CN212558402U - Tray loading attachment - Google Patents
Tray loading attachment Download PDFInfo
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- CN212558402U CN212558402U CN202020949094.8U CN202020949094U CN212558402U CN 212558402 U CN212558402 U CN 212558402U CN 202020949094 U CN202020949094 U CN 202020949094U CN 212558402 U CN212558402 U CN 212558402U
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- tray
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- moving assembly
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Abstract
The utility model discloses a tray feeding device, which is used for conveying semiconductor wafers to the lower part of a large turntable and comprises a tray bearing device and a tray moving device, wherein the tray moving device comprises a transverse moving assembly, a longitudinal moving assembly and a tray bracket; the longitudinal moving assembly is arranged on the transverse moving assembly, and the longitudinal moving assembly can make transverse translation on the transverse moving assembly; the tray support is arranged on the longitudinal moving assembly and can perform longitudinal translation on the longitudinal moving assembly; the tray bearing device is arranged on the tray bracket. The tray is integrally fed, the tray is transversely and longitudinally moved to be fed in all directions by controlling, a large turntable is not required to move, and the feeding efficiency is improved.
Description
Technical Field
The utility model belongs to the technical field of semiconductor wafer processing production and specifically relates to a tray loading attachment is related to.
Background
Most of the existing semiconductor wafer feeders adopt a vibration bowl and a vibration track, and a small number of the existing semiconductor wafer feeders adopt large turntables to move to realize complete feeding of trays, but for semiconductor wafers subjected to high-temperature drying treatment, the semiconductor wafers are positioned in the trays at the moment, because the semiconductor wafers are required to be placed in the trays for high-temperature treatment, the tray feeding is most convenient, the space required for realizing the integral feeding of the trays through the large turntables is very large, the power consumption required by the large turntables is higher, the requirements on a power device are higher, and the large turntables are larger and heavier, so the probability of failure is higher.
For example, CN209758294U patent CN SOT packaging product feed mechanism, it is exactly that it has adopted the combination of vibration bowl and straight vibration track, the efficiency of the vibration bowl material loading of itself is low, it has still had a step with tray material loading to compare with it, it is still big to take up an area of, therefore this application has designed a tray loading attachment, and realize the complete material loading of tray through the tray self removes, the big carousel need not to remove in the material loading process, can realize all material loading through removing the tray, still improved material loading efficiency when reducing occupation of land space.
Disclosure of Invention
The utility model aims to solve the problem that to the shortcoming among the above-mentioned prior art, put forward improvement scheme or alternative, especially one kind improves tray material loading efficiency, reduces the improvement or the alternative of equipment volume simultaneously by a wide margin.
In order to solve the above problem, the utility model discloses a scheme as follows: a tray loading device is used for conveying semiconductor wafers to the position below a large turntable and comprises a tray bearing device and a tray moving device, wherein the tray moving device comprises a transverse moving assembly, a longitudinal moving assembly and a tray support; the longitudinal moving assembly is arranged on the transverse moving assembly, and the longitudinal moving assembly can make transverse translation on the transverse moving assembly; the tray support is arranged on the longitudinal moving assembly and can perform longitudinal translation on the longitudinal moving assembly; the tray bearing device is arranged on the tray bracket.
The tray bearing device can do reciprocating motion in the transverse direction and the longitudinal direction by arranging the transverse moving assembly and the longitudinal moving assembly, so that the tray can move to the position below the large turntable at any position, and the large turntable can absorb the semiconductor wafer on the tray.
Further, according to the above design scheme, the tray feeding device is characterized in that the transverse moving assembly comprises a transverse slide rail, a transverse screw rod and a transverse servo motor; the longitudinal moving assembly is connected with the transverse screw rod, and the transverse servo motor drives the screw rod to enable the longitudinal moving assembly to move horizontally on the transverse sliding rail; the longitudinal moving assembly comprises a longitudinal sliding rail, a longitudinal screw rod and a longitudinal servo motor; the tray support is connected with the longitudinal screw rod, and the longitudinal screw rod is driven by the longitudinal servo motor, so that the tray support can be translated on the longitudinal slide rail.
