CN1548576A - Instantaneously switch controlled vacuum unit for gaseous beam source furnace - Google Patents
Instantaneously switch controlled vacuum unit for gaseous beam source furnace Download PDFInfo
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- CN1548576A CN1548576A CNA031362389A CN03136238A CN1548576A CN 1548576 A CN1548576 A CN 1548576A CN A031362389 A CNA031362389 A CN A031362389A CN 03136238 A CN03136238 A CN 03136238A CN 1548576 A CN1548576 A CN 1548576A
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- ultrahigh vacuum
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Abstract
The vacuum unit for gaseous beam source furnace includes one ultrahigh vacuum cavity of stainless steel, one first pneumatic valve connected to one end of the vacuum cavity, one gaseous beam source furnace inside the vacuum cavity, one second pneumatic valve connected to the middle section of the vacuum cavity, one vacuum pump connected to the second pneumatic valve, one first manual valve connected to the other end of the vacuum cavity, one mass flow meter connected to the manual valve, one second manual valve connected to the mass flow meter, one gas pipeline connected between the mass flow meter and the second manual valve, one gas container connected to the second manual valve, one high vacuum pump connected to the vacuum cavity, and one computer for controlling the mass flow meter and valves to realize the switching of gas flow direction.
Description
Technical field
The invention provides a kind of gaseous state electron gun stove transient state on-off control vacuum unit, be meant a kind of gaseous state electron gun stove transient state on-off control vacuum unit that is used for the vacuum epitaxy(VE) material growing device especially.
Background technology
It is the high pure compound heterojunction material of present artificial preparation that vacuum epitaxy(VE) prepares the high-purity material technology, the modern technique means of generally using of nano material etc.Its principle of work is in the high vacuum cavity, by the electron gun stove of variety of functions (as solid thermal vapor molecule electron gun stove, gas cracking atomic beam source stove, gas plasma activated atom electron gun stove or the like) ejects certain element atom of certain line amount (using the partial pressure quantificational expression usually), to the epitaxial base egative film, carry out epitaxy.Or launch particle beam with particle (ion, electronics etc.) bundle rifle, and the bombardment target, atomic group that is gone out by target as sputter or molecular grouping are injected into and carry out epitaxy on the epitaxial base egative film.Special baffle can be installed by above-mentioned source stove or particle beam rifle jet orifice place, and the opening and closing action by baffle plate can realize the growth of different compound-materials, stops, and switches etc.In above-mentioned various electron gun stoves, the ejected beam flow of solid thermal vapor molecule electron gun stove can be realized transient control with baffle plate.This provenance stove is that solid raw material is seated in the body of heater in actual use, is heated to dissolving distillation under the certain temperature and eject molecular beam.Baffle plate almost can be realized 100% shutoff to the shutoff control of spray beam flow.Therefore can realize the gauge control of atom level precision with the epitaxial material of Solid State Source stove growth.
And the operation material of gas cracking or plasma-activated atomic beam source stove is a gasiform, the baffle plate of exit portal can not be realized the control of shutoff fully to air-flow, special in plasma-activated atomic beam stove, gas at first will be through source stove plasma, generally speaking, this the plasma process of gas is often needed time of minute magnitude, and the switching of turn-offing fully/opening of air-flow can't realize transient control.Therefore be badly in need of wanting a kind of new device can overcome above difficulty.Guarantee the works better of vacuum epitaxy(VE) material system.
Summary of the invention
The objective of the invention is to, a kind of gaseous state electron gun stove transient state on-off control vacuum unit is provided, can solve in the present high vacuum epitaxial system transient control problem gaseous source furnace gas flow valve.Utilize this device will make those the heterojunction material structures that must utilize the particular components that the gaseous source stove could obtain, realize the atom level thickness and precision control of epitaxial film equally.
A kind of source of the gas stove of the present invention transient state on-off control vacuum unit is characterized in that, comprising:
One stainless steel ultrahigh vacuum(HHV) cavity;
One pneumavalve, this pneumavalve is connected with an end of stainless steel ultrahigh vacuum(HHV) cavity;
One gaseous state electron gun stove, this gaseous state electron gun stove is installed in the stainless steel ultrahigh vacuum(HHV) cavity;
One operated pneumatic valve, this operated pneumatic valve is connected with the stage casing of stainless steel ultrahigh vacuum(HHV) cavity;
One vacuum pump, this vacuum pump is connected with the other end of operated pneumatic valve;
One manual valve, this manual valve is connected with the other end of stainless steel ultrahigh vacuum(HHV) cavity;
One mass flowmeter, this mass flowmeter is connected with manual valve;
One manually-operated gate, this manually-operated gate is connected with mass flowmeter;
One gas piping, the two ends of this gas piping are connected with manually-operated gate with mass flowmeter respectively;
One gas container, this gas container is connected with manually-operated gate;
One ultrahigh vacuum(HHV) cavity, this ultrahigh vacuum(HHV) cavity is connected with pneumavalve, and this ultrahigh vacuum(HHV) cavity is connected to a high-vacuum pump;
One computer is controlling quality under meter, pneumavalve and operated pneumatic valve respectively, realizes that air flow line feeds the ultrahigh vacuum(HHV) cavity or switches to the bypass vacuum pump.
