CN202057438U - Integrated strain gauge type double-freedom microload detection device - Google Patents

Integrated strain gauge type double-freedom microload detection device Download PDF

Info

Publication number
CN202057438U
CN202057438U CN2011201158245U CN201120115824U CN202057438U CN 202057438 U CN202057438 U CN 202057438U CN 2011201158245 U CN2011201158245 U CN 2011201158245U CN 201120115824 U CN201120115824 U CN 201120115824U CN 202057438 U CN202057438 U CN 202057438U
Authority
CN
China
Prior art keywords
freedom
foil gauge
compliant mechanism
microload
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN2011201158245U
Other languages
Chinese (zh)
Inventor
赵宏伟
黄虎
杨洁
万顺光
米杰
袁英堃
马志超
王小月
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jilin University
Original Assignee
Jilin University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jilin University filed Critical Jilin University
Priority to CN2011201158245U priority Critical patent/CN202057438U/en
Application granted granted Critical
Publication of CN202057438U publication Critical patent/CN202057438U/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Measurement Of Force In General (AREA)

Abstract

The utility model relates to an integrated strain gauge type double-freedom microload detection device which belongs to the electromechanical field. The integrated strain gauge type double-freedom microload detection device comprises a flexible mechanism (1) and strain gauges (2) to (9); the flexible mechanism (1) is a base body of the device, and a connection hole (12) is arranged on the flexible mechanism (1); the flexible mechanism (1) is provided with a left sheet and a right sheet (10) and a middle sheet (11); the strain gauges (2), (3), (8) and (9) are respectively adhered onto the opposite inner sides of the two ends of the left and right sheets (10) and are sequentially connected in series through a lead to form a bridge; and the strain gauges (4), (5), (6) and (7) are respectively adhered onto the opposite outer sides of the middle part of the middle sheet (11) of the flexible mechanism (1) and are sequentially connected in series through a lead to form a bridge. The integrated strain gauge type double-freedom microload detection device has the advantages that the loads of double freedoms can be simultaneously detected; and different magnitude test resolutions can be detected. The integrated strain gauge type double-freedom microload detection device has the characteristics of milli-newton level test resolution, high sensitivity, low cost and the like and can be widely applied to the scratch test field and other relevant tribological test fields.

