CN212426239U - Conveniently detachable cleaning type single crystal furnace - Google Patents

Abstract

A single crystal furnace capable of being conveniently disassembled, assembled and cleaned comprises a furnace body and an exhaust device, wherein the exhaust device comprises a first exhaust pipe, a four-way pipe, a clamp assembly, a blind plate, a vacuum valve, a second exhaust pipe and a vacuum pump, the inlet end of the first exhaust pipe is communicated with an inner cavity of the furnace body, the outlet end of the first exhaust pipe is hermetically connected with the left port of the four-way pipe, the right port of the four-way pipe is hermetically connected with the blind plate through the clamp assembly, the upper port of the four-way pipe is hermetically connected with the blind plate through the clamp assembly, the lower port of the four-way pipe is hermetically connected with the inlet end of the vacuum valve, the outlet end of the vacuum valve is hermetically connected with the inlet end of the second exhaust pipe, the outlet end of the second exhaust pipe is hermetically connected with the inlet of the vacuum pump, the four-way pipe is used as a connecting pipe, oxides remained and gathered in the pipeline can be easily, the installation and the dismantlement are convenient, the effectual cleaning efficiency that has improved.

Description

Conveniently detachable cleaning type single crystal furnace

Technical Field

The utility model relates to a monocrystalline silicon processing equipment technical field, in particular to can convenient dismouting clearance formula single crystal growing furnace.

Background

The lower part of the Hanhong single crystal furnace used at present is connected with a high vacuum isolation ball valve by a phi 80 bent pipe. In the process of using a heavily doped drawn crystal bar in the semiconductor industry, the amount of oxides is large, equipment runs for a long time, the high-vacuum isolation ball valve is not closed tightly, a large amount of oxides are accumulated in a pipeline and are adhered to the inner wall of the pipeline, so that the exhaust is not smooth in the production and drawing process, a vortex is generated, and the performance of the drawn crystal bar is influenced finally. When clearance pipeline and high vacuum isolation ball valve at every turn, will dismantle four screws in return bend both ends, because the mounted position is narrow and small, dismantle inconvenient, during the installation afterwards, it is improper to have the installation slightly, will cause gas leakage, causes the clearance inconvenient.

Disclosure of Invention

In view of the above, it is necessary to provide a single crystal furnace that can be easily disassembled and cleaned.

The utility model provides a but convenient dismouting clearance formula single crystal growing furnace, includes furnace body, exhaust apparatus includes first blast pipe, