CN212586432U - Optical signal acquisition device for electric excitation component, optical parameter testing device and equipment - Google Patents

Optical signal acquisition device for electric excitation component, optical parameter testing device and equipment Download PDF

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Publication number
CN212586432U
CN212586432U CN202021955726.8U CN202021955726U CN212586432U CN 212586432 U CN212586432 U CN 212586432U CN 202021955726 U CN202021955726 U CN 202021955726U CN 212586432 U CN212586432 U CN 212586432U
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light
light guide
optical
integrating sphere
electric excitation
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韦日文
杨应俊
沈杰
刘振辉
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Silicon Electric Semiconductor Equipment Shenzhen Co ltd
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Silicon Electric Semiconductor Equipment Shenzhen Co ltd
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Abstract

The utility model discloses an electric excitation components and parts light signal acquisition device, optical parameter testing arrangement and equipment. The optical signal acquisition device of the electric excitation component comprises a test electrode fixedly connected to the rack and used for conducting current to the electric excitation component; the supporting part positively corresponds to the test electrode along a first direction and is connected to the test electrode along the first direction in a moving way; the mode of leading the electric excitation component to be close to the testing electrode actively and leading in charges is adopted, so that the flatness of the electric excitation component relative to the testing electrode is ensured, and the testing accuracy is ensured.

Description

Optical signal acquisition device for electric excitation component, optical parameter testing device and equipment
Technical Field
The utility model relates to an electric excitation components and parts light signal acquisition device, optical parameter testing arrangement and equipment.
Background
The electric excitation component refers to a part, a device or equipment which realizes a specific function by using electric energy; for testing optical signals of an electric excitation component with an optical function, the electric excitation component needs to conduct current and collect light emitted by the electric excitation component.
The LED core particles are electrode components which utilize electric energy to emit light, the conventional test is that the LED core particles are adhered to a blue film, and the area of the blue film adhered with the LED core particles is adhered to a horizontally arranged slide holder; however, as the size of the LED wafer is larger and larger, the area of the LED core particles adhered to the blue film is larger and larger, which causes the area of the slide bearing table to be set larger, and increases the flatness processing difficulty of the slide bearing table; meanwhile, the LED core particles are smaller and smaller, and the flatness of the slide holder needs to be improved continuously so as to ensure the test accuracy of the LED core particles.
Conventionally testing an electric excitation component, and actively abutting a testing electrode against a bonding pad of the electric excitation component; the test of a large number of electric excitation components is difficult to ensure that all the electric excitation components are smooth relative to the test electrodes, thereby influencing the test.
SUMMERY OF THE UTILITY MODEL
For solving above-mentioned technical problem at least partially, the utility model provides an electric excitation components and parts optical signal collection system, optical parameter testing arrangement and equipment.
The technical scheme of the utility model is that: an optical signal acquisition device for an electric excitation component,
the test electrode is fixedly connected with the rack and used for conducting current to the electric excitation component;
and the supporting part positively corresponds to the test electrode along the first direction and is connected to the test electrode along the first direction in a moving manner.
Furthermore, the optical signal acquisition device of the electric excitation component comprises a first optical signal acquisition part,
the first optical signal acquisition part is arranged right opposite to the light-emitting side of the electric excitation component.
Furthermore, the first optical signal acquisition part is an integrating sphere provided with a light receiving port, light enters the integrating sphere through the light receiving port, and the light receiving port faces the supporting part;
the supporting part comprises a light guide part, and the light guide part is arranged between the integrating sphere and the testing electrode; the light outlet of the light guide part is communicated with the light receiving port of the integrating sphere; the light guide part is movably connected with the integrating sphere.
Further, the light guide part includes,
the light guide pipe is provided with a light outlet at one end;
and the light transmitting resisting part is connected with the light guide pipe, one end of the light transmitting resisting part is communicated with the light outlet, and the area of the light transmitting resisting part is smaller than that of the light outlet.
Furthermore, the light guide pipe penetrates through the light receiving opening and extends into the integrating sphere.
Furthermore, the light guide pipe is provided with a light guide channel, one end of the light guide channel is connected to the light-transmitting abutting portion, and one end of the light guide channel, which is far away from the light-transmitting abutting portion, is a light outlet.
Further, a diffuse reflection coating is adhered to the inner wall of the light guide channel.
Furthermore, the light guide channel is in a horn mouth-shaped structure gradually enlarged from the part close to the light transmitting stopping part to the light outlet.
Further, the light guide part is connected with the integrating sphere through a slide rail sliding groove.
Further, the linear motion direction that the slide rail spout was injectd is on a parallel with the light transmission direction in the light guide part.
Further, the light outlet of the light guide part corresponds to the light receiving opening of the integrating sphere.
Further, the area of a light outlet of the light guide part is smaller than the area of a light receiving opening of the integrating sphere.
An optical parameter testing device comprises the electric excitation component optical signal acquisition device and a spectrometer connected with the electric excitation component optical signal acquisition device through an optical fiber.
Furthermore, a light blocking sheet is arranged inside the integrating sphere and is positioned between the light receiving port and the integrating sphere port connected with the optical fiber.
An optical parameter testing device comprises the electric excitation component optical signal acquisition device.
An optical parameter testing device comprises the optical parameter testing device.
Furthermore, the test electrode comprises two test probes for respectively connecting two first bonding pads on the electric excitation component.
Furthermore, the two test probes are arranged on the same probe card.
Furthermore, the test probes are respectively installed on first needle bases, and the first needle bases are three-dimensional adjusting needle bases.
Further, the optical parameter testing device comprises,
the plane motion mechanism is positioned between the light guide part and the testing electrode and is arranged in a hollow mode;
and a fixing part connected to the plane movement mechanism.
Further, the fixing part is provided with a magnetic adsorption part.
Further, the fixing portion is provided with a vacuum adsorption hole facing the test electrode.
Furthermore, the fixed part is provided with a limiting clamping groove parallel to the plane motion mechanism adjusting plane.
The beneficial effects of the utility model reside in that: the mode of leading the electric excitation component to be close to the testing electrode actively and leading in charges is adopted, so that the flatness of the electric excitation component relative to the testing electrode is ensured, and the testing accuracy is ensured.
Drawings
Fig. 1 is a schematic diagram of an electric excitation device according to the present invention;
FIG. 2 is a schematic diagram showing the relationship between the testing electrodes, the supporting portions and the electric excitation devices before testing;
FIG. 3 is a schematic view of the test electrode and the support portion directly connected by a linear motion mechanism according to the present invention;
FIG. 4 is a schematic view of the test electrode of the present invention indirectly connected to the supporting portion via the linear motion mechanism;
FIG. 5 is a first embodiment of a position diagram of a first optical signal collection site;
FIG. 6 is a schematic view of a second embodiment of the position of the first optical signal collection part;
FIG. 7 is a third embodiment of a position diagram of a first optical signal collection site;
FIG. 8 is a schematic structural diagram of the first optical signal collecting part being an integrating sphere;
FIG. 9 is a schematic view of a structure of a light pipe disposed on the substrate of FIG. 8;
FIG. 10A is a first embodiment of a light pipe;
FIG. 10B is a second embodiment of a light pipe;
FIG. 11A is a schematic view of a first view of a light pipe with a tapered channel therein;
FIG. 11B is a schematic axial cross-sectional view of a light pipe with a tapered channel therein;
FIG. 12 is a schematic axial cross-sectional view of a light pipe with built-in composite tapered channels;
FIG. 13A is a schematic view of a first view of a light pipe with a planar combined channel therein;
FIG. 13B is a schematic axial cross-sectional view of a light pipe with a planar combination channel therein;
fig. 14A is a first schematic view of the connection between the light guide portion and the integrating sphere through the slide groove;
fig. 14B is a second schematic view of the connection between the light guide portion and the integrating sphere through the slide groove;
FIG. 15 is a schematic structural view of a light-emitting port directly facing a corresponding light-receiving port;
FIG. 16 is a schematic structural diagram of an optical parametric measurement device;
FIG. 17 is a schematic structural diagram of an optical parameter testing device with a planar motion mechanism;
FIG. 18A is a schematic view showing the positional relationship of the light-emitting side of the device facing away from the pad side before testing;
fig. 18B is a schematic diagram showing a positional relationship of the light-emitting side away from the pad-side element during the test.
