CN111364024B - Atomic layer deposition apparatus - Google Patents
Atomic layer deposition apparatus Download PDFInfo
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- CN111364024B CN111364024B CN202010348312.7A CN202010348312A CN111364024B CN 111364024 B CN111364024 B CN 111364024B CN 202010348312 A CN202010348312 A CN 202010348312A CN 111364024 B CN111364024 B CN 111364024B
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- safety chuck
- atomic layer
- layer deposition
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- shaft
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses atomic layer deposition equipment, which comprises an atomic layer deposition device and a coil stock fixing device, wherein the atomic layer deposition device is used for carrying out deposition treatment on a sample to be deposited, the coil stock fixing device is used for installing the sample to be deposited so as to transmit the sample to be deposited into the atomic layer deposition device or withdraw the sample to be deposited from the atomic layer deposition device, the coil stock fixing device comprises a first bearing seat, a second bearing seat, a coil stock shaft and a driving piece, the coil stock shaft is provided with a mounting end and a driving end which are opposite, the mounting end is rotationally connected with the second safety chuck, and the driving end is rotationally connected with the first safety chuck and is in driving connection with the driving piece so that the coil stock shaft is used for carrying out coil stock treatment on the sample to be deposited, which is wound on the coil stock shaft. The invention improves the structure of the atomic layer deposition equipment, improves the assembly efficiency of the atomic layer deposition equipment, facilitates the assembly of each part of the atomic layer deposition equipment, and saves the time required by assembly.
Description
Technical Field
The invention relates to the technical field of atomic layer deposition, in particular to atomic layer deposition equipment.
Background
Atomic layer deposition (Atomic Layer Deposition, ALD) is a thin film formation technique that uses continuous chemical reactions in the gas phase. Atomic layer deposition differs from chemical vapor deposition in that atomic layer deposition uses alternating application of a precursor and a reactant, i.e. during a first process step or so-called half cycle, the precursor is applied, which reacts with the substrate surface in a self-limiting manner, resulting in a first target deposition; during a second treatment step or so-called latter half cycle, a reactant is applied, which reacts in a self-limiting manner with the newly formed surface, thereby depositing a second target. A complete atomic layer deposition cycle results in the deposition of a monolayer of target material. This allows atomic layer deposition to be driven by a number of advantages in thin film fabrication.
The prior roll-to-roll atomic layer deposition equipment consists of a reaction cavity, a driving device and at least two material rolling devices, wherein the reaction cavity is internally provided with a plurality of air passages and a passage intersecting the direction of the air passages and used for a sample to be deposited to pass through, the reaction cavity is provided with a plurality of air inlets and air outlets corresponding to the air passages, and the driving device outputs power to a material rolling shaft of the material rolling device so as to be used for driving the banded sample to be deposited. The coil stock fixing device of the atomic layer deposition equipment comprises a machine base, a bearing seat, a coil stock shaft and the like, the number of parts is large, the assembly of the coil stock shaft and the bearing seat is very complicated, the installation and the positioning are troublesome, a large amount of time is required to be consumed for assembly, and the assembly efficiency of the coil stock fixing device is low. Therefore, how to improve the assembly efficiency of the atomic layer deposition apparatus becomes a very troublesome problem.
Disclosure of Invention
The invention mainly aims to provide an atomic layer deposition device, which aims to improve the assembly efficiency of the atomic layer deposition device, facilitate the assembly of parts and save the time required by the assembly.
To achieve the above object, the present invention provides an atomic layer deposition apparatus including:
the atomic layer deposition device is used for carrying out deposition treatment on a sample to be deposited;
a coil holder for mounting a sample to be deposited for transporting the sample to be deposited into or withdrawing the sample from the atomic layer deposition apparatus; the coil stock fixing device comprises a first bearing seat, a second bearing seat, a coil stock shaft and a driving piece, wherein a first safety chuck is arranged on the first bearing seat; the second bearing seat is arranged opposite to the first bearing seat, and a second safety chuck is arranged on the second bearing seat; the material winding shaft is provided with an opposite installation end and a driving end, the installation end is rotationally connected with the second safety chuck, the driving end is rotationally connected with the first safety chuck and is in driving connection with the driving piece, so that the material winding shaft is used for carrying out material winding treatment on a sample to be deposited, which is wound on the material winding shaft.
