CN212533100U - Ultrahigh vacuum beam source furnace crucible degassing device - Google Patents
Ultrahigh vacuum beam source furnace crucible degassing device Download PDFInfo
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- CN212533100U CN212533100U CN202020892165.5U CN202020892165U CN212533100U CN 212533100 U CN212533100 U CN 212533100U CN 202020892165 U CN202020892165 U CN 202020892165U CN 212533100 U CN212533100 U CN 212533100U
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Abstract
The patent discloses an ultrahigh vacuum beam source stove crucible degassing unit, the device includes: the vacuum chamber is connected with a fifth knife edge flange on the vacuum gauge pipe through a first knife edge flange, is connected with a sixth knife edge flange on the gate valve through a second knife edge flange, and is respectively connected with a ninth knife edge flange on the 2-beam source furnace through a third knife edge flange and a fourth knife edge flange. The gate valve is connected with an eighth knife edge flange on the vacuum pump through a seventh knife edge flange. The device has simple structure, can quickly recover to ultrahigh vacuum degree after being exposed to the atmosphere, has simple loading and unloading of the beam source furnace, and greatly improves the working efficiency of degassing the crucible of the beam source furnace.
Description
Technical Field
The patent relates to the technical field of vacuum cavities, in particular to a beam source furnace degassing device utilizing an ultrahigh vacuum environment.
Background
Under the vacuum environment, the metal material can be evaporated from the crucible of the beam source furnace by heating with the resistance wire in the beam source furnace, thereby realizing the preparation of the film material or the chip metal electrode. The beam source furnace has become a core component for preparing semiconductor materials and chip metal electrodes. However, the impurities carried by the new beam source furnace or crucible itself during use are likely to contaminate the high purity metal. Therefore, high temperature outgassing is required before a new beam source furnace or crucible can be used. If a new beam source furnace or crucible is directly placed into the process equipment for degassing, the background vacuum degree of the system is poor, and the risk of polluting the process equipment exists, meanwhile, the process equipment is exposed to the atmosphere for many times by repeatedly disassembling the crucible of the beam source furnace, and the cavity needs to be baked for a long time after the system is exposed to the atmosphere each time, so that water vapor and other organic gases adhered to the cavity wall when the cavity is exposed to the atmosphere are removed, and the cavity returns to the ultrahigh vacuum environment, so that the utilization efficiency of the process equipment is greatly reduced, obviously, the method of directly placing the beam source furnace or crucible into the process equipment for degassing is not preferable. Therefore, the degassing of the beam source furnace crucible by the cavity in the ultrahigh vacuum environment is expected to be realized, and the cavity is simple in structure and beneficial to high-efficiency recovery of the ultrahigh vacuum environment and quick loading and unloading of the beam source furnace crucible.
Disclosure of Invention
The purpose of this patent is to provide a device to bunch source stove crucible degasification under ultrahigh vacuum environment to solve above-mentioned existing problem, make bunch source stove crucible degasification device simple structure under ultrahigh vacuum environment, the vacuum is high, and loading and unloading are simple.
In order to achieve the above purpose, the patent provides the following solutions: this patent provides an ultrahigh vacuum beam source
The furnace crucible degassing device mainly comprises a vacuum chamber 1, a beam source furnace degassing chamber 1-1, a beam source furnace storage chamber 1-2, a vacuum gauge pipe 2, a gate valve 3, a vacuum pump 4 and a beam source furnace 5.
The vacuum chamber 1 is made of stainless steel, and is cylindrical in appearance with a hollow cylinder in the middle. One side of the upper half part of the cylinder is connected with a gas chamber 1-1 at the beam source furnace, the degassing chamber 1-1 of the beam source furnace is made of stainless steel, the cylinder is cylindrical in appearance, a hollow hole is formed in the middle, the other end of the cylinder is connected with a third knife edge flange 1-1-1, and the other end of the third knife edge 1-1-1 is connected with a ninth knife edge flange 5-1 on the beam source furnace 5 through bolts.
