CN212570953U

CN212570953U - Loading mechanism for wafer

Info

Publication number: CN212570953U
Application number: CN202021861105.3U
Authority: CN
Inventors: 陶为银; 巩铁建
Original assignee: Henan General Intelligent Equipment Co Ltd
Current assignee: Jiangsu General Semiconductor Co ltd
Priority date: 2020-08-31
Filing date: 2020-08-31
Publication date: 2021-02-19
Anticipated expiration: 2030-08-31

Abstract

The utility model discloses a wafer uses loading mechanism, including arm and wafer box, the setting of arm is on the base, and the inside of arm sets up the straw, and the head of arm sets up the sucking disc, and the sucking disc bottom sets up the conveyer belt, and the conveyer belt left and right sides sets up servo motor, the wafer box sets up on the platform is placed to the wafer box on conveyer belt right side, and the wafer box is placed a bottom and is set up the landing leg. This loading mechanism is used to wafer, the structure sets up rationally, place the wafer that will process on the conveyer belt, the wafer conveys the arm position to under the drive of conveyer belt, arm controller control arm downstream is to sucking disc and wafer contact, then sucking disc controller control sucking disc holds the wafer, arm controller control arm mentions the wafer and hangs the wafer and send to the wafer box in, this process has not only saved a large amount of manpowers, the loading efficiency of wafer has still been improved, so just the high-efficient loading of assurance wafer that can be better, promote the development of wafer trade.

Description

Loading mechanism for wafer

Technical Field

The utility model relates to a wafer loads technical field, specifically is a wafer uses loading mechanism.

Background

The traditional wafer loading mode is that processed wafers are placed in a wafer packaging box one by manpower, and the method wastes time and labor and has low loading efficiency.

In order to overcome the defects in the existing market, an improved wafer loading technology is urgently needed, so that efficient loading of wafers can be better guaranteed, and the development of the wafer industry is promoted.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a loading mechanism is used to wafer to the problem that the loading efficiency is low is wasted time and energy who proposes in solving above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a wafer uses loading mechanism, includes arm and wafer box, the setting of arm is on the base, and the base bottom sets up a supporting bench, and the supporting bench bottom sets up the landing leg, and the inside of arm sets up the straw, and the head of arm sets up the sucking disc, and the sucking disc bottom sets up the conveyer belt, places the wafer on the conveyer belt, and the inside gear that sets up of conveyer belt, gear and servo motor's pivot are connected, and the servo motor bottom sets up fixed foot, sets up fixing bolt on the fixed foot, and servo motor installs on the fixed station, and the fixed station bottom sets up branch, the wafer box sets up and places the platform at the wafer box on conveyer belt right side, and the wafer box is placed the.

Preferably, the mechanical arm is formed by connecting four straight cylinders through rotating bearings, and a pipeline channel is formed in the mechanical arm.

Preferably, the base is of a rectangular cavity structure, and the mechanical arm controller and the sucker controller are arranged inside the base.

Preferably, the number of the gears is two, the two gears are respectively placed at the left end and the right end of the conveyor belt, and trapezoidal strip-shaped tooth blocks are arranged on the gears.

Preferably, the conveying belt is an annular belt made of polyurethane and coated with glass fiber as a strong layer, and the inner periphery of the belt is made into teeth matched with the trapezoidal strip-shaped tooth blocks on the gear.

Preferably, the wafer box is of a cylindrical structure, a layer of rubber pad is arranged inside the box body of the wafer box, the box cover of the wafer box is connected with the box body through a hinge, and a layer of rubber pad is arranged on the box cover of the wafer box.

Compared with the prior art, the beneficial effects of the utility model are that: this loading mechanism is used to wafer, the structure sets up rationally, place the wafer that will process on the conveyer belt, the wafer conveys the arm position to under the drive of conveyer belt, arm controller control arm downstream is to sucking disc and wafer contact, then sucking disc controller control sucking disc holds the wafer, arm controller control arm mentions the wafer and hangs the wafer and send to the wafer box in, this process has not only saved a large amount of manpowers, the loading efficiency of wafer has still been improved, so just the high-efficient loading of assurance wafer that can be better, promote the development of wafer trade.

Drawings

FIG. 1 is a sectional view of the present invention;

FIG. 2 is a schematic view of the structural conveyor belt of the present invention;

fig. 3 is an expanded schematic view of the wafer cassette of the present invention.