In an embodiment, one side of the first safety chuck opposite to the second safety chuck is provided with a mounting opening for mounting two ends of the material winding shaft, the inner wall of the mounting opening is provided with a positioning pin, the mounting opening is outwards convexly provided with an abutting arm, and the abutting arm is provided with a guide groove;
the positioning pins are abutted to the grooves and clamp the guide blocks into the guide grooves, so that the material rolling shaft is fixed between the first safety chuck and the second safety chuck and can rotate relatively.
In an embodiment, the outer walls of the first safety chuck and the second safety chuck are sleeved with a fastening driving plate, and the outer walls of the fastening driving plate are inserted with limiting pins for limiting the positions of the fastening driving plate relative to the first safety chuck and the second safety chuck;
the fastening driving plate is used for locking and fixing the coil stock shaft, the first safety chuck and the second safety chuck.
In an embodiment, the guide block comprises a locking piece and a clamping piece in a non-closed ring shape, the shape of the clamping piece is matched with the shape of the corresponding positions of two ends of the coil stock shaft, the inner side of the ring of the clamping piece is abutted to the coil stock shaft and detachably locked and fixed through the locking piece, and the outer side of the ring of the clamping piece is abutted to the guide groove so that the guide block is clamped into the guide groove.
In an embodiment, the clamping member and the locking member are provided with threaded holes which are arranged oppositely, and the clamping member is connected with the locking member through screws.
In an embodiment, the number of the grooves at two ends of the material rolling shaft is more than 2, and the grooves are circumferentially and uniformly arranged on the outer walls at two ends of the material rolling shaft.
In one embodiment, the roll shaft is an expansion shaft.
In one embodiment, a tensioning mechanism is mounted on the expansion shaft for applying the sample to be deposited against the expansion shaft.
In one embodiment, the tensioning mechanism comprises:
the body is provided with an installation cavity and a containing groove;
the screw rod is arranged in the installation cavity of the body, the screw rod is limited to rotate by a nut sleeved on the screw rod, and the screw rod can move along the axial direction of the screw rod relative to the body;
the first wedge-shaped block is movably sleeved on the screw rod;
the second wedge-shaped block is arranged in the accommodating groove of the outer wall of the body, is abutted with the first wedge-shaped block and can move relatively;
when the screw rod moves along the axial direction of the body, the first wedge-shaped block is driven to move along the axial direction of the body, and the first wedge-shaped block pushes the second wedge-shaped block which is abutted to the first wedge-shaped block to move along the direction vertical to the body.
In an embodiment, the driving piece comprises a supporting seat, a driving motor arranged on the supporting seat and a rotating shaft in driving connection with the driving motor, and the driving motor is connected with the first safety chuck through the rotating shaft.
