CN212585721U - Monolithic integration triaxial gyro based on tunnel magnetic resistance detection - Google Patents

Abstract

A monolithic integrated three-axis gyroscope based on tunnel magnetoresistive detection mainly structurally comprises a bonding substrate, a supporting frame, a sensitive mass block, an orthogonal beam, a driving beam, a detection beam, a connecting block, a cantilever beam, a driving magnet, a detection magnet, a tunnel magnetoresistive element and a signal wire; the driving magnet and the tunnel magneto-resistive element are arranged on the bonding substrate groove, the tunnel magneto-resistive element is arranged on the bonding substrate groove and corresponds to the detection magnet above the sensitive mass block, and the tunnel magneto-resistive element has high sensitivity characteristic on weak magnetic field change.

Description

Monolithic integration triaxial gyro based on tunnel magnetic resistance detection

Technical Field

The utility model belongs to a little inertial navigation's technical field, concretely relates to monolithic integration triaxial top based on tunnel magnetic resistance detects.

Background

The micromechanical gyroscope is a sensor for measuring angular velocity, is one of core devices of the inertial technology, and plays an important role in the fields of modern aerospace, industrial control, consumer electronics, national defense and military and the like.

At present, most of three-axis gyroscopes adopt single-axis gyroscopes for discrete integration, and the discrete integrated three-axis gyroscopes have the advantages of simple design, but show the problems of large volume, low integration level, high noise, especially slow starting time and low reliability; the monolithic integrated three-axis gyroscope is difficult to process, but has the advantages of small volume, high integration level, low noise and the like. With the continuous improvement of the MEMS technology, the monolithic integrated three-axis gyroscope for measuring the full-space angular velocity becomes a necessary trend for development, and the monolithic integrated three-axis gyroscope applied to an inertial guidance system can reduce the volume of the gyroscope, reduce the measurement error and further improve the detection precision of the gyroscope.

In addition, the common detection modes of the micro-mechanical gyroscope are a piezoresistive type, a piezoelectric type, a capacitance type, a resonant tunneling type, an electron tunneling type and the like, wherein the piezoresistive effect detection has low sensitivity and large temperature coefficient, so that the further improvement of the detection precision is limited; the sensitivity of the piezoelectric effect detection is easy to drift, needs to be corrected frequently, is slow to return to zero, and is not suitable for continuous testing; the capacitance detection adopts a comb tooth structure, the displacement resolution is high, the capacitance structure is suitable for MEMS process processing, but with further miniaturization, the comb tooth voltage is easy to breakdown, the attraction is invalid when the comb tooth is impacted transversely, and particularly, the precision requirement of the comb tooth manufacturing process is extremely high, the yield is low, and the development in the direction is restricted; the sensitivity of the resonant tunneling effect is one order of magnitude higher than that of the silicon piezoresistive effect, but the detection sensitivity obtained by testing is lower, and the problem exists that the bias voltage is easy to drift due to gyro driving, so that the gyro cannot stably work; the manufacturing process of the electronic tunnel effect type device is extremely complex, a detection circuit is relatively difficult to realize, the rate of finished products is low, the normal work is difficult, the integration is not facilitated, especially, the distance between the tunnel junction and the tunnel tip and the electrode plate is difficult to control at a nanometer level, and the normal work of the sensor cannot be guaranteed. Therefore, structural studies of new effect detection principles are urgently needed.

The tunnel magnetoresistance effect is based on the spin effect of electrons, a non-magnetic layer of an insulator or a semiconductor is arranged between a magnetic pinning layer and a magnetic free layer at intervals, when the magnetization direction of the magnetic free layer is changed under the action of an external field, but the magnetization direction of the pinning layer is not changed, the relative orientation of the magnetization of the two magnetic layers is changed, large resistance change can be observed on a magnetic tunnel junction crossing an insulating layer, the physical effect is based on the tunneling effect of electrons on the insulating layer, so the tunnel magnetoresistance effect is called as the tunnel magnetoresistance effect, has the advantages of high sensitivity, miniaturization and easiness in detection, and has the advantages of being applied to the detection of a single-chip three-axis gyroscope structure, so that the problem of angular velocity signal detection is solved, and related products do not exist in the technical field.

SUMMERY OF THE UTILITY MODEL

Purpose of the utility model

The utility model aims at solving the problems of large volume, low integration level, large noise and low reliability of the prior discrete integrated gyroscope by designing an electromagnetic drive and a single-chip integrated triaxial gyroscope detected by a tunnel magnetic resistance element aiming at the defects of the background art.

Technical scheme

A monolithic integrated triaxial gyroscope based on tunnel magnetoresistive detection comprises a bonding substrate, a supporting frame, an X-axis gyroscope sensitive mass block, a Y-axis gyroscope sensitive mass block, a Z-axis gyroscope sensitive mass block, a first tunnel magnetoresistive element, a second tunnel magnetoresistive element and a third tunnel magnetoresistive element;

at least three grooves for providing a motion space are arranged on the bonding substrate, and the first tunnel magnetoresistive element, the second tunnel magnetoresistive element and the third tunnel magnetoresistive element are symmetrically arranged in the grooves to form a single-chip integrated triaxial gyroscope;

and a supporting frame is arranged above the bonding substrate, a Z-axis gyroscope sensitive mass block is arranged in the middle of the supporting frame, and an X-axis gyroscope sensitive mass block and a Y-axis gyroscope sensitive mass block are respectively arranged at the two sides of the Z-axis gyroscope sensitive mass block.

Furthermore, an X-axis gyroscope first driving magnet and an X-axis gyroscope second driving magnet are symmetrically arranged on two sides of the first tunnel magnetoresistive element and are firmly bonded;

y-axis gyroscope first driving magnets and Y-axis gyroscope second driving magnets are symmetrically arranged on two sides of the second tunnel magnetoresistive element and are firmly bonded;

and a Z-axis gyroscope first driving magnet and a Z-axis gyroscope second driving magnet are symmetrically arranged on two sides of the third tunnel magnetoresistive element and are firmly bonded.

Furthermore, a first orthogonal beam, a second orthogonal beam, a third orthogonal beam and a fourth orthogonal beam are arranged on two sides of the X-axis gyroscope sensitive mass block and are connected with the supporting frame in a matching manner;

a fifth orthogonal beam, an eighth orthogonal beam, a sixth orthogonal beam and a seventh orthogonal beam are arranged on two sides of the Y-axis gyroscope sensitive mass block and are connected with the supporting frame in a matching manner;

and a first driving combination beam, a fourth driving combination beam, a second driving combination beam and a third driving combination beam are arranged at the front part and the rear part of the Z-axis gyroscope sensitive mass block and are in fit connection with the supporting frame.