The vacuum chamber 1 is made of stainless steel, and is cylindrical in appearance with a hollow cylinder in the middle. The other side of the upper half part of the cylinder is connected with a beam source furnace storage chamber 1-2, the beam source furnace storage chamber 1-2 is made of stainless steel, the cylinder is cylindrical in appearance, a hollow hole is formed in the middle, the other end of the cylinder is connected with a fourth knife edge flange 1-2-1, and the other end of the fourth knife edge flange 1-2-1 is connected with a ninth knife edge flange 5-1 on the beam source furnace 5 through bolts.
The vacuum chamber 1 is made of stainless steel, and is cylindrical in appearance with a hollow cylinder in the middle. One side of the lower half part of the cylinder is connected with a first knife edge flange (1-3) at the same side of a beam source furnace degassing chamber (1-1), and the other end of the first knife edge flange (1-3) is connected with a fifth knife edge flange (2-1) on the vacuum gauge pipe (2) through a bolt.
The vacuum chamber 1 is made of stainless steel, and is cylindrical in appearance with a hollow cylinder in the middle. The bottom surface of the cylinder is connected with a second knife edge flange (1-4), and the other end of the second knife edge flange (1-4) is connected with a sixth knife edge flange (3-1) on the gate valve (3) through a bolt.
The gate valve 3 is made of stainless steel, and the upper side and the lower side of the gate valve 3 are provided with a sixth knife edge flange 1-3 and a seventh knife edge flange 1-4 on the valve faces. The other end of the seventh knife edge flange 1-4 is connected with an eighth knife edge flange 4-1 welded with the vacuum pump 4 through bolts.
The top of the vacuum pump 4 is connected with the other end of the eighth knife edge flange 4-1 through welding.
A ninth knife edge flange 5-1 is welded on the beam source furnace 5, and a cylindrical cavity made of tantalum materials and used for placing a crucible is arranged in the middle of one end, not welded with the beam source furnace 5, of the ninth knife edge flange 5-1.
This patent has obtained following technological effect for prior art:
the utility model provides an utilize beam source stove crucible degassing unit of ultrahigh vacuum environment, its simple structure conveniently loads and unloads beam source stove crucible, and the rough vacuum time of taking out is short, and ultrahigh vacuum degree recovery speed is fast, can carry out work after reaching corresponding vacuum, improves work efficiency.
Drawings
In order to more clearly illustrate the embodiments of the present patent or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present patent, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a schematic structural view of a crucible degassing device of an ultrahigh vacuum beam source furnace of the present patent;
wherein 1 is a vacuum chamber, 1-1 is a beam source furnace degassing chamber, 1-2 is a beam source furnace storage chamber, 1-3 is a first knife edge flange (welded with the vacuum chamber), 1-4 is a knife edge flange (welded with the vacuum chamber), 1-1-1 is a knife edge flange (welded with the beam source furnace degassing chamber), 1-2-1 is a knife edge flange (welded with the beam source furnace storage chamber), 2 is a vacuum gauge pipe, 2-1 is a knife edge flange (welded with the vacuum gauge pipe), 3 is a gate valve, 3-1 is a knife edge flange (welded with the gate valve), 3-2 is a knife edge flange (welded with the gate valve), 4 is a vacuum pump, 4-1 is a knife edge flange (welded with the vacuum pump), 5 is a beam source furnace, and 5-1 is a knife edge flange (welded with the beam source furnace).
Detailed Description
The technical solutions in the embodiments of the present patent will be clearly and completely described below with reference to the drawings in the embodiments of the present patent, and it is obvious that the described embodiments are only some embodiments of the present patent, not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the scope of protection of this patent.
The utility model aims at providing an ultrahigh vacuum beam source stove crucible degassing unit to solve the problem that exists on the above-mentioned prior art, make the loading and unloading of beam source stove crucible of simple structure of vacuum cavity, obtain quick ultrahigh vacuum.
In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention is further described with reference to the accompanying drawings and the detailed description.