Detailed Description
In order to facilitate the understanding of the technical solutions of the present invention for those skilled in the art, the technical solutions of the present invention will be described in further detail with reference to specific embodiments.
It should be noted that the description of the present embodiment refers to a detailed description of each component or structure, and does not indicate that each component or structure cannot be combined; the related parts or structures are combined according to the principle that the scheme can be realized, and the corresponding technical scheme can be formed.
As shown in fig. 1, fig. 2, fig. 3 and fig. 4, an electrical excitation component 101 is an optical signal acquisition device 100, where the electrical excitation component refers to a component or a part capable of generating an optical signal by using electrical energy, and includes but is not limited to an LED core particle, a module with a light emitting function, or other structure or device capable of converting electrical energy into optical energy; the components and parts herein should not be construed as limitations on the volume, size, and function of the objects used in the inventive solution;
a test electrode 20 fixedly connected to the frame 102 for conducting current to the electrical excitation component 101; the conduction current of the electrical excitation component 101 and the test electrode includes contact conduction and non-contact conduction, i.e. the manner of the conduction current of the electrical excitation component 101 and the test electrode 20 should not be limited herein; the test electrode 20 herein is not limited to a shape or a specification, and a structure capable of transferring electric charges to other components or a noncontact transfer should be construed as the test electrode 20 herein; the test electrode 20 is fixed on the frame 102 only for expressing that the test electrode 20 cannot move relative to the frame 102 in the test electric excitation component 101, and not for limiting that the test electrode 20 cannot have a position adjustment function relative to the frame 102;
the supporting part 30 is opposite to the test electrode 20 along the first direction a and is movably connected with the test electrode 20 along the first direction a; the supporting portion 30 is opposite to the test electrode 20 along the first direction a, and is used for expressing that, in the process that the electric excitation component 101 approaches the test electrode 20, the structure that the supporting portion 30 is electrically connected to the electric excitation component 101 can be electrically connected to the pad 1011 of the electric excitation component 101, and the pad 1011 here is a port for electrically connecting the electric excitation component 101 and is not used for limiting the shape, size or structure of the electric excitation component 101 at which charges are introduced; during testing, the supporting part 30 moves to convey the electric excitation component 101 to a position close to the testing electrode 20, and the testing electrode 20 conducts the electric excitation component 101;
the supporting portion 30 is movably connected to the test electrode 20 along the first direction a, and whether other structures are connected to the supporting portion 30 and the test electrode 20 is not limited, and is only used for expressing that the supporting portion 30 has a moving function along the first direction a relative to the test electrode 20; kinematic coupling includes, but is not limited to, linear motion mechanism 21 coupled to support 30 and test electrode 20, respectively (see FIG. 3); or the test electrode 20 is fixed relative to the frame 102, and the supporting part 30 is connected to the frame 102 through the linear motion mechanism 21, so that the supporting part 30 can move relative to the test electrode 20 along the first direction a (as shown in fig. 4); the linear motion mechanism 21 includes, but is not limited to, a slide rail slider mechanism and a crank slider mechanism.
Adopt above-mentioned technical scheme: the pad 1011 of the electric excitation component 101 is opposite to the corresponding test electrode 20 along the first direction a, so that the supporting part 30 can move along the first direction a and stop against the electric excitation component 101, and the pad 1011 of the electric excitation component 101 is conducted with the test electrode 20; thereby meeting the requirement of leading in charges to the electric excitation component 101; the mode that the electric excitation component 101 is actively close to the testing electrode 20 and charges are introduced is adopted, so that the flatness of the electric excitation component 101 relative to the testing electrode 20 is convenient to ensure, and the testing accuracy is ensured.
