CN115683407B - Force-sensitive core and pressure sensor - Google Patents
Force-sensitive core and pressure sensor Download PDFInfo
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- CN115683407B CN115683407B CN202211472524.1A CN202211472524A CN115683407B CN 115683407 B CN115683407 B CN 115683407B CN 202211472524 A CN202211472524 A CN 202211472524A CN 115683407 B CN115683407 B CN 115683407B
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Abstract
The application relates to a force sensitive core comprising: the elastic body, the stopper, and signal switching circuit board, the centre of elastomer is provided with the through-hole, the both sides limit of elastomer is fixed respectively and is provided with the stopper, adopt the mode of nanoscale film sputtering to be provided with 4 at least strain resistor on the elastomer, 4 at least strain resistor set up around the through-hole, signal switching circuit board is fixed to be set up on the elastomer, the strain resistor is connected, be used for turning into the signal of telecommunication with the mechanical signal of the elastic strain that strain resistor received, send conditioning circuit, because strain resistor sets up on the elastomer through the mode of nanoscale film sputtering, strain resistor is difficult for droing, the height Wen Wenpiao is little, and strain resistor sets up the biggest position of deflection on the elastomer around the through-hole, can improve strain resistor's sensitivity effectively, thereby the long-term stability and the measurement accuracy of force-sensitive core have been improved notably.
Description
Technical Field
The application belongs to the technical field of sensors, and particularly relates to a force-sensitive core and a pressure sensor.
Background
A pressure sensor is a device that converts a measured physical pressure signal into an electrical signal that is convenient for testing and outputs it in the form of a certain voltage or current.
The shaft pin type sensor in the pressure sensor is mainly used for measuring shearing bending stress, the traditional shaft pin type sensor is characterized in that a groove is directly formed in an elastic shaft, a hole is formed in the radial direction of the position of the groove, a resistance strain gauge is stuck in the hole of the position of the groove by using glue, the resistance strain gauge forms a Wheatstone bridge to detect a force value, but due to the defects of poor stability, large drifting, easy aging of glue, easy falling of the resistance strain gauge, difficult sticking and the like of the sticking technology, and the rigidity and overload capacity of the shaft are poor, so that the shaft pin type sensor has the problems of poor long-term stability and low precision.
Therefore, how to improve the long-term stability and measurement accuracy of the pressure sensor is a technical problem to be solved by those skilled in the art.
Disclosure of Invention
A first object of the present application is to provide a force sensitive core; a second object of the present application is to improve a pressure sensor comprising a force sensitive core as described above; the force-sensitive core and the pressure sensor can improve long-term stability and measurement accuracy.
The technical scheme provided by the application is as follows:
a force sensitive core comprising: the elastic body, the limiting block and the signal switching circuit board;
a through hole is formed in the middle of the elastic body, and limiting blocks are fixedly arranged on two side edges of the elastic body respectively;
at least 4 strain resistors are arranged on the elastic body in a nanoscale film sputtering mode, and at least 4 strain resistors are arranged around the through hole;
the signal switching circuit board is fixedly arranged on the elastic body and connected with the strain resistor, and is used for converting the mechanical signal of elastic strain received by the strain resistor into an electric signal and sending the electric signal to the conditioning circuit.
Preferably, the elastic body is made of stainless steel or alloy steel materials with high elastic modulus.
Preferably, the elastic body is connected with the signal transfer circuit board through double-gold wire ball welding.
Preferably, the limiting block is provided with a wire passing hole.
Preferably, the signal switching circuit board is fixedly arranged on the elastic body through a screw.
Preferably, the other two sides of the elastic body are respectively provided with a step, and the steps are in interference fit with the inner wall of the body of the pressure sensor.
The present application also provides a pressure sensor comprising: a body, at least two force sensitive cores of any of the above;
the body comprises a stress section in the middle and support sections at two ends, and a shaft shoulder groove is formed between the stress section and the support sections;
the inside of the body is provided with a through accommodating channel, and the accommodating channel comprises a wire passing cavity in the middle and mounting cavities at two ends;
the mounting cavity and the shaft shoulder groove are correspondingly arranged, and at least two force-sensitive cores are symmetrically nested in the mounting cavity respectively;
the signal switching circuit boards of the at least two force-sensitive cores are connected, so that strain resistors connected with the signal switching circuit boards form a bridge circuit;
the bridge circuit is used for converting the mechanical signal of elastic strain received by the strain resistor into an electric signal and sending the electric signal to the conditioning circuit.