The method comprises the steps of adopting a transverse servo motor, a transverse screw rod, a longitudinal servo motor and a longitudinal screw rod to accurately control the moving direction of a tray bearing device, enabling each semiconductor wafer placing groove on the tray to sequentially pass through a certain position below a large turntable through computer design and accurate movement of the servo motor, enabling a semiconductor wafer suction nozzle of the position to work to take away the semiconductor wafer at the position when the semiconductor wafer placing groove on the tray moves to a design position below the large turntable, then enabling the tray bearing device to continue to move, enabling the next semiconductor wafer placing groove to move to the design position, repeating the steps until all the semiconductor wafers on the tray are taken away, and then withdrawing from the position below the large turntable.
Further, according to the above design scheme, the tray loading device is characterized in that the tray loading device comprises a bearing plate and a clamping device; the clamping device comprises a horizontal telescopic device, a vertical telescopic device, a clamping plate, a movable plate and a clamping plate mounting frame; the movable plate is arranged on the back of the bearing plate through a vertical telescopic device and can reciprocate up and down under the action of the vertical telescopic device; the movable plate is provided with a sliding hole; a slide bar is arranged on the splint mounting rack; the sliding rod is arranged in the sliding hole; the clamping plate is arranged on the clamping plate mounting frame; the horizontal telescopic device is arranged on the movable plate; the horizontal telescopic device is connected with the clamping plate mounting frame and used for pushing the clamping plate mounting frame to do horizontal reciprocating motion in the horizontal direction.
Because the tray needs to load the semiconductor wafer and enter the high-temperature equipment to dry in the semiconductor wafer processing procedure, therefore the tray often can appear warping after a period of time uses, the four sides are upwards or downwards protruding for most cases, therefore this application has designed a clamping device for pressing the tray side, the tray that is through the centre gripping tray side keeps a horizontal plane when on tray carrier, thereby prevent because the tray warp the semiconductor wafer standing groove slope or the aversion that leads to, because the semiconductor wafer standing groove slope or the aversion can lead to semiconductor wafer slope or the aversion among them, and then lead to sucking mouth on the carousel can be because the semiconductor wafer slope or the aversion can not accurate effectual absorption semiconductor wafer when absorbing the semiconductor wafer. Thereby reducing the work efficiency.
Therefore, the clamping device is designed on the tray bearing device, the movable plate is controlled to reciprocate up and down relative to the bearing plate through the vertical telescopic device, and the clamping plate clamps the tray.
At the during operation, horizontal telescoping device work promotes splint mounting bracket makes the splint with splint mounting bracket fixed connection to outside horizontal migration one section distance, vertical telescoping device work promotes the fly leaf upwards to move one section distance simultaneously, the splint mounting bracket and the splint that will set up on the fly leaf upwards promote one section distance, then put into the tray, horizontal telescoping device work, inwards shrink, make splint mounting bracket and splint inwards move one section distance, make splint be located the top of tray side, then vertical telescoping device work, drive the fly leaf and move one section distance downwards, make splint mounting bracket and the splint of installing on the fly leaf move one section distance downwards, finally realize that splint centre gripping tray side moves downwards, suppress the tray on the tray loading board, the tray that will warp flattens.
Further, according to the above design scheme, the tray feeding device is characterized in that a transverse conduit and a longitudinal conduit are respectively arranged along a direction parallel to the transverse moving assembly and the longitudinal moving assembly; the transverse conduit and the longitudinal conduit are used for installing power cables and signal cables.
Further, according to the above design scheme, the tray feeding device is characterized in that the clamping device further comprises a mounting bridge; the mounting bridge is arranged on the back surface of the bearing plate, and a gap is reserved between the mounting bridge and the bearing plate; the movable plate is arranged in the gap; the middle part of the mounting bridge is provided with a gap for mounting a vertical telescopic device; at least two positioning rods are arranged on the mounting bridge; the positioning rod penetrates through the movable plate to be connected with the bearing plate and is used for assisting in positioning the movable plate to enable the movable plate to be kept horizontal.