In the technical scheme of the invention, as the first safety chuck is arranged on the first bearing seat, the second bearing seat is opposite to the first bearing seat, the second bearing seat is provided with the second safety chuck, the winding shaft is provided with the opposite mounting end and driving end, the mounting end is rotationally connected with the second safety chuck, the driving end is rotationally connected with the first safety chuck and is used for being in driving connection with a driving piece of the winding device, so that the winding shaft is used for carrying out winding treatment on a sample to be deposited which is wound on the winding shaft, the assembly efficiency of the atomic layer deposition equipment is improved, each part of the atomic layer deposition equipment is conveniently assembled, and the time required by assembly is saved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the structures shown in these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of an embodiment of a coil fixing apparatus according to the present invention;
FIG. 2 is a front view of an embodiment of the coil holder of the present invention;
FIG. 3 is a top view of an embodiment of the coil holder of the present invention;
FIG. 4 is a schematic view of the structure at section B-B in FIG. 3;
FIG. 5 is a schematic view of an embodiment of a coil fixing apparatus according to the present invention;
FIG. 6 is an enlarged view of portion A of FIG. 5;
FIG. 7 is a schematic view of a first safety chuck according to an embodiment of the coil fixing apparatus of the present invention;
FIG. 8 is a schematic view of a coil shaft according to an embodiment of the coil fixing apparatus of the present invention;
fig. 9 is a schematic structural view of a tensioning mechanism on a coil shaft in an embodiment of a coil fixing apparatus according to the present invention.
Reference numerals illustrate:
| reference numerals | Name of the name | Reference numerals | Name of the |
|
| 100 | First bearing |
110 | |
|
| 200 | Second bearing |
210 | |
|
| 300 | |
| Mounting end | |
| 400 | |
420 | |
|
| 410 | |
430 | Supporting |
|
| 100A | Mounting opening | | Drive end | |
| 101 | |
102 | |
|
| 1021 | |
301 | |
|
| 302 | |
104 | Fastening |
|
| 105 | Connecting |
105A | Positioning opening | |
| 1041 | Limiting |
3021 | |
|
| 3022 | |
310 | |
|
| 311 | |
| Mounting cavity | |
| | Accommodating groove | 3111 | |
|
| 3112 | First wedge- |
3113 | Second wedge- |
|
| 500 | Sample to be deposited |
The achievement of the objects, functional features and advantages of the present invention will be further described with reference to the accompanying drawings, in conjunction with the embodiments.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without any inventive effort, are intended to be within the scope of the invention.
It should be noted that all directional indicators (such as up, down, left, right, front, and rear … …) in the embodiments of the present invention are merely used to explain the relative positional relationship, movement, etc. between the components in a particular posture (as shown in the drawings), and if the particular posture is changed, the directional indicator is changed accordingly.
Furthermore, the description of "first," "second," etc. in this disclosure is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and/or" as it appears throughout is meant to include three side-by-side schemes, for example, "A and/or B", including the A scheme, or the B scheme, or the scheme where A and B meet at the same time. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the scope of protection claimed in the present invention.
Atomic layer deposition (Atomic Layer Deposition, ALD) is a thin film formation technique that uses continuous chemical reactions in the gas phase. Atomic layer deposition differs from chemical vapor deposition in that atomic layer deposition uses alternating application of a precursor and a reactant, i.e. during a first process step or so-called half cycle, the precursor is applied, which reacts with the substrate surface in a self-limiting manner, resulting in a first target deposition; during a second treatment step or so-called latter half cycle, a reactant is applied, which reacts in a self-limiting manner with the newly formed surface, thereby depositing a second target. A complete atomic layer deposition cycle results in the deposition of a monolayer of target material. This allows atomic layer deposition to be driven by a number of advantages in thin film fabrication.
The prior roll-to-roll atomic layer deposition equipment consists of a reaction cavity, a driving device and at least two material rolling devices, wherein the reaction cavity is internally provided with a plurality of air passages and a passage intersecting the direction of the air passages and used for a sample to be deposited to pass through, the reaction cavity is provided with a plurality of air inlets and air outlets corresponding to the air passages, and the driving device outputs power to a material rolling shaft of the material rolling device so as to be used for driving the banded sample to be deposited. The coil stock fixing device of the atomic layer deposition equipment comprises a machine base, a bearing seat, a coil stock shaft and the like, the number of parts is large, the assembly of the coil stock shaft and the bearing seat is very complicated, the installation and the positioning are troublesome, a large amount of time is required to be consumed for assembly, and the assembly efficiency of the atomic layer deposition equipment is low.