Wherein said stainless steel ultrahigh vacuum(HHV) cavity and ultrahigh vacuum(HHV) cavity all adopt the stainless material preparation of inner bag polishing, and total interface all adopts the blue wire loop Seal Design of knife-edge method, and highest attainable vacuum is less than 1E-8Pa.
The pumping speed of wherein said vacuum pump and high-vacuum pump need satisfy the requirement of above-mentioned vacuum cavity, determines the kind of pump according to the character of supporting gas, and whether corrosion-resistant grade all should be taken into account, as adopting ionic pump, is equipped with condensation pump or turbomolecular pump.
Wherein said pneumavalve and operated pneumatic valve are ultrahigh vacuum valve, and leak rate is less than 1E-10Pam
3/ S.
The interface requirement of wherein said manual valve adopts VCR metal ultrahigh vacuum seal mode, and leak rate is less than 1E-9Pam
3/ S.
The interface requirement of wherein said mass flowmeter adopts VCR metal ultrahigh vacuum seal mode, and leak rate is less than 1E-9Pam
3/ S.
Wherein said gaseous state electron gun stove kind is determined by the requirement of concrete material growth, can be plasma-activated source stove, or high-temperature cracking furnace.
Description of drawings
For further specifying technology contents of the present invention, below in conjunction with embodiment and accompanying drawing describes in detail as after, wherein:
Fig. 1 is a structural representation of the present invention.
Embodiment
The present invention as shown in Figure 1, a kind of source of the gas stove transient state on-off control vacuum unit, comprising:
One stainless steel ultrahigh vacuum(HHV) cavity 1, this stainless steel ultrahigh vacuum(HHV) cavity 1 adopts the stainless material preparation of inner bag polishing, and total interface adopts the blue wire loop Seal Design of knife-edge method, and highest attainable vacuum is less than 1E-8Pa;
One pneumavalve 2, this pneumavalve 2 is connected with an end of stainless steel ultrahigh vacuum(HHV) cavity 1, and this pneumavalve 2 is ultrahigh vacuum valve, and leak rate is less than 1E-10Pam
3/ S;
One gaseous state electron gun stove 11, this gaseous state electron gun stove 11 is installed in the stainless steel ultrahigh vacuum(HHV) cavity 1, and these gaseous state electron gun stove 11 kinds are determined by the requirement of concrete material growth, can be plasma-activated source stoves, or high-temperature cracking furnace;
One operated pneumatic valve 3, this operated pneumatic valve 3 is connected with the stage casing of stainless steel ultrahigh vacuum(HHV) cavity 1, and this operated pneumatic valve 3 is a ultrahigh vacuum valve, and leak rate is less than 1E-10Pam
3/ S;
One vacuum pump 4, this vacuum pump 4 is connected with the other end of operated pneumatic valve 3, and these vacuum pump 4 pumping speed need satisfy the requirement of above-mentioned vacuum cavity, determine the kind of pump according to the character of supporting gas, whether corrosion-resistant grade all should be taken into account, as adopting ionic pump, is equipped with condensation pump or turbomolecular pump;
One manual valve 6, this manual valve 6 is connected with the other end of stainless steel ultrahigh vacuum(HHV) cavity 1, and the interface requirement of this manual valve 6 adopts VCR metal ultrahigh vacuum seal mode, and leak rate is less than 1E-9Pam
3/ S;
One mass flowmeter 5, this mass flowmeter 5 is connected with manual valve 6, and the interface requirement of this mass flowmeter 5 adopts VCR metal ultrahigh vacuum seal mode, and leak rate is less than 1E-9Pam
3/ S;
One manually-operated gate 7, this manually-operated gate 7 is connected with mass flowmeter 5;
One gas piping 9, the two ends of this gas piping 9 are connected with manually-operated gate 7 with mass flowmeter 5 respectively;
One gas container 8, this gas container 8 is connected with manually-operated gate 7;
One ultrahigh vacuum(HHV) cavity 12, this ultrahigh vacuum(HHV) cavity 12 is connected with pneumavalve 2, this ultrahigh vacuum(HHV) cavity 12 is connected to a high-vacuum pump 13, these high-vacuum pump 13 pumping speed need satisfy the requirement of above-mentioned vacuum cavity, determine the kind of pump according to the character of supporting gas, whether corrosion-resistant grade all should be taken into account, as adopting ionic pump, be equipped with condensation pump or turbomolecular pump, this ultrahigh vacuum(HHV) cavity 12 adopts the stainless material preparation of inner bag polishing, total interface all adopts the blue wire loop Seal Design of knife-edge method, and highest attainable vacuum is less than 1E-8Pa;
One computer 10 is controlling quality under meter 5 and pneumavalve 2 and operated pneumatic valve 3 respectively, realizes that air flow line feeds ultrahigh vacuum(HHV) cavity 12 or switches to bypass vacuum pump 4.