As shown in fig. 5, 6 and 7, the optical signal collection device 100 includes a first optical signal collection unit 40, where the first optical signal collection unit 40 is an integrating sphere 41, an optical sensor, or the like, and can accommodate optical lines or components/parts/devices having a light sensing function and capable of generating parameter changes related to the optical lines;
the first optical signal acquisition part 40 is arranged right opposite to the light emitting side 1012 of the electric excitation component 101, so that the first optical signal acquisition part 40 can acquire optical signals generated by the electric excitation component 101 electrically connected to the test electrode 20; of course, the light emitting side 1012 of the electrical component 101 can be the same side (as in fig. 5)/away (as in fig. 7)/other side (as in fig. 6) with respect to the pad 1011, which is not limited herein.
Adopt above-mentioned technical scheme: the first optical signal acquisition part 40 can acquire light emitted after the electric excitation component 101 is led in current, so that optical acquisition of the electric excitation component 101 is completed; the light of the electric excitation component 101 can be collected or analyzed with optical parameters.
As shown in fig. 8, the first optical signal collecting part 40 is an integrating sphere 41 provided with a light receiving opening 411, light enters the integrating sphere 41 through the light receiving opening 411, and the light receiving opening 411 faces the supporting part 30;
the supporting part 30 comprises a light guide part 31 for guiding light from the supporting part 30 close to the light emitting side 1012 of the electric excitation component part 101 to the light outlet 311, and the light guide part 31 is arranged between the integrating sphere 41 and the test electrode 20; the light outlet 311 of the light guide part 31 is communicated with the light receiving port 411 of the integrating sphere 41, so that light emitted by the electric excitation component 101 is irradiated to the light receiving port 411 through the light guide part 31 and enters the integrating sphere 41, where the light outlet 311 is communicated with the light receiving port 411 and only used for limiting that the light emitted by the light receiving port 411 can enter the integrating sphere 41 and is not used for limiting that the light outlet 311 is in certain positive correspondence or contact with the light receiving port 411, for example, for the electric excitation component 101 with high power, even if a gap exists between the light outlet 311 and the light receiving port 411 to leak light, the test requirement can be met; the light outlet 311 is communicated with the light receiving port 411 through an optical fiber or other optical transmission channels, so that the light outlet 311 can be transmitted into the light receiving port 411; the light guide part 31 is movably connected to the integrating sphere 41, and the position of the light guide part 31 relative to the integrating sphere 41 can be adjusted; the integrating sphere 41 is used in the field of optical parameter testing of components, and a diffuse reflection layer is adhered to the hollow inner wall of the sphere, and the structure is used for enabling light rays emitted by the electric excitation component 101 to be uniform after being diffusely reflected by the integrating sphere 41.
As shown in fig. 9, the light guide part 31 includes,
a light guide pipe 312, one end of which is a light outlet 311, for transmitting the light emitted by the electric excitation component 101 to the integrating sphere 41; the light guide 312 is a structure capable of irradiating light along a predetermined path, and functions like a water pipe; however, the structure of the light pipe 312 cannot be limited by the structure of the water pipe, because the water pipe has a hollow structure; the light guide 312 is not limited to a hollow structure, but a transparent structure capable of penetrating light also belongs to the content limited by the light guide 312;
the light-transmitting resisting part 313 connected with the light guide pipe 312 supports the electric component 101 and facilitates light rays emitted by the electric component 101 to penetrate through the light guide part 31, so that the light-transmitting resisting part 313 is made of materials such as glass and light-transmitting plastics; one end of the light-transmitting stopping part 313 is communicated with the light outlet 311, and the area of the light-transmitting stopping part 313 is smaller than that of the light outlet 311, so that the irradiation efficiency of the light outlet 311 is improved, and the loss of light on the light guide pipe 312 is reduced.
