CN111534797B - Ultrahigh vacuum beam source furnace crucible degassing device - Google Patents
Ultrahigh vacuum beam source furnace crucible degassing device Download PDFInfo
- Publication number
- CN111534797B CN111534797B CN202010448802.4A CN202010448802A CN111534797B CN 111534797 B CN111534797 B CN 111534797B CN 202010448802 A CN202010448802 A CN 202010448802A CN 111534797 B CN111534797 B CN 111534797B
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- Prior art keywords
- beam source
- knife edge
- edge flange
- source furnace
- vacuum
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- 238000007872 degassing Methods 0.000 title claims abstract description 36
- 229910001220 stainless steel Inorganic materials 0.000 claims description 17
- 239000010935 stainless steel Substances 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 3
- 238000003466 welding Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 2
- 239000008358 core component Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Furnace Details (AREA)
- Manufacture And Refinement Of Metals (AREA)
Abstract
The invention discloses a crucible degassing device of an ultrahigh vacuum beam source furnace, which comprises: the vacuum chamber is connected with a fifth knife edge flange on the vacuum gauge pipe through a first knife edge flange, is connected with a sixth knife edge flange on the gate valve through a second knife edge flange, and is respectively provided with a ninth knife edge flange on the 2 beam source furnaces through a third knife edge flange and a fourth knife edge flange. The gate valve is connected with an eighth knife edge flange on the vacuum pump through a seventh knife edge flange. The device has simple structure, can quickly recover to the ultra-high vacuum degree after exposing the atmosphere, has simple assembly and disassembly of the beam source furnace, and greatly improves the working efficiency of the beam source furnace crucible degassing.
Description
Technical Field
The invention relates to the technical field of vacuum cavities, in particular to a beam source furnace degassing device utilizing an ultra-high vacuum environment.
Background
In a vacuum environment, a resistance wire in a beam source furnace is utilized to heat, so that a metal material can be evaporated from a crucible of the beam source furnace, and the preparation of a film material or a chip metal electrode is realized. Beam source furnaces have become a core component for the preparation of semiconductor materials, chip metal electrodes. However, the impurities carried by the new beam source furnace or crucible itself during use are likely to contaminate the high purity metal. Therefore, high temperature degassing is required before a new beam source furnace or crucible is used. If a new beam source furnace or crucible is directly put into process equipment for degassing, the background vacuum degree of the system is poor, the risk of polluting the process equipment exists, the process equipment is exposed to the atmosphere for many times by repeatedly disassembling the beam source furnace crucible, the cavity is required to be baked for a long time after the system is exposed to the atmosphere each time, so that moisture and other organic gases adhered to the wall of the cavity when the cavity is exposed to the atmosphere are removed, and the cavity is returned to the environment with ultrahigh vacuum, the utilization efficiency of the process equipment is greatly reduced, and the method of directly putting the beam source furnace or crucible into the process equipment for degassing is obviously not preferable. Therefore, the cavity in the ultrahigh vacuum environment is expected to be capable of degassing the beam source furnace crucible, and the cavity is expected to be simple in structure, so that the ultrahigh vacuum environment is recovered with high efficiency and the beam source furnace crucible is expected to be fast assembled and disassembled.
Disclosure of Invention
The invention aims to provide a device for degassing a beam source furnace crucible in an ultra-high vacuum environment, so as to solve the existing problems, and the device for degassing the beam source furnace crucible in the ultra-high vacuum environment has the advantages of simple structure, high vacuum degree and simple assembly and disassembly.
In order to achieve the above object, the present invention provides the following solutions: the invention provides an ultrahigh vacuum beam source
The furnace crucible degassing device mainly comprises a vacuum chamber 1, a beam source furnace degassing chamber 1-1, a beam source furnace storage chamber 1-2, a vacuum gauge 2, a gate valve 3, a vacuum pump 4 and a beam source furnace 5.
The vacuum chamber 1 is made of stainless steel, and has a cylindrical appearance with a hollow cylinder in the middle. One side of the upper half part of the cylinder is connected with an air chamber 1-1 at a beam source furnace, the beam source furnace air removal chamber 1-1 is made of stainless steel, a hollow cylinder is arranged in the middle of the cylinder, the appearance of the cylinder is in a barrel shape, the other end of the cylinder is connected with a third knife edge flange 1-1-1, and the other end of the third knife edge 1-1-1 is connected with a ninth knife edge flange 5-1 on the beam source furnace 5 through a bolt.
The vacuum chamber 1 is made of stainless steel, and has a cylindrical appearance with a hollow cylinder in the middle. The other side of the upper half part of the cylinder is connected with a beam source furnace storage chamber 1-2, the beam source furnace storage chamber 1-2 is made of stainless steel, a hollow cylinder is arranged in the middle of the cylinder, the appearance of the cylinder is in a barrel shape, the other end of the cylinder is connected with a fourth knife edge flange 1-2-1, and the other end of the fourth knife edge flange 1-2-1 is connected with a ninth knife edge flange 5-1 on the beam source furnace 5 through a bolt.
The vacuum chamber 1 is made of stainless steel, and has a cylindrical appearance with a hollow cylinder in the middle. One side of the lower half part of the cylinder is connected with a first knife edge flange (1-3) on the same side connected with a beam source furnace degassing chamber (1-1), and the other end of the first knife edge flange 1-3 is connected with a fifth knife edge flange 2-1 on a vacuum gauge pipe 2 through bolts.
The vacuum chamber 1 is made of stainless steel, and has a cylindrical appearance with a hollow cylinder in the middle. The bottom surface of the cylinder is connected with a second knife edge flange (1-4), and the other end of the second knife edge flange 1-4 is connected with a sixth knife edge flange 3-1 on the gate valve 3 through bolts.
The gate valve 3 is made of stainless steel, and the upper and lower valve surfaces of the gate valve 3 are provided with a sixth knife edge flange 1-3 and a seventh knife edge flange 1-4. The other end of the seventh knife edge flange 1-4 is connected with an eighth knife edge flange 4-1 welded with the vacuum pump 4 through bolts.
The top of the vacuum pump 4 is connected with the other end of the eighth knife edge flange 4-1 through welding.
The beam source furnace 5 is welded with a ninth knife edge flange 5-1, and a barrel-shaped cavity made of tantalum material and used for placing a crucible is arranged in the middle of one end of the ninth knife edge flange 5-1 which is not welded with the beam source furnace 5.
Compared with the prior art, the invention has the following technical effects:
the invention provides a beam source furnace crucible degassing device utilizing an ultra-high vacuum environment, which has the advantages of simple structure, convenience in loading and unloading of the beam source furnace crucible, short rough vacuumizing time, high recovery speed of the ultra-high vacuum degree, capability of working after reaching the corresponding vacuum and improvement of working efficiency.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the drawings that are needed in the embodiments will be briefly described below, it will be obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of the structure of the ultra-high vacuum beam source furnace crucible degassing device of the invention;
wherein 1 is a vacuum chamber, 1-1 is a beam source furnace degassing chamber, 1-2 is a beam source furnace storage chamber, 1-3 is a first knife edge flange (welded with the vacuum chamber), 1-4 is a knife edge flange (welded with the vacuum chamber), 1-1-1 is a knife edge flange (welded with the beam source furnace degassing chamber), 1-2-1 is a knife edge flange (welded with the beam source furnace storage chamber), 2 is a vacuum gauge, 2-1 is a knife edge flange (welded with the vacuum gauge), 3 is a gate valve, 3-1 is a knife edge flange (welded with the gate valve), 3-2 is a knife edge flange (welded with the gate valve), 4 is a vacuum pump, 4-1 is a knife edge flange (welded with the vacuum pump), 5 is a beam source furnace, and 5-1 is a knife edge flange (welded with the beam source furnace).
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention aims to provide an ultrahigh vacuum beam source furnace crucible degassing device, which solves the problems in the prior art, and ensures that the vacuum cavity has a simple structure and is convenient for loading and unloading the beam source furnace crucible to obtain the rapid ultrahigh vacuum.
In order that the manner in which the above recited objects, features and advantages of the present invention are obtained will become more readily apparent, a more particular description of the invention briefly described above will be rendered by reference to the appended drawings.
As shown in fig. 1, the invention provides a beam source furnace crucible degassing system in an ultra-high vacuum environment, which comprises a vacuum chamber 1, a beam source furnace degassing chamber 1-1, a beam source furnace storage chamber 1-2, a vacuum gauge 2, a gate valve 3, a vacuum pump 4 and a beam source furnace 5. The vacuum chamber 1 is formed by welding stainless steel round pipes, one end of a first knife edge flange 1-3, a second knife edge flange 1-4, a third knife edge flange 1-1 and a fourth knife edge flange 1-2-1 is welded with the vacuum chamber 1, and the other end is respectively connected with the vacuum gauge pipe 2, the gate valve 3 and the beam source furnace 5 through bolts. A sixth knife edge flange 3-1 is welded on one side of the gate valve 3 and is connected with the second knife edge flange 1-4; the gate valve 3 is welded with a seventh knife-edge flange 3-2 through the valve surface at the other side and is connected with an eighth knife-edge flange 4-1 welded at the top of the vacuum pump 4.