Working process can be divided into three steps:
(1): the vacuum preset condition
At first close all manually-operated gates 6 and manually-operated gate 7, open pneumavalve 2 and operated pneumatic valve 3, by vacuum pump 4 and high-vacuum pump 13 respectively to stainless steel ultrahigh vacuum(HHV) cavity 1 and 12 forvacuum of ultrahigh vacuum(HHV) gas.Vacuum tightness is detected by vacuumometer separately.
(2): gaseous state electron gun stove preset condition regulate process
After vacuum pump reaches necessary requirement, open manual valve 6 and manually-operated gate 7, keep operated pneumatic valve 3 to open, close pneumavalve 2, in this state (bypass condition: after promptly reactant gases is feeding gaseous state electron gun stove 11 stainless steel ultrahigh vacuum(HHV) cavitys 1, extract out by vacuum pump 4 and to form bypass) under, the preset condition of gas finished.When for example using plasma-activated gaseous source stove, in stainless steel ultrahigh vacuum(HHV) cavity 1, finish the build-up of luminance process of gas.When using the hydrogen atom pyrolyzer for another example, can finish gas flow at vacuum cavity and regulate and pre-cracking setting.Therefore stainless steel ultrahigh vacuum(HHV) cavity 1 has played and has finished the effect of preset condition for the gaseous source stove.
(3): the gas reaction process
After finishing second step, under computer 10 controls, close operated pneumatic valve 3, open pneumavalve 2 simultaneously, make that the reactant gases transient state after preseting feeds in the ultrahigh vacuum(HHV) cavity 12, the growing and preparing process of beginning material.When needs interrupt reactant gases, close and open pneumavalve 2 and operated pneumatic valve 3 more simultaneously.Cao Zuo key features is to open and close pneumavalve 2 and operated pneumatic valve 3 synchronously herein, could ensure really that like this transient state of reaction feeding reaction vacuum chamber opens and closes characteristic, finishes the growing and preparing of precipitous heterojunction boundary material, reaches basic goal of the present invention.
The new device that proposes of the present invention mainly is to solve common problem that present vacuum epitaxy(VE) material preparation technology faced promptly: when the transient control that can't realize gaseous source furnace gas flow.This novel gaseous state electron gun stove transient state on-off control vacuum unit can transient control feeds the airshed in the extension vacuum system.Thereby make those the heterojunction material structures that must utilize the particular components that the gaseous source stove could obtain, realize the atom level thickness and precision control of epitaxial film equally.
Claims (7)
1, a kind of source of the gas stove transient state on-off control vacuum unit is characterized in that, comprising:
One stainless steel ultrahigh vacuum(HHV) cavity;
One pneumavalve, this pneumavalve is connected with an end of stainless steel ultrahigh vacuum(HHV) cavity;
One gaseous state electron gun stove, this gaseous state electron gun stove is installed in the stainless steel ultrahigh vacuum(HHV) cavity;
One operated pneumatic valve, this operated pneumatic valve is connected with the stage casing of stainless steel ultrahigh vacuum(HHV) cavity;
One vacuum pump, this vacuum pump is connected with the other end of operated pneumatic valve;
One manual valve, this manual valve is connected with the other end of stainless steel ultrahigh vacuum(HHV) cavity;
One mass flowmeter, this mass flowmeter is connected with manual valve;
One manually-operated gate, this manually-operated gate is connected with mass flowmeter;
One gas piping, the two ends of this gas piping are connected with manually-operated gate with mass flowmeter respectively;
One gas container, this gas container is connected with manually-operated gate;
One ultrahigh vacuum(HHV) cavity, this ultrahigh vacuum(HHV) cavity is connected with pneumavalve, and this ultrahigh vacuum(HHV) cavity is connected to a high-vacuum pump;
One computer is controlling quality under meter, pneumavalve and operated pneumatic valve respectively, realizes that air flow line feeds the ultrahigh vacuum(HHV) cavity or switches to the bypass vacuum pump.
