CN212625498U - Device for automatically correcting levelness of platform - Google Patents
Device for automatically correcting levelness of platform Download PDFInfo
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- CN212625498U CN212625498U CN202021320314.7U CN202021320314U CN212625498U CN 212625498 U CN212625498 U CN 212625498U CN 202021320314 U CN202021320314 U CN 202021320314U CN 212625498 U CN212625498 U CN 212625498U
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Abstract
The utility model discloses a device for automatically correcting levelness of a platform, which comprises a fixed seat, a movable platform, a concentric bearing and a plurality of eccentric jacking mechanisms; the movable platform is arranged above the fixed seat in a levelness-adjustable manner, and a plurality of extension springs are connected between the bottom of the movable platform and the fixed seat; the concentric bearing is rotatably arranged on the fixed seat and is abutted against the bottom of one corner of the movable platform; the eccentric jacking mechanisms are all arranged on the fixed seat and positioned beside the lower side of the rest corners of the movable platform, and each eccentric jacking mechanism comprises a rotating shaft, a servo motor and an eccentric bearing. Through measuring the difference in height of calculating four angles of movable platform, convert and drive corresponding servo motor control eccentric bearing by the procedure and rotate to accomplish the levelness in the altitude mixture control reaches the standard, levelness correction automation back, the liberation manpower that can be very big practices thrift the human cost, reduces the maintenance time, also can avoid because of the various risks that human misoperation brought.
Description
Technical Field
The invention relates to the technical field of automation equipment, in particular to a device for automatically correcting levelness of a platform.
Background
In the semiconductor packaging industry, automation equipment is increasingly applied to production processes, and the higher the automation degree of the equipment is, the more labor cost, time cost and maintenance cost can be saved, and various problems caused by manual operation errors can be reduced to the greatest extent.
At present, various devices in the semiconductor packaging industry are more or less related to the levelness problem of the platform, the grade of the levelness of the platform is related to the quality, the yield, the stability and the utilization rate of the devices, and the levelness correction technology of the platform is also widely applied to the semiconductor packaging devices. Taking a Flip Chip process in the camera industry as an example, poor adjustment of the levelness of the platform can cause the substrate to be horizontally inclined, partial insufficient soldering of the pins can occur in the Chip welding process, the electrical property is poor, and the imaging quality is poor due to the inclined packaging of the photosensitive Chip, so that the product yield is affected. The existing platform levelness correction technology is to achieve levelness correction by manually adjusting the height of a platform, and the difference is only the difference of mechanical structures for realizing height adjustment. The manual correction has higher requirements on the specialty and the proficiency of operators, the ideal effect can be achieved by repeatedly trying for many times, the time spent in the correction process is too long, and the utilization rate of equipment is influenced.
Disclosure of Invention
In view of the above, the present invention is directed to the defects in the prior art, and a primary objective of the present invention is to provide a device for automatically calibrating the levelness of a platform, which can effectively solve the problems of long time and low efficiency in the prior art of manually calibrating the levelness of the platform.
In order to achieve the purpose, the invention adopts the following technical scheme:
a device for automatically correcting the levelness of a platform comprises a fixed seat, a movable platform, a concentric bearing and a plurality of eccentric jacking mechanisms; the movable platform is arranged above the fixed seat in a levelness-adjustable manner, and a plurality of extension springs are connected between the bottom of the movable platform and the fixed seat; the concentric bearing is rotatably arranged on the fixed seat and is abutted against the bottom of one corner of the movable platform; the eccentric jacking mechanisms are arranged on the fixed seat and positioned beside the lower side of the rest corners of the movable platform, each eccentric jacking mechanism comprises a rotating shaft, a servo motor and an eccentric bearing, the rotating shaft is rotatably arranged on the fixed seat, the servo motor is fixed on the fixed seat and drives the rotating shaft to rotate back and forth, the eccentric bearings are fixed on the rotating shaft and driven by the rotating shaft to rotate, and the eccentric bearings abut against the bottoms of the corresponding corners of the movable platform.