Preferably, the method comprises the steps of,
the first end of the accommodating channel is provided with a signal processing component;
the conditioning circuit is arranged in the signal processing component and is used for converting the received electric signals into various signals to be output, wherein the various signals comprise analog signals or digital signals.
Preferably, the method comprises the steps of,
the second end of the accommodating channel is provided with a sealing cover, and the outer side of the sealing cover is in threaded connection with the inner wall of the body;
the sealing cover is abutted with at least one force-sensitive core body;
the outer side of one end of the signal processing component is in threaded connection with the inner wall of the body;
the other force-sensitive core body is abutted with the threaded surface of the signal processing component.
Preferably, the method comprises the steps of,
sealing rings are respectively arranged on the sealing cover and the signal processing assembly.
Compared with the prior art, the power sensitive core that this application provided includes: the elastic body, the limiting block and the signal switching circuit board are fixedly provided with a through hole in the middle of the elastic body, the limiting blocks are fixedly arranged on two side edges of the elastic body respectively, at least 4 strain resistors are arranged on the elastic body in a nanoscale film sputtering mode, at least 4 strain resistors are arranged around the through hole, the signal switching circuit board is fixedly arranged on the elastic body and connected with the strain resistors and is used for converting mechanical signals of elastic strain received by the strain resistors into electric signals and sending the electric signals to the conditioning circuit, and the strain resistors are arranged on the elastic body in a nanoscale film sputtering mode, are not easy to fall off and are small in size Wen Wenpiao, are arranged around the through hole and are arranged around the through hole at the position with the largest deformation on the elastic body, so that the sensitivity of the strain resistors can be effectively improved, and the long-term stability and the measurement accuracy of the force-sensitive core are remarkably improved; and the individual force sensitive cores can be mass produced as universal components.
Compared with the prior art, the pressure sensor comprising the at least two force-sensitive cores improves long-term stability and measurement accuracy, and because the at least two force-sensitive cores are arranged at two ends in the body, bending moment forces in opposite directions transmitted by the body are measured through the at least two force-sensitive cores, unbalanced loading of the stressed position can be effectively prevented, and the stressed condition of the shaft body can be accurately measured through the bridge circuit formed by the strain resistors on the at least two force-sensitive cores, so that the measurement accuracy of the pressure sensor is further improved.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic structural view of a force sensitive core disclosed in an embodiment of the present application;
FIG. 2 is another schematic structural view of a force sensitive core disclosed in an embodiment of the present application;
FIG. 3 is a circuit diagram of a Wheatstone bridge composed of strain resistors of a force sensitive core disclosed in an embodiment of the present application;
FIG. 4 is a schematic diagram of the deformation of an elastomer under force disclosed in the examples of the present application;
FIG. 5 is a schematic diagram of the location of a strain resistor of an elastomer as disclosed in embodiments herein;
FIG. 6 is a schematic structural diagram of a pressure sensor according to an embodiment of the present disclosure;
FIG. 7 is a cross-sectional view A-A of FIG. 6;
FIG. 8 is a circuit diagram of a bridge circuit formed by strain resistors of two force sensitive cores of a pressure sensor disclosed in an embodiment of the present application;
reference numerals: 100-force sensitive core; 200-body; 300-a signal processing component; 400-sealing cover; 500-sealing rings;
100-force sensitive core; 110-an elastomer; 120-limiting blocks; 130-a signal transfer circuit board;
111-through holes; 112-steps; 121-a wire via; 131-a screw;
1101-first quadrant; 1102-second quadrant; 1103-third quadrant; 1104-fourth quadrant;
200-body; 210-a stress section; 220-a support section; 230-shoulder groove; 240-receiving channels;
241-wire lumen; 242-mounting cavity.
Detailed Description
In order to better understand the technical solutions in the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below, and it is obvious that the described embodiments are only some embodiments of the present application, not all embodiments. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.
It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or be indirectly on the other element; the method comprises the steps of carrying out a first treatment on the surface of the When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate or are based on the orientation or positional relationship shown in the drawings, merely to facilitate description of the present application and simplify description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be configured and operated in a particular orientation, and therefore should not be construed as limiting the present application.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present application, the meaning of "a plurality" or "a number" is two or more, unless explicitly defined otherwise.
