawing a tubular crystal as set forth in claim 1, wherein: the crucible outer sleeve (2) is of a hollow cylindrical structure.

8. A crucible for drawing a tubular crystal as set forth in claim 1, wherein: the bottom of the outer edge surface of the crucible outer sleeve (2) is provided with a trapezoidal surface or a conical surface.