Preferably, the number of the extension springs is four, and the extension springs are distributed at the bottoms of four corners of the movable platform.
Preferably, the fixed seat is provided with a positioning hole, and the bottom surface of the movable platform is fixed with a positioning pin which is inserted into the positioning hole.
Preferably, the number of the positioning pins is four, and the number of the corresponding positioning holes is four, and each positioning pin is inserted into the corresponding positioning hole.
Preferably, a rubber sleeve is fixed on the periphery of the positioning hole and sleeved on the outer side surface of the positioning pin.
Preferably, the number of the eccentric jacking mechanisms is three, and the eccentric jacking mechanisms are distributed on three edges of the fixed seat and used for jacking three corners of the movable platform.
Preferably, the rotation axis has a screw thread section, and the spiral shell closes in the screw thread section and is connected with a sliding seat, and this sliding seat is driven by the screw thread section and makes a round trip to move about along the axial of rotation axis, has three trigger piece on this sliding seat, and is provided with anodal limit sensor, origin sensor and the negative pole limit sensor of arranging in proper order along the rotation axis axial on the fixing base, and this three trigger piece activity is close to respectively or keeps away from corresponding sensor.
Preferably, the threaded section is located between the eccentric bearing and the servo motor.
Preferably, the fixed seat is provided with a slide rail, and the movable seat is slidably mounted on the slide rail and moves back and forth along the slide rail.
Preferably, the fixing base is provided with a mounting groove, and the positive limit sensor, the origin sensor and the negative limit sensor can be arranged in the mounting groove in a position-adjustable manner.
Compared with the prior art, the invention has obvious advantages and beneficial effects, and specifically, the technical scheme includes that:
through measuring the difference in height of calculating four angles of movable platform, convert and drive corresponding servo motor control eccentric bearing by the procedure and rotate to accomplish the levelness in the altitude mixture control reaches the standard, levelness correction automation back, the liberation manpower that can be very big practices thrift the human cost, reduces the maintenance time, also can avoid because of the various risks that human misoperation brought.
To more clearly illustrate the structural features and effects of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments:
drawings
FIG. 1 is an assembled perspective view of the preferred embodiment of the present invention;
FIG. 2 is an exploded view of the preferred embodiment of the present invention;
FIG. 3 is an enlarged view of the eccentric pressing mechanism according to the preferred embodiment of the present invention;
FIG. 4 is an enlarged view of the eccentric pressing mechanism of the preferred embodiment of the present invention from another angle;
FIG. 5 is a schematic diagram of the rotation of the eccentric bearing according to the preferred embodiment of the present invention.
The attached drawings indicate the following:
10. fixing seat 11, positioning hole
12. Rubber sleeve 13 and sliding rail
14. Mounting groove 20 and movable platform
21. Positioning pin 30, concentric bearing
40. Eccentric pressing mechanism 41 and rotating shaft
411. Threaded section 42, servo motor
43. Eccentric bearing 44, movable seat
441. Trigger piece 50, extension spring
61. Positive limit sensor 62 and origin sensor
63. Negative limit sensor
Detailed Description
Referring to fig. 1 to 5, a specific structure of a preferred embodiment of the present invention is shown, which includes a fixed base 10, a movable platform 20, a concentric bearing 30 and a plurality of eccentric pressing mechanisms 40.
The fixing base 10 is a square plate structure. The movable platform 20 is arranged above the fixed seat 10 in a levelness-adjustable manner, and a plurality of extension springs 50 are connected between the bottom of the movable platform 20 and the fixed seat 10; in this embodiment, the four extension springs 50 are distributed at the bottom of four corners of the movable platform 20, so as to maintain the stability of the movable platform 20 under stress; moreover, the fixed seat 10 is provided with positioning holes 11, the bottom surface of the movable platform 20 is fixed with positioning pins 21, the positioning pins 21 are inserted into the positioning holes 11, the positioning pins 21 are four and equally arranged along the periphery of the movable platform 20, the corresponding positioning holes 11 are also four, each positioning pin 21 is respectively inserted into the corresponding positioning hole 11, so as to fix the position of the movable platform 20, and a linear bearing (not shown) is arranged in each positioning hole 11, so that the positioning pins 21 do not generate friction when moving up and down; in addition, a rubber sleeve 12 is fixed on the periphery of the positioning hole 11, and the rubber sleeve 12 is sleeved on the outer side surface of the positioning pin 21, so that the positioning pin 21 of the movable platform 20 can incline with a certain margin during horizontal correction.