The vacuum chamber 1 is formed by welding a stainless steel round tube with the tube diameter of 550mm, and a round hole with the diameter of 100mm is formed in the right side face of the upper half part and is used for welding with the beam source furnace degassing chamber 1-1. The beam source furnace degassing chamber 1-1 is a stainless steel circular tube with the diameter of 100mm, and the other end is welded with a third knife edge flange 1-1-1 with the diameter of 120 mm. The third knife edge flange 1-1-1 is connected with the eighth knife edge flange 4-1 with the welding diameter of 120mm of the beam source furnace 5 through M6 bolts.
The vacuum chamber 1 is formed by welding stainless steel round pipes, and a 90mm round hole is formed in the left side face of the upper half part and is used for welding with the beam source furnace storage chamber 1-2. The beam source furnace storage chamber 1-2 is a stainless steel circular tube with the diameter of 90mm, and the other end is welded with a fourth knife edge flange 1-2-1 with the diameter of 120 mm. The fourth knife edge flange 1-2-1 is connected with the eighth knife edge flange 4-1 with the welding diameter of 120mm of the beam source furnace 5 through M6 bolts.
The vacuum gauge tube 2 is connected with a first knife edge flange 1-3 welded with the vacuum chamber 1 through a fifth knife edge flange 2-1 with the diameter of 50mm through an M4 bolt, and the other end of the fifth knife edge flange 2-1 is welded with the vacuum gauge tube 2.
The gate valve 3 is made of stainless steel, a sixth knife edge flange 3-1 with the diameter of 150mm is welded on one side of the gate valve 3, and the sixth knife edge flange 1-4 with the diameter of 150mm is welded with the vacuum chamber 1 and connected with the second knife edge flange through an M6 bolt. The seventh knife-edge flange 3-2 with the diameter of 150mm is welded on the valve surface on the other side of the gate valve 3, and the eighth knife-edge flange 4-1 with the diameter of 150mm is welded with the vacuum pump 4 through M6 bolts.
Wherein, the top of the vacuum pump 4 is welded with an eighth knife-edge flange 4-1 with the diameter of 150 mm.
Wherein, the beam source furnace 5 is connected with the outside through a ninth knife edge flange 5-1 with the welding diameter of 120 mm. The middle of the other end of the ninth knife edge flange 5-1 is made of tantalum and welded into a barrel shape, a cavity is formed in the middle of the ring, the ring is used for placing a crucible, and the end face is respectively connected with a first knife edge flange 1-3 and a second knife edge flange 1-4 welded with the vacuum chamber 1 through bolts.
The invention is an ultra-high vacuum chamber, has simple structure, can rapidly and conveniently assemble and disassemble the beam source furnace, ensures that the chamber recovers ultra-high vacuum in an extremely short time, meets the process requirements of degassing of various beam source furnace crucibles, and improves the working efficiency.
The principles and embodiments of the present invention have been described in detail with reference to specific examples thereof, which are provided to facilitate understanding of the principles and core concepts of the invention and are not to be construed as limiting the scope of the claims, and other substantially equivalent substitutions will occur to those skilled in the art to which the invention pertains.
Claims (5)
1. An ultra-high vacuum beam source furnace crucible degassing device, comprising: a vacuum chamber (1), a vacuum gauge pipe (2), a gate valve (3), a vacuum pump (4) and a beam source furnace (5); the device is characterized in that a first knife edge flange (1-3) on a vacuum chamber (1) is connected with a fifth knife edge flange (2-1) on a vacuum gauge pipe (2) through bolts, a second knife edge flange (1-4) on the vacuum chamber (1) is connected with a sixth knife edge flange (3-1) on a gate valve (3) through bolts, a seventh knife edge flange (3-2) on the gate valve (3) is connected with an eighth knife edge flange (4-1) on the top of a vacuum pump (4) through bolts, and a ninth knife edge flange (5-1) on an upper stage of two beam source furnaces (5) is connected with a third knife edge flange (1-1-1) on a beam source furnace degassing chamber (1-1) in the vacuum chamber (1) and a fourth knife edge flange (1-2-1) on a beam source furnace storage chamber (1-2) through bolts respectively; the vacuum chamber (1) is made of stainless steel, the appearance of the vacuum chamber is a barrel-shaped cylinder with a hollow middle, and one side of the upper half part of the cylinder is connected with a beam source furnace degassing chamber (1-1); the other side is connected with a beam source furnace storage chamber (1-2), one side of the lower half part of the cylinder is connected with a first knife edge flange (1-3) on the same side with the beam source furnace degassing chamber (1-1), and the bottom surface of the cylinder is connected with a second knife edge flange (1-4); the beam source furnace degassing chamber (1-1) is made of stainless steel, a hollow cylinder is arranged in the middle of the beam source furnace degassing chamber, the appearance of the beam source furnace degassing chamber is in a barrel shape, and a third knife edge flange (1-1-1) is welded at the other end of the cylinder; the beam source furnace storage chamber (1-2) is made of stainless steel, a hollow cylinder is arranged in the middle of the beam source furnace storage chamber, the appearance of the beam source furnace storage chamber is in a barrel shape, and a fourth knife edge flange (1-2-1) is welded at the other end of the cylinder;
the opening of the beam source furnace degassing chamber (1-1) is connected to one side of the upper half part of the cylinder in an upward inclined way.
