CN212483957U

CN212483957U - Incident light angle continuous adjustable device

Info

Publication number: CN212483957U
Application number: CN202021925465.5U
Authority: CN
Inventors: 王曦; 陈坚; 吴周令; 黄明
Original assignee: ZC OPTOELECTRONIC TECHNOLOGIES Ltd
Current assignee: ZC OPTOELECTRONIC TECHNOLOGIES Ltd
Priority date: 2020-09-04
Filing date: 2020-09-04
Publication date: 2021-02-05
Anticipated expiration: 2030-09-04

Abstract

The utility model discloses an incident light angle is adjustable device in succession, including the plane speculum, electric rotating table and off-axis oval speculum, the plane speculum is fixed on electric rotating table, the plane speculum's plane of reflection center and electric rotating table's center of rotation coincidence, the plane speculum's plane of reflection is towards the inner wall of off-axis oval speculum, non-rotation oval conjugate plane has been established to off-axis oval speculum, non-rotation oval conjugate plane of reflection has two focuses, one of them focus coincides with the plane speculum's plane of reflection center, another focus assembles the sample and awaits measuring on the surface. The utility model discloses can be at certain angle within range continuous regulation light path incident angle, have simple structure, implant characteristics such as the adjustment method in the light path system is convenient, and can guarantee that the light path point of incidence is fixed not a little in the continuous regulation process.

Description

Incident light angle continuous adjustable device

Technical Field

The utility model relates to a technical field is adjusted to the laser light path, specifically is an incident light angle continuously adjustable device.

Background

Optical properties of optical films include spectral characteristics such as transmittance, reflectance, absorption, and scattering. In the process of measuring the reflectivity, lasers with different wave band wavelengths need to be introduced in the test process under certain application occasions, the reflectivity characteristics of optical films on the same or different optical elements to the lasers with different wavelengths are tested, in the process of measuring, the lasers need to be obliquely incident, the problem of adjusting the laser incident angle is involved, in addition, the position of a convergent point needs to be kept fixed in the process of adjusting the laser incident angle, and otherwise, larger measurement errors can be introduced. In the prior art, a coaxial convergence method is adopted, and the incident angle is adjusted by simultaneously rotating in the process of driving the plane mirror to linearly move by adopting a linear displacement table matched with a rotating mechanism. The coaxial convergence method comprises the following steps: the optical axis of the condenser lens and the surface of the sample form a certain angle, the incident laser coincides with the optical axis of the converging lens, and the included angle between the optical axis of the condenser lens and the surface of the sample is the laser incident angle. If the incident angle needs to be changed, the optical axis of the collecting lens needs to be changed, and the optical path of the laser needs to be adjusted to ensure that the laser is overlapped with the optical axis of the converging lens while the collecting lens is adjusted. The angle adjusting mechanism required by the coaxial convergence method is very complex, and the position of the convergence point is difficult to keep constant in the adjusting process, so that the real-time adjustment cannot be realized, and a better device for adjusting the laser incident angle is required.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is to provide an incident light angle continuously adjustable device, can be at certain angle within range continuous adjustment light path incident angle, have simple structure, implant characteristics such as the adjustment method in the light path system is convenient, and can guarantee that the light path incident point is fixed not a little in the continuous adjustment process.

The technical scheme of the utility model is that:

a device capable of continuously adjusting the angle of incident light comprises a plane reflector, an electric rotating table and an off-axis elliptical reflector, wherein the plane reflector is fixed on the electric rotating table, the center of the reflecting surface of the plane reflector coincides with the rotating center of the electric rotating table, the reflecting surface of the plane reflector faces the inner wall of the off-axis elliptical reflector, a non-rotating elliptical conjugate reflecting surface is established on the off-axis elliptical reflector, the non-rotating elliptical conjugate reflecting surface is provided with two focuses which are respectively a focus A and a focus B, and the focus A coincides with the center of the reflecting surface of the plane reflector; the incident light path is reflected by the plane reflector to irradiate towards the inner wall of the off-axis elliptical reflector, the reflected light reflected by the plane reflector is light emitted from a focus A of the non-rotating elliptical conjugate reflecting surface, the light is reflected by the inner wall of the off-axis elliptical reflector and then converged on a focus B of the non-rotating elliptical conjugate reflecting surface, the light reflected by the inner wall of the off-axis elliptical reflector is incident light with a continuously adjustable angle, the focus B is converged on the surface to be measured of the sample, the surface to be measured of the sample is vertical to the incident light path, and the vertical intersection point of the incident light path and the surface to be measured of the sample is focus B.