As shown in fig. 9, the light guide pipe 312 passes through the light receiving opening 411 and extends into the integrating sphere 41, so as to reduce light leakage caused by a connecting gap between the light guide part 31 and the integrating sphere 41, and improve light entering the integrating sphere 41 from the electric excitation component 101.
As shown in fig. 9, fig. 10A, and fig. 10B, the light guide tube 312 is provided with a light guide channel 3121, one end of the light guide channel 3121 is connected to the light-transmitting stop portion 313, and one end of the light guide channel 3121 away from the light-transmitting stop portion 3113 is a light outlet 311; that is, the light passing through the light-transmitting stop portion 313 is transmitted into the integrating sphere 41 along the linear channel via the light-guiding channel 3121; the light guide channel 3121 is wrapped with a non-light-transmitting layer 3122, so that light can irradiate the preset light outlet 311 along the preset light guide channel 3121; specifically including but not limited to,
the light guide channel 3121 is a hollow structure formed by a non-light transmissive layer 3122 (see fig. 10A); or the light guide channel 3121 is formed by wrapping the non-light-transmissive layer 3122 with a light-transmissive material (see fig. 10B).
Adopt above-mentioned technical scheme: so that the light can be irradiated along the preset direction of the light guide channel 3121 to reach the integrating sphere 41; the amount of light transmitted by the light pipe 312 is reduced, and the accuracy of light collection by the integrating sphere 41 is improved.
As shown in fig. 10A, a diffuse reflection coating is adhered to the inner wall of the light guide channel 3121, so that the light diffusion efficiency is enhanced, and the accuracy of transmitting light to the integrating sphere is improved.
As shown in fig. 11A and 11B, the light guide channel 3121 is a bell-mouth-shaped structure gradually enlarged from the position close to the light transmission stopping portion 313 to the light outlet 311; that is, the inner diameter of the light guide channel 3121 gradually increases along the preset irradiation direction of the light, so that the light is irradiated along the preset direction; the light guide channel 3121 here is a bell-mouth shaped structure, and does not limit the light guide channel 3121 to a continuous channel with smooth inner wall, nor to a channel of revolution along the axis of the light guide channel 3121; here, the light-guiding channel 3121 also has a plurality of tapered patches (as shown in fig. 12), and the inner wall is a planar patch (as shown in fig. 13A and 13B).
As shown in fig. 14A and 14B, the light guide portion 31 and the integrating sphere 41 are connected by a slide groove; namely, the light guide part 31 can realize relative linear motion relative to the integrating sphere 41 through the slide groove; of course, for the solution using the automated test, a driving source is also needed here to realize the automatic motion control of light guide part 31 with respect to integrating sphere 41; for laboratory or other use requirements, the driving source of the sliding track and sliding chute structure here can also adopt a manual adjustment mode, and is not limited here.
As shown in fig. 14A and 14B, the linear motion direction defined by the slide grooves is parallel to the light transmission direction in the light guide portion 31, that is, the light transmission path in the light guide portion 31 is a straight line, the straight line transmission path is the shortest, and the light loss is the least, so as to ensure the least light loss that can be transmitted to the integrating sphere 41.
As shown in fig. 15, the light outlet 311 of the light guide 31 faces the light receiving opening 411 of the integrating sphere 41, that is, the light outlet 311 is separated from the light receiving opening 411 (in non-contact), the structure is simple, and the efficiency of light propagating into the integrating sphere 41 is improved by using the characteristic of light propagating along a straight line; the area of the light outlet 311 of the light guide part 31 is smaller than the area of the light receiving opening 411 of the integrating sphere 41, and since part of the light rays are not perpendicular to the light receiving opening 411 due to the propagation direction after the light rays are propagated from the light outlet 311, the area of the light outlet 311 is smaller than the area of the light receiving opening 411, so that the light rays can be propagated into the integrating sphere 41 as much as possible, and the light ray dissipation is reduced.
