CN212621208U

CN212621208U - Contact probe for three-dimensional force probe sensor

Info

Publication number: CN212621208U
Application number: CN202021436757.2U
Authority: CN
Inventors: 郭晨晨; 汪升森; 张赟
Original assignee: Mingshi Innovation Yantai Micro Nano Sensor Technology Research Institute Co ltd
Current assignee: Mingshi Innovation Yantai Micro Nano Sensor Technology Research Institute Co ltd
Priority date: 2020-07-21
Filing date: 2020-07-21
Publication date: 2021-02-26
Anticipated expiration: 2030-07-21

Abstract

The utility model relates to a semiconductor device's test field, in particular to a contact probe for three-dimensional power probe sensor. The whole contact probe consists of a base, a probe rod, a transition round table between the base and the probe rod and a probe, wherein the base is a cylinder, stands on the surface of the sensor and is tightly connected with the surface of the sensor; the upper section of the base is gradually reduced to be in a round table shape, and the base, the probe rod and the transition round table are all made of titanium alloy; the probe is arranged at the top end of the probe rod and is used for being contacted with a measured object, and the probe is made of ruby, so that the probe is high in measurement precision, long in service life and enhanced in anti-interference capability.

Description

Contact probe for three-dimensional force probe sensor

Technical Field

The utility model relates to a semiconductor device's test field, in particular to a contact probe for three-dimensional power probe sensor.

Background

With the continuous development of Integrated Circuit (IC) silicon micromachining technology, MEMS (micro electro mechanical systems) pressure sensors are increasingly used, and the demand for measuring three-dimensional forces is also increasing. The MEMS piezoresistive three-dimensional force probe type contact sensor is used for measuring three-dimensional force, and requirements are provided for the precision of the contact probe. Therefore, a micro device and a structure for measuring three-dimensional force, which have high precision, large range, strong anti-interference capability and long service life, are the main research works. In the design, it is necessary to ensure that the force being measured is transmitted as completely as possible through the probe to the sensitive unit of the three-dimensional force probe sensor, and therefore the stiffness and rigidity requirements of the probe must be high to reduce deformation of the probe.

SUMMERY OF THE UTILITY MODEL

The utility model aims to overcome the defect and not enough that current MEMS three-dimensional force transducer contact probe exists, for this reason the utility model provides a contact probe for three-dimensional force transducer can improve and detect the precision, and increase of service life makes the detection range improve.

In order to achieve the above object, the present invention provides a contact probe for a three-dimensional force probe sensor, which includes: the probe comprises a base, a probe rod, a transition round table between the base and the probe rod and a probe, wherein the probe is arranged at the top end of the probe rod; the base, the transition round table and the probe rod are all made of titanium alloy; the material of probe is ruby.

Further, the base, the transition round platform and the probe rod are of an integrated structure, and the diameter of the base gradually decreases from top to bottom.

Further, the total length of the probe is 2.8 mm.

Further, the diameter of the base was 300 μm, and the length thereof was 1500 μm.

Further, the length of the probe rod is 1000 μm.

Further, the transition round table is conical, and the cone angle is 25 degrees.

Further, the probe is spherical.

Compared with the prior art, the beneficial effects of the utility model are that: by adopting titanium alloy, parts with high unit strength, good rigidity and light weight can be manufactured, the anti-interference capability of the probe is improved, and the processing is convenient; the top end of the probe rod is provided with the probe made of ruby, and the probe is spherical, so that the damage to a measured object is reduced, and the measurement precision is improved; the service life of the probe is prolonged integrally, and the use cost is saved.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is a view of the installation position of the present invention on the sensor.

Fig. 3 is a schematic view of the stress of the present invention.

Wherein: the device comprises a base 1, a transition round table 2, a probe rod 3, a probe 4, a sensor 5 and a cantilever beam 5.1.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1 to 3, the present invention provides a contact probe for a three-dimensional force probe sensor, which includes a base 1, a probe rod 3, a transition round table 2 between the base 1 and the probe rod 3, and a probe 4, wherein the probe 4 is disposed at the top end of the probe rod 3; the base 1, the transition round table 2 and the probe rod 3 are all made of titanium alloy; the probe 4 is made of ruby.

Preferably, the base 1, the transition round table 2 and the probe rod 3 are of an integrated structure, and the diameter of the base 1 gradually decreases upwards.

Preferably, the overall length of the probe is 2.8 mm.

Preferably, the base 1 has a diameter of 300 μm and a length of 1500 μm.

Preferably, the probe 3 has a length of 1000 μm.

Preferably, the transition circular truncated cone 2 is conical, and the cone angle is 25 degrees.

Preferably, the probe 4 is spherical.

More specifically, the utility model discloses an installation and use are: the utility model discloses a base 1 fixes in the centre of cantilever roof beam 5.1 on sensor 5, receives effort F when the probe contacts with the measured object, and effort F transmits sensor 5 through probe rod 3, transition round platform 2 and base 1 on, then arouses cantilever 5.1 on the sensor 5 to produce deformation, has piezo-resistor on the cantilever 5.1, and the resistance changes, accomplishes voltage output through the wheatstone electric bridge, surveys the size of effort, accomplishes with this the utility model discloses a use.

The present invention may be embodied in other specific forms without departing from its spirit or essential characteristics. Therefore, the above-described embodiments of the present invention should be considered only as illustrative and not restrictive in any way, the scope of the present invention being indicated by the claims, and any changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.

Claims

1. A contact probe for a three-dimensional force probe sensor is characterized by comprising a base (1), a probe rod (3), a transition round table (2) and a probe (4) which are arranged between the base (1) and the probe rod (3), wherein the probe (4) is arranged at the top end of the probe rod (3); the base (1), the transition round table (2) and the probe rod (3) are all made of titanium alloy; the probe (4) is made of ruby.

2. The contact probe for a three-dimensional force probe sensor according to claim 1, characterized in that the base (1), the transition round table (2) and the probe rod (3) are of an integrated structure and taper in diameter from the base (1) upwards.

3. The contact probe for a three-dimensional force probe sensor of claim 1, wherein the overall probe length is 2.8 mm.

4. The contact probe for a three-dimensional force probe sensor according to claim 3, characterized in that the base (1) has a diameter of 300 μm and a length of 1500 μm.

5. The contact probe for a three-dimensional force probe sensor according to claim 4, characterized in that the length of the probe rod (3) is 1000 μm.

6. The contact probe for a three-dimensional force probe sensor according to claim 1, characterized in that the transition round table (2) is conical with a cone angle of 25 °.

7. The contact probe for a three-dimensional force probe sensor according to claim 1, characterized in that the probe head (4) is spherical.