CN212567246U - Silicon window piece side parallelism detection device - Google Patents
Silicon window piece side parallelism detection device Download PDFInfo
- Publication number
- CN212567246U CN212567246U CN202021198990.1U CN202021198990U CN212567246U CN 212567246 U CN212567246 U CN 212567246U CN 202021198990 U CN202021198990 U CN 202021198990U CN 212567246 U CN212567246 U CN 212567246U
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- China
- Prior art keywords
- silicon window
- moving mechanism
- mechanism assembly
- equipment box
- window piece
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 47
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 47
- 239000010703 silicon Substances 0.000 title claims abstract description 47
- 238000001514 detection method Methods 0.000 title claims abstract description 7
- 230000007246 mechanism Effects 0.000 claims abstract description 48
- 230000005389 magnetism Effects 0.000 claims abstract description 6
- 238000005259 measurement Methods 0.000 abstract description 10
- 239000000523 sample Substances 0.000 description 4
- 238000013461 design Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
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- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The utility model discloses a silicon window piece side depth of parallelism detection device, including base platform and reference surface slide rail, the track groove has been seted up to base platform top one side, track groove top is provided with the moving mechanism assembly, a moving mechanism assembly lateral wall intermediate position is provided with electric putter, be fixed with the cylinder tongs on another lateral wall of moving mechanism assembly, cylinder tongs one end is connected with silicon window piece, silicon window piece bottom is provided with the reference surface slide rail. Has the advantages that: the utility model discloses a set up moving mechanism assembly, magnetism and snatch mechanism and base face slide rail, can realize the data to silicon window piece four limits mechanized measurement depth of parallelism, reduced the work load of manual intervention operation, saved the manpower, improved work efficiency.
Description
Technical Field
The utility model relates to a technical field is measured to the depth of parallelism, concretely relates to silicon window piece side depth of parallelism detection device.
Background
The parallelism refers to the degree of parallelism of two planes or two straight lines, and refers to the maximum allowable error value of parallelism of one plane (side) relative to the other plane (side), and the parallelism evaluates the parallel state between straight lines, between planes or between straight lines and planes. One of the straight lines or the planes is an evaluation reference, the straight line can be a straight line part or a straight line motion track of the measured sample, and the plane can be a plane formed by a plane part or a motion track of the measured sample.
The existing silicon window piece needs to measure the parallelism of the side edges after the manufacture is finished, most of the existing measuring devices are manually measured, four sides of the silicon window piece need to be measured, and the consumption of manual labor is greatly increased.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
In order to overcome prior art not enough, now provide a silicon window piece side parallelism detection device, solve current silicon window piece and need carry out the measurement of parallelism to the side after the preparation is accomplished, current measuring device is mostly artifical manual measurement, and four limits of silicon window piece all need measure, greatly increased the problem of the consumption of artifical physical power.
(II) technical scheme
The utility model discloses a following technical scheme realizes: the utility model provides a silicon window piece side depth of parallelism detection device, including base platform and reference surface slide rail, the track groove has been seted up to base platform top one side, track groove top is provided with the moving mechanism assembly, a moving mechanism assembly lateral wall intermediate position is provided with electric putter, be fixed with the cylinder tongs on another lateral wall of moving mechanism assembly, cylinder tongs one end is connected with silicon window piece, silicon window piece bottom is provided with the reference surface slide rail.
Furthermore, an equipment box is fixed to one side, close to the reference surface sliding rail, of the top of the base platform through screws, a component for power connection is arranged on the equipment box, an operation table is fixed to the top of the equipment box, and the operation table is connected with the power utilization structures through wires.
Furthermore, an electromagnetic grabbing mechanism is fixed at the top in the equipment box and is of an electromagnet structure, a magnetic end is movably connected under the electromagnetic grabbing mechanism, a sliding meter frame is arranged at one end of the magnetic end, and a dial indicator is fixed on the sliding meter frame.
Furthermore, two groups of track grooves are formed in the base platform, sliding columns are welded at the bottom of the moving mechanism assembly, the electric push rod pushes and pulls the moving mechanism assembly to slide in the track grooves through the sliding columns, and one end of the air cylinder gripper is arranged inside the moving mechanism assembly and is rotatably connected with a rotating motor.
Further, the cylinder tongs are tightly attached to one side wall of the silicon window sheet, the silicon window sheet can slide in the reference surface slide rail, and the electric push rod, the rotating motor and the electromagnetic grabbing mechanism are all connected with the equipment box through leads.
Further, the operation panel with electric putter the rotating electrical machines and the electromagnetism snatchs the control end intercommunication on the mechanism, there is the spout beginning on the inner wall of equipment box, the slip table frame pass through the spout with equipment box sliding connection, the magnetism end is embedded in the slip table frame, the percentage table with the slip table frame passes through the draw-in groove and connects.