As shown in fig. 1 to 16, an optical parameter testing apparatus 200, the optical parameter testing apparatus 200 includes an electrical excitation device optical signal acquisition apparatus 100 (as shown in any one of fig. 1 to 15) of any one of the above, and a spectrometer 60 connected to the electrical excitation device optical signal acquisition apparatus 200 through an optical fiber 50; the spectrometer 60 is an apparatus capable of analyzing or comparing optical parameters such as frequency, wavelength, light intensity, etc. of light, and the spectrometer 60 is not limited to have all the functions mentioned herein, and other apparatuses capable of analyzing light also belong to the technical features of the spectrometer 60 equivalent herein.
As shown in fig. 1 to 16, a light blocking sheet 412 is disposed inside the integrating sphere 40, and the light blocking sheet 412 is located between the light receiving port 411 and the integrating sphere port of the connecting optical fiber 50, so as to prevent light entering from the light receiving port 411 from directly irradiating the integrating sphere port of the connecting optical fiber 50, which causes a problem of parameter error in analysis of the spectrometer 60; that is, the light blocking sheet 412 is used to ensure that the light entering the integrating sphere 40 is subjected to diffuse reflection homogenization treatment inside the integrating sphere 40, and then is transmitted through the optical fiber to enter the spectrometer 60; the optical parameter result analyzed by the spectrometer 60 is ensured to be stable and reliable.
As shown in fig. 1 to 15, an optical parametric testing apparatus includes the above-mentioned optical signal acquisition device 100 for an electrical excitation device.
As shown in fig. 1 to 16, an optical parameter testing apparatus includes the optical parameter testing device 200.
As shown in fig. 2 to fig. 9, the testing electrode 20 includes two testing probes for respectively connecting two first pads 1011 on the electric excitation component 101, that is, one testing probe is correspondingly connected to one first pad 1011, so as to realize the electric connection of the electric excitation component 101 through the two first pads 1011.
As shown in fig. 2 to fig. 9, the two test probes are mounted on the same probe card, that is, the test probes for testing the test electrodes 20 of the electrical excitation component 101 are in a probe card structure; the test probes for testing the plurality of electric excitation components 101 are all arranged on the same pin card, so that the plurality of electric excitation components 101 are simultaneously subjected to pin card testing, and the test efficiency is improved.
As shown in fig. 2 to 9, the test probes are respectively mounted on first needle seats, and the first needle seats are three-dimensional adjusting needle seats; namely, the test probe can be adjusted through the spatial position of the first pin base so as to meet the requirement of the supporting part 30 for stopping the electrical connection after the electrical excitation component 101 is electrically excited; it should be noted that the three-dimensional adjusting pin seat herein can also be modified to be a structure that automatically adjusts to approach/depart from the electric excitation component 101, so as to satisfy the requirement of completing the test by adjusting the position of the test probe when the supporting portion 30 stops the electric excitation component 101 at a predetermined position.
As shown in fig. 17, the optical parameter testing apparatus includes,
a planar moving mechanism 70 disposed in a hollow space between the light guide part 31 and the test electrode 20;
and a fixing portion 71 connected to the planar motion mechanism 70; the fixing portion 71 is used to fix an LED core particle (an example of an electrode component 101) adhered to a blue film, and the hollow plane moving mechanism 70 facilitates the light guide portion 31 to pass through the plane moving mechanism 70 and stop against the blue film adhered to the core particle; in the disclosure of the present disclosure, the term "abutting" is not limited to direct contact, but should be interpreted as interaction, for example, the light guide portion 31 abutting against the LED core particle means that the light guide portion 31 applies a force to the LED core particle to drive the LED core particle to move, and a blue film is spaced between the light guide portion 31 and the LED core particle; the fixing portion 71 is provided with a magnetic adsorption portion for fixing the blue film with the LED core particles adhered thereto to the iron ring, and the iron ring is adsorbed by the magnetic adsorption portion to fix the LED core particles to the fixing portion 71; or the fixing part 71 is provided with a vacuum adsorption hole facing the test electrode 20 for vacuum fixing the blue film adhered with the LED core particles; or the fixing part 71 is provided with a limiting clamping groove parallel to the adjusting plane of the plane movement mechanism 70, the blue film adhered to the LED core particles is adhered to other fixing mechanisms such as an iron ring, a primary-secondary ring and the like, and then the other fixing mechanisms such as the iron ring, the primary-secondary ring and the like are fixed through the limiting clamping groove, so that the LED core particles are fixed relative to the fixing part 71.