In order to improve the assembly efficiency of an atomic layer deposition device, the invention provides the atomic layer deposition device.
In an embodiment of the present invention, the atomic layer deposition apparatus includes an atomic layer deposition device for performing deposition processing on a sample to be deposited, and a coil holder for mounting the sample to be deposited to transfer the sample to be deposited to or withdraw the sample from the atomic layer deposition device. Referring to fig. 1 to 5, the coil stock fixing device includes a first load bearing seat 100, a second load bearing seat 200, a coil stock shaft 300 and a driving member 400, wherein the first load bearing seat 100 is provided with a first safety chuck 110, the second load bearing seat 200 is opposite to the first load bearing seat 100, the second load bearing seat 200 is provided with a second safety chuck 210, the coil stock shaft 300 has opposite mounting ends 300A and a driving end 300B (as shown in fig. 2), the mounting ends 300A are rotatably connected with the second safety chucks 210, and the driving end 300B is rotatably connected with the first safety chuck 110 and is in driving connection with the driving member 400, so that the coil stock shaft 300 can be used for performing coil stock treatment on a sample 500 to be deposited wound thereon. The mounting end 300A of the roll shaft 300 has the same structure as the driving end 300B, and only the difference in the connection members is the same.
In fig. 7, a connecting shaft 105 may be disposed at one end of the first safety chuck 110 and one end of the driving member 400 of the rolling device, and a positioning opening 105A may be disposed at an end of the connecting shaft 105, so as to facilitate connection and installation. The side of the second safety clip 210 remote from the mounting end 300A of the roll shaft 300 may have a closed cylindrical shape.
It should be noted that, the first bearing seat 100 and the second bearing seat 200 may be of split design, and specifically may include a base and a bearing plate disposed on the base, where the bearing plate may be connected with the base through a bolt. In order to improve the connection strength, in this embodiment, a plurality of rib plates are further installed between the bearing plate and the machine base.
Further, in order to facilitate installation of the coil stock shaft 300, in the present embodiment, referring mainly to fig. 5, a sliding rail may be disposed between the first bearing seat 100 and the second bearing seat 200 to adjust the relative distance, so as to adjust the relative distance between the first safety clip 110 and the second safety clip 210. In addition, when utilizing the slide rail to adjust two bearing seats to minimum interval, occupation space of whole part is less, makes things convenient for staff to carry to promote assembly efficiency. Here, the specific structure of the housing thereof is not limited.
According to the atomic layer deposition equipment, the first safety clamping head 110 is arranged on the first bearing seat 100, the second bearing seat 200 is arranged opposite to the first bearing seat 100, the second safety clamping head 210 is arranged on the second bearing seat 200, the coil stock shaft 300 is provided with the opposite mounting end 300A and the driving end 300B, the mounting end 300A is rotationally connected with the second safety clamping head 210, the driving end 300B is rotationally connected with the first safety clamping head 110 and is used for being in driving connection with the driving piece 400 of the coil stock device, so that the coil stock shaft 300 can be used for carrying out coil stock treatment on a sample 500 to be deposited, which is wound on the coil stock shaft, the assembly efficiency of the atomic layer deposition equipment is improved, all parts of the atomic layer deposition equipment are convenient to assemble, and the time required by assembly is saved.
In order to facilitate the installation of the roll shaft 300 and the two bearing seats, and improve the assembly efficiency, referring to fig. 6 to 8, in an embodiment, the opposite sides of the first safety chuck 110 and the second safety chuck 210 are provided with the installation openings 100A for installing the two ends of the roll shaft 300. Referring mainly to fig. 7, a positioning pin 101 is disposed on an inner wall of the mounting opening 100A, the mounting opening 100A is provided with an abutment arm 102 protruding outwards, and the abutment arm 102 is provided with a guide groove 1021. Referring to fig. 6 and 8, grooves 301 adapted to the positioning pins 101 are formed in the peripheral walls of the two ends of the material rolling shaft 300, guide blocks 302 are respectively and circumferentially arranged at positions, close to the grooves 301, of the two ends of the material rolling shaft 300, the positioning pins 101 abut against the grooves 301, and the guide blocks 302 are clamped in the guide grooves 1021, so that the material rolling shaft 300 is fixed between the first safety chuck 110 and the second safety chuck 210 and can rotate relatively. A pair of bearings are disposed in the first safety chuck 110 and the second safety chuck 210 to realize a rotational connection. So set up, when promoting assembly efficiency, also reached certain joint strength.