As shown in figure 1, the patent provides a beam source furnace crucible degassing system in an ultrahigh vacuum environment, which comprises a vacuum chamber 1, a beam source furnace degassing chamber 1-1, a beam source furnace storage chamber 1-2, a vacuum gauge 2, a gate valve 3, a vacuum pump 4 and a beam source furnace 5. The vacuum chamber 1 is formed by welding stainless steel round pipes, one end of a first knife edge flange 1-3, a second knife edge flange 1-4, a third knife edge flange 1-1-1 and a fourth knife edge flange 1-2-1 is welded with the vacuum chamber 1, and the other end is respectively connected with a vacuum gauge pipe 2, a gate valve 3 and a beam source furnace 5 through bolts. A sixth knife edge flange 3-1 is welded on the valve face on one side of the gate valve 3 and is connected with a second knife edge flange 1-4; the gate valve 3 is connected with an eighth knife edge flange 4-1 welded on the top of the vacuum pump 4 through a seventh knife edge flange 3-2 welded on the other side valve face.
Wherein the vacuum chamber 1 is formed by welding stainless steel round pipes with the pipe diameter of 550mm, and the right side surface of the upper half part is provided with a round hole with the diameter of 100mm for welding with the beam source furnace degassing chamber 1-1. The degassing chamber 1-1 of the beam source furnace is a stainless steel round pipe with the diameter of 100mm, and a third knife edge flange 1-1-1 with the diameter of 120mm is welded at the other end of the degassing chamber. And the third knife edge flange 1-1-1 is connected with an eighth knife edge flange 4-1 welded with the beam source furnace 5 and having a diameter of 120mm through M6 bolts.
Wherein the vacuum chamber 1 is formed by welding stainless steel round pipes, and the left side surface of the upper half part is provided with a round hole of 90mm for welding with the beam source furnace storage chamber 1-2. The beam source furnace storage chamber 1-2 is a stainless steel round pipe with the diameter of 90mm, and a fourth knife edge flange 1-2-1 with the diameter of 120mm is welded at the other end of the stainless steel round pipe. And the fourth knife edge flange 1-2-1 is connected with an eighth knife edge flange 4-1 welded with the beam source furnace 5 and having a diameter of 120mm through M6 bolts.
The vacuum gauge pipe 2 is connected with a first knife edge flange 1-3 welded to the vacuum chamber 1 through a fifth knife edge flange 2-1 with the diameter of 50mm through an M4 bolt, and the other end of the fifth knife edge flange 2-1 is welded to the vacuum gauge pipe 2.
Wherein, the gate valve 3 is made of stainless steel, a sixth knife edge flange 3-1 with the diameter of 150mm is welded on the valve surface at one side of the gate valve 3, and the second knife edge flange 1-4 with the diameter of 150mm is welded with the vacuum chamber 1 and is connected with the vacuum chamber through M6 bolts. A seventh knife edge flange 3-2 with the diameter of 150mm is welded on the valve surface on the other side of the gate valve 3, and an eighth knife edge flange 4-1 with the diameter of 150mm is welded on the vacuum pump 4 and is connected with the vacuum pump through M6 bolts.
Wherein, the top of the vacuum pump 4 is welded with an eighth knife edge flange 4-1 with the diameter of 150 mm.
Wherein, the beam source furnace 5 is connected with the outside by welding a ninth knife edge flange 5-1 with the diameter of 120 mm. The middle of the other end of the ninth knife edge flange 5-1 is welded into a barrel-shaped cavity by tantalum, and the cavity is used for placing a crucible,and thisThe end surfaces of the two cutting edges are respectively connected with a first cutting edge flange 1-3 and a second cutting edge flange 1-4 welded with the vacuum chamber 1 through bolts.
The ultrahigh vacuum cavity type beam source furnace is an ultrahigh vacuum cavity, is simple in structure, can be quickly and conveniently assembled and disassembled, ensures that the cavity recovers ultrahigh vacuum in a very short time, meets the technological requirements of degassing of crucibles of various beam source furnaces, and improves the working efficiency.
The principles and implementations of this patent are explained in this patent by applying specific examples, and the above descriptions of the examples are only used to help understanding the method and core idea of this patent and do not limit the scope of the claims, and other substantially equivalent substitutes that can be conceived by those skilled in the art are within the scope of this patent.
