CN212610892U - Coil stock fixing device and atomic layer deposition equipment - Google Patents
Coil stock fixing device and atomic layer deposition equipment Download PDFInfo
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- CN212610892U CN212610892U CN202020673238.1U CN202020673238U CN212610892U CN 212610892 U CN212610892 U CN 212610892U CN 202020673238 U CN202020673238 U CN 202020673238U CN 212610892 U CN212610892 U CN 212610892U
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Abstract
The utility model discloses a coil stock fixing device and atomic layer deposition equipment, wherein, coil stock fixing device includes first bearing seat, second bearing seat and coil stock axle, be provided with first safe chuck on the first bearing seat, second bearing seat sets up with first bearing seat relatively, be provided with second safe chuck on the second bearing seat, the coil stock axle has relative installation end and drive end, the installation end rotates with second safe chuck to be connected, the drive end rotates with first safe chuck to be connected, and be used for being connected with the driving piece drive of coil stock device, so that the coil stock axle is used for carrying out the coil stock to the winding and sets up treating the deposit sample on it and handle. The utility model discloses improved coil stock fixing device's structure, promoted coil stock fixing device's assembly efficiency, each spare part of convenient equipment coil stock fixing device has saved the required time of assembly.
Description
Technical Field
The utility model relates to an atomic layer deposition technical field especially relates to a coil stock fixing device and atomic layer deposition equipment.
Background
Atomic Layer Deposition (ALD) is a thin film formation technique that uses sequential chemical reactions in the vapor phase. Atomic layer deposition differs from chemical vapor deposition in that atomic layer deposition is applied using precursors and reactants alternately, i.e. during a first process step or so-called half cycle, precursors are applied which react in a self-limiting manner with the substrate surface resulting in a first target deposition; during a second process step or so-called second half cycle, a reactant is applied, which reacts in a self-limiting manner with the newly formed surface, thereby depositing a second target material. One complete atomic layer deposition cycle results in the deposition of one monolayer of the target. This allows atomic layer deposition to be used with many advantages in thin film fabrication.
The existing roll-to-roll atomic layer deposition equipment comprises a reaction cavity, a driving device and at least two roll-up devices, wherein the reaction cavity is internally provided with a plurality of air passages and a channel which is intersected with the air passages and used for a sample to be deposited to pass through, the reaction cavity is provided with a plurality of air inlets and air outlets corresponding to the air passages, and the driving device outputs power to a roll-up shaft of the roll-up device so as to be used for driving a belt-shaped sample to be deposited. The coil stock fixing device comprises a base, a bearing seat, a coil stock shaft and the like, the number of parts is large, the coil stock shaft and the bearing seat are very complex to assemble, the installation and the positioning are troublesome, a large amount of time is consumed for assembly, and the assembly efficiency of the coil stock fixing device is low. Therefore, how to improve the assembly efficiency of the coil fixing device becomes a very troublesome problem.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a coil stock fixing device aims at promoting coil stock fixing device's assembly efficiency, and each spare part is assembled to the convenience, sparingly assembles required time.
In order to achieve the above object, the utility model provides a coil stock fixing device for atomic layer deposition equipment, coil stock fixing device includes:
the first safety chuck is arranged on the first bearing seat;
the second bearing seat is arranged opposite to the first bearing seat, and a second safety chuck is arranged on the second bearing seat;
the material rolling shaft is provided with a mounting end and a driving end which are opposite, the mounting end is rotationally connected with the second safety chuck, and the driving end is rotationally connected with the first safety chuck and is used for being in driving connection with a driving piece of the atomic layer deposition equipment, so that the material rolling shaft is used for performing material rolling processing on a to-be-deposited sample wound on the material rolling shaft.
In one embodiment, the opposite sides of the first safety chuck and the second safety chuck are respectively provided with an installation opening for installing two ends of the coiling shaft, the inner wall of the installation opening is provided with a positioning pin, the installation opening is provided with a butting arm in an outward protruding manner, and the butting arm is provided with a guide groove;
the two ends of the coiling shaft are respectively provided with a guide block in a surrounding manner at the positions close to the grooves, and the guide block is clamped in the guide groove by the positioning pin in a butting manner against the grooves, so that the coiling shaft is fixed between the first safety chuck and the second safety chuck and can rotate relatively.