The concentric bearing 30 is rotatably disposed on the fixed base 10 and abuts against the bottom of a corner of the movable platform 20, and the concentric bearing 30 is a concentric shaft, i.e. a fixed shaft, whose height does not change with the rotation of the bearing.
The eccentric pressing mechanisms 40 are all arranged on the fixed seat 10 and are positioned at the lower side of the rest corners of the movable platform 20, each eccentric pressing mechanism 40 comprises a rotating shaft 41, a servo motor 42 and an eccentric bearing 43, the rotating shaft 41 is rotatably arranged on the fixed seat 10, the servo motor 42 is fixed on the fixed seat 10 and drives the rotating shaft 41 to rotate back and forth, the eccentric bearing 43 is fixed on the rotating shaft 42 and is driven to rotate by the rotating shaft 41, the eccentric bearing 43 is abutted against the bottom of the corresponding corner of the movable platform 20, the eccentric bearing 43 is an eccentric shaft, namely a variable shaft, the height can be changed along with the rotation taking the eccentric circle as the rotating shaft, the height change of the eccentric bearing 43 is the position change of the circle center of the bearing, the change range is related to the distance between the two circle centers of the eccentric bearing, and if the distance between the two circle centers of the eccentric bearing 43 is d, the sum of the adjustable lowest height to the highest height, when the two centers of the circle are in the zero degree horizontal line, the height of the eccentric bearing 43 is consistent with that of the concentric bearing, and when the two centers of the circle are in the 90 degree vertical line, the eccentric bearing 43 can be in the lowest or highest position.
In this embodiment, there are three eccentric pressing mechanisms 40, which are distributed on three edges of the fixed base 10 and press three corners of the movable platform 20.
The rotating shaft 41 is provided with a threaded section 411, the threaded section 411 is in threaded connection with a movable seat 44 in a screwed mode, the movable seat 44 is driven by the threaded section 411 to move back and forth along the axial direction of the rotating shaft 41, the movable seat 44 is provided with three triggering sheets 441, the fixed seat 10 is provided with a positive limit sensor 61, an origin sensor 62 and a negative limit sensor 63 which are sequentially arranged along the axial direction of the rotating shaft 41, the three triggering sheets 441 are respectively close to or far away from the corresponding sensors in a movable mode, and the positive limit sensor 61 is used for limiting when the servo motor 42 rotates forwards to reach the highest position of the eccentric bearing 43; when the two centers of the eccentric bearing 43 are at the zero-degree horizontal line, the height of the eccentric bearing 43 is the same as that of the concentric bearing 30, and the origin sensor 62 is used for enabling the four bearings to be at the same horizontal height when the origin of the servo motor 42 is reset; the negative limit sensor 63 is used for limiting when the servo motor 42 rotates reversely until the eccentric bearing 43 reaches the lowest position. In this embodiment, the threaded section 411 is located between the eccentric bearing 43 and the servo motor 42, the fixed seat 10 is provided with a slide rail 13, and the movable seat 44 is slidably mounted on the slide rail 13 to move back and forth along the slide rail 13; and the fixed seat 10 is provided with a mounting groove 14, and the positive limit sensor 61, the origin sensor 62 and the negative limit sensor 63 are all arranged in the mounting groove 14 in a position-adjustable manner.
Detailed description the working principle of the present embodiment is as follows:
when the device is used, a jig for fixing a substrate (product) can be arranged on the movable platform 20 of the device, the movable platform 20 can incline due to different self weights of the jig or installation methods of operators, and the levelness of the movable platform 20 needs to be corrected at the moment.