Description

Integrated strain chip two-freedom tiny load pick-up unit
Technical field
The utility model relates to electrical category, particularly a kind of integrated strain chip two-freedom tiny load pick-up unit.The present invention can realize the detection of two-freedom tiny load, has a good application prospect in fields such as Mechanics Performance Testing, tribology.
Background technology
In recent years, along with the development of nanometer mechanics measuring technology, ultraprecise processing and detection technique, detection has proposed requirement to the multiple degrees of freedom tiny load.Though traditional tiny load pick-up unit has high measuring resolution, generally can only test folk prescription to load, and price is also relatively more expensive.Independent measurement is generally taked in measurement for multiaxis loading, does algorithm then and integrates, and is difficult to guarantee the synchronism of testing like this, and also can produces bigger error in integration process.In the micro nanometer mechanics measuring technology, particularly in the cut test, the synchronous detection of axial force and transverse force also is a science difficult problem always in addition.
Summary of the invention
The purpose of this utility model is to provide a kind of integrated strain chip two-freedom tiny load pick-up unit, solved traditional tiny load pick-up unit and can only test folk prescription to load, and price is also relatively more expensive; Independent measurement is generally taked in the measurement of multiaxis loading, does algorithm then and integrates, and is difficult to guarantee the synchronism of testing like this, and also can produces bigger problems such as error in integration process.The utility model proposes a kind of integrated strain chip two-freedom tiny load pick-up unit, this device can detect axial force and transverse force simultaneously, novel structure, compactness, can reach the above measuring resolution of milli ox level, and with low cost, can be widely used in the field of relevant tribology testers such as cut test.Have a good application prospect in fields such as ultraprecise processing and equipment, Mechanics Performance Testing, Aero-Space, tiny load detection, precision measurement, tribology.
The new above-mentioned purpose of this practicality is achieved through the following technical solutions:
Integrated strain chip two-freedom tiny load pick-up unit, its structure comprises compliant mechanism 1, foil gauge 2~9, left and right sides thin plate 10, middle thin plate 11 and connecting hole 12, wherein, compliant mechanism 1 is the matrix of device, which is provided with connecting hole 12 and be connected with other devices, this compliant mechanism 1 is provided with left and right sides thin plate 10 and middle thin plate 11; Foil gauge 2,3,8,9 is bonded in the both sides of the left and right sides thin plate 10 of compliant mechanism 1 respectively, and is connected in series the formation electric bridge in regular turn by lead; Foil gauge 4,5,6,7 is adhered to the both sides up and down of the middle thin plate 11 of compliant mechanism 1 respectively, and is connected in series the formation electric bridge in regular turn by lead.During use, compliant mechanism 1 is connected on other devices by the connecting hole on it 12.When loading during in compliant mechanism 1, compliant mechanism 1 produces elastic deformation, the foil gauge 2~9 that is bonded on the compliant mechanism 1 produces corresponding strain, pressure drag characteristic according to foil gauge, foil gauge 2~9 variation that will have a resistance, convert change in resistance to voltage through electric bridge again, devices such as application A/D card obtain the electric signal that can gather to Signal Processing.By the electric signal of gathering, can realize the detection of tiny load.
The foil gauge group that foil gauge group that described foil gauge 2,3,8,9 constitutes and foil gauge 4~7 constitute has independence respectively when load test.When compliant mechanism 1 bears axial load, detect the strain of foil gauge 2,3,8,9.When compliant mechanism 1 bears transverse load, detect the strain of foil gauge 4~7.Foil gauge 2~9 produces strain under loading, strain causes its resistance variations, convert change in resistance to voltage through electric bridge again, the changes in resistance amount is subjected to the big or small closely related of extraneous loading power with it, utilize this relation can realize detection to two-freedom loading force signal by the changes in resistance amount of testing its generation.Compliant mechanism 1 has following design feature: can axially and under horizontal little load condition produce elastic deformation, and then cause that the foil gauge 2~9 with its adhesion produces distortion; This compliant mechanism 1 can be realized axial and horizontal two-freedom milli ox level load is detected simultaneously.
The beneficial effects of the utility model are: can detect the load of two-freedom simultaneously, because the pressure drag characteristic of foil gauge can detect the small load of milli ox level; Thereby measure the tiny load of two-freedom.By dissimilar foil gauges, the compliant mechanism of different structure size detects different magnitude measuring resolutions simultaneously.Have milli ox level measuring resolution, high sensitivity, characteristics such as cheap, can be widely used in the field of relevant tribology testers such as cut test.