Furthermore, two sides of the first signal line of the X-axis gyroscope and the second signal line of the X-axis gyroscope are symmetrically arranged on two sides of the first tunnel magnetoresistive element, the first signal line of the Y-axis gyroscope and the second signal line of the Y-axis gyroscope are symmetrically arranged on the second tunnel magnetoresistive element, and the first signal line of the Z-axis gyroscope and the second signal line of the Z-axis gyroscope are symmetrically arranged on the rear part of the third tunnel magnetoresistive element.

Furthermore, a first seat groove, a second seat groove and a third seat groove are symmetrically distributed on the supporting frame, and an X-axis gyroscope sensitive mass block, a first orthogonal beam, a second orthogonal beam, a third orthogonal beam and a fourth orthogonal beam are arranged in the first seat groove and are in fit connection with the supporting frame through the orthogonal beams;

a Y-axis gyroscope sensitive mass block, a fifth orthogonal beam, a sixth orthogonal beam, a seventh orthogonal beam and an eighth orthogonal beam are arranged in the second seat groove and are connected with the supporting frame in a matching way through the orthogonal beams;

and a Z-axis gyroscope sensitive mass block, a first driving combined beam, a second driving combined beam, a third driving combined beam, a fourth driving combined beam, a first detection combined beam, a second detection combined beam, a third detection combined beam and a fourth detection combined beam are arranged in the third seat slot and are in fit connection with the support frame through the driving combined beams.

Furthermore, the first orthogonal beam, the second orthogonal beam, the third orthogonal beam and the fourth orthogonal beam are all in an orthogonal beam structure, the orthogonal beams are arranged at four corners of the X-axis gyroscope, the orthogonal beams are composed of a first driving beam of the X-axis gyroscope, a second driving beam of the X-axis gyroscope, a detection beam of the X-axis gyroscope and an X-axis connecting block, the first driving beam of the X-axis gyroscope and the second driving beam of the X-axis gyroscope are in a slender beam structure, the width of the first driving beam of the X-axis gyroscope and the width of the second driving beam of the X-axis gyroscope are smaller than the length of the first driving beam of the X-axis gyroscope, and the first driving beam;

the X-axis gyroscope detection beam is of a flat beam structure, has a thickness smaller than the width, and is connected with the X-axis connecting block and the supporting frame; the X-axis connecting block is a cuboid, is as thick as the sensitive mass block of the X-axis gyroscope, and is used for connecting the first driving beam of the X-axis gyroscope, the second driving beam of the X-axis gyroscope and the detection beam of the X-axis gyroscope.

Furthermore, the first driving combination beam, the second driving combination beam, the third driving combination beam and the fourth driving combination beam are all driving combination beam structures, the driving combination beams are arranged at four corners of the Z-axis gyroscope driving mechanism, each driving combination beam is composed of a Z-axis gyroscope first driving beam, a Z-axis gyroscope second driving beam and a Z-axis gyroscope driving connecting block, the Z-axis gyroscope first driving beam and the Z-axis gyroscope second driving beam are arranged on two sides of the Z-axis gyroscope driving connecting block, the two driving beams arranged on the left side and the right side of the same connecting block are parallel to each other, the Z-axis gyroscope driving connecting block is in a T shape, the thickness of the Z-axis gyroscope driving connecting block is consistent with that of each driving beam and each sensitive mass block, the Z-axis gyroscope driving connecting block is used for connecting the Z-axis gyroscope first driving beam, the Z-axis gyroscope second driving beam and the supporting frame, the Z-axis gyroscope first driving beam, The Z-axis gyro second driving beam is of a slender beam structure, namely the length of the beam is larger than the width of the beam, and the Z-axis gyro second driving beam is used for connecting a Z-axis gyro driving mechanism and a Z-axis gyro driving connecting block.

Furthermore, the first detection combination beam, the second detection combination beam, the third detection combination beam and the fourth detection combination beam are of detection combination beam structures, the detection combination beams are arranged at four corners of the Z-axis gyroscope sensitive mass block, each detection combination beam is composed of a Z-axis gyroscope first detection beam, a Z-axis gyroscope second detection beam and a Z-axis gyroscope detection connecting block, the Z-axis gyroscope first detection beam and the Z-axis gyroscope second detection beam are arranged on the left side and the right side of the Z-axis gyroscope detection connecting block, the two detection beams arranged on the left side and the right side of the same connecting block are parallel to each other, the Z-axis gyroscope detection connecting block is in a T shape, the thickness of the Z-axis gyroscope detection connecting block is consistent with that of each detection beam and each sensitive mass block, the Z-axis gyroscope detection connecting block is used for connecting the Z-axis gyroscope first detection beam, the Z-axis gyroscope second detection beam and the Z-axis gyroscope driving mechanism, and the Z-axis gyroscope first detection beam is, The second detection beam of the Z-axis gyroscope is of a slender beam structure, namely the length of the beam is larger than the width of the beam, and the second detection beam is used for connecting the sensitive mass block of the Z-axis gyroscope and the detection connecting block of the Z-axis gyroscope.

Furthermore, the first tunnel magnetoresistive element, the second tunnel magnetoresistive element and the third tunnel magnetoresistive element are respectively arranged at the right part, the left part and the middle part of the groove, and each tunnel magnetoresistive element is of a multilayer nano-film structure;

the multilayer nano film structure comprises a substrate layer, a magnetic free layer, an insulating layer, a magnetic pinning layer, a top electrode layer and a bottom electrode layer, wherein an X-axis gyroscope first signal line, an X-axis gyroscope second signal line, a Y-axis gyroscope first signal line, a Y-axis gyroscope second signal line, a Z-axis gyroscope first signal line and a Z-axis gyroscope second signal line are arranged on the top electrode layer and the bottom electrode layer, and signals detected by the first tunnel magnetoresistive element, the second tunnel magnetoresistive element and the third tunnel magnetoresistive element are connected with an external processing circuit through the X-axis gyroscope first signal line, the X-axis gyroscope second signal line, the Y-axis gyroscope first signal line, the Y-axis gyroscope second signal line, the Z-axis gyroscope first signal line and the Z-axis gyroscope second signal line.