As shown in fig. 18A and 18B, an optical parameter testing method in which the light emitting side is away from the land-side element 101a, here the light emitting side is away from the land-side element such as a flip-chip LED chip;
(1) arranging a light-emitting side element 101a facing away from the pad-side element 101a between the test electrode 20 and the light guide part 31 kinematically connected to the integrating sphere 41, wherein a light-emitting side 1012 facing away from the pad-side element 101a faces the light guide part 31, and a pad side facing away from the pad-side element 101a faces the test electrode 20; a pad 1011 is arranged on the side of the pad, and the relative position is preset, so that the pad can be conveniently executed according to a preset test method;
(2) the light guide part 31 moves to be stopped against the light emitting side 1012 of the light emitting side departing from the pad side element 101a, and the pad 1011 of the light emitting side departing from the pad side element 101a is conducted to the test electrode 20; the element 101a on the side of the light-emitting side, which is far away from the pad side, is electrically connected to the test electrode 20 and conducted, so that the circuit conduction before the test on the element 101a on the side of the light-emitting side, which is far away from the pad side, is realized;
(3) the light emitted from the pad-side element 101a on the light-emitting side is irradiated into the integrating sphere 41 through the light guide part 31; the light emitted by the test electrode 20 is conducted by the element 101a on the side of the light-emitting side away from the pad side, and enters the integrating sphere 41, so that the light emitted by the element 101a on the side of the light-emitting side away from the pad side is collected.
As shown in fig. 18, the integrating sphere 41 is provided with a light receiving opening 411, and the light receiving opening 41 directly faces the light guide unit 31; the path of the light entering integrating sphere 41 from light guide part 31 is shortened, thereby reducing the loss of the light; the accuracy of optical parameter testing of the pad-side element 101a on the light-emitting side is improved.
As shown in fig. 18A and 18B, the light guide part 31 includes,
a light guide pipe 312, light can be emitted from a preset path in the light guide pipe 312, thereby reducing the loss and overflow in the light irradiation process;
the light-transmitting stopping part 313 is connected with the light guide pipe 312, one end of the light-transmitting stopping part 313 is communicated with the light outlet 311, so that light can enter from the light-transmitting stopping part 313 and irradiate out from the light outlet 311 after passing through the light guide pipe 312; the area of the light-transmitting stopping part 313 is smaller than that of the light outlet 311; the light rays can conveniently pass through the light-transmitting stopping part 313 and the light guide pipe 312 in sequence along a preset path to enter the integrating sphere 41, and the loss and overflow of the light rays in the process of irradiating the integrating sphere 41 are reduced.
The above is the preferred embodiment of the present invention, and is not used to limit the protection scope of the present invention. It should be recognized that non-inventive variations and modifications to the disclosed embodiments, as understood by those skilled in the art, are intended to be included within the scope of the present invention as claimed and claimed.

Claims (23)

1. The utility model provides an electric excitation components and parts optical signal collection system which characterized in that:
the test electrode is fixedly connected with the rack and used for conducting current to the electric excitation component;
and the supporting part positively corresponds to the test electrode along the first direction and is connected to the test electrode along the first direction in a moving manner.
2. The device for collecting optical signals of an electro-active device as claimed in claim 1, wherein: the optical signal acquisition device of the electric excitation component comprises a first optical signal acquisition part,
the first optical signal acquisition part is arranged right opposite to the light-emitting side of the electric excitation component.
3. The device for collecting optical signals of an electro-active device as claimed in claim 2, wherein:
the first optical signal acquisition part is an integrating sphere provided with a light receiving port, light enters the integrating sphere through the light receiving port, and the light receiving port faces the supporting part;
the supporting part comprises a light guide part, and the light guide part is arranged between the integrating sphere and the testing electrode; the light outlet of the light guide part is communicated with the light receiving port of the integrating sphere; the light guide part is movably connected with the integrating sphere.