Claims (6)
1. An ultrahigh vacuum beam source furnace crucible degassing device comprises: vacuum chamber (1), vacuum gauge pipe (2), slide valve (3), vacuum pump (4), beam source stove (5), its characterized in that:
a first knife edge flange (1-3) on the vacuum chamber (1) is connected with a fifth knife edge flange (2-1) on the vacuum gauge pipe (2) by bolts, a second knife edge flange (1-4) on the vacuum chamber (1) is connected with a sixth knife edge flange (3-1) on the gate valve (3) by bolts, a seventh knife edge flange (3-2) on the gate valve (3) is connected with an eighth knife edge flange (4-1) on the top of the vacuum pump (4) by bolts, a ninth knife edge flange (5-1) on the upper surface of the two beam source furnaces (5) is respectively connected with a third knife edge flange (1-1-1) on a beam source furnace degassing chamber (1-1) in the vacuum chamber (1) and a fourth knife edge flange (1-2-1) on a beam source furnace storage chamber (1-2) by bolts.
2. The degassing device for the crucible of the ultra-high vacuum beam source furnace according to claim 1, wherein the vacuum chamber (1) is made of stainless steel, the appearance of the vacuum chamber is a cylindrical cylinder with a hollow cavity in the middle, and one side of the upper half part of the cylinder is connected with a degassing chamber (1-1) of the beam source furnace; the other side of the cylinder is connected with a beam source furnace storage chamber (1-2), one side of the lower half part of the cylinder and the same side connected with a beam source furnace degassing chamber (1-1) are connected with a first knife edge flange (1-3), and the bottom surface of the cylinder is connected with a second knife edge flange (1-4); the beam source furnace degassing chamber (1-1) is made of stainless steel, a hollow cylinder is arranged in the middle of the beam source furnace degassing chamber and is cylindrical, and a third knife edge flange (1-1-1) is welded at the other end of the cylinder; the beam source furnace storage chamber (1-2) is made of stainless steel, a hollow cylinder is arranged in the middle of the cylindrical appearance, and a fourth knife edge flange (1-2-1) is welded at the other end of the cylinder.
3. The crucible degassing device for the ultrahigh vacuum beam source furnace according to the claim 1, characterized in that one end of the vacuum gauge tube (2) is welded with a filament binding post; the other end is welded with a fifth knife edge flange (2-1); the filament binding post is connected with a filament at the vacuum end in the vacuum gauge tube (2).
4. The degassing device for the crucible of the ultrahigh vacuum beam source furnace according to claim 1, wherein the gate valve (3) is made of stainless steel, and a sixth knife edge flange (3-1) and a seventh knife edge flange (3-2) are welded on the upper side and the lower side of the valve body respectively.
5. The crucible degassing device for the ultrahigh vacuum beam source furnace according to claim 1, characterized in that an eighth knife edge flange (4-1) is welded on the top of the vacuum pump (4).
6. The crucible degassing device for the ultrahigh vacuum beam source furnace according to claim 1, wherein a ninth knife-edge flange (5-1) is welded on the beam source furnace (5), and a cylindrical cavity made of tantalum material for placing the crucible is arranged in the middle of one end, which is not welded with the beam source furnace (5), of the ninth knife-edge flange (5-1).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202020892165.5U CN212533100U (en) | 2020-05-25 | 2020-05-25 | Ultrahigh vacuum beam source furnace crucible degassing device |
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| CN202020892165.5U CN212533100U (en) | 2020-05-25 | 2020-05-25 | Ultrahigh vacuum beam source furnace crucible degassing device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111534797A (en) * | 2020-05-25 | 2020-08-14 | 中国科学院上海技术物理研究所 | Ultrahigh vacuum beam source furnace crucible degassing device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111534797A (en) * | 2020-05-25 | 2020-08-14 | 中国科学院上海技术物理研究所 | Ultrahigh vacuum beam source furnace crucible degassing device |
| CN111534797B (en) * | 2020-05-25 | 2023-11-07 | 中国科学院上海技术物理研究所 | Ultrahigh vacuum beam source furnace crucible degassing device |
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