Further, according to the above design scheme, the tray feeding device is characterized in that the clamping device further comprises a horizontal positioning bracket; the horizontal positioning bracket is connected with the bearing plate through a sliding rod; the horizontal positioning bracket is provided with a through hole; the splint connecting rod is fixedly connected with the splint mounting rack; the splint connecting rod passes through the through hole.
The technical effects of the utility model are as follows: the utility model provides a tray loading attachment realizes through setting up lateral shifting assembly, longitudinal movement assembly that the tray bears the weight of the device and can be reciprocating motion in horizontal and vertical two directions, and then realizes that the optional position homoenergetic of tray moves the below of carousel, supplies the carousel to absorb the semiconductor wafer on the tray.
Further, a clamping device is designed, the deformed tray can be flattened, and the precision and the efficiency of the large turntable when the semiconductor wafer is sucked are guaranteed.
Some tray loading attachment in prior art's tray loading attachment adopt convertible splint, however the working space that convertible splint needed is bigger, need reserve for the bigger space of tray loading attachment, consequently need make bigger equipment and hold this tray loading attachment for the whole of equipment becomes bigger.
The prior art has equipment for sucking the semiconductor wafer on the tray through the movement of the large turntable, but the large turntable has larger volume and needs larger space for the movement of the large turntable, and meanwhile, the large turntable can realize the suction of the semiconductor through the movement, so that the material taking and placing of other equipment and the processing of the semiconductor wafer cannot be simultaneously provided.
In the prior art, a method of arranging a linear vibration track between the tray and the turntable is also used to join the tray and the turntable, but the method also has the problems of large occupied space and low efficiency.
Drawings
Fig. 1 is a structural schematic diagram of a tray feeding device installed below a large turntable.
Fig. 2 is a schematic structural diagram of a tray feeding device.
Fig. 3 is a schematic view of a back structure of the tray carrying device.
Fig. 4 is a schematic front structure view of the tray carrying device.
Wherein, 1 is a large turntable, 2 is a tray bearing device, 3 is a transverse movement assembly, 4 is a longitudinal movement assembly, 5 is an auxiliary slide rail, 21 is a bearing plate, 22 is an installation support, 23 is an installation bridge, 24 is a movable plate, 25 is a slide hole, 26 is a slide bar, 27 is a splint installation frame, 28 is a splint, 29 is a splint connecting rod, 291 is a horizontal telescopic device, 292 is a vertical telescopic device, 293 is a horizontal positioning support, 31 is a transverse servo motor, 32 is a transverse slide rail, 33 is a transverse screw rod, 41 is a longitudinal servo motor, 42 is a longitudinal slide rail, and 43 is a longitudinal screw rod.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The meaning of the above terms in the present invention can be understood in specific cases by those skilled in the art.
Example (b): a tray loading device is used for conveying semiconductor wafers to the position below a large turntable and comprises a tray bearing device and a tray moving device, wherein the tray moving device comprises a transverse moving assembly, a longitudinal moving assembly and a tray support; the longitudinal moving assembly is arranged on the transverse moving assembly, and the longitudinal moving assembly can make transverse translation on the transverse moving assembly; the tray support is arranged on the longitudinal moving assembly and can perform longitudinal translation on the longitudinal moving assembly; the tray bearing device is arranged on the tray bracket; the transverse moving assembly comprises a transverse sliding rail, a transverse screw rod and a transverse servo motor; the longitudinal moving assembly is connected with the transverse screw rod, and the transverse servo motor drives the screw rod to enable the longitudinal moving assembly to move horizontally on the transverse sliding rail; the longitudinal moving assembly comprises a longitudinal sliding rail, a longitudinal screw rod and a longitudinal servo motor; the tray support is connected with the longitudinal screw rod, and the longitudinal screw rod is driven by a longitudinal servo motor to enable the tray support to move horizontally on the longitudinal slide rail; the tray bearing device comprises a bearing plate and a clamping device; the clamping device comprises a horizontal telescopic device, a vertical telescopic device, a clamping plate, a movable plate and a clamping plate mounting frame; the movable plate is arranged on the back of the bearing plate through a vertical