Advantageous effects

The utility model discloses compare with the background art and have obvious advance, this top adopts the overall structure design, use the bonded substrate as the carrier, on a supporting frame left side, in, the right side symmetry sets up the Y axle top, the Z axle top, the X axle top, and with the supporting frame connection that coincide, on a recess left side, in, right side symmetric position sets up the three tunnel magnetic resistance component that the structure is the same, set up the detection magnet on the proof mass piece, and the tunnel magnetic resistance one-to-one with recess upper portion setting, the drive combination roof beam comprises drive roof beam and connecting block, the detection combination roof beam comprises detection roof beam and connecting block, tunnel magnetic resistance component is by the substrate layer, the magnetism free layer, the insulating layer, the magnetism pin layer, the top electrode layer, bottom electrode layer is constituteed, this gyro structure is whole small, the integrated level is high, the cost of manufacture is low, high durability and convenient use, good reliability.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

FIG. 1 is a schematic view of the overall structure;

FIG. 2 is a top view of the overall structure;

FIG. 3 is a front view of the overall structure;

FIG. 4 is a view showing a structure of a bonded substrate;

FIG. 5 is a top view of a bonded substrate;

FIG. 6 is a view of the support frame structure;

FIG. 7 is a top view of the support frame;

FIG. 8 is a view showing the structure of an X-axis gyro

FIG. 9 is a top view of an X-axis gyroscope

FIG. 10 is a view showing the structure of an orthogonal beam of an X-axis gyroscope

FIG. 11 is a top view of an orthogonal beam of an X-axis gyroscope

FIG. 12 is a front view of an X-axis gyroscope orthogonal beam

FIG. 13 is a diagram of the structure of the sensing mass of an X-axis gyroscope

FIG. 14 is a top view of the proof-mass of an X-axis gyroscope

FIG. 15 is a view showing the structure of a Y-axis gyro

FIG. 16 is a top view of a Y-axis gyroscope

FIG. 17 is a view showing the structure of an orthogonal beam of a Y-axis gyroscope

FIG. 18 is a top view of a Y-axis gyroscope orthogonal beam

FIG. 19 is a front view of a Y-axis gyroscope orthogonal beam

FIG. 20 is a view showing the structure of a Y-axis gyroscope proof mass

FIG. 21 is a top view of a Y-axis gyroscope proof mass

FIG. 22 is a view showing a structure of a Z-axis gyro

FIG. 23 is a top view of a Z-axis gyroscope

FIG. 24 is a view showing a structure of a Z-axis gyro drive mechanism

FIG. 25 is a top view of a Z-axis gyro drive mechanism

FIG. 26 is a view showing the structure of a driving beam of a Z-axis gyro

FIG. 27 is a top view of a Z-axis gyroscope drive beam

FIG. 28 is a front view of a Z-axis gyro drive beam

FIG. 29 is a view showing a structure of a Z-axis gyro detection mechanism

FIG. 30 is a top view of the Z-axis gyro detection mechanism

FIG. 31 is a view showing the structure of a Z-axis gyro detection beam

FIG. 32 is a top view of a Z-axis gyroscope detection beam

FIG. 33 is a side view of a Z-axis gyroscope sense beam

FIG. 34 is a sectional view showing the positions of a detection magnet and a tunnel magnetoresistive element

FIG. 35 is a front view of the position of the sensing magnet and the tunnel magnetoresistive element

FIG. 36 is a schematic view of a gyroscope lead and electrodes

FIG. 37 is a nano-multilayer film structure of a tunnel magnetoresistive device

As shown in the figures, the list of reference numbers is as follows:

1-a support frame; a 2-X axis gyroscope proof mass; a 3-Y axis gyroscope proof mass; a 4-Z axis gyroscope sensitive mass block; 5-a first orthogonal beam; 6-a second orthogonal beam; 7-a third orthogonal beam; 8-a fourth orthogonal beam; 9-a fifth orthogonal beam; 10-a sixth orthogonal beam; 11-a seventh orthogonal beam; 12-an eighth orthogonal beam; 13-a first drive combination beam; 14-a second drive combination beam; 15-a third drive combination beam; 16-a fourth drive combination beam; 17-a first detection composite beam; 18-a second inspection composite beam; 19-a third inspection composite beam; 20-a fourth inspection composite beam; 21-a first detection magnet; 22-a second detection magnet; 23-a third detection magnet; 24-a first seat groove; 25-a second seat groove; 26-a third seat groove; a 27-X axis gyro first drive beam; a 28-X axis gyro second drive beam; a 29-X axis gyro sense beam; a 30-X shaft connecting block; a 31-Y axis gyro first drive beam; a 32-Y axis gyro second drive beam; a 33-Y axis gyro sense beam; a 34-Y axis gyro connecting block; a 35-Z axis gyro first drive beam; a 36-Z axis gyro second drive beam; a 37-Z axis gyro driving connecting block; a 38-Z axis gyroscope first detection beam; a 39-Z axis gyroscope second detection beam; a 40-Z axis gyro detection connecting block; a 41-X axis gyroscope first motion space; a 42-X axis gyroscope second motion space; a 43-X axis gyro third motion space; a 44-X axis gyro fourth motion space; a 45-Y axis gyroscope first motion space; a 46-Y axis gyroscope second motion space; a 47-Y axis gyro third motion space; a 48-Y axis gyroscope fourth motion space; 49-a bonded substrate; a 50-X axis gyroscope first drive magnet; a 51-X axis gyro second drive magnet; a 52-Y axis gyro first drive magnet; a 53-Y axis gyro second drive magnet; a 54-Z axis gyro first drive magnet; a 55-Z axis gyro second drive magnet; 56-first tunnel magnetoresistive element; 57-a second tunnel magnetoresistive element; 58-a third tunnel magnetoresistive element; a 59-X axis gyro first signal line; a 60-X axis gyro second signal line; a 61-Y axis gyro first signal line; a 62-Y axis gyro second signal line; a 63-Z axis gyroscope first signal line; a 64-Z axis gyroscope second signal line; a 65-X axis gyroscope first drive lead; a 66-X axis gyroscope second drive lead; 67-X axis gyro drive feedback wires; 68-X axis gyro first drive electrode; 69-X axis gyro second drive electrode; a 70-X axis gyro drive feedback electrode; a 71-Y axis gyroscope first drive lead; a second driving lead of the 72-Y axis gyroscope; 73-Y axis gyro drive feedback wires; a 74-Y axis gyroscope first drive electrode; a 75-Y axis gyroscope second drive electrode; a 76-Y axis gyro drive feedback electrode; a first drive lead of a 77-Z axis gyroscope; a second drive wire of the 78-Z axis gyroscope; a 79-Z axis gyro drive feedback wire; a 80-Z axis gyroscope first drive electrode; a 81-Z axis gyroscope second drive electrode; 82-Z axis gyro drive feedback electrodes; 83-a substrate layer; 84-bottom electrode layer; 85-magnetic pinning layer; 86-an insulating layer; 87-a magnetic free layer; 88-a top electrode layer; 89-groove.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the combination or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. In addition, in the description process of the embodiment of the present invention, the position relationships of the devices such as "up", "down", "front", "back", "left", "right" in all the drawings all use fig. 1 as a standard.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The present invention will be further explained with reference to the accompanying drawings:

as shown in fig. 1, 2 and 3, for the structural schematic diagram of the embodiment of the present invention, the monolithic integrated three-axis gyroscope includes a bonding substrate 49, a supporting frame 1, an X-axis gyroscope proof mass 2, a Y-axis gyroscope proof mass 3, a Z-axis gyroscope proof mass 4, a first orthogonal beam 5, a second orthogonal beam 6, a third orthogonal beam 7, a fourth orthogonal beam 8, a fifth orthogonal beam 9, a sixth orthogonal beam 10, a seventh orthogonal beam 11, an eighth orthogonal beam 12, a first driving composite beam 13, a second driving composite beam 14, a third driving composite beam 15, a fourth driving composite beam 16, a first detecting composite beam 17, a second detecting composite beam 18, a third detecting composite beam 19, a fourth detecting composite beam 20, an X-axis gyroscope first driving magnet 50, an X-axis gyroscope second driving magnet 51, a Y-axis gyroscope first driving magnet 52, a Y-axis gyroscope first driving magnet 53, a Y-axis gyroscope first driving mass 2, a Y-axis gyroscope proof mass 3, a Y-axis, A first driving magnet 54 of a Z-axis gyroscope, a first driving magnet 55 of the Z-axis gyroscope, a first detecting magnet 21, a second detecting magnet 22, a third detecting magnet 23, a first tunnel magnetoresistive element 56, a second tunnel magnetoresistive element 57, a third tunnel magnetoresistive element 58, a first signal line 59 of the X-axis gyroscope, a second signal line 60 of the X-axis gyroscope, a first signal line 61 of the Y-axis gyroscope, a second signal line 62 of the Y-axis gyroscope, a first signal line 63 of the Z-axis gyroscope and a second signal line 64 of the Z-axis gyroscope, wherein a supporting frame 1 is arranged above a bonding substrate 49 and is firmly bonded, a Y-axis gyroscope sensitive mass block 3, a Z-axis gyroscope sensitive mass block 4 and an X-axis gyroscope sensitive mass block 2 are arranged at the left, middle and right positions of the supporting frame 1, a first orthogonal beam 5, a second orthogonal beam 6, a third orthogonal beam 7, a second orthogonal beam 7, a third orthogonal, A fourth orthogonal beam 8 is matched and connected with the supporting frame 1, a fifth orthogonal beam 9, an eighth orthogonal beam 12, a sixth orthogonal beam 10 and a seventh orthogonal beam 11 are arranged at the front part and the rear part of the Y-axis gyro sensitive mass block 3 and are matched and connected with the supporting frame 1, a first driving combination beam 13, a fourth driving combination beam 16, a second driving combination beam 14 and a third driving combination beam 15 are arranged at the front part and the rear part of the Z-axis gyro sensitive mass block 4 and are matched and connected with the supporting frame 1, a first detection combination beam 17, a second detection combination beam 18, a third detection combination beam 19 and a fourth detection combination beam 20 are arranged at the left part and the right part of the Z-axis gyro sensitive mass block 4 and are matched and connected with the Z-axis gyro driving mechanism, a first detection magnet 21 is arranged at the middle position above the X-axis gyro sensitive mass block 2, the Y-axis gyro sensitive mass block 3 and the Z-axis gyro sensitive mass block 4, A second detection magnet 22 and a third detection magnet 23, and are bonded firmly.

As shown in fig. 4 and 5, in the structure diagram of the bonding substrate, the bonding substrate 49 has a rectangular structure, is made of a semiconductor material, and has a rectangular groove 89 formed in the middle thereof by etching, the second tunnel magnetoresistive element 57, the third tunnel magnetoresistive element 58, and the first tunnel magnetoresistive element 56 are symmetrically disposed on the left, middle, and right portions of the groove 89, and are bonded firmly, and the depth of the groove 89 is greater than the thickness of each tunnel magnetoresistive element, the X-axis gyro first driving magnet 50 and the X-axis gyro second driving magnet 51 are symmetrically disposed on the front and rear portions of the first tunnel magnetoresistive element 56, and are bonded firmly, the Y-axis gyro first driving magnet 52 and the Y-axis gyro second driving magnet 53 are symmetrically disposed on the left and right portions of the second tunnel magnetoresistive element 57, and are bonded firmly, the Z-axis gyro first driving magnet 54 and the Z-axis gyro second driving magnet 55 are symmetrically disposed on the left and right portions of the third tunnel magnetoresistive element 58, and bonded firmly, an X-axis gyro first signal line 59 and an X-axis gyro second signal line 60 are symmetrically arranged at the right part of the first tunnel magnetoresistive element 56, a Y-axis gyro first signal line 61 and a Y-axis gyro second signal line 62 are symmetrically arranged at the rear part of the second tunnel magnetoresistive element 57, a Z-axis gyro first signal line 63 and a Z-axis gyro second signal line 64 are symmetrically arranged at the rear part of the third tunnel magnetoresistive element 58, and the X-axis gyro first signal line 59, the X-axis gyro second signal line 60, the Y-axis gyro first signal line 61, the Y-axis gyro second signal line 62, the Z-axis gyro first signal line 63 and the Z-axis gyro second signal line 64 are all gold wires for leading out signals detected by the tunnel magnetoresistances.