Before correction, the original positions of the servo motors 42 of the three eccentric jacking mechanisms 40 need to be reset, so that the concentric bearings 30 and the three eccentric bearings 43 are at the same height level, height data of four corners (corresponding to the positions of the four bearings) of the movable platform 20 are acquired, the data acquisition mode can adopt different modes according to different equipment requirements, an infrared distance measurement sensor can be arranged above the movable platform 20, or the height can be measured by using the servo motors, taking a mobile phone camera flip chip process as an example, the equipment measures the height of each point of the movable platform 20 by using the servo motors of the bond, and no specific requirement is made here. Among the bearings corresponding to the four corners of the movable platform 20, the concentric bearing 30 is not adjustable, the three eccentric bearings 43 are adjustable bearings, the height data of the four corners are respectively a, b, c and d, a corresponds to the concentric bearing 20, b, c and d correspond to the three eccentric bearings 43, the difference between the height corresponding to the three eccentric bearings 43 and the height corresponding to the concentric bearing 30 is calculated, namely the corresponding height of the eccentric bearing which needs to be adjusted, the difference between b and a is the height which needs to be adjusted by the first eccentric bearing, the difference between c and a is the height which needs to be adjusted by the second eccentric bearing, the difference between d and a is the height which needs to be adjusted by the third eccentric bearing, if b > a, it is assumed that the height of the second eccentric bearing is lower than that of the concentric bearing 30 and the height of the second eccentric bearing needs to be increased, so that the difference between the two values is positive, the corresponding servo motor 42 rotates forwards, and the eccentric bearing 43 needs to be heightened; the subtraction of the two values is negative, which means that the servo motor 42 is reversed and the eccentric bearing 43 needs to be lowered. After the horizontal adjustment of the movable platform 20 is completed, the heights of the four corners of the movable platform 20 are measured again, and if the height difference is smaller than the set standard range, it indicates that the horizontal degree correction of the movable platform 20 is completed. Taking the manufacturing process of the mobile phone camera flip chip as an example, the error of the levelness of the movable platform 20 needs to be less than 20 μm to meet the manufacturing process requirement, that is, the height difference measured by the movable platform 20 is less than 20 μm to indicate that the correction is completed.
The height difference of the eccentric bearing 43 needing to be adjusted needs to be converted into the pulse number output of the servo motor 42, the servo motor 42 rotates a pulse signal by a fixed angle, the precision of the servo motor 42 depends on the linear position number of the encoder, the linear position number of the encoder is set to be n, the number of pulses needed by the servo motor 42 when the servo motor 42 moves one circle (360 degrees) is n times of 2, namely 2^ n, and the number of pulses needed by the servo motor 42 when the servo motor moves 1 degree is 2^ n/360. Assuming that the number of pulses required for the servo motor 42 to rotate by an angle α is m, it is possible to obtain:
(1)m＝α*2^n/360；
assuming that the distance between two centers of the eccentric bearing 43 is d, the maximum range of the height variation of the eccentric bearing 43 is the diameter 2d of the circle with the radius d, and the relationship between the height variation h and the rotation angle α of the servo motor 42 is:
(2)h＝sin∠α*d；
using an inverse trigonometric function one can derive:
(3)∠α＝arcsin(h/d)；
from the above three relations, the relationship between the number of pulses m required for the rotation angle of the servo motor 42 and the change in the height h is:
(4)m＝arcsin(h/d)*2^n/360；
(5)h＝sin∠(360m/2^n)*d；
therefore, the relationship between the height variation and the servo motor 42 during the horizontal adjustment of the movable platform 20 can be directly defined in the program.
The design key points of the invention are as follows: through measuring the difference in height of calculating four angles of movable platform, convert and drive corresponding servo motor control eccentric bearing by the procedure and rotate to accomplish the levelness in the altitude mixture control reaches the standard, levelness correction automation back, the liberation manpower that can be very big practices thrift the human cost, reduces the maintenance time, also can avoid because of the various risks that human misoperation brought.