Referring to fig. 6 and 7, further, in the present embodiment, the outer walls of the first safety chuck 110 and the second safety chuck 210 are sleeved with the fastening dial 104, and the outer wall of the fastening dial 104 is inserted with a limiting pin 1041 for limiting the position of the fastening dial 104 relative to the first safety chuck 110 and the second safety chuck 210; the securing dial 104 is used to lock the fixed spool 300 fully installed between the first safety collet 110 and the second safety collet 210.
It can be appreciated that the safety of the atomic layer deposition apparatus is enhanced by providing the fastening dials 104 on the two safety chucks, so that the connection between the roll shaft 300 and the safety chucks is more fastened.
During assembly, the guide blocks 302 can be firstly installed on the coil stock shaft 300, then the coil stock shaft 300 is lifted in the air, the guide blocks 302 are aligned with the guide grooves 1021 on the first safety chuck 110 and the second safety chuck 210, the grooves 301 at the two ends of the guide blocks are aligned with the positioning pins 101 at the mounting port 100A, then the coil stock shaft 300 is slowly placed into the mounting port 100A, the limiting pins 1041 on the fastening driving plate 104 of the first safety chuck 110 and/or the second safety chuck 210 are pressed, the fastening driving plate 104 is moved along the direction close to the coil stock shaft 300, and the two ends of the coil stock shaft 300 are completely clamped into and fixed in the mounting port 100A between the first safety chuck 110 and the second safety chuck 210.
In an embodiment, the guide block 302 is of a split type design, referring to fig. 6 and 7, the guide block 302 includes a locking member 3021 and a non-closed annular clamping member 3022, the shape of the clamping member 3022 is adapted to the shape of the corresponding positions of the two ends of the winding shaft 300, the inner side of the clamping member 3022 abuts against the winding shaft 300 and is detachably locked and fixed by the locking member 3021, and the outer side of the ring of the clamping member 3022 abuts against the guide groove 1021, so that the guide block 302 is clamped into the guide groove 1021. When the coil stock shaft 300 and the two safety chucks are installed, the outer wall of the outer side of the ring of the clamping piece 3022 slides into the guide groove 1021 to play a certain guiding role, and the installation efficiency of the coil stock shaft 300 and the safety chucks is improved.
Further, threaded holes are formed in the clamping member 3022 and the locking member 3021, and the clamping member 3022 is connected with the locking member 3021 through screws. Of course, the rivet connection may be used herein, and the like, and is not limited herein.
It should be noted that the number of the grooves 301 at the two ends of the winding shaft 300 may be set to be more than 2, and the grooves 301 are circumferentially and uniformly disposed on the outer walls at the two ends of the winding shaft 300. In this embodiment, in order to facilitate handling and alignment during installation, the number of grooves 301 at both ends of the roll shaft 300 is set to 3 groups and uniformly distributed along the circumferential direction of the outer wall thereof. Of course, for convenience of processing, only one set of grooves may be provided, and the number, the size, and the like thereof are not limited.
Referring to fig. 8 and 9, in one embodiment, the roll shaft 300 is an expansion shaft, and a tensioning mechanism 310 is mounted on the expansion shaft, and the tensioning mechanism 310 is used to tightly attach the sample 500 to be deposited on the expansion shaft.