Description of drawings
Fig. 1 is a structural representation of the present utility model;
Fig. 2 is the structural representation of compliant mechanism of the present utility model;
Fig. 3 is a bridge diagram structural representation of the present utility model;
Fig. 4, Fig. 5 are workpiece deformation embodiment synoptic diagram under the load condition of the present utility model.
Embodiment
Embodiment
Referring to Fig. 1 to Fig. 3, integrated strain chip two-freedom tiny load pick-up unit of the present utility model, its structure comprises compliant mechanism 1, foil gauge 2~9, left and right sides thin plate 10, middle thin plate 11 and connecting hole 12, wherein, compliant mechanism 1 is the matrix of device, which is provided with connecting hole 12 and be connected with other devices, this compliant mechanism 1 is provided with left and right sides thin plate 10 and middle thin plate 11; Foil gauge 2,3,8,9 is bonded in the both sides of the left and right sides thin plate 10 of compliant mechanism 1 respectively, and is connected in series the formation electric bridge in regular turn by lead; Foil gauge 4,5,6,7 is adhered to the both sides up and down of the middle thin plate 11 of compliant mechanism 1 respectively, and is connected in series the formation electric bridge in regular turn by lead.During use, compliant mechanism 1 is connected on other devices by the connecting hole on it 12.When loading during in compliant mechanism 1, compliant mechanism 1 produces elastic deformation, the foil gauge 2~9 that is bonded on the compliant mechanism 1 produces corresponding strain, pressure drag characteristic according to foil gauge, foil gauge 2~9 variation that will have a resistance, convert change in resistance to voltage through electric bridge again, devices such as application A/D card obtain the electric signal that can gather to Signal Processing.By the electric signal of gathering, can realize the detection of tiny load.
The course of work of the present utility model is as follows:
Referring to Fig. 3 to Fig. 5, original state: do not have loading when compliant mechanism 1, system is in free state.When axial load F acts on compliant mechanism 1, compliant mechanism 1 produces elastic deformation under loading, the foil gauge 2,3,8,9 that is bonded on the compliant mechanism 1 produces corresponding strain, pressure drag characteristic according to foil gauge, foil gauge 2,3,8,9 variation that will have a resistance, convert change in resistance to voltage through electric bridge again, devices such as application A/D card obtain the electric signal that can gather to Signal Processing.By the electric signal of gathering, can realize the detection of axial tiny load.Together should be laterally when load F acts on compliant mechanism 1, compliant mechanism 1 produces elastic deformation under loading, the foil gauge 4~7 that sticks on the compliant mechanism 1 produces corresponding strain and causes its resistance variations, pressure drag characteristic according to foil gauge, foil gauge 4~7 variation that will have a resistance, convert change in resistance to voltage through electric bridge again, devices such as application A/D card obtain the electric signal that can gather to Signal Processing.By the electric signal of gathering, can realize the detection of horizontal tiny load.The utility model mainly is a tiny load of measuring two-freedom by the characteristics of compliant mechanism 1 structure.When unloading load, there is not loading in compliant mechanism 1, compliant mechanism 1 distortion returns to original state, and foil gauge also returns to original state.Compliant mechanism 1 and foil gauge 2~9 are interchangeable elements, require to be replaced by the dissimilar foil gauges and the compliant mechanism of different size respectively according to specific load, can realize the detection to the measuring resolution of different magnitudes.
When loading direction not simultaneously, compliant mechanism 1 deformation place is also different, the distortion of different parts produces differently strained, thereby detects the power of different directions.When axial load F acts on compliant mechanism 1, compliant mechanism 1 mechanically deform under loading, the foil gauge 2,3,8,9 that is bonded on the compliant mechanism 1 produces corresponding strain, as shown in Figure 4; Together should be laterally when load F act on compliant mechanism 1, compliant mechanism 1 mechanically deform under loading, the foil gauge 4~7 that is bonded on the compliant mechanism 1 produces corresponding strain, as shown in Figure 5; The mechanism of its piezoresistive effect is: be meant when foil gauge is subjected to stress, because the variation of carrier mobility changes its resistivity.Under external force, the elastic body mechanically deform is bonded in foil gauge on the elastic body and produces corresponding strain and cause its resistance variations, converts change in resistance to voltage or electric current output through electric bridge again.
Carrying out axial tiny load when detecting, load F acts on compliant mechanism, and the metal strain plate that adheres to body surface produces distortion, causes resistance variations by strain.Do not consider the influence of electric capacity and inductance, form direct current bridge by pure resistance, as shown in Figure 3, AC two termination supply voltage E, arm resistance is R 1, R 2, R 3And R 4, the BD two ends extrude end Δ U for transmission of electricity.

