CN212597355U

CN212597355U - Semiconductor photoetching plate cleaning device

Info

Publication number: CN212597355U
Application number: CN202021006667.XU
Authority: CN
Inventors: 韩波
Original assignee: Hans Automation Technology Jiangsu Co ltd
Current assignee: Hans Semiconductor Jiangsu Co ltd
Priority date: 2020-06-04
Filing date: 2020-06-04
Publication date: 2021-02-26
Anticipated expiration: 2030-06-04

Abstract

The utility model is suitable for the technical field of photoetching plate cleaning, and discloses a semiconductor photoetching plate cleaning device, which comprises a casing; the middle of the top end of the casing is provided with a motor, a motor shaft of the motor penetrates through the inside of the casing, driving teeth are fixed at the tail end of the motor shaft of the motor, bearings are arranged at the top end of the inside of the casing, a plurality of groups of the bearings are uniformly arranged on the bearings, a rotating rod is mounted at the bottom end of each bearing, the bottom end of each rotating rod penetrates through the bottom of the casing, a cleaning cloth brush is arranged at the bottom end of each rotating rod, and driven teeth are arranged on the outer; the dorsal part of casing bottom is fixed with the infusion board, and the apopore has been seted up on the surface of infusion board, and the inside right side of casing is provided with the water pump, and the end of intaking of water pump is connected with the inlet tube, and the play water end of water pump is connected with the outlet pipe. The utility model discloses chassis bottom is provided with out water mechanism and clearance mechanism, can carry out quick clearance to attaching to photoetching board impurity, and clearance mechanism adopts electric drive, plays the effect of quick clearance, improves the convenience on clearance photoetching board surface.

Description

Semiconductor photoetching plate cleaning device

Technical Field

The utility model is suitable for a photoetching board washs technical field, especially relates to a semiconductor photoetching board belt cleaning device.

Background

At present, photoetching is a key process for manufacturing a semiconductor device and a micro-pattern structure of an integrated circuit, if a photoetching plate is not clean, pollution particles exist, and the particles can be copied to photoresist on the surface of a silicon wafer to cause the performance reduction of the device.

However, the photolithography mask inevitably sticks with dust, photoresist and other contaminants during the use process, the existence of these contaminants directly affects the photolithography effect, and if the efficient cleaning is not achieved, the production quality and the service life of the equipment are greatly reduced.

SUMMERY OF THE UTILITY MODEL

The utility model provides a pair of semiconductor photoetching board belt cleaning device, chassis bottom are provided with out water mechanism and clearance mechanism, can carry out quick clearance to attaching to photoetching board impurity, and clearance mechanism adopts electric drive, play the effect of quick clearance, improve the convenience on clearance photoetching board surface, have solved the problem that proposes in the background art.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a cleaning device for a semiconductor photolithography plate comprises a casing;

the middle of the top end of the casing is provided with a motor, a motor shaft of the motor penetrates through the inside of the casing, driving teeth are fixed at the tail end of the motor shaft of the motor, bearings are arranged at the top end of the inside of the casing, a plurality of groups of the bearings are uniformly arranged on the bearings, a rotating rod is mounted at the bottom end of each bearing, the bottom end of each rotating rod penetrates through the bottom of the casing, a cleaning cloth brush is arranged at the bottom end of each rotating rod, and driven teeth are arranged on the outer;

the dorsal part of casing bottom is fixed with the infusion board, and the apopore has been seted up on the surface of infusion board, and the inside right side of casing is provided with the water pump, and the end of intaking of water pump is connected with the inlet tube, and the play water end of water pump is connected with the outlet pipe, and the end of outlet pipe is linked together with the lateral wall of infusion board, and the both sides on casing top all are fixed with the handle.

Preferably, the outer wall of the driving tooth is sleeved with a chain, and the driving tooth is connected with the driven tooth through the chain.

Preferably, the outer wall of the bearing is fixed at the top end of the interior of the casing, and the top of the rotating rod is fixedly connected with the rotating wall of the bearing.

Preferably, the infusion plate is hollow inside.

Preferably, a switch is arranged on the left side of the casing and electrically connected with the motor.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses a chassis bottom is provided with out water mechanism and clearance mechanism, can carry out quick clearance to attaching to photoetching board impurity, and clearance mechanism adopts electric drive, plays the effect of quick clearance, improves the convenience on clearance photoetching board surface.

2. The utility model discloses a drive tooth is rotatory by the driven tooth of chain drive multiunit, makes the motor can drive the multiunit bull stick simultaneously rotatory, drives the cleaning cloth brush and rotates simultaneously, and the efficiency of use is improved to the consumption of the energy can be saved.

Drawings

Fig. 1 is a schematic view of the overall structure of a semiconductor photolithography plate cleaning apparatus according to the present invention;

fig. 2 is a schematic view of a bottom structure of a case of the semiconductor photolithography mask cleaning apparatus according to the present invention.