As shown in fig. 6 and 7, for the structure of the supporting frame, the supporting frame 1 is located on the bonding substrate 49 and has the same length and width dimensions as the bonding substrate 49, the second seat groove 25, the third seat groove 26 and the first seat groove 24 are arranged at the left, middle and right parts of the supporting frame 1 and are square grooves, the X-axis gyro proof mass 2, the first orthogonal beam 5, the second orthogonal beam 6, the third orthogonal beam 7 and the fourth orthogonal beam 8 are arranged in the first seat groove 24 and are matched and connected with the supporting frame 1 through the orthogonal beams, the Y-axis gyro proof mass 3, the fifth orthogonal beam 9, the sixth orthogonal beam 10, the seventh orthogonal beam 11 and the eighth orthogonal beam 12 are arranged in the second seat groove 25 and are matched and connected with the supporting frame 1 through the orthogonal beams, and the Z-axis gyro proof mass 4, the first driving combination beam 13, the second driving combination beam 14, the third driving combination beam 15 and the third driving combination beam 15 are arranged in the third seat groove 26, A fourth driving combination beam 16, a first detection combination beam 17, a second detection combination beam 18, a third detection combination beam 19 and a fourth detection combination beam 20, and are connected with the supporting frame 1 in a matching way through the driving combination beams.

As shown in fig. 8 and 9, the structure of the X-axis gyroscope is shown, the X-axis gyroscope is composed of an X-axis gyroscope proof mass 2, a first orthogonal beam 5, a second orthogonal beam 6, a third orthogonal beam 7, and a fourth orthogonal beam 8, a first detection magnet 21 is disposed in the middle position above the X-axis gyroscope proof mass 2, and the number of the first orthogonal beam 5, the second orthogonal beam 6, the third orthogonal beam 7, and the fourth orthogonal beam 8 is 4, and the structure sizes are the same, and the first detection magnet is disposed at four corners of the X-axis gyroscope.

As shown in fig. 10, 11, and 12, the orthogonal beam structure of the X-axis gyroscope is shown, the orthogonal beam is composed of a first driving beam 27 of the X-axis gyroscope, a second driving beam 28 of the X-axis gyroscope, a detecting beam 29 of the X-axis gyroscope, and a connecting block 30 of the X-axis gyroscope, the first driving beam 27 of the X-axis gyroscope and the second driving beam 28 of the X-axis gyroscope are in slender beam structures, the width of the beam structures is much smaller than the length of the beam structures, and the beam structures are connected with the connecting block 30 of the X-axis gyroscope and the sensitive mass block 2 of the X-axis gyroscope, the detecting beam 29 of the X-axis gyroscope is in a flat beam structure, the thickness of the beam structures is much smaller than the width of; the X-axis gyroscope connecting block 30 is a cuboid, is as thick as the X-axis gyroscope sensitive mass block 2, and is used for connecting the X-axis gyroscope first driving beam 27, the X-axis gyroscope second driving beam 28 and the X-axis gyroscope detecting beam 29.

As shown in fig. 13 and 14, for the composition of the X-axis gyroscope proof mass, an X-axis gyroscope first motion space 41, an X-axis gyroscope second motion space 42, an X-axis gyroscope third motion space 43, and an X-axis gyroscope fourth motion space 44 are symmetrically disposed on the left and right sides of the X-axis gyroscope proof mass 2, and the X-axis gyroscope first motion space 41, the X-axis gyroscope second motion space 42, the X-axis gyroscope third motion space 43, and the X-axis gyroscope fourth motion space 44 are used for disposing the first orthogonal beam 5, the second orthogonal beam 6, the third orthogonal beam 7, and the fourth orthogonal beam 8.

As shown in fig. 15 and 16, the structure of the Y-axis gyroscope is shown, the Y-axis gyroscope is composed of a Y-axis gyroscope proof mass 3, a fifth orthogonal beam 9, a sixth orthogonal beam 10, a seventh orthogonal beam 11, and an eighth orthogonal beam 12, a second detection magnet 22 is disposed at the middle position above the Y-axis gyroscope proof mass 3, and 4 of the fifth orthogonal beam 9, the sixth orthogonal beam 10, the seventh orthogonal beam 11, and the eighth orthogonal beam 12 are provided, and the structure size is the same, and the two beams are disposed at four corners of the Y-axis gyroscope.

As shown in fig. 17, 18, and 19, the structure diagram of the Y-axis gyro orthogonal beam is shown, the orthogonal beam is composed of a Y-axis gyro first driving beam 31, a Y-axis gyro second driving beam 32, a Y-axis gyro detecting beam 33, and a Y-axis gyro connecting block 34, the Y-axis gyro first driving beam 31 and the Y-axis gyro second driving beam 32 are in a slender beam structure, the width of the beam structure is much smaller than the length of the beam structure, and the beam structure is connected with the Y-axis gyro connecting block 34 and the Y-axis gyro sensitive mass block 3, the Y-axis gyro detecting beam 33 is in a flat beam structure, the thickness of the beam structure is much smaller than the width of the beam structure, and the beam structure is connected with the Y-axis gyro; the Y-axis gyroscope connecting block 34 is a cuboid, is as thick as the Y-axis gyroscope sensitive mass block 3, and is used for connecting the Y-axis gyroscope first driving beam 31, the Y-axis gyroscope second driving beam 32 and the Y-axis gyroscope detecting beam 33.

As shown in fig. 20 and 21, for the composition of the Y-axis gyroscope proof mass, a Y-axis gyroscope first motion space 45, a Y-axis gyroscope fourth motion space 48, a Y-axis gyroscope second motion space 46, and a Y-axis gyroscope third motion space 47 are symmetrically disposed on the front and rear sides of the Y-axis gyroscope proof mass 3, and the Y-axis gyroscope first motion space 45, the Y-axis gyroscope second motion space 46, the Y-axis gyroscope third motion space 47, and the Y-axis gyroscope fourth motion space 48 are used for disposing the fifth orthogonal beam 9, the sixth orthogonal beam 10, the seventh orthogonal beam 11, and the eighth orthogonal beam 12.

As shown in fig. 22 and 23, the structure is a structure diagram of a Z-axis gyroscope, where the Z-axis gyroscope is composed of a Z-axis gyroscope proof mass 4, a first driving composite beam 13, a second driving composite beam 14, a third driving composite beam 15, a fourth driving composite beam 16, a first detecting composite beam 17, a second detecting composite beam 18, a third detecting composite beam 19, and a fourth detecting composite beam 20, a third detecting magnet 23 is disposed at a middle position above the Z-axis gyroscope proof mass 4, and the first driving composite beam 13, the second driving composite beam 14, the third driving composite beam 15, and the fourth driving composite beam 16 are 4 in total, and have the same structural size, and are disposed at four corners of the Z-axis gyroscope, and the first detecting composite beam 17, the second detecting composite beam 18, the third detecting composite beam 19, and the fourth detecting composite beam 20 are four in total, and have the same structural size, and are symmetrically disposed before, or before the Z-axis gyroscope proof mass is sensitive, A rear portion.