In one embodiment, the outer walls of the first safety chuck and the second safety chuck are sleeved with fastening drive plates, and limit pins for limiting the positions of the fastening drive plates relative to the first safety chuck and the second safety chuck are inserted into the outer walls of the fastening drive plates;
and the fastening drive plate is used for locking and fixing the coiling shaft, the first safety chuck and the second safety chuck.
In an embodiment, the guide block comprises a locking piece and a clamping piece in a non-closed ring shape, the shape of the clamping piece is matched with the shape of the corresponding position at the two ends of the winding shaft, the ring inner side of the clamping piece is abutted to the winding shaft and is detachably locked and fixed through the locking piece, and the ring outer side of the clamping piece is abutted to the guide groove so that the guide block is clamped into the guide groove.
In one embodiment, the clamping piece and the locking piece are provided with oppositely arranged threaded holes, and the clamping piece is in screw connection with the locking piece.
In an embodiment, the number of the grooves at the two ends of the winding shaft is more than 2, and the grooves are circumferentially and uniformly arranged on the outer walls at the two ends of the winding shaft in an encircling manner.
In one embodiment, the take-up spool is an expansion spool.
In one embodiment, a tensioning mechanism is mounted on the expansion shaft and used for tightly attaching the sample to be deposited on the expansion shaft.
In one embodiment, the tensioning mechanism comprises:
the body is provided with an installation cavity and an accommodating groove;
the screw rod is arranged in the mounting cavity of the body and is limited to rotate through a nut sleeved on the screw rod, and the screw rod can move along the axial direction of the body relative to the body;
the first wedge-shaped block is movably sleeved on the screw rod;
the second wedge-shaped block is arranged in the accommodating groove in the outer wall of the body, is abutted against the first wedge-shaped block and can move relatively;
when the screw rod moves axially along the body, the first wedge-shaped block is driven to move axially along the body, and the first wedge-shaped block pushes the second wedge-shaped block which is abutted against the first wedge-shaped block to move along the direction vertical to the body.
In order to achieve the above object, the present invention further provides an atomic layer deposition apparatus, including:
the atomic layer deposition device is used for carrying out deposition treatment on a sample to be deposited;
a roll holding device as described above for mounting a sample to be deposited for transporting the sample to be deposited into or withdrawing the sample from the atomic layer deposition apparatus; the coil stock fixing device includes:
the first safety chuck is arranged on the first bearing seat;
the second bearing seat is arranged opposite to the first bearing seat, and a second safety chuck is arranged on the second bearing seat;
the material rolling shaft is provided with a mounting end and a driving end which are opposite, the mounting end is rotationally connected with the second safety chuck, and the driving end is rotationally connected with the first safety chuck and is used for being in driving connection with a driving piece of the atomic layer deposition equipment, so that the material rolling shaft is used for performing material rolling processing on a to-be-deposited sample wound on the material rolling shaft.
The technical scheme of the utility model, owing to be provided with first safe chuck on first bearing seat, second bearing seat sets up with first bearing seat relatively, be provided with second safe chuck on the second bearing seat, the coil stock axle has relative installation end and drive end, the installation end rotates with second safe chuck to be connected, the drive end rotates with first safe chuck to be connected, and be connected with the driving piece drive of coil stock device, so that the coil stock axle is used for carrying out the coil stock to the winding and setting up the deposit sample of treating that it is on and handles, the assembly efficiency of coil stock fixing device has been promoted, conveniently assemble each spare part of coil stock fixing device, the required time of assembly has been saved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
Fig. 1 is a schematic structural view of an embodiment of the coil fixing device of the present invention;
FIG. 2 is a front view of an embodiment of the coil fixing device of the present invention;
FIG. 3 is a top view of an embodiment of the coil fixing device of the present invention;
FIG. 4 is a schematic view of the structure of FIG. 3 at cross-section B-B;
FIG. 5 is a schematic structural view of an embodiment of the coil fixing device of the present invention;
FIG. 6 is an enlarged view of portion A of FIG. 5;
fig. 7 is a schematic structural view of a first safety chuck according to an embodiment of the present invention;
fig. 8 is a schematic structural view of a material winding shaft in an embodiment of the material winding fixing device of the present invention;
fig. 9 is a schematic structural view of a tensioning mechanism on a coil shaft in an embodiment of the coil fixing device of the present invention.