It should be understood that the structures, proportions, sizes, etc. shown in the drawings are for illustration purposes only and should not be construed as limiting the scope of the present disclosure, since any structural modifications, proportional changes, or dimensional adjustments made by those skilled in the art should not be made in the present disclosure without affecting the efficacy or achievement of the present disclosure.
As shown in fig. 1 and 2, an embodiment of the present application provides a force sensitive core 100, comprising: elastomer 110, stopper 120, and signal transfer circuit board 130; a through hole 111 is formed in the middle of the elastic body 110, and limiting blocks 120 are fixedly arranged on two side edges of the elastic body 110 respectively; at least 4 strain resistors are arranged on the elastic body 110 in a nano-scale film sputtering mode, and at least 4 strain resistors are arranged around the through hole 111; the signal switching circuit board 130 is fixedly arranged on the elastic body 110 and connected with the strain resistor, and is used for converting the mechanical signal of elastic strain received by the strain resistor into an electric signal and sending the electric signal to the conditioning circuit.
In this embodiment, the conditioning circuit is not shown in the drawing, the force sensitive core is simply called as the pressure sensitive core, the through hole 111 is preferably a round hole, and the strain of the resistor of the equal-sized open circle Kong Yingbian is larger.
As shown in fig. 1, 3 and 4, in this embodiment, preferably, at least 4 strain resistors are 4 strain resistors, the 4 strain resistors are electrically connected to form a wheatstone bridge, the 4 strain resistors are a first strain resistor R1, a second strain resistor R2, a third strain resistor R3 and a fourth strain resistor R4, respectively, wherein a first end of the first strain resistor R1 is connected to a first end of the second strain resistor R2, a second end of the second strain resistor R2 is connected to a first end of the third strain resistor R3, a second end of the third strain resistor R3 is connected to a first end of the fourth strain resistor R4, and a second end of the fourth strain resistor R4 is connected to a second end of the first strain resistor R1; in the working process, the limiting block 120 at one end (end B) of the force-sensitive core 100 is fixed, when the limiting block 120 at the other end (end C) receives bending moment force, the bending moment force is transmitted to the elastic body 110 in time, after the elastic body 110 receives the shearing bending moment force, a round hole in the middle of the elastic body 110 is deformed, the round hole is changed into an ellipse from a perfect circle, 4 strain resistors arranged around the round hole are deformed, a group of opposite angles of the strain resistors are stretched, the other group of the strain resistors are compressed, the resistance values of the 4 strain resistors are changed, and when the first end of the first strain resistor R1 and the second end of the third strain resistor R3 are connected with stable direct current voltage signals (V+ and V-), the electric signals (S+ and S-) output by the second end of the second strain resistor R2 and the second end of the fourth strain resistor R4 are correspondingly changed, and the mechanical signals of the elastic strain received by the strain resistors are converted into electric signals, so that the stress of the limiting block 120 is measured.
Compared to the prior art, the force sensitive core 100 provided herein comprises: the elastic body 110, the limiting block 120 and the signal switching circuit board 130 are provided with a through hole 111 in the middle of the elastic body 110, the limiting block 120 is fixedly arranged on two side edges of the elastic body 110 respectively, at least 4 strain resistors are arranged on the elastic body 110 in a nanoscale film sputtering mode, at least 4 strain resistors are arranged around the through hole 111, the signal switching circuit board 130 is fixedly arranged on the elastic body 110 and connected with the strain resistors, and is used for converting mechanical signals of elastic strain received by the strain resistors into electric signals and sending the electric signals to the conditioning circuit; and the individual force sensitive cores 100 can be mass produced as universal components.
In this embodiment, the elastic body 110 and the stopper 120 may be directly manufactured into a whole by laser welding, and the stopper 120 is in interference fit with the inner wall of the body 200 of the pressure sensor, and the stopper 120 has the functions of assembly guiding and transmitting. The elastic body 110 has a sheet shape, and can improve the measurement accuracy of the force-sensitive core 100.