It should be noted that, the coil fixing device is installed in the vacuum chamber, and the tensioning mechanism 310 of the expansion shaft is usually an inflatable air bag, and the air bag is easily broken under the condition of being pressed, so that the air in the air bag leaks into the vacuum chamber to pollute the reaction gas in the vacuum chamber, and meanwhile, the material wound on the air bag becomes unstable.
In this regard, the present invention adopts a mechanical tensioning mechanism 310, referring to fig. 9, the tensioning mechanism 310 includes a body 311, a screw rod 3111, a first wedge 3112 and a second wedge 3113, the body 311 is provided with a mounting cavity 311A and a receiving groove 311B, the screw rod 3111 is mounted in the mounting cavity 311A of the body 311, and is limited to rotate by a nut sleeved on the screw rod 3111, two ends of the screw rod 3111 can abut against an elastic member such as a spring, so that the screw rod 3111 can move axially relative to the body 311, the first wedge 3112 is movably sleeved on the screw rod 3111, and the second wedge 3113 is mounted in the receiving groove 311B of the outer wall of the body 311 and abuts against the first wedge 3112 and can move relatively. When the screw rod 3111 moves axially along the body 311, the first wedge-shaped block 3112 is driven to move axially along the body 311, and the first wedge-shaped block 3112 pushes the second wedge-shaped block 3113 abutting against the first wedge-shaped block to move along the direction perpendicular to the body 311, so that the sample 500 to be deposited is tightly attached to the winding shaft 300, and the effect that the sample 500 to be deposited is wrinkled to affect the atomic layer deposition product while the production and manufacturing are prevented from being affected by air leakage of the air bag is avoided.
In some embodiments, referring to fig. 1, the driving member 400 may include a supporting base 430, a driving motor 410 mounted on the supporting base 430, and a rotating shaft 420 rotatably connected with the driving motor 410. The rotating shaft 420 is rotatably connected with the connecting shaft 105 of the first safety chuck 110, so that the driving motor 410 is connected with the first safety chuck 110.
It should be noted that, the atomic layer deposition apparatus generally includes two coil fixing devices and a reaction chamber disposed between the two coil fixing devices, where one coil fixing device is used for discharging materials into the reaction chamber, and the reaction chamber performs an atomic layer deposition reaction on the sample 500 to be deposited, which is transferred by the reaction chamber, and then winds up the deposited sample by another coil fixing device.
The foregoing description is only of the optional embodiments of the present invention, and is not intended to limit the scope of the invention, and all the equivalent structural changes made by the description of the present invention and the accompanying drawings or the direct/indirect application in other related technical fields are included in the scope of the invention.
Claims (4)
1. An atomic layer deposition apparatus, comprising:
the atomic layer deposition device is used for carrying out deposition treatment on a sample to be deposited;
a coil holder for mounting a sample to be deposited for transporting the sample to be deposited into or withdrawing the sample from the atomic layer deposition apparatus; the coil stock fixing device comprises a first bearing seat, a second bearing seat, a coil stock shaft and a driving piece, wherein a first safety chuck is arranged on the first bearing seat; the second bearing seat is arranged opposite to the first bearing seat, and a second safety chuck is arranged on the second bearing seat; the material rolling shaft is provided with an opposite installation end and a driving end, the installation end is rotationally connected with the second safety chuck, and the driving end is rotationally connected with the first safety chuck and is in driving connection with the driving piece, so that the material rolling shaft is used for carrying out material rolling treatment on a sample to be deposited which is wound and arranged on the material rolling shaft;
the coil stock axle is the inflation axle, install straining device on the inflation axle, straining device is used for waiting to deposit the sample hug closely in on the inflation axle, straining device includes:
the body is provided with an installation cavity and a containing groove;
the screw rod is arranged in the installation cavity of the body, the screw rod is limited to rotate by a nut sleeved on the screw rod, and the screw rod can move along the axial direction of the screw rod relative to the body;