(III) advantageous effects
Compared with the prior art, the utility model, following beneficial effect has:
for solving current silicon window piece and need carry out the measurement of depth of parallelism to the side after the preparation is accomplished, current measuring device mostly all is artifical manual measurement, and four limits of silicon window piece all need measure, greatly increased the problem of the consumption of artifical physical power, the utility model discloses a set up moving mechanism assembly, magnetism and snatch mechanism and base face slide rail, can realize the data to silicon window piece four limits mechanized measurement depth of parallelism, reduced the work load of manual intervention operation, saved the manpower, improved work efficiency.
Drawings
Fig. 1 is a schematic structural view of a device for detecting parallelism of a side edge of a silicon window sheet according to the present invention;
FIG. 2 is a front view of an apparatus box in the device for detecting parallelism of the side edge of a silicon window sheet according to the present invention;
fig. 3 is a right sectional view of a moving mechanism assembly in the silicon window side parallelism detecting apparatus of the present invention.
The reference numerals are explained below:
1. a base platform; 2. a reference surface slide rail; 3. a moving mechanism assembly; 4. a cylinder gripper; 5. a dial indicator; 6. an equipment box; 7. an electromagnetic grabbing mechanism; 8. a sliding watch frame; 9. a silicon window sheet; 10. a rotating electric machine; 11. an electric push rod; 12. an operation table; 13. a magnetic tip; 14. a track groove; 15. a slide column.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
As shown in fig. 1-3, the device for detecting parallelism of side edges of a silicon window sheet in this embodiment includes a base platform 1 and a reference surface slide rail 2, a rail groove 14 is formed on one side of the top of the base platform 1, a moving mechanism assembly 3 is arranged on the top of the rail groove 14, the moving mechanism assembly 3 measures a silicon window sheet 9 along the rail groove 14, an electric push rod 11 is arranged at the middle position of one side wall of the moving mechanism assembly 3, an air cylinder gripper 4 is fixed on the other side wall of the moving mechanism assembly 3, one end of the air cylinder gripper is connected with the silicon window sheet 9, the reference surface slide rail 2 is arranged at the bottom of the silicon window sheet 9, the output length of the electric push rod 11 is greater than the length of the reference surface slide rail 2, the air cylinder gripper 4 is controlled by an external air source control device, a device box 6 is fixed on one side of the top of the base platform 1, the device comprises a device box 6, an operation table 12 is fixed at the top of the device box 6, the operation table 12 is connected with all power utilization structures through wires, an electromagnetic grabbing mechanism 7 is fixed at the top in the device box 6, the electromagnetic grabbing mechanism 7 is an electromagnet structure with smaller power, a magnetic end 13 is movably connected under the electromagnetic grabbing mechanism 7, one end of the magnetic end 13 is provided with a sliding meter frame 8, a dial indicator 5 is fixed on the sliding meter frame 8, two groups of track grooves 14 are formed on a base platform 1, sliding columns 15 are welded at the bottom of a moving mechanism assembly 3, electric push rods 11 push-pull moving mechanism assemblies 3 slide in the track grooves 14 through the sliding columns 15, and one end of an air cylinder hand grip 4 is rotatably connected with a rotating motor 10 inside the moving mechanism assembly 3.
In this embodiment, the cylinder gripper 4 is tightly attached to a side wall of the silicon window sheet 9, the silicon window sheet 9 can slide in the reference surface slide rail 2, and the electric push rod 11, the rotating motor 10 and the electromagnetic gripping mechanism 7 are all connected with the equipment box 6 through wires.
In this embodiment, the operation console 12 is communicated with the electric push rod 11, the rotating electrical machine 10 and the control end of the electromagnetic grabbing mechanism 7, a sliding groove is formed in the inner wall of the equipment box 6, the sliding meter frame 8 is slidably connected with the equipment box 6 through the sliding groove, the magnetic end 13 is embedded in the sliding meter frame 8, and the dial indicator 5 is connected with the sliding meter frame 8 through a clamping groove.