As shown in fig. 5, in this embodiment, the strain resistor is disposed around the through hole 111 at the position with the largest deformation amount on the elastomer 110, specifically, the first strain resistor R1 is disposed at the-67 degree angle position of the second quadrant 1102 on the elastomer 110, the second strain resistor R2 is disposed at the 45 degree angle position of the first quadrant 1101 on the elastomer 110, the third strain resistor R3 is disposed at the-70 degree angle position of the fourth quadrant 1104 on the elastomer 110, and the fourth strain resistor R4 is disposed at the 40 degree angle position of the third quadrant 1103 on the elastomer 110, so that the sensitivity of the strain resistor is higher and the measurement accuracy is better.
In one embodiment, the elastic body 110 is made of stainless steel or alloy steel having a high elastic modulus. The rigidity overload capability of the elastic body 110 can be made good.
As one embodiment, the elastomer 110 and the signal-switching circuit board 130 are bonded by a double-wire ball bond. The connection between the elastic body 110 and the signal switching circuit board 130 is stable and reliable, and the signal output by the strain resistor on the elastic body 110 is accurate and undistorted.
In this embodiment, the elastic body 110 and the signal switching circuit board 130 may be connected by a double aluminum wire ball bonding or a double silver wire ball bonding, and may be connected by other conductive materials.
As shown in fig. 2, as an embodiment, the stopper 120 is provided with a wire passing hole 121. The signal output wire can pass through the wire through holes 121 as required, so that the wires are ensured to be orderly and conveniently identified by tracing.
As shown in fig. 1 and 2, as an embodiment, the signal transfer circuit board 130 is fixedly disposed on the elastic body 110 by a screw 131. The signal transfer circuit board 130 is fixed on the elastic body 110 by the screw 131, so that the signal transfer circuit board 130 is convenient to detach from the elastic body 110 when the signal transfer circuit board 130 fails.
As shown in fig. 1 and 2, as an embodiment, the other two sides of the elastic body 110 are respectively provided with steps 112, and the steps 112 are interference fit with the inner wall of the body 200 of the pressure sensor. The step 112 has the function of guiding and ensuring the consistent direction of force.
As shown in fig. 6 and 7, the present application further provides a pressure sensor, including: a body 200, at least two force sensitive cores 100 of any of the above; the body 200 comprises a stress section 210 in the middle and support sections 220 at two ends, and a shaft shoulder groove 230 is formed between the stress section 210 and the support sections 220; the body 200 is internally provided with a through accommodating channel 240, and the accommodating channel 240 comprises a wire passing cavity 241 in the middle and mounting cavities 242 at two ends; the mounting cavity 242 and the shoulder groove 230 are correspondingly arranged, and at least two force-sensitive cores 100 are symmetrically nested in the mounting cavity 242 respectively; the signal transfer circuit boards 130 of the at least two force sensitive cores 100 are connected such that the strain resistors connected to the signal transfer circuit boards 130 form a bridge circuit; the bridge circuit is used for converting the mechanical signal of elastic strain received by the strain resistor into an electric signal and sending the electric signal to the conditioning circuit.
In this embodiment, the shape of the shoulder groove may be rectangular, trapezoidal, polygonal, annular or various special shapes, the conditioning circuit is not shown in the drawing, the through hole 111 is preferably a round hole, and the strain of the resistor of the equal-sized open circle Kong Yingbian is larger.
As shown in fig. 6 and 8, in this embodiment, it is preferable that at least two force sensitive cores are two force sensitive cores, and the two force sensitive cores 100 are a first force sensitive core and a second force sensitive core, the first force sensitive core includes a first strain resistor R1, a second strain resistor R2, a third strain resistor R3 and a fourth strain resistor R4, the second force sensitive core includes a fifth strain resistor R5, a sixth strain resistor R6, a seventh strain resistor R7 and an eighth strain resistor R8, wherein a first end of the first strain resistor R1 is connected to a first end of the second strain resistor R2, a second end of the second strain resistor R2 is connected to a first end of the seventh strain resistor R7, a second end of the seventh strain resistor R7 is connected to a first end of the sixth strain resistor R6, a second end of the third strain resistor R3 is connected to a first end of the third strain resistor R3, a second end of the third strain resistor R3 is connected to a first end of the fourth strain resistor R4, a second end of the fourth strain resistor R4 is connected to a second end of the fifth strain resistor R5, and a first end of the fourth strain resistor R4 is connected to a first end of the fourth strain resistor R8. In the working process, when the upper end (D end) of the stress section 210 of the body 200 is pressed, since the lower ends (E end and F end) of the supporting sections 220 at the two ends of the body 200 are fixed, the body 200 is subjected to a shearing bending moment force, the two force sensitive cores 100 in the body 200 timely transmit the bending moment force in opposite directions transmitted by the body 200 to the elastic body 110 of the force sensitive core 100, the round hole in the middle of the force sensitive core 100 is deformed, the round hole is changed from a perfect circle to an ellipse, 4 strain resistors arranged around the round hole are deformed, one set of strain resistors at opposite angles is stretched, the other set of strain resistors is compressed, the resistance values of the 4 strain resistors are changed, the first end of the first strain resistor R1 and the second end of the third strain resistor R3 are connected with stable direct current voltage signals (v+ and V-), and the electrical signals (s+ and S-) output by the first end of the sixth strain resistor R6 and the first end of the eighth strain resistor R8 are correspondingly changed, so that the stress of the body 200 is measured.