As shown in fig. 24 and 25, the structure of the Z-axis gyro driving mechanism is shown, and the Z-axis gyro driving mechanism is composed of a first driving composite beam 13, a second driving composite beam 14, a third driving composite beam 15, and a fourth driving composite beam 16, and is disposed at four corners of the Z-axis gyro driving mechanism.

As shown in fig. 26, 27, and 28, the structure of the driving beam structure of the Z-axis gyroscope is that 4 driving composite beams 13, 4 driving composite beams 14, 4 driving composite beams 15, and 4 driving composite beams 16 are provided, the driving composite beams are disposed at four corners of the driving mechanism of the Z-axis gyroscope, each driving composite beam is composed of a first driving beam 35 of the Z-axis gyroscope, a second driving beam 36 of the Z-axis gyroscope, and a connecting block 37 for driving the Z-axis gyroscope, the first driving beam 35 of the Z-axis gyroscope and the second driving beam 36 of the Z-axis gyroscope are disposed at left and right sides of the connecting block 37 for driving the Z-axis gyroscope, and the two driving beams disposed at left and right sides of the same connecting block are parallel to each other, the connecting block 37 for driving the Z-axis gyroscope is in a "T" shape, and has a thickness consistent with that of each driving beam and each sensing mass block, and the connecting block 37 for driving the Z-axis gyroscope is used to connect the first driving beam 35 of the Z-, Z axle top second drive beam 36 and braced frame 1, Z axle top first drive beam 35, Z axle top second drive beam 36 are "slender roof beam" structure, and the length of roof beam is far greater than its width promptly for connect Z axle top actuating mechanism and Z axle top drive connecting block 37.

As shown in fig. 29 and 30, the structure of the Z-axis gyro detection mechanism is shown, the Z-axis gyro detection mechanism is composed of a Z-axis gyro proof mass 4, a first detection composite beam 17, a second detection composite beam 18, a third detection composite beam 19, and a fourth detection composite beam 20, and the first detection composite beam 17, the second detection composite beam 18, the third detection composite beam 19, and the fourth detection composite beam 20 are symmetrically disposed at the front and rear portions of the Z-axis gyro proof mass 4.

As shown in fig. 31, 32, and 33, the structure of the Z-axis gyro detection beam is that the number of the first detection composite beam 17, the second detection composite beam 18, the third detection composite beam 19, and the fourth detection composite beam 20 is 4, and the structure size is the same, the detection composite beams are disposed at four corners of the Z-axis gyro proof mass 4, each detection composite beam is composed of a Z-axis gyro first detection beam 38, a Z-axis gyro second detection beam 39, and a Z-axis gyro detection connection block 40, the Z-axis gyro first detection beam 38 and the Z-axis gyro second detection beam 39 are disposed at the left and right sides of the Z-axis gyro detection connection block 40, and the two detection beams disposed at the left and right sides of the same connection block are parallel to each other, the Z-axis gyro detection connection block 40 is "T" shaped, and has the thickness consistent with that of each detection beam and each proof mass, and the Z-axis gyro detection connection block 40 is used for connecting the Z-axis gyro first detection beams, The first detection beam 38 of the Z-axis gyroscope and the second detection beam 39 of the Z-axis gyroscope are in a structure of a slender beam, namely the length of the beam is far larger than the width of the beam, and the beam is used for connecting the sensitive mass block 4 of the Z-axis gyroscope and the detection connecting block 40 of the Z-axis gyroscope.

As shown in fig. 34 and 35, for the position diagrams of the detection magnet and the tunnel magnetoresistive element, a first detection magnet 21, a second detection magnet 22 and a third detection magnet 23 are respectively disposed above the X-axis gyro proof mass 2, the Y-axis gyro proof mass 3 and the Z-axis gyro proof mass 4, and correspond to a first tunnel magnetoresistive element 56, a second tunnel magnetoresistive element 57 and a third tunnel magnetoresistive element 58 disposed on the upper portion of the lower bonding substrate 49, specifically taking the X-axis gyro proof mass 2 as an example, the first detection magnet 21 is disposed at the middle position above the X-axis gyro proof mass 2, and is connected to the supporting frame 1 through a first orthogonal beam 5, a second orthogonal beam 6, a third orthogonal beam 7 and a fourth orthogonal beam 8, and is firmly bonded, the first tunnel magnetoresistive element 56 is disposed at the right portion of the groove 89, the first tunnel magnetoresistive element 56 is disposed on the groove X-axis, and corresponding to the first detection magnet 21 disposed above the X-axis gyroscope proof mass 2, the first tunnel magnetoresistive element 56 is specifically located in a high magnetic field variation rate region generated by the first detection magnet 21, and the first detection magnet 21 and the first tunnel magnetoresistive element 56 can exchange positions.

As shown in fig. 36, the schematic diagram of the gyro wire and the electrode includes a driving electrode and a driving feedback electrode, the electrodes exist in pairs, the wires include the driving wire and the driving feedback wire, the first electrode 68 of the X-axis gyro is respectively disposed at the left and right sides of the upper end of the X-axis gyro, the second electrode 69 of the X-axis gyro is respectively disposed at the left and right sides of the lower end of the X-axis gyro, the driving feedback electrode 70 of the X-axis gyro is close to the second electrode 69 of the X-axis gyro, the first driving wire 65 of the X-axis gyro is connected with the first electrode 68 of the X-axis gyro at both ends, the second driving wire 66 of the X-axis gyro is connected with the second electrode 69 of the X-axis gyro at both ends, and the driving feedback wire 67 of the X-axis gyro is connected with. The Y-axis gyroscope first electrode 74 is respectively arranged at the upper end and the lower end of the left side of the Y-axis gyroscope, the Y-axis gyroscope second electrode 75 is respectively arranged at the upper end and the lower end of the right side of the Y-axis gyroscope, the Y-axis gyroscope driving feedback electrode 76 is close to the Y-axis gyroscope first electrode 74, the Y-axis gyroscope first driving lead 71 is connected with the Y-axis gyroscope first electrodes 74 at the two ends, the Y-axis gyroscope second driving lead 72 is connected with the Y-axis gyroscope second electrodes 75 at the two ends, and the Y-axis gyroscope driving feedback lead 73 is connected with the Y-axis gyroscope driving feedback electrodes 76 at the two ends. Z axle top first electrode 80 sets up respectively the left upper and lower both ends of Z axle top, Z axle top second electrode 81 sets up respectively the upper and lower both ends on Z axle top right side, Z axle top drive feedback electrode 82 is close to Z axle top first electrode 80 sets up, the first drive wire 77 of Z axle top of connecting both ends first electrode 80 of Z axle top, Z axle top second drive wire 78 connects the Z axle top second electrode 81 at both ends, Z axle top drive feedback wire 79 connects the Z axle top drive feedback electrode 82 at both ends.