telescopic device and can reciprocate up and down under the action of the vertical telescopic device; the movable plate is provided with a sliding hole; a slide bar is arranged on the splint mounting rack; the sliding rod is arranged in the sliding hole; the clamping plate is arranged on the clamping plate mounting frame; the horizontal telescopic device is arranged on the movable plate; the horizontal telescopic device is connected with the splint mounting frame and is used for pushing the splint mounting frame to horizontally reciprocate in the horizontal direction; a transverse conduit and a longitudinal conduit are respectively arranged along the direction parallel to the transverse moving assembly and the longitudinal moving assembly; the transverse conduit and the longitudinal conduit are used for installing a power supply cable and a signal cable; the transverse moving assembly and the longitudinal moving assembly are respectively provided with an auxiliary sliding rail parallel to the transverse moving assembly and the longitudinal moving assembly; the clamping device further comprises a mounting bridge; the mounting bridge is arranged on the back surface of the bearing plate, and a gap is reserved between the mounting bridge and the bearing plate; the movable plate is arranged in the gap; the middle part of the mounting bridge is provided with a gap for mounting a vertical telescopic device; at least two positioning rods are arranged on the mounting bridge; the positioning rod penetrates through the movable plate to be connected with the bearing plate and is used for assisting in positioning the movable plate to keep the movable plate horizontal; the clamping device further comprises a horizontal positioning bracket; the horizontal positioning bracket is connected with the bearing plate through a sliding rod; the horizontal positioning bracket is provided with a through hole; the splint connecting rod is fixedly connected with the splint mounting rack; the splint connecting rod passes through the through hole. The bearing plate is provided with a mounting bracket, and the tray bearing device is arranged on the tray bracket through the mounting bracket.
Because the tray needs to load the semiconductor wafer and enter the high-temperature equipment to dry in the semiconductor wafer processing procedure, therefore the tray often can appear warping after a period of time uses, the four sides are upwards or downwards protruding for most cases, therefore this application has designed a clamping device for pressing the tray side, the tray that is through the centre gripping tray side keeps a horizontal plane when on tray carrier, thereby prevent because the tray warp the semiconductor wafer standing groove slope or the aversion that leads to, because the semiconductor wafer standing groove slope or the aversion can lead to semiconductor wafer slope or the aversion among them, and then lead to sucking mouth on the carousel can be because the semiconductor wafer slope or the aversion can not accurate effectual absorption semiconductor wafer when absorbing the semiconductor wafer. Thereby reducing the work efficiency.
Therefore, the clamping device is designed on the tray bearing device, the movable plate is controlled to reciprocate up and down relative to the bearing plate through the vertical telescopic device, and the clamping plate clamps the tray.
At the during operation, horizontal telescoping device work promotes splint mounting bracket makes the splint with splint mounting bracket fixed connection to outside horizontal migration one section distance, vertical telescoping device work promotes the fly leaf upwards to move one section distance simultaneously, the splint mounting bracket and the splint that will set up on the fly leaf upwards promote one section distance, then put into the tray, horizontal telescoping device work, inwards shrink, make splint mounting bracket and splint inwards move one section distance, make splint be located the top of tray side, then vertical telescoping device work, drive the fly leaf and move one section distance downwards, make splint mounting bracket and the splint of installing on the fly leaf move one section distance downwards, finally realize that splint centre gripping tray side moves downwards, suppress the tray on the tray loading board, the tray that will warp flattens.
Claims (7)
1. A tray loading device is used for conveying semiconductor wafers to the position below a large turntable and comprises a tray bearing device and a tray moving device, wherein the tray moving device comprises a transverse moving assembly, a longitudinal moving assembly and a tray support; the longitudinal moving assembly is arranged on the transverse moving assembly, and the longitudinal moving assembly can make transverse translation on the transverse moving assembly; the tray support is arranged on the longitudinal moving assembly and can perform longitudinal translation on the longitudinal moving assembly; the tray bearing device is arranged on the tray bracket.