In the figure: 1. a support leg; 2. a support table; 3. a base; 4. a mechanical arm; 5. a straw; 6. a suction cup; 7. a wafer; 8. a conveyor belt; 8.1, a gear; 9. a rotating shaft; 10. a servo motor; 11. fixing the bolt; 12. a fixing leg; 13. a fixed table; 14. a wafer cassette; 15. and a wafer box placing table.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, the present invention provides a technical solution: a wafer using and loading mechanism comprises a mechanical arm 4 and a wafer box 14, wherein the mechanical arm 4 is arranged on a base 3, the mechanical arm 4 is formed by connecting four straight cylinders through a rotating bearing, a pipeline channel is formed in the mechanical arm 4, the base 3 is of a rectangular cavity structure, a mechanical arm controller and a sucking disc controller are arranged in the base 3, the mechanical arm controller is used for controlling the mechanical arm 4 to lift and convey a wafer 7, the sucking disc controller controls a sucking disc 6 to suck and release the wafer 7 through sucking and exhausting, a supporting table 2 is arranged at the bottom of the base 3, supporting legs 1 are arranged at the bottom of the supporting table 2, the supporting table 2 is a stainless steel rectangular block, the supporting legs 1 are stainless steel round bars, the supporting legs 1 are respectively arranged at four corners at the bottom of the supporting table 2, a suction pipe 5 is arranged in the pipeline channel in the mechanical arm 4, and a rubber hose made of elastic rubber is, the head of the mechanical arm 4 is provided with a sucker 6, the sucker 6 is connected with a sucker 5, the bottom of the sucker 6 is provided with a conveyor belt 8, the conveyor belt 8 is an annular belt made of polyurethane, the inner periphery of the belt is made into a tooth shape matched with a trapezoidal strip-shaped tooth block on a gear 8.1, when the conveyor belt 8 is used for transmission, the transmission ratio is accurate, the counter shaft acting force is small, the structure is compact, the oil resistance and the wear resistance are good, and the ageing resistance is good, a wafer 7 is placed on the conveyor belt 8, a gear 8.1 is arranged inside the conveyor belt 8, the two gears 8.1 are arranged in two numbers, the two gears 8.1 are respectively placed at the left end and the right end of the conveyor belt 8, the gear 8.1 is provided with a trapezoidal strip-shaped tooth block, the gear 8.1 is connected with a rotating shaft 9 of a servo motor 10, the servo motor 10 drives the gear 8.1 to rotate so as to drive the belt 8 to transmit the wafer 7, fixing base 12 is last to be opened there is the screw that matches with fixing bolt 11, servo motor 10 is installed on fixed station 13, fixed station 13 top is opened has the screw that corresponds with the screw on the fixed base 12, fixing bolt 11 passes the screw and fixes servo motor 10 on fixed station 13, fixed station 13 bottom four corners position sets up a cylindrical branch respectively, wafer box 14 sets up on the brilliant circle box placing table 15 on conveyer belt 8 right side, wafer box 14 is cylindrical structure, the inside one deck rubber pad that sets up of the box body of brilliant circle box 14, use hinge connection between lid and the box body of brilliant circle box 14, set up the one deck rubber pad on the lid of brilliant circle box 14, the rubber pad can prevent that 7 from colliding with brilliant circle box 14, brilliant circle box placing table 15 is the rectangular block structure, brilliant circle box placing table 15 bottom four corners position sets up a landing leg 1 respectively.

The working principle is as follows: when the wafer loading mechanism is used, a processed wafer 7 is placed on the conveyor belt 8, the servo motor 10 is started to drive the conveyor belt 8 to run, the wafer 7 is driven by the conveyor belt 8 to be conveyed to the operation position of the mechanical arm 4, the mechanical arm controller in the base 3 controls the mechanical arm 4 to move downwards until the suction cup 6 is in contact with the wafer 7, then the suction disk controller in the base 3 controls the suction pipe 5 to suck air so that the suction cup sucks the wafer 7, finally the mechanical arm 4 lifts the wafer 7 to hoist the wafer 7 into the wafer box 14, the suction disk controller controls the suction pipe 5 to exhaust air so as to release the wafer 7, the box cover is closed, and the wafer 7 is loaded, so that the whole process of the wafer loading mechanism is used.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A wafer use loading mechanism comprising a robot arm (4) and a wafer cassette (14), characterized in that: the mechanical arm (4) is arranged on the base (3), the supporting table (2) is arranged at the bottom of the base (3), the supporting legs (1) are arranged at the bottom of the supporting table (2), the suction pipe (5) is arranged inside the mechanical arm (4), the sucking disc (6) is arranged at the head of the mechanical arm (4), the conveying belt (8) is arranged at the bottom of the sucking disc (6), the wafer (7) is placed on the conveying belt (8), the gear (8.1) is arranged inside the conveying belt (8), the gear (8.1) is connected with the rotating shaft (9) of the servo motor (10), the fixing foot (12) is arranged at the bottom of the servo motor (10), the fixing bolt (11) is arranged on the fixing foot (12), the servo motor (10) is arranged on the fixing table (13), the supporting rod, the wafer box (14) is arranged on the wafer box placing table (15) on the right side of the conveyor belt (8), and the bottom of the wafer box placing table (15) is provided with the supporting legs (1).

2. The wafer use loading mechanism of claim 1, wherein: the mechanical arm (4) is formed by connecting four straight cylinders through rotating bearings, and a pipeline channel is formed in the mechanical arm (4).

3. The wafer use loading mechanism of claim 1, wherein: the base (3) is of a rectangular cavity structure, and a mechanical arm controller and a sucker controller are arranged inside the base (3).

4. The wafer use loading mechanism of claim 1, wherein: the two gears (8.1) are respectively arranged at the left end and the right end of the conveyor belt (8), and the trapezoidal strip-shaped tooth blocks are arranged on the gears (8.1).

5. The wafer use loading mechanism of claim 1, wherein: the conveying belt (8) is an annular belt which is made of polyurethane and takes glass fiber as a strong layer, and the inner periphery of the belt is made into teeth matched with the trapezoidal strip-shaped tooth blocks on the gear (8.1).

6. The wafer use loading mechanism of claim 1, wherein: the wafer box (14) is of a cylindrical structure, a layer of rubber pad is arranged inside the wafer box (14), the box cover of the wafer box (14) is connected with the box body through a hinge, and a layer of rubber pad is arranged on the box cover of the wafer box (14).