the first wedge-shaped block is movably sleeved on the screw rod;
the second wedge-shaped block is arranged in the accommodating groove of the outer wall of the body, is abutted with the first wedge-shaped block and can move relatively;
when the screw rod axially moves along the body, the first wedge-shaped block is driven to axially move along the body, and the first wedge-shaped block pushes the second wedge-shaped block which is abutted against the first wedge-shaped block to move along the direction vertical to the body;
the two ends of the material winding shaft are provided with a first safety chuck and a second safety chuck, the two ends of the material winding shaft are provided with a first safety chuck, the first safety chuck and the second safety chuck are respectively provided with a second safety chuck, the second safety chuck is respectively provided with a second safety chuck, the first safety chuck is provided with a second safety chuck, the second safety chuck is provided with a second safety chuck, and the second safety chucks are respectively provided with a second safety chuck;
grooves matched with the positioning pins are formed in the peripheral walls of the two ends of the material rolling shaft, guide blocks are respectively arranged at the positions, close to the grooves, of the two ends of the material rolling shaft in a surrounding mode, the positioning pins are abutted to the grooves and clamp the guide blocks into the guide grooves, and therefore the material rolling shaft is fixed between the first safety clamping head and the second safety clamping head and can rotate relatively;
the outer walls of the first safety chuck and the second safety chuck are sleeved with a fastening driving plate, limiting pins for limiting the positions of the fastening driving plate relative to the first safety chuck and the second safety chuck are inserted into the outer walls of the fastening driving plate, and the fastening driving plate is used for locking and fixing the coiling shaft, the first safety chuck and the second safety chuck;
the guide block comprises a locking piece and a clamping piece which is in a non-closed ring shape, the shape of the clamping piece is matched with the shape of the corresponding positions of the two ends of the material winding shaft, the inner side of the ring of the clamping piece is abutted to the material winding shaft and detachably locked and fixed through the locking piece, and the outer side of the ring of the clamping piece is abutted to the guide groove so that the guide block is clamped into the guide groove.
2. The atomic layer deposition apparatus according to claim 1, wherein the clamping member and the locking member are provided with threaded holes arranged opposite to each other, and the clamping member is screwed to the locking member.
3. The atomic layer deposition apparatus according to claim 1, wherein the number of grooves at both ends of the winding shaft is 2 or more, and the grooves are circumferentially uniformly formed on the outer walls of both ends of the winding shaft.
4. The atomic layer deposition apparatus according to claim 1, wherein the driving member includes a support base, a driving motor provided on the support base, and a rotating shaft drivingly connected to the driving motor, the driving motor being connected to the first safety chuck through the rotating shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010348312.7A CN111364024B (en) | 2020-04-27 | 2020-04-27 | Atomic layer deposition apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010348312.7A CN111364024B (en) | 2020-04-27 | 2020-04-27 | Atomic layer deposition apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103966572A (en) * | 2013-02-05 | 2014-08-06 | 王东君 | Roll-to-roll atomic layer deposition apparatus and application method thereof |
| CN106917074A (en) * | 2017-03-28 | 2017-07-04 | 华中科技大学 | One kind circulation takeup type atomic layer deposition apparatus |
| CN209222916U (en) * | 2018-11-16 | 2019-08-09 | 杭州金仕达汽车科技有限公司 | A kind of servo leveling feeding device |
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| US11306395B2 (en) * | 2017-06-28 | 2022-04-19 | Asm Ip Holding B.V. | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103966572A (en) * | 2013-02-05 | 2014-08-06 | 王东君 | Roll-to-roll atomic layer deposition apparatus and application method thereof |
| CN106917074A (en) * | 2017-03-28 | 2017-07-04 | 华中科技大学 | One kind circulation takeup type atomic layer deposition apparatus |
| CN209222916U (en) * | 2018-11-16 | 2019-08-09 | 杭州金仕达汽车科技有限公司 | A kind of servo leveling feeding device |
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