The technical principle of the present invention is described above in connection with specific embodiments. The description is made for the purpose of illustrating the principles of the invention and should not be construed in any way as limiting the scope of the invention. Based on the explanations herein, those skilled in the art will be able to conceive of other embodiments of the present invention without inventive effort, which would fall within the scope of the present invention.
Claims (10)
1. An apparatus for automatically correcting the levelness of a platform, comprising: comprises a fixed seat, a movable platform, a concentric bearing and a plurality of eccentric jacking mechanisms; the movable platform is arranged above the fixed seat in a levelness-adjustable manner, and a plurality of extension springs are connected between the bottom of the movable platform and the fixed seat; the concentric bearing is rotatably arranged on the fixed seat and is abutted against the bottom of one corner of the movable platform; the eccentric jacking mechanisms are arranged on the fixed seat and positioned beside the lower side of the rest corners of the movable platform, each eccentric jacking mechanism comprises a rotating shaft, a servo motor and an eccentric bearing, the rotating shaft is rotatably arranged on the fixed seat, the servo motor is fixed on the fixed seat and drives the rotating shaft to rotate back and forth, the eccentric bearings are fixed on the rotating shaft and driven by the rotating shaft to rotate, and the eccentric bearings abut against the bottoms of the corresponding corners of the movable platform.
2. An apparatus for automatically correcting the levelness of a platform according to claim 1, wherein: the number of the extension springs is four, and the extension springs are distributed at the bottoms of four corners of the movable platform.
3. An apparatus for automatically correcting the levelness of a platform according to claim 1, wherein: the fixed seat is provided with a positioning hole, and the bottom surface of the movable platform is fixed with a positioning pin which is inserted into the positioning hole.
4. An apparatus for automatically correcting the levelness of a platform according to claim 3, wherein: the positioning pins are four and are evenly distributed along the periphery of the movable platform, the number of the corresponding positioning holes is four, and each positioning pin is respectively inserted into the corresponding positioning hole.
5. An apparatus for automatically correcting the levelness of a platform according to claim 3, wherein: the periphery of the positioning hole is fixed with a rubber sleeve which is sleeved on the outer side surface of the positioning pin.
6. An apparatus for automatically correcting the levelness of a platform according to claim 1, wherein: the eccentric jacking mechanisms are three and are distributed on three edges of the fixed seat and used for jacking three corners of the movable platform.
7. An apparatus for automatically correcting the levelness of a platform according to claim 1, wherein: the rotation axis has a screw thread section, and the spiral shell is screwed on and is connected with a sliding seat, and this sliding seat is driven by the screw thread section and is made a round trip to move about along the axial of rotation axis, has three trigger piece on this sliding seat, and is provided with anodal limit sensor, origin sensor and the negative pole limit sensor of arranging in proper order along the rotation axis axial on the fixing base, and this three trigger piece activity is close to or keeps away from corresponding sensor respectively.
8. An apparatus for automatically correcting the levelness of a platform according to claim 7, wherein: the threaded section is located between the eccentric bearing and the servo motor.
9. An apparatus for automatically correcting the levelness of a platform according to claim 7, wherein: the fixed seat is provided with a slide rail, and the movable seat is slidably mounted on the slide rail and moves back and forth along the slide rail.
10. An apparatus for automatically correcting the levelness of a platform according to claim 7, wherein: the fixing seat is provided with a mounting groove, and the positive limit sensor, the origin sensor and the negative limit sensor can be arranged in the mounting groove in a position-adjustable mode.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021320314.7U CN212625498U (en) | 2020-07-08 | 2020-07-08 | Device for automatically correcting levelness of platform |
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| CN202021320314.7U CN212625498U (en) | 2020-07-08 | 2020-07-08 | Device for automatically correcting levelness of platform |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111640699A (en) * | 2020-07-08 | 2020-09-08 | 东莞高伟光学电子有限公司 | Device for automatically correcting levelness of platform |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111640699A (en) * | 2020-07-08 | 2020-09-08 | 东莞高伟光学电子有限公司 | Device for automatically correcting levelness of platform |
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