In the figure: 1. a housing; 2. a motor; 3. a driving tooth; 4. a bearing; 5. a rotating rod; 6. cleaning a cloth brush; 7. a switch; 8. a driven tooth; 9. a chain; 10. a handle; 11. a transfusion plate; 12. a water outlet hole; 13. a water pump; 14. a water inlet pipe; 15. and (5) discharging a water pipe.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

In the description of the present invention, it should be noted that, unless explicitly stated or limited otherwise, the terms "mounted," "connected" and "disposed" are to be interpreted broadly, and may be, for example, fixedly connected, disposed, detachably connected, disposed, or integrally connected and disposed; the utility model discloses in the model of providing with electrical apparatus only refer to, can be through changing the different models that the function is the same according to the actual use condition with electrical apparatus, to the ordinary technical personnel in this field, can understand that above-mentioned term is in by particular case the utility model provides a concrete meaning.

Referring to fig. 1-2, a cleaning apparatus for a semiconductor photolithography plate includes a housing 1;

the middle of the top end of the machine shell 1 is provided with a motor 2, a motor shaft of the motor 2 penetrates through the interior of the machine shell 1, the tail end of the motor shaft of the motor 2 is fixedly provided with a driving tooth 3, the top end of the interior of the machine shell 1 is provided with bearings 4, the bearings 4 are uniformly provided with a plurality of groups, the bottom end of each bearing 4 is provided with a rotating rod 5, the bottom end of each rotating rod 5 penetrates through the bottom of the machine shell 1, the bottom end of each rotating rod 5 is provided with a cleaning cloth brush 6, and the outer wall of each rotating;

the dorsal part at casing 1 bottom is fixed with infusion board 11, and delivery orifice 12 has been seted up on the surface of infusion board 11, and the inside right side of casing 1 is provided with water pump 13, and the end of intaking of water pump 13 is connected with inlet tube 14, and the play water end of water pump 13 is connected with outlet pipe 15, and the end of outlet pipe 15 is linked together with infusion board 11's lateral wall, and the both sides on casing 1 top all are fixed with handle 10.

In this embodiment, referring to fig. 1, a water outlet mechanism and a cleaning mechanism are disposed at the bottom of the casing 1, so that impurities attached to the photolithography mask can be quickly cleaned, and the cleaning mechanism is driven by electric power to achieve a quick cleaning effect, thereby improving convenience in cleaning the surface of the photolithography mask.

Wherein, the outer wall of the driving tooth 3 is sleeved with a chain 9, and the driving tooth 3 is connected with the driven tooth 8 through the chain 9.

Wherein, the outer wall of bearing 4 is fixed in the top of casing 1 inside, and the top of bull stick 5 and the rotating wall fixed connection of bearing 4.

The inside of the infusion plate 11 is hollow.

Wherein, the left side of casing 1 is provided with switch 7, and switch 7 is electric connection with motor 2.

The utility model discloses during the use: 14 ends of inlet tube are put into the water source, behind the external circular telegram wire, handheld handle 10, place the surface at the photoetching board with the bottom of casing 1, switch 7 starts water pump 13 and the operation of motor 2, water pump 13 will drive the water source and get into in outlet pipe 15, finally get into the inside of infusion board 11, by apopore 12 blowout, fall on clearance cloth brush 6, motor 2's motor shaft drives the rotation of driving tooth 3, driving tooth 3 is rotatory through 9 driven teeth 8 of chain drive, driven tooth 8 will drive bull stick 5 this moment and rotate based on bearing 4, multiunit clearance cloth brush 6 will take place the rotation simultaneously, carry out quick washing to the photoetching board surface, improve the convenience of wasing the photoetching board, the design is simple, and is comparatively practical.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. A cleaning device for a semiconductor photoetching plate is characterized by comprising a machine shell (1);

the middle of the top end of the machine shell (1) is provided with a motor (2), a motor shaft of the motor (2) penetrates through the machine shell (1), the tail end of the motor shaft of the motor (2) is fixedly provided with a driving tooth (3), the top end of the interior of the machine shell (1) is provided with a bearing (4), a plurality of groups of bearings (4) are uniformly arranged, the bottom end of the bearing (4) is provided with a rotating rod (5), the bottom end of the rotating rod (5) penetrates through the bottom of the machine shell (1), the bottom end of the rotating rod (5) is provided with a cleaning cloth brush (6), and the outer wall of the rotating rod (5) is provided with a;

the back side of the bottom end of the casing (1) is fixed with a transfusion plate (11), a water outlet hole (12) is formed in the surface of the transfusion plate (11), a water pump (13) is arranged on the right side inside the casing (1), the water inlet end of the water pump (13) is connected with a water inlet pipe (14), the water outlet end of the water pump (13) is connected with a water outlet pipe (15), the tail end of the water outlet pipe (15) is communicated with the side wall of the transfusion plate (11), and handles (10) are fixed on the two sides of the top end of the casing (1.

2. A semiconductor photolithography tool cleaning apparatus according to claim 1, wherein a chain (9) is sleeved on an outer wall of the driving tooth (3), and the driving tooth (3) is connected to the driven tooth (8) through the chain (9).

3. A cleaning apparatus for a semiconductor photolithography tool according to claim 1, wherein the outer wall of the bearing (4) is fixed to the top of the inside of the housing (1), and the top of the rotating shaft (5) is fixedly connected to the rotating wall of the bearing (4).

4. A cleaning apparatus for a semiconductor photolithography plate according to claim 1, wherein the inside of the liquid feed plate (11) is hollow.

5. A cleaning apparatus for a semiconductor reticle according to claim 1, wherein a switch (7) is provided on the left side of the housing (1), the switch (7) being electrically connected to the motor (2).