The bridge circuits may be combined in other serial or parallel modes according to different requirements of use scenes, and are not limited to the above bridge combination mode.
Compared with the prior art, the pressure sensor comprising the at least two force-sensitive cores 100 improves long-term stability and measurement accuracy, and because the at least two force-sensitive cores 100 are arranged at two ends in the body 200, bending moment forces in opposite directions transmitted by the body 200 are measured through the at least two force-sensitive cores 100, the condition of unbalanced load at a stressed position can be effectively prevented, and the stressed condition of the shaft body 200 can be accurately measured through a bridge circuit formed by strain resistors on the at least two force-sensitive cores 100, so that the measurement accuracy of the pressure sensor is further improved.
In this embodiment, the body 200 of the pressure sensor is made of stainless steel or alloy steel, and the through accommodating channel 240 is formed in the body 200 to mount the force-sensitive core 100, so that the rigidity of the body 200 is not affected, the weight of the body 200 is reduced, and the pressure sensors with various measuring ranges and various performance outputs can be customized by adjusting the depth of the shoulder groove 230 on the body 200 and the diameter of the body 200.
As shown in fig. 7, as an embodiment, a first end of the receiving channel 240 is provided with a signal processing assembly 300; conditioning circuitry is provided within the signal processing assembly 300 for converting the received electrical signal into various signals, including analog or digital signals, for output. In this embodiment, the conditioning circuit may further amplify the received electrical signal and convert the amplified electrical signal into an analog or digital quantity of the required current or voltage, and may further perform filtering processing on the electrical signal.
As shown in fig. 7, as an embodiment, the second end of the receiving channel 240 is provided with a sealing cap 400, and the outer side of the sealing cap 400 is screw-coupled with the inner wall of the body 200; the seal cap 400 abuts the at least one force sensitive core 100; the outer side of one end of the signal processing component 300 is in threaded connection with the inner wall of the body 200, and the other force sensitive core 100 is in abutting contact with the threaded surface of the signal processing component. The outside of the sealing cover 400 and the body 200, and the outside of one end of the signal processing assembly 300 and the body 200 are connected by screw threads, so that the sealing effect is good, the disassembly is convenient, and the long-term stability of the sensor can be effectively ensured.
As shown in fig. 7, as an embodiment, sealing rings 500 are provided on the sealing cover 400 and the signal processing unit 300, respectively. By providing the seal ring 500 to further seal the force-sensitive core 100, the sealability of the body 200 can be further ensured.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described and is different from other embodiments, so that the same or similar parts between the embodiments are mutually referred to. The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A force sensitive core comprising: the elastic body, the limiting block and the signal switching circuit board;
a through hole is formed in the middle of the elastic body, and limiting blocks are fixedly arranged on two side edges of the elastic body respectively;
at least 4 strain resistors are arranged on the elastic body in a nanoscale film sputtering mode, and at least 4 strain resistors are arranged around the through hole;
the signal switching circuit board is fixedly arranged on the elastic body and connected with the strain resistor, and is used for converting an elastic strain mechanical signal received by the strain resistor into an electric signal and sending the electric signal to the conditioning circuit;
the through hole is a round hole;
the 4 strain resistors are respectively a first strain resistor, a second strain resistor, a third strain resistor and a fourth strain resistor;
the first strain resistor is arranged at the-67 degree angle position of the second quadrant on the elastomer, the second strain resistor is arranged at the 45 degree angle position of the first quadrant on the elastomer, the third strain resistor is arranged at the-70 degree angle position of the fourth quadrant on the elastomer, and the fourth strain resistor is arranged at the 40 degree angle position of the third quadrant on the elastomer.