2. The ultra-high vacuum beam source furnace crucible degassing device according to claim 1, wherein one end of the vacuum gauge (2) is welded with a filament binding post; the other end is welded with a fifth knife edge flange (2-1); the filament binding post is connected with the filament at the vacuum end inside the vacuum gauge tube (2).
3. The degassing device for the ultra-high vacuum beam source furnace crucible according to claim 1, wherein the gate valve (3) is made of stainless steel, and a sixth knife edge flange (3-1) and a seventh knife edge flange (3-2) are welded on the upper side and the lower side of the valve body respectively.
4. The crucible degassing device for the ultra-high vacuum beam source furnace according to claim 1, wherein the vacuum pump (4) is welded with an eighth knife edge flange (4-1) at the top.
5. The ultra-high vacuum beam source furnace crucible degassing device according to claim 1, wherein a ninth knife edge flange (5-1) is welded on the beam source furnace (5), and one end of the ninth knife edge flange (5-1) is welded with the beam source furnace (5); the middle of the other end is provided with a barrel-shaped chamber around the crucible made of tantalum material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010448802.4A CN111534797B (en) | 2020-05-25 | 2020-05-25 | Ultrahigh vacuum beam source furnace crucible degassing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010448802.4A CN111534797B (en) | 2020-05-25 | 2020-05-25 | Ultrahigh vacuum beam source furnace crucible degassing device |
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| Publication Number | Publication Date |
|---|---|
| CN111534797A CN111534797A (en) | 2020-08-14 |
| CN111534797B true CN111534797B (en) | 2023-11-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010448802.4A Active CN111534797B (en) | 2020-05-25 | 2020-05-25 | Ultrahigh vacuum beam source furnace crucible degassing device |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4518846A (en) * | 1984-06-11 | 1985-05-21 | International Business Machines Corporation | Heater assembly for molecular beam epitaxy furnace |
| US4777908A (en) * | 1986-11-26 | 1988-10-18 | Optical Coating Laboratory, Inc. | System and method for vacuum deposition of thin films |
| US4868003A (en) * | 1986-11-26 | 1989-09-19 | Optical Coating Laboratory, Inc. | System and method for vacuum deposition of thin films |
| CN1548576A (en) * | 2003-05-19 | 2004-11-24 | 中国科学院半导体研究所 | Instantaneously switch controlled vacuum unit for gaseous beam source furnace |
| CN204644499U (en) * | 2015-05-14 | 2015-09-16 | 厦门烯成新材料科技有限公司 | A kind of molecular beam epitaxial growth device for the preparation of molybdenum disulfide film |
| CN212533100U (en) * | 2020-05-25 | 2021-02-12 | 中国科学院上海技术物理研究所 | Ultrahigh vacuum beam source furnace crucible degassing device |
-
2020
- 2020-05-25 CN CN202010448802.4A patent/CN111534797B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4518846A (en) * | 1984-06-11 | 1985-05-21 | International Business Machines Corporation | Heater assembly for molecular beam epitaxy furnace |
| US4777908A (en) * | 1986-11-26 | 1988-10-18 | Optical Coating Laboratory, Inc. | System and method for vacuum deposition of thin films |
| US4868003A (en) * | 1986-11-26 | 1989-09-19 | Optical Coating Laboratory, Inc. | System and method for vacuum deposition of thin films |
| CN1548576A (en) * | 2003-05-19 | 2004-11-24 | 中国科学院半导体研究所 | Instantaneously switch controlled vacuum unit for gaseous beam source furnace |
| CN204644499U (en) * | 2015-05-14 | 2015-09-16 | 厦门烯成新材料科技有限公司 | A kind of molecular beam epitaxial growth device for the preparation of molybdenum disulfide film |
| CN212533100U (en) * | 2020-05-25 | 2021-02-12 | 中国科学院上海技术物理研究所 | Ultrahigh vacuum beam source furnace crucible degassing device |
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| CN111534797A (en) | 2020-08-14 |
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