As shown in fig. 37, the nano-multilayer film structure of the tunnel magnetoresistive element is a structure in which a top electrode layer 88, a magnetic free layer 87, an insulating layer 86, a magnetic pinning layer 85, and a bottom electrode layer 84 are sequentially arranged on a semiconductor material substrate layer 83 from top to bottom, and when an external magnetic field changes, a medium tunneling current of the first tunnel magnetoresistive element 56, the second tunnel magnetoresistive element 57, and the third tunnel magnetoresistive element 58 changes, and shows a drastic resistance change, and a detection signal is output through the top electrode layer 88 and the bottom electrode layer 84.

Principle of utility model

The X-axis gyroscope belongs to an off-plane detection single-axis gyroscope, a micro-gyroscope structure is placed in a uniform magnetic field generated by a driving magnet, an alternating drive current is loaded on the drive lead to generate an alternating Lorentz force, the sensitive mass block of the X-axis gyroscope vibrates in a reciprocating manner along the Y-axis direction under the action of the drive force, when the angular speed in the X-axis direction is input, the X-axis gyroscope sensitive mass block moves in the Z-axis direction under the action of the Coriolis force, the X-axis gyroscope sensitive mass block drives the first detection magnet to move in parallel above the first tunnel magneto-resistive element, so that the magnetic field sensed by the first tunnel magneto-resistive element is greatly changed, the change of the magnetic field causes the change of the spin-related tunneling current in the first tunnel magneto-resistive element, therefore, the resistance value of the first tunnel magneto-resistor changes violently, and the X-axis angular velocity can be detected by measuring the change of the resistance value.

The Y-axis gyroscope belongs to an off-plane detection uniaxial gyroscope, a micro-gyroscope structure is placed in a uniform magnetic field generated by a driving magnet, an alternating drive current is loaded on the drive lead to generate an alternating Lorentz force, the sensitive mass block of the Y-axis gyroscope vibrates in a reciprocating manner along the X-axis direction under the action of the drive force, when the angular velocity in the Y-axis direction is input, the Y-axis gyroscope sensitive mass block moves in the Z-axis direction under the action of the Coriolis force, the Y-axis gyroscope sensitive mass block drives the second detection magnet to move in parallel above the second tunnel magneto-resistive element, so that the magnetic field sensed by the second tunnel magneto-resistive element is greatly changed, the change of the magnetic field causes the change of the tunneling current related to spin in the second tunnel magneto-resistive element, therefore, the resistance value of the second tunnel magnetic resistor is changed violently, and the Y-axis angular velocity can be detected by measuring the change of the resistance value.

The Z-axis gyroscope belongs to an in-plane detection uniaxial gyroscope, the micro-gyroscope structure is placed in a uniform magnetic field generated by a driving magnet, an alternating drive current is loaded on the drive lead to generate an alternating Lorentz force, the Z-axis gyro drive mechanism vibrates in a reciprocating manner along the X-axis direction under the action of the drive force, when the angular speed in the Z-axis direction is input, the Z-axis gyroscope detection mechanism moves along the Y-axis direction under the action of the Coriolis force, the Z-axis gyroscope sensitive mass block drives the third detection magnet to move in parallel above the third tunnel magneto-resistive element, so that the magnetic field sensed by the third tunnel magneto-resistive element is greatly changed, the change of the magnetic field causes the change of the tunneling current related to spin in the third tunnel magneto-resistive element, therefore, the resistance value of the third tunnel magneto-resistor is changed violently, and the Z-axis angular velocity can be detected by measuring the change of the resistance value.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the claims and their equivalents.

Claims (9)

1. A monolithic integrated triaxial gyroscope based on tunnel magnetoresistive detection is characterized by comprising a bonding substrate, a supporting frame, an X-axis gyroscope sensitive mass block, a Y-axis gyroscope sensitive mass block, a Z-axis gyroscope sensitive mass block, a first tunnel magnetoresistive element, a second tunnel magnetoresistive element and a third tunnel magnetoresistive element;

at least three grooves for providing a motion space are arranged on the bonding substrate, and the first tunnel magnetoresistive element, the second tunnel magnetoresistive element and the third tunnel magnetoresistive element are symmetrically arranged in the grooves to form a single-chip integrated triaxial gyroscope;

and a supporting frame is arranged above the bonding substrate, a Z-axis gyroscope sensitive mass block is arranged in the middle of the supporting frame, and an X-axis gyroscope sensitive mass block and a Y-axis gyroscope sensitive mass block are respectively arranged at the two sides of the Z-axis gyroscope sensitive mass block.

2. The monolithic integrated triaxial gyro based on tunnel magnetoresistive sensing of claim 1, wherein an X-axis gyro first driving magnet and an X-axis gyro second driving magnet are symmetrically arranged on two sides of the first tunnel magnetoresistive element and are firmly bonded;

y-axis gyroscope first driving magnets and Y-axis gyroscope second driving magnets are symmetrically arranged on two sides of the second tunnel magnetoresistive element and are firmly bonded;

and a Z-axis gyroscope first driving magnet and a Z-axis gyroscope second driving magnet are symmetrically arranged on two sides of the third tunnel magnetoresistive element and are firmly bonded.

3. The monolithic integrated triaxial gyroscope based on tunnel magnetoresistive detection according to claim 1, wherein a first orthogonal beam, a second orthogonal beam, a third orthogonal beam and a fourth orthogonal beam are arranged on two sides of a sensitive mass block of the X-axis gyroscope and are connected with a support frame in a matching manner;

a fifth orthogonal beam, an eighth orthogonal beam, a sixth orthogonal beam and a seventh orthogonal beam are arranged on two sides of the Y-axis gyroscope sensitive mass block and are connected with the supporting frame in a matching manner;

and a first driving combination beam, a fourth driving combination beam, a second driving combination beam and a third driving combination beam are arranged at the front part and the rear part of the Z-axis gyroscope sensitive mass block and are in fit connection with the supporting frame.