The reference numbers illustrate:
the objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without any creative effort belong to the protection scope of the present invention.
It should be noted that all the directional indicators (such as upper, lower, left, right, front and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is changed accordingly.
In addition, the descriptions related to "first", "second", etc. in the present invention are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit ly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and/or" appearing throughout is to include three juxtapositions, exemplified by "A and/or B" including either scheme A, or scheme B, or a scheme in which both A and B are satisfied. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
Atomic Layer Deposition (ALD) is a thin film formation technique that uses sequential chemical reactions in the vapor phase. Atomic layer deposition differs from chemical vapor deposition in that atomic layer deposition is applied using precursors and reactants alternately, i.e. during a first process step or so-called half cycle, precursors are applied which react in a self-limiting manner with the substrate surface resulting in a first target deposition; during a second process step or so-called second half cycle, a reactant is applied, which reacts in a self-limiting manner with the newly formed surface, thereby depositing a second target material. One complete atomic layer deposition cycle results in the deposition of one monolayer of the target. This allows atomic layer deposition to be used with many advantages in thin film fabrication.
The existing roll-to-roll atomic layer deposition equipment comprises a reaction cavity, a driving device and at least two roll-up devices, wherein the reaction cavity is internally provided with a plurality of air passages and a channel which is intersected with the air passages and used for a sample to be deposited to pass through, the reaction cavity is provided with a plurality of air inlets and air outlets corresponding to the air passages, and the driving device outputs power to a roll-up shaft of the roll-up device so as to be used for driving a belt-shaped sample to be deposited. The coil stock fixing device comprises a base, a bearing seat, a coil stock shaft and the like, the number of parts is large, the coil stock shaft and the bearing seat are very complex to assemble, the installation and the positioning are troublesome, a large amount of time is consumed for assembly, and the assembly efficiency of the coil stock fixing device is low.
Therefore, the utility model provides a coil stock fixing device is applicable to the device or the atomic layer deposition equipment of various needs coil stock, and here is not limited.
Referring to fig. 1 to 5, in an embodiment of the present invention, the roll fixing device includes a first bearing seat 100, a second bearing seat 200 and a roll shaft 300, a first safety chuck 110 is disposed on the first bearing seat 100, the second bearing seat 200 is disposed opposite to the first bearing seat 100, a second safety chuck 210 is disposed on the second bearing seat 200, the roll shaft 300 has a mounting end 300A and a driving end 300B (as shown in fig. 2), the mounting end 300A is rotatably connected to the second safety chuck 210, the driving end 300B is rotatably connected to the first safety chuck 110 and is used for being drivingly connected to a driving member 400 of the roll device, so that the roll shaft 300 can be used for rolling a to-be-deposited sample 500 wound thereon. It should be noted that the mounting end 300A and the driving end 300B of the winding shaft 300 have the same structure, and only the difference between the connection parts is included.
Referring to fig. 7, the first safety chuck 110 and one end of the driving member 400 of the winding device may be provided with a connecting shaft 105, and an end of the connecting shaft 105 may be provided with a positioning opening 105A for facilitating connection and installation. The side of the second safety chuck 210 away from the mounting end 300A of the winding shaft 300 may have a closed cylindrical shape.
It should be noted that, both the first bearing seat 100 and the second bearing seat 200 can be designed in a split manner, and specifically, the first bearing seat and the second bearing seat can include a base and a bearing plate arranged on the base, and the bearing plate can be connected with the base through a bolt. In order to improve the connection strength, in this embodiment, a plurality of ribs are further installed between the bearing plate and the machine base.
Further, in order to facilitate the installation of the material winding shaft 300, in the present embodiment, referring mainly to fig. 5, a sliding rail may be disposed between the first load bearing seat 100 and the second load bearing seat 200 to adjust the relative distance, so as to adjust the relative distance between the first safety chuck 110 and the second safety chuck 210. In addition, when utilizing the slide rail to adjust two bearing seats to minimum interval, the occupation space of whole part is less, makes things convenient for staff's transport to promote assembly efficiency. Here, the specific structure of the housing is not limited.