The incident light path passes through the reflection surface center of the plane reflector by the front light path adjusting small hole, and the front light path adjusting small hole is used for adjusting the incident light path so that the incident light path irradiates the reflection surface center of the plane reflector.

And a rear light path adjusting small hole is arranged at a position adjacent to the surface to be measured of the sample and used for adjusting an incident light path, so that the incident light path is vertical to the surface to be measured of the sample.

The utility model has the advantages that:

(1) the utility model has simple structure and convenient adjustment method implanted into the light path system;

(2) the utility model can realize continuous adjustment of the incident angle, can realize rotation of the electric rotating platform, and can realize continuous adjustment of the incident angle while the incident point of the light path is fixed;

(3) the utility model can realize the change of the angle adjusting range by adjusting the size specification of the off-axis elliptical reflector;

(4) the utility model discloses compact structure easily realizes the modularization, becomes a angle continuous adjustment device that can be general under different application scenarios.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is a schematic diagram of the system structure for reflectivity measurement according to the present invention.

Fig. 3 is a schematic diagram of the present invention.

The device comprises an incident light path 1, a front light path adjusting small hole 2, an off-axis elliptical reflector 3, an electric rotating table 4, a plane reflector 5, a rear light path adjusting small hole 6, a sample surface to be measured 7, a non-rotating elliptical conjugate reflecting surface 8, a biconvex lens 9, an integrating sphere 10, an integrating sphere baffle 11 and a detector 12.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, a device for continuously adjusting the angle of incident light comprises a plane reflector 5, an electric rotating table 4 and an off-axis elliptical reflector 3, wherein the plane reflector 5 is fixed on the electric rotating table 4, the center of the reflecting surface of the plane reflector 5 coincides with the rotating center of the electric rotating table 4, the reflecting surface of the plane reflector 5 faces the inner wall of the off-axis elliptical reflector 3, a non-rotating elliptical conjugate reflecting surface 8 is established on the off-axis elliptical reflector 3, the non-rotating elliptical conjugate reflecting surface 8 is provided with two focuses A and B, and the focus A coincides with the center of the reflecting surface of the plane reflector 5.

The incident light path 1 penetrates through the reflection surface center of the plane reflector 5 from the front light path adjusting small hole 2, and the front light path adjusting small hole 2 is used for adjusting the incident light path 1 so that the incident light path 1 irradiates the reflection surface center of the plane reflector 5; and a rear light path adjusting small hole 6 is arranged at a position adjacent to the sample surface to be measured 7, and the rear light path adjusting small hole 6 is used for adjusting the incident light path 1 so that the incident light path 1 is vertical to the sample surface to be measured 7.

A method for continuously adjusting the angle of incident light comprises the following steps:

(1) establishing a non-rotating elliptic conjugate reflecting surface 8, taking the off-axis elliptic reflecting mirror 3 as a carrier of conjugate reflection, and placing the rotating center of the electric rotating table 4 at the focus A of the non-rotating elliptic conjugate reflecting surface 8;

(2) the plane reflector 5 is placed on the electric rotating platform 4 and fixed, and the center of the reflecting surface of the plane reflector 5 is superposed with the rotating center of the electric rotating platform 4;

(3) the device integrally consisting of the off-axis elliptical reflector 3, the electric rotating table 4 and the plane reflector 5 is placed in a light path system needing to be subjected to incidence angle continuous adjustment, and the light incidence point of the incident light path 1 is ensured to fall at the center of the reflecting surface of the plane reflector 5;

(4) placing the surface to be measured 7 of the optical element at a focus B of the non-rotating elliptic conjugate reflecting surface 8, keeping the surface to be measured 7 vertical to the incident light path 1, and taking the vertical intersection point of the incident light path 1 and the surface to be measured 7 of the sample as the focus B;

(5) the electric rotating platform 4 is controlled to drive the plane reflecting mirror 5 to rotate so that the reflecting surface of the plane reflecting mirror 5 forms a certain angle with the incident light path 1, the reflected light reflected by the plane reflecting mirror 5 irradiates the inner wall of the off-axis elliptical reflecting mirror 3, the reflected light reflected by the plane reflecting mirror 5 is light emitted from the focal point a of the non-rotating elliptical conjugate reflecting surface 8, the reflected light is reflected by the inner wall of the off-axis elliptical reflecting mirror 3 and then is converged on the focal point B of the non-rotating elliptical conjugate reflecting surface 8, the focal point B is converged on the sample surface to be measured 7, the sample surface to be measured 7 is perpendicular to the incident light path 1, the light irradiated on the sample surface to be measured 7 after being reflected by the inner wall of the off-axis elliptical reflecting mirror 3 is incident light with a continuously adjustable angle, and the angle of the incident light in the embodiment;

(6) when the angle is continuously adjusted, the electric rotating table 4 drives the plane reflector 5 to rotate, the light reflected by the plane reflector 5 on the incident light path 1 also rotates around the focus a in the corresponding direction, the included angle between the light reflected by the plane reflector 5 and the incident light path 1 is theta, the light reflected by the inner wall of the off-axis elliptical reflector 3 is incident on the sample surface to be measured 7, namely the focus B of the non-rotating elliptical conjugate reflecting surface, the incident angle of the light irradiated on the sample surface to be measured 7 after being reflected by the off-axis elliptical reflector 3 is alpha, and as shown in fig. 3, AO sin theta is BO sin alpha, and AB sin alpha is AO sin (theta-alpha), so that AO sin theta is equal to BO sin alpha and AB sin alpha is equal to AO sin alpha (theta-alpha)

For the determined non-rotating elliptical conjugate reflecting surface, the left side of the equation is constant, so that the relation between the angle theta and the incident angle alpha is obtained, and the electric rotating table 4 can drive the plane reflecting mirror 5 to adjust the angle theta so as to adjust the incident angle alpha.

By introducing a corresponding detection assembly and detector, see fig. 2, a measurement of the reflectivity/transmissivity at a desired angle of incidence can be achieved.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A device for continuously adjusting the angle of incident light is characterized in that: the plane reflector is fixed on the electric rotating table, the center of the reflecting surface of the plane reflector coincides with the rotating center of the electric rotating table, the reflecting surface of the plane reflector faces the inner wall of the off-axis elliptic reflector, the off-axis elliptic reflector establishes a non-rotating elliptic conjugate reflecting surface, the non-rotating elliptic conjugate reflecting surface is provided with two focuses which are respectively a focus A and a focus B, and the focus A coincides with the center of the reflecting surface of the plane reflector; the incident light path is reflected by the plane reflector to irradiate towards the inner wall of the off-axis elliptical reflector, the reflected light reflected by the plane reflector is light emitted from a focus A of the non-rotating elliptical conjugate reflecting surface, the light is reflected by the inner wall of the off-axis elliptical reflector and then converged on a focus B of the non-rotating elliptical conjugate reflecting surface, the light reflected by the inner wall of the off-axis elliptical reflector is incident light with a continuously adjustable angle, the focus B is converged on the surface to be measured of the sample, the surface to be measured of the sample is vertical to the incident light path, and the vertical intersection point of the incident light path and the surface to be measured of the sample is focus B.

2. The apparatus of claim 1, wherein the angle of the incident light is continuously adjustable: the incident light path passes through the reflection surface center of the plane reflector by the front light path adjusting small hole, and the front light path adjusting small hole is used for adjusting the incident light path so that the incident light path irradiates the reflection surface center of the plane reflector.

3. The apparatus of claim 1, wherein the angle of the incident light is continuously adjustable: and a rear light path adjusting small hole is arranged at a position adjacent to the surface to be measured of the sample and used for adjusting an incident light path, so that the incident light path is vertical to the surface to be measured of the sample.