4. The monolithic integrated triaxial gyro based on tunnel magnetoresistive sensing of claim 1, wherein the first tunnel magnetoresistive element is symmetrically provided with the first X-axis gyro signal line and the second X-axis gyro signal line on two sides, the second tunnel magnetoresistive element is symmetrically provided with the first Y-axis gyro signal line and the second Y-axis gyro signal line, and the third tunnel magnetoresistive element is symmetrically provided with the first Z-axis gyro signal line and the second Z-axis gyro signal line on the rear portion.

5. The monolithic integrated triaxial gyroscope based on tunnel magnetoresistive detection according to claim 1, wherein a first seat groove, a second seat groove and a third seat groove are symmetrically distributed on the supporting frame, an X-axis gyroscope proof mass, a first orthogonal beam, a second orthogonal beam, a third orthogonal beam and a fourth orthogonal beam are arranged in the first seat groove, and are in fit connection with the supporting frame through the orthogonal beams;

a Y-axis gyroscope sensitive mass block, a fifth orthogonal beam, a sixth orthogonal beam, a seventh orthogonal beam and an eighth orthogonal beam are arranged in the second seat groove and are connected with the supporting frame in a matching way through the orthogonal beams;

and a Z-axis gyroscope sensitive mass block, a first driving combined beam, a second driving combined beam, a third driving combined beam, a fourth driving combined beam, a first detection combined beam, a second detection combined beam, a third detection combined beam and a fourth detection combined beam are arranged in the third seat slot and are in fit connection with the support frame through the driving combined beams.

6. The monolithic integrated triaxial gyroscope based on tunnel magnetoresistive detection according to claim 5, wherein the first orthogonal beam, the second orthogonal beam, the third orthogonal beam and the fourth orthogonal beam are all orthogonal beam structures, the orthogonal beams are arranged at four corners of an X-axis gyroscope, the orthogonal beams are composed of an X-axis gyroscope first driving beam, an X-axis gyroscope second driving beam, an X-axis gyroscope detection beam and an X-axis connecting block, the X-axis gyroscope first driving beam and the X-axis gyroscope second driving beam are in elongated beam structures, the width of the elongated beam structures is smaller than the length of the elongated beam structures, and the elongated beam structures are connected with the X-axis connecting block and the X-axis gyroscope sensitive mass block;

the X-axis gyroscope detection beam is of a flat beam structure, has a thickness smaller than the width, and is connected with the X-axis connecting block and the supporting frame; the X-axis connecting block is a cuboid, is as thick as the sensitive mass block of the X-axis gyroscope, and is used for connecting the first driving beam of the X-axis gyroscope, the second driving beam of the X-axis gyroscope and the detection beam of the X-axis gyroscope.

7. The monolithic integrated three-axis gyroscope based on tunnel magnetoresistive detection according to claim 5, wherein the first driving composite beam, the second driving composite beam, the third driving composite beam and the fourth driving composite beam are all driving composite beam structures, the driving composite beams are disposed at four corners of the Z-axis gyroscope driving mechanism, each driving composite beam is composed of a Z-axis gyroscope first driving beam, a Z-axis gyroscope second driving beam and a Z-axis gyroscope driving connection block, the Z-axis gyroscope first driving beam and the Z-axis gyroscope second driving beam are disposed at two sides of the Z-axis gyroscope driving connection block, the two driving beams disposed at the left and right sides of the same connection block are parallel to each other, the Z-axis gyroscope driving connection block is "T" shaped, and has a thickness consistent with that of each driving beam and each sensitive mass block, and the Z-axis gyroscope driving connection block is used for connecting the Z-axis gyroscope first driving beam, The first driving beam of the Z-axis gyroscope and the second driving beam of the Z-axis gyroscope are of a slender beam structure, namely the length of the beam is larger than the width of the beam, and the driving beam is used for connecting a Z-axis gyroscope driving mechanism and a Z-axis gyroscope driving connecting block.

8. The monolithic integrated triaxial gyroscope based on tunnel magnetoresistive sensing of claim 5, wherein the first, second, third and fourth sensing composite beams are all of a sensing composite beam structure, the sensing composite beams are disposed at four corners of the Z-axis gyroscope proof mass, each sensing composite beam is composed of a Z-axis gyroscope first sensing beam, a Z-axis gyroscope second sensing beam and a Z-axis gyroscope sensing connection block, the Z-axis gyroscope first sensing beam and the Z-axis gyroscope second sensing beam are disposed on the left and right sides of the Z-axis gyroscope sensing connection block, the two sensing beams disposed on the left and right sides of the same connection block are parallel to each other, the Z-axis gyroscope sensing connection block is "T" shaped and has a thickness consistent with the thicknesses of the sensing beams and the proof masses, and the Z-axis gyroscope sensing connection block is used for connecting the Z-axis gyroscope first sensing beams, The first detection beam of the Z-axis gyroscope and the second detection beam of the Z-axis gyroscope are in a structure of a slender beam, namely the length of the beam is larger than the width of the beam, and the beam is used for connecting the sensitive mass block of the Z-axis gyroscope and the detection connecting block of the Z-axis gyroscope.

9. The monolithic integrated triaxial gyroscope based on tunnel magnetoresistive sensing of claim 1, wherein the first tunnel magnetoresistive element, the second tunnel magnetoresistive element and the third tunnel magnetoresistive element are respectively disposed at the right part, the left part and the middle part of the groove, and each tunnel magnetoresistive element is of a multilayer nano-film structure;

the multilayer nano film structure comprises a substrate layer, a magnetic free layer, an insulating layer, a magnetic pinning layer, a top electrode layer and a bottom electrode layer, wherein an X-axis gyroscope first signal line, an X-axis gyroscope second signal line, a Y-axis gyroscope first signal line, a Y-axis gyroscope second signal line, a Z-axis gyroscope first signal line and a Z-axis gyroscope second signal line are arranged on the top electrode layer and the bottom electrode layer, and signals detected by the first tunnel magnetoresistive element, the second tunnel magnetoresistive element and the third tunnel magnetoresistive element are connected with an external processing circuit through the X-axis gyroscope first signal line, the X-axis gyroscope second signal line, the Y-axis gyroscope first signal line, the Y-axis gyroscope second signal line, the Z-axis gyroscope first signal line and the Z-axis gyroscope second signal line.

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