2. The tray feeding device according to claim 1, wherein the lateral moving assembly comprises a lateral slide rail, a lateral screw rod, a lateral servo motor; the longitudinal moving assembly is connected with the transverse screw rod, and the transverse servo motor drives the screw rod to enable the longitudinal moving assembly to move horizontally on the transverse sliding rail; the longitudinal moving assembly comprises a longitudinal sliding rail, a longitudinal screw rod and a longitudinal servo motor; the tray support is connected with the longitudinal screw rod, and the longitudinal screw rod is driven by the longitudinal servo motor, so that the tray support can be translated on the longitudinal slide rail.
3. The tray loading device according to claim 1, wherein the tray carrying device comprises a carrying plate and a clamping device; the clamping device comprises a horizontal telescopic device, a vertical telescopic device, a clamping plate, a movable plate and a clamping plate mounting frame; the movable plate is arranged on the back of the bearing plate through a vertical telescopic device and can reciprocate up and down under the action of the vertical telescopic device; the movable plate is provided with a sliding hole; a slide bar is arranged on the splint mounting rack; the sliding rod is arranged in the sliding hole; the clamping plate is arranged on the clamping plate mounting frame; the horizontal telescopic device is arranged on the movable plate; the horizontal telescopic device is connected with the clamping plate mounting frame and used for pushing the clamping plate mounting frame to do horizontal reciprocating motion in the horizontal direction.
4. The tray loading device according to claim 1, wherein a lateral conduit and a longitudinal conduit are provided in a direction parallel to the lateral moving assembly and the longitudinal moving assembly, respectively; the transverse conduit and the longitudinal conduit are used for installing power cables and signal cables.
5. The tray loading device according to claim 1, wherein the lateral moving assembly and the longitudinal moving assembly are each provided with an auxiliary slide rail parallel to itself.
6. A pallet loading device according to claim 3, wherein said gripping device further comprises a mounting bridge; the mounting bridge is arranged on the back surface of the bearing plate, and a gap is reserved between the mounting bridge and the bearing plate; the movable plate is arranged in the gap; the middle part of the mounting bridge is provided with a gap for mounting a vertical telescopic device; at least two positioning rods are arranged on the mounting bridge; the positioning rod penetrates through the movable plate to be connected with the bearing plate and is used for assisting in positioning the movable plate to enable the movable plate to be kept horizontal.
7. The tray feeding device according to claim 3, wherein the clamping device further comprises a horizontal positioning bracket; the horizontal positioning bracket is connected with the bearing plate through a sliding rod; the horizontal positioning bracket is provided with a through hole; the splint mounting rack is fixedly connected with the splint connecting rod; the splint connecting rod passes through the through hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020949094.8U CN212558402U (en) | 2020-05-29 | 2020-05-29 | Tray loading attachment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020949094.8U CN212558402U (en) | 2020-05-29 | 2020-05-29 | Tray loading attachment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212558402U true CN212558402U (en) | 2021-02-19 |
Family
ID=74637557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020949094.8U Active CN212558402U (en) | 2020-05-29 | 2020-05-29 | Tray loading attachment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212558402U (en) |
-
2020
- 2020-05-29 CN CN202020949094.8U patent/CN212558402U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210423 Address after: 2 / F, building 6, No. 8, Xinzhong Road, Haining Economic Development Zone, Haining City, Jiaxing City, Zhejiang Province Patentee after: Zhejiang Qingxin Technology Co.,Ltd. Address before: 212300 original badminton hall, science and Innovation Park, No.19, Qiliang Road, Danyang City, Zhenjiang City, Jiangsu Province Patentee before: Jiangsu Tongzhen Intelligent Technology Co.,Ltd. |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Tray feeding device Effective date of registration: 20211214 Granted publication date: 20210219 Pledgee: Hangzhou United Rural Commercial Bank Co.,Ltd. Haining sub branch Pledgor: Zhejiang Qingxin Technology Co.,Ltd. Registration number: Y2021330002525 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20220714 Granted publication date: 20210219 Pledgee: Hangzhou United Rural Commercial Bank Co.,Ltd. Haining sub branch Pledgor: Zhejiang Qingxin Technology Co.,Ltd. Registration number: Y2021330002525 |