2, a kind of source of the gas stove transient state on-off control vacuum unit according to claim 1, it is characterized in that, wherein said stainless steel ultrahigh vacuum(HHV) cavity and ultrahigh vacuum(HHV) cavity all adopt the stainless material preparation of inner bag polishing, total interface all adopts the blue wire loop Seal Design of knife-edge method, and highest attainable vacuum is less than 1E-8Pa.
3, a kind of source of the gas stove transient state on-off control vacuum unit according to claim 1, it is characterized in that, the pumping speed of wherein said vacuum pump and high-vacuum pump need satisfy the requirement of above-mentioned vacuum cavity, determine the kind of pump according to the character of supporting gas, whether corrosion-resistant grade all should be taken into account, as adopting ionic pump, be equipped with condensation pump or turbomolecular pump.
4, a kind of source of the gas stove transient state on-off control vacuum unit according to claim 1 is characterized in that wherein said pneumavalve and operated pneumatic valve are ultrahigh vacuum valve, and leak rate is less than 1E-10Pam
3/ S.
5, a kind of source of the gas stove transient state on-off control vacuum unit according to claim 1 is characterized in that, the interface requirement of wherein said manual valve adopts VCR metal ultrahigh vacuum seal mode, and leak rate is less than 1E-9Pam
3/ S.
6, a kind of source of the gas stove transient state on-off control vacuum unit according to claim 1 is characterized in that, the interface requirement of wherein said mass flowmeter adopts VCR metal ultrahigh vacuum seal mode, and leak rate is less than 1E-9Pam
3/ S.
7, a kind of source of the gas stove transient state on-off control vacuum unit according to claim 1 is characterized in that, wherein said gaseous state electron gun stove kind is determined by the requirement of concrete material growth, can be plasma-activated source stove, or high-temperature cracking furnace.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03136238 CN1255572C (en) | 2003-05-19 | 2003-05-19 | Instantaneously switch controlled vacuum unit for gaseous beam source furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03136238 CN1255572C (en) | 2003-05-19 | 2003-05-19 | Instantaneously switch controlled vacuum unit for gaseous beam source furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1548576A true CN1548576A (en) | 2004-11-24 |
| CN1255572C CN1255572C (en) | 2006-05-10 |
Family
ID=34323266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03136238 Expired - Fee Related CN1255572C (en) | 2003-05-19 | 2003-05-19 | Instantaneously switch controlled vacuum unit for gaseous beam source furnace |
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| Country | Link |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104032283A (en) * | 2014-06-09 | 2014-09-10 | 中国电子科技集团公司第四十八研究所 | Control device for reaction cavity pressure of large-area flat plate type PECVD equipment |
| CN108560045A (en) * | 2018-06-11 | 2018-09-21 | 南京大学 | A kind of octahedral ultrahigh vacuum cavity |
| CN111534797A (en) * | 2020-05-25 | 2020-08-14 | 中国科学院上海技术物理研究所 | Ultrahigh vacuum beam source furnace crucible degassing device |
| CN114483608A (en) * | 2021-12-29 | 2022-05-13 | 北京无线电计量测试研究所 | Small-pumping-speed ion pump service life assessment device and service life assessment method |
-
2003
- 2003-05-19 CN CN 03136238 patent/CN1255572C/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104032283A (en) * | 2014-06-09 | 2014-09-10 | 中国电子科技集团公司第四十八研究所 | Control device for reaction cavity pressure of large-area flat plate type PECVD equipment |
| CN104032283B (en) * | 2014-06-09 | 2016-03-09 | 中国电子科技集团公司第四十八研究所 | A kind of control device of large-area flat-plate PECVD device reaction chamber pressure |
| CN108560045A (en) * | 2018-06-11 | 2018-09-21 | 南京大学 | A kind of octahedral ultrahigh vacuum cavity |
| CN111534797A (en) * | 2020-05-25 | 2020-08-14 | 中国科学院上海技术物理研究所 | Ultrahigh vacuum beam source furnace crucible degassing device |
| CN111534797B (en) * | 2020-05-25 | 2023-11-07 | 中国科学院上海技术物理研究所 | Ultrahigh vacuum beam source furnace crucible degassing device |
| CN114483608A (en) * | 2021-12-29 | 2022-05-13 | 北京无线电计量测试研究所 | Small-pumping-speed ion pump service life assessment device and service life assessment method |
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| Publication number | Publication date |
|---|---|
| CN1255572C (en) | 2006-05-10 |
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