The specific implementation process of this embodiment is as follows: when the device is used specifically, firstly, the equipment box 6 is powered on, then a silicon window sheet 9 to be detected is placed into the reference surface slide rail 2, the electromagnetic grabbing mechanism 7 is controlled to work through the operation table 12, the magnetic end 13 is grabbed, the magnetic end 13 carries the sliding meter frame 8 and the dial indicator 5 to ascend, then the electric push rod 11 is controlled through the operation table 12 to pull the moving mechanism assembly 3 along the rail groove 14, the air cylinder grabbing hand 4 corresponds to one side wall of the silicon window sheet 9, then the air cylinder grabbing hand 4 is started to be adsorbed on the silicon window sheet 9 with small grabbing force, the electric push rod 11 pushes the moving mechanism assembly 3 again, the silicon window sheet 9 moves to the position under the dial indicator 5 along the reference surface slide rail 2 under the pushing of the air cylinder grabbing hand 4, the electromagnetic grabbing mechanism 7 is powered off, a measuring probe of the dial indicator 5 falls to the side of the silicon window sheet 9, and the electric push rod 11 pushes and pulls the moving mechanism assembly 3 in a reciprocating mode, and pulls the silicon window sheet 9 to level at the bottom of the The measurement of line degree, after data are stable, silicon window piece 9 is removed 2 outsides of datum plane slide rail, rotating electrical machines 10 drives cylinder tongs 4 and rotates, make the opposite side of silicon window piece 9 correspond the measuring probe of percentage table 5, carry out the depth of parallelism measurement of this side with the principle, the circulation is so work, can accomplish the depth of parallelism measurement work to four sides of silicon window piece 9 fast, this design, can realize the data to the four sides mechanized depth of parallelism measurement of silicon window piece 9, the work load of manual intervention operation has been reduced, the manpower is saved, the work efficiency is improved, the risk of being worn and torn by handheld for a long time has been avoided silicon window piece 9 again.
The above-described embodiments are merely illustrative of the preferred embodiments of the present invention and are not intended to limit the spirit and scope of the present invention. Without departing from the design concept of the present invention, various modifications and improvements made by the technical solution of the present invention by those skilled in the art should fall into the protection scope of the present invention, and the technical contents claimed by the present invention have been fully recorded in the claims.
Claims (6)
1. The utility model provides a silicon window piece side depth of parallelism detection device which characterized in that: including base platform (1) and reference surface slide rail (2), track groove (14) have been seted up to base platform (1) top one side, track groove (14) top is provided with moving mechanism assembly (3), a lateral wall intermediate position of moving mechanism assembly (3) is provided with electric putter (11), be fixed with cylinder tongs (4) on another lateral wall of moving mechanism assembly (3), cylinder tongs one end is connected with silicon window piece (9), silicon window piece (9) bottom is provided with reference surface slide rail (2).
2. The device for detecting the parallelism of the side edge of a silicon window sheet according to claim 1, wherein: the base platform (1) top is close to datum plane slide rail (2) one side has equipment box (6) through the fix with screw, have the subassembly of power connection on equipment box (6), equipment box (6) top is fixed with operation panel (12), operation panel (12) pass through the wire with each part power consumption structure and are connected.
3. The apparatus of claim 2, wherein: the top is fixed with the electromagnetism and snatchs mechanism (7) in equipment box (6), the electromagnetism snatchs mechanism (7) and is the electro-magnet structure, the electromagnetism snatchs mechanism (7) under swing joint have magnetism end (13), magnetism end (13) one end is provided with slip table frame (8), be fixed with percentage table (5) on slip table frame (8).
4. The apparatus of claim 3, wherein: the track groove (14) are provided with two groups which are formed on the base platform (1), a sliding column (15) is welded at the bottom of the moving mechanism assembly (3), the electric push rod (11) pushes and pulls the moving mechanism assembly (3) to slide in the track groove (14) through the sliding column (15), and one end of the air cylinder hand grip (4) is arranged in the moving mechanism assembly (3) and is rotatably connected with a rotating motor (10).
5. The apparatus of claim 4, wherein: the air cylinder gripper (4) is tightly attached to one side wall of the silicon window sheet (9), the silicon window sheet (9) can slide in the reference surface sliding rail (2), and the electric push rod (11), the rotating motor (10) and the electromagnetic gripping mechanism (7) are connected with the equipment box (6) through wires.
6. The apparatus of claim 5, wherein: operation panel (12) with electric putter (11), rotating electrical machines (10) and the electromagnetism snatchs the control end intercommunication on the mechanism (7), there is the spout beginning on the inner wall of equipment box (6), slip table frame (8) through the spout with equipment box (6) sliding connection, magnetism end (13) are embedded in slip table frame (8), percentage table (5) with slip table frame (8) are connected through the draw-in groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021198990.1U CN212567246U (en) | 2020-06-24 | 2020-06-24 | Silicon window piece side parallelism detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021198990.1U CN212567246U (en) | 2020-06-24 | 2020-06-24 | Silicon window piece side parallelism detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212567246U true CN212567246U (en) | 2021-02-19 |
Family
ID=74612250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021198990.1U Expired - Fee Related CN212567246U (en) | 2020-06-24 | 2020-06-24 | Silicon window piece side parallelism detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212567246U (en) |
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2020
- 2020-06-24 CN CN202021198990.1U patent/CN212567246U/en not_active Expired - Fee Related
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210219 |
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| CF01 | Termination of patent right due to non-payment of annual fee |