2. The force sensitive core of claim 1, wherein the elastomer is made of a stainless steel or alloy steel material having a high modulus of elasticity.
3. The force sensitive core of claim 1, wherein the elastomer and the signal transfer circuit board are bonded together by a double wire ball bond.
4. A force sensitive core according to any of claims 1-3, wherein the stopper is provided with a wire through hole.
5. The force sensitive core of claim 1, wherein the signal transfer circuit board is fixedly disposed on the elastomer by a screw.
6. The force-sensitive core of claim 1, wherein the other two sides of the elastomer are respectively provided with a step, and the steps are in interference fit with the inner wall of the body of the pressure sensor.
7. A pressure sensor, comprising: a body, at least two force sensitive cores according to any one of claims 1 to 6;
the body comprises a stress section in the middle and support sections at two ends, and a shaft shoulder groove is formed between the stress section and the support sections;
the inside of the body is provided with a through accommodating channel, and the accommodating channel comprises a wire passing cavity in the middle and mounting cavities at two ends;
the mounting cavity and the shaft shoulder groove are correspondingly arranged, and at least two force-sensitive cores are symmetrically nested in the mounting cavity respectively;
the signal switching circuit boards of the at least two force-sensitive cores are connected, so that strain resistors connected with the signal switching circuit boards form a bridge circuit;
the bridge circuit is used for converting the mechanical signal of elastic strain received by the strain resistor into an electric signal and sending the electric signal to the conditioning circuit.
8. The pressure sensor of claim 7, wherein the pressure sensor is configured to,
the first end of the accommodating channel is provided with a signal processing component;
the conditioning circuit is arranged in the signal processing component and is used for converting the received electric signals into various signals to be output, wherein the various signals comprise analog signals or digital signals.
9. The pressure sensor of claim 8, wherein the pressure sensor is configured to,
the second end of the accommodating channel is provided with a sealing cover, and the outer side of the sealing cover is in threaded connection with the inner wall of the body;
the sealing cover is abutted with at least one force-sensitive core body;
the outer side of one end of the signal processing component is in threaded connection with the inner wall of the body;
the other force-sensitive core body is abutted with the threaded surface of the signal processing component.
10. The pressure sensor of claim 9, wherein the pressure sensor is configured to,
sealing rings are respectively arranged on the sealing cover and the signal processing assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211472524.1A CN115683407B (en) | 2022-11-22 | 2022-11-22 | Force-sensitive core and pressure sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211472524.1A CN115683407B (en) | 2022-11-22 | 2022-11-22 | Force-sensitive core and pressure sensor |
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| Publication Number | Publication Date |
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| CN115683407A CN115683407A (en) | 2023-02-03 |
| CN115683407B true CN115683407B (en) | 2023-07-18 |
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| CN105628289B (en) * | 2015-12-25 | 2019-03-26 | 陕西电器研究所 | A kind of four remaining pressure sensors using sputtered film core |
| CN206095474U (en) * | 2016-09-27 | 2017-04-12 | 陕西电器研究所 | Safe type film pressure sensor of mining essence |
| CN206627234U (en) * | 2017-03-15 | 2017-11-10 | 北京中航兴盛测控技术有限公司 | Film torque sensor |
| CN209247207U (en) * | 2018-12-18 | 2019-08-13 | 余姚太平洋称重工程有限公司 | A kind of axial pin type sensor |
| CN209764304U (en) * | 2019-05-28 | 2019-12-10 | 江门市英合创展电子有限公司 | Axial pin type radial force cell sensor |
| CN113091967B (en) * | 2021-03-26 | 2023-08-22 | 徐州徐工挖掘机械有限公司 | Shaft pin type triaxial force transducer |
| CN215338660U (en) * | 2021-07-15 | 2021-12-28 | 湖南实锐欣智能科技有限责任公司 | Shaft pin type pressure sensor structure |
| CN114414123B (en) * | 2022-01-24 | 2023-08-25 | 上海交通大学 | Strain sensor chip on special-shaped metal substrate and in-situ preparation method thereof |
| CN115164705A (en) * | 2022-06-28 | 2022-10-11 | 北京石墨烯技术研究院有限公司 | Strain sensor and preparation method thereof |
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