The utility model discloses coil stock fixing device is through being provided with first safe chuck 110 on first bearing seat 100, second bearing seat 200 sets up with first bearing seat 100 relatively, be provided with second safe chuck 210 on the second bearing seat 200, coil stock axle 300 has relative installation end 300A and drive end 300B, installation end 300A rotates with second safe chuck 210 to be connected, drive end 300B rotates with first safe chuck 110 to be connected, and be used for being connected with the driving piece 400 drive of coil stock device, so that coil stock axle 300 can be used to set up the coil stock of treating deposit sample 500 on it to the winding and handle, coil stock fixing device's assembly efficiency has been promoted, conveniently assemble each spare part of coil stock fixing device, the required time of assembly has been saved.
In order to facilitate the installation of the material winding shaft 300 and the two bearing seats and improve the assembly efficiency, referring to fig. 6 to 8, in an embodiment, the opposite sides of the first safety chuck 110 and the second safety chuck 210 are both provided with installation openings 100A for the installation of the two ends of the material winding shaft 300. Referring mainly to fig. 7, a positioning pin 101 is disposed on an inner wall of the mounting opening 100A, an abutting arm 102 is disposed on the mounting opening 100A in an outward protruding manner, and a guide groove 1021 is formed in the abutting arm 102. Referring to fig. 6 and 8, the circumferential wall of the two ends of the winding shaft 300 is provided with a groove 301 adapted to the positioning pin 101, the two ends of the winding shaft 300 are respectively provided with a guide block 302 around the positions close to the groove 301, the positioning pin 101 abuts against the groove 301 and the guide block 302 is clamped in the guide groove 1021, so that the winding shaft 300 is fixed between the first safety chuck 110 and the second safety chuck 210 and can rotate relatively. Wherein, a pair of bearings are arranged in each of the first safety chuck 110 and the second safety chuck 210 to realize the rotation connection. So set up, when promoting assembly efficiency, also reached certain joint strength.
Referring to fig. 6 and 7, further, in the present embodiment, a fastening dial 104 is sleeved on the outer walls of the first safety clip 110 and the second safety clip 210, and a limit pin 1041 for limiting the position of the fastening dial 104 relative to the first safety clip 110 and the second safety clip 210 is inserted on the outer wall of the fastening dial 104; the fastening dial 104 is used to lock the fixed winding shaft 300 to be completely installed between the first safety jaw 110 and the second safety jaw 210.
It can be understood that the safety of the coil fixing device is enhanced because the fastening dial 104 is provided on the two safety chucks, so that the connection between the coil shaft 300 and the safety chucks is more secure.
During assembly, the guide block 302 can be firstly installed on the winding shaft 300, then the winding shaft 300 is lifted in the air, the guide block 302 is aligned with the guide grooves 1021 on the first safety chuck 110 and the second safety chuck 210, the grooves 301 at the two ends of the winding shaft are aligned with the positioning pins 101 at the installation opening 100A, then the winding shaft 300 is slowly put into the installation opening 100A, the limit pins 1041 on the fastening dial 104 of the first safety chuck 110 and/or the second safety chuck 210 are pressed, and the fastening dial 104 is moved in the direction close to the winding shaft 300, so that the two ends of the winding shaft 300 are completely clamped and fixed in the installation opening 100A between the first safety chuck 110 and the second safety chuck 210.
In an embodiment, the guide block 302 is a split design, referring to fig. 6 and 7, the guide block 302 includes a locking member 3021 and a clamping member 3022 in a non-closed ring shape, the shape of the clamping member 3022 is adapted to the shape of the corresponding position at the two ends of the winding shaft 300, the inner side of the clamping member 3022 abuts against the winding shaft 300 and is detachably locked and fixed by the locking member 3021, and the outer side of the clamping member 3022 abuts against the guide groove 1021, so that the guide block 302 is clamped into the guide groove 1021. When the material rolling shaft 300 and the two safety chucks are installed, the outer wall of the outer side of the clamping piece 3022 slides into the guide groove 1021, so that a certain guiding effect is achieved, and the installation efficiency of the material rolling shaft 300 and the safety chucks is improved.