Claims (2)

1. integrated strain chip two-freedom tiny load pick-up unit, it is characterized in that: structure comprises compliant mechanism (1) and foil gauge (2 ~ 9), this compliant mechanism (1) is the matrix of device, which is provided with connecting hole (12), this compliant mechanism (1) is provided with left and right sides thin plate (10) and middle thin plate (11); Foil gauge (2,3,8,9) is bonded in the two ends relative inner of the left and right sides thin plate (10) of compliant mechanism (1) respectively, and is connected in series the formation electric bridge in regular turn by lead; Foil gauge (4,5,6,7) is adhered to the relative outside, middle part of the middle thin plate (11) of compliant mechanism (1) respectively, and is connected in series the formation electric bridge in regular turn by lead.
2. a kind of integrated strain chip two-freedom tiny load pick-up unit according to claim 1 is characterized in that: the foil gauge group that foil gauge group that described foil gauge (2,3,8,9) constitutes and foil gauge (4 ~ 7) constitute has independence respectively when load test.
CN2011201158245U 2011-04-19 2011-04-19 Integrated strain gauge type double-freedom microload detection device Expired - Lifetime CN202057438U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011201158245U CN202057438U (en) 2011-04-19 2011-04-19 Integrated strain gauge type double-freedom microload detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011201158245U CN202057438U (en) 2011-04-19 2011-04-19 Integrated strain gauge type double-freedom microload detection device

Publications (1)

Publication Number Publication Date
CN202057438U true CN202057438U (en) 2011-11-30

Family

ID=45017409

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011201158245U Expired - Lifetime CN202057438U (en) 2011-04-19 2011-04-19 Integrated strain gauge type double-freedom microload detection device

Country Status (1)

Country Link
CN (1) CN202057438U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102706224A (en) * 2012-05-23 2012-10-03 西安近代化学研究所 Friction load loading device
CN113138162A (en) * 2021-06-22 2021-07-20 南京高华科技股份有限公司 Steel wire rope state monitoring device and monitoring method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102706224A (en) * 2012-05-23 2012-10-03 西安近代化学研究所 Friction load loading device
CN113138162A (en) * 2021-06-22 2021-07-20 南京高华科技股份有限公司 Steel wire rope state monitoring device and monitoring method

Similar Documents

Publication Publication Date Title
CN110374857B (en) Oil pressure and air pressure monitoring device and method for diaphragm compressor
CN109974919B (en) Six-dimensional force sensing device
CN103592062B (en) A kind of axial pretightening force snesor
CN101226121B (en) Precision charger for material nano metric bending mechanical properties test
CN103575446B (en) A kind of Medium-measurement-rthree-dimensional three-dimensional force sensor
CN103983383B (en) A kind of sensitive element of the 3 dimension Micro-force sensors based on compliant mechanism
CN101603865B (en) Attached type force-measuring sensor
CN101907502B (en) Parallel-connection three-dimensional force sensor with decoupling structure
CN103575435B (en) For the three-dimensional force sensor of automobile axle test macro
CN101532817A (en) Resistance strain gauge and sensor using resistance strain gauge to change stress transfer mode
CN105527015A (en) Flexible structure resonant frequency visualized detection system and method
CN202057438U (en) Integrated strain gauge type double-freedom microload detection device
CN204241151U (en) Compact steel wire tension sensor
CN205175586U (en) Commercial car distance rod axial force testing arrangement
CN108709490B (en) Strain sensor, method for obtaining high sensitivity using the same, and measuring device
CN201173754Y (en) Precision electronic feeler gage
CN203519229U (en) Quartz piezoelectric six-dimensional force detecting device
CN207556748U (en) Tension compression bidirectional tests force standard machines
CN101975631B (en) Integrated form five ties up micro-power/torque sensor
CN103921171B (en) A kind of wide range piezoresistance type high-frequency rings fixed four component Milling Force sensors
CN102353483A (en) Device for detecting three-dimensional micro mechanical signal
CN103017948A (en) Piezoresistive type pressure sensor
CN201803816U (en) Combined transducer force-measuring device
CN203163840U (en) High precision column type weighing sensor
CN102998038B (en) A kind of space three-dimensional high-accuracy mechanical type micro force sensor

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CX01 Expiry of patent term

Granted publication date: 20111130

CX01 Expiry of patent term