4. The device for collecting optical signals of an electro-active device as claimed in claim 3, wherein:
the light-guiding portion includes a light-guiding portion,
the light guide pipe is provided with a light outlet at one end;
and the light transmitting resisting part is connected with the light guide pipe, one end of the light transmitting resisting part is communicated with the light outlet, and the area of the light transmitting resisting part is smaller than that of the light outlet.
5. The device for collecting optical signals of an electro-active device as claimed in claim 4, wherein: the light pipe penetrates through the light receiving opening and extends into the integrating sphere.
6. The device for collecting optical signals of an electro-active device as claimed in claim 4, wherein: the light guide pipe is provided with a light guide channel, one end of the light guide channel is connected to the light-transmitting resisting part, and one end of the light guide channel, which is far away from the light-transmitting resisting part, is a light outlet.
7. The device for collecting optical signals of an electro-active device as claimed in claim 6, wherein: and a diffuse reflection coating is adhered to the inner wall of the light guide channel.
8. The device for collecting optical signals of an electro-active device as claimed in claim 6, wherein: the light guide channel is in a horn mouth-shaped structure gradually enlarged from the part close to the light transmitting abutting part to the light outlet.
9. The device for collecting optical signals of an electro-active device as claimed in claim 3, wherein: the light guide part is connected with the integrating sphere through a sliding rail and a sliding groove.
10. The device for collecting optical signals of an electro-active device as claimed in claim 9, wherein: the linear motion direction that the slide rail spout was injectd is on a parallel with light transmission direction in the light guide part.
11. The device for collecting optical signals of an electro-active device as claimed in claim 4, wherein: the light outlet of the light guide part is right corresponding to the light receiving opening of the integrating sphere.
12. The device for collecting optical signals of an electro-active device as claimed in claim 11, wherein: the area of a light outlet of the light guide part is smaller than that of a light receiving opening of the integrating sphere.
13. An optical parameter testing device, characterized in that: the optical parameter testing device comprises the electrical excitation component optical signal acquisition device as claimed in any one of claims 3 to 12, and a spectrometer connected to the electrical excitation component optical signal acquisition device through an optical fiber.
14. The optical parameter testing device of claim 13, wherein: and a light blocking sheet is arranged in the integrating sphere and is positioned between the light receiving port and the integrating sphere port connected with the optical fiber.
15. An optical parametric test device, characterized by: the optical parameter testing equipment comprises the electric excitation component optical signal acquisition device as claimed in any one of claims 1 to 12.
16. The optical parametric test device of claim 15, wherein: the optical parameter testing device comprises a light source,
the plane motion mechanism is positioned between the light guide part and the testing electrode and is arranged in a hollow mode;
and a fixing part connected to the plane movement mechanism.
17. The optical parametric test device of claim 16, wherein:
the fixing part is provided with a magnetic adsorption part.
18. The optical parametric test device of claim 16, wherein:
the fixing portion is provided with a vacuum adsorption hole facing the test electrode.
19. The optical parametric test device of claim 16, wherein:
the fixed part is provided with a limiting clamping groove parallel to the adjusting plane of the plane movement mechanism.
20. An optical parametric test device, characterized by: the optical parameter testing device comprises the optical parameter testing apparatus of any one of claims 13 and 14.
21. The optical parametric test device of claim 20, wherein: the test electrode comprises two test probes for respectively connecting two first bonding pads on the electric excitation component.
22. The optical parametric test device of claim 21, wherein: the two test probes are arranged on the same probe card.
23. The optical parametric test device of claim 21, wherein: the test probes are respectively installed on first needle bases, and the first needle bases are three-dimensional adjusting needle bases.
CN202021955726.8U 2020-09-09 2020-09-09 Optical signal acquisition device for electric excitation component, optical parameter testing device and equipment Active CN212586432U (en)

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