Furthermore, threaded holes are formed in the clamping piece 3022 and the locking piece 3021, which are opposite to each other, and the clamping piece 3022 is screwed with the locking piece 3021. Of course, the present invention may also be implemented by means of rivet connection, and is not limited herein.
It should be noted that, the number of the grooves 301 at the two ends of the winding shaft 300 may be set to be more than 2 groups, and the grooves 301 are circumferentially and uniformly arranged on the outer walls at the two ends of the winding shaft 300. In this embodiment, in order to facilitate lifting and convenient alignment during installation, the number of the grooves 301 at two ends of the winding shaft 300 is set to 3 groups and uniformly distributed along the circumferential direction of the outer wall thereof. Of course, for convenience of processing, only one set of grooves may be provided, and the number, size, and the like are not limited herein.
Referring to fig. 8 and 9, in one embodiment, the take-up reel 300 is an expansion reel having a tensioning mechanism 310 mounted thereon, the tensioning mechanism 310 being configured to tighten the sample 500 to be deposited on the expansion reel.
It is worth mentioning that the coil fixing device is installed in the vacuum chamber, and the tensioning mechanism 310 of the expansion shaft is an inflatable air bag, which is easily broken under pressure, so that the gas in the air bag leaks into the vacuum chamber to pollute the reaction gas therein, and the material wound thereon becomes unstable.
To this, the utility model discloses a straining device 310 of mechanical type, refer to fig. 9, this straining device 310 includes body 311, lead screw 3111, first wedge 3112 and second wedge 3113, installation cavity 311A and storage tank 311B have been seted up to body 311, lead screw 3111 is installed in installation cavity 311A of body 311, and restrict its rotation through the nut that the cover was located on it, but elastic component such as lead screw 3111 both ends butt spring, so that lead screw 3111 body 311 is along its axial displacement relatively, the movably cover of first wedge 3112 is located on lead screw 3111, second wedge 3113 is installed in the storage tank 311B of body 311 outer wall and with first wedge 3112 butt and relative displacement. When lead screw 3111 moves along body 311 axial, drive first wedge 3112 along body 311 axial displacement, first wedge 3112 promotes the second wedge 3113 rather than the butt and moves along the direction of perpendicular body 311 to make and treat that deposit sample 500 hugs closely on reel 300, when having avoided gasbag gas leakage to influence production, also avoided treating that deposit sample 500 wrinkles and influence the effect of atomic layer deposition product.
It should be noted that, in some embodiments, referring to fig. 1, the driving member 400 may include a supporting base 430, a driving motor 410 mounted on the supporting base 430, and a rotating shaft 420 rotatably connected to the driving motor 410. Wherein, the rotating shaft 420 is rotatably connected with the connecting shaft 105 of the first safety chuck 110.
The utility model provides an atomic layer deposition equipment, this atomic layer deposition equipment include atomic layer deposition device and coil stock fixing device, and wherein, atomic layer deposition device is used for treating the sample of deposit and carries out the deposit processing, and coil stock fixing device is used for the installation to treat the sample of deposit to will treat that the sample of deposit transmits to atomic layer deposition device in or withdraws from atomic layer deposition device, this coil stock fixing device's concrete structure refers to above-mentioned embodiment, because the utility model provides an atomic layer deposition equipment includes all schemes of all embodiments of above-mentioned coil stock fixing device, consequently, have at least with the same technological effect of coil stock fixing device, the explanation differs here.
It should be noted that the atomic layer deposition apparatus generally includes two of the above-mentioned coil fixing devices and a reaction chamber disposed between the two coil fixing devices, wherein one of the coil fixing devices is used for discharging the material into the reaction chamber, and the reaction chamber performs an atomic layer deposition reaction on the to-be-deposited sample 500 transmitted by the reaction chamber and then winds up the deposited sample by using the other coil fixing device.
The above is only the optional embodiment of the present invention, and not the scope of the present invention is limited thereby, all the equivalent structure changes made by the contents of the specification and the drawings are utilized under the inventive concept of the present invention, or the direct/indirect application in other related technical fields is included in the patent protection scope of the present invention.
Claims (10)
1. A roll holding device for an atomic layer deposition apparatus, the roll holding device comprising:
the first safety chuck is arranged on the first bearing seat;
the second bearing seat is arranged opposite to the first bearing seat, and a second safety chuck is arranged on the second bearing seat;
the material rolling shaft is provided with a mounting end and a driving end which are opposite, the mounting end is rotationally connected with the second safety chuck, and the driving end is rotationally connected with the first safety chuck and is used for being in driving connection with a driving piece of the atomic layer deposition equipment, so that the material rolling shaft is used for performing material rolling processing on a to-be-deposited sample wound on the material rolling shaft.
2. The coil fixing device according to claim 1, wherein the opposite sides of the first safety chuck and the second safety chuck are respectively provided with an installation opening for installing two ends of the coil shaft, the inner wall of the installation opening is provided with a positioning pin, the installation opening is provided with an abutting arm protruding outwards, and the abutting arm is provided with a guide groove;
the two ends of the coiling shaft are respectively provided with a guide block in a surrounding manner at the positions close to the grooves, and the guide block is clamped in the guide groove by the positioning pin in a butting manner against the grooves, so that the coiling shaft is fixed between the first safety chuck and the second safety chuck and can rotate relatively.
3. The coil stock fixing device as claimed in claim 2, wherein the outer walls of the first safety chuck and the second safety chuck are sleeved with a fastening dial plate, and a limit pin for limiting the position of the fastening dial plate relative to the first safety chuck and the second safety chuck is inserted into the outer wall of the fastening dial plate;
and the fastening drive plate is used for locking and fixing the coiling shaft, the first safety chuck and the second safety chuck.
4. The coil fixing device according to claim 2, wherein the guide block includes a locking member and a holding member in a non-closed ring shape, the holding member has a shape corresponding to the shape of the corresponding position of the two ends of the coil shaft, the inner side of the holding member abuts against the coil shaft and is detachably locked and fixed by the locking member, and the outer side of the holding member abuts against the guide groove, so that the guide block is locked into the guide groove.
5. The coil fixing device according to claim 4, wherein the holder and the locker are provided with screw holes oppositely arranged, and the holder is screwed with the locker.
6. The coil fixing device according to claim 2, wherein the number of the grooves at both ends of the coil shaft is more than 2 groups, and the grooves are circumferentially and uniformly arranged on the outer walls at both ends of the coil shaft.
7. The coil fixing device according to any one of claims 1 to 6, wherein the coil shaft is an expansion shaft.
8. The coil stock fixing device as claimed in claim 7, wherein a tensioning mechanism is mounted on the expansion shaft and used for tightly attaching the sample to be deposited on the expansion shaft.
9. The web holding device of claim 8, wherein said tensioning mechanism comprises:
the body is provided with an installation cavity and an accommodating groove;
the screw rod is arranged in the mounting cavity of the body and is limited to rotate through a nut sleeved on the screw rod, and the screw rod can move along the axial direction of the body relative to the body;
the first wedge-shaped block is movably sleeved on the screw rod;
the second wedge-shaped block is arranged in the accommodating groove in the outer wall of the body, is abutted against the first wedge-shaped block and can move relatively;
when the screw rod moves axially along the body, the first wedge-shaped block is driven to move axially along the body, and the first wedge-shaped block pushes the second wedge-shaped block which is abutted against the first wedge-shaped block to move along the direction vertical to the body.
10. An atomic layer deposition apparatus, comprising:
the atomic layer deposition device is used for carrying out deposition treatment on a sample to be deposited;
a web holding device according to any of claims 1-9 for mounting a sample to be deposited for transporting the sample to be deposited into or retrieving the sample from the atomic layer deposition device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020673238.1U CN212610892U (en) | 2020-04-27 | 2020-04-27 | Coil stock fixing device and atomic layer deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020673238.1U CN212610892U (en) | 2020-04-27 | 2020-04-27 | Coil stock fixing device and atomic layer deposition equipment |
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| Publication Number | Publication Date |
|---|---|
| CN212610892U true CN212610892U (en) | 2021-02-26 |
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| CN202020673238.1U Active CN212610892U (en) | 2020-04-27 | 2020-04-27 | Coil stock fixing device and atomic layer deposition equipment |
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| Country | Link |
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| CN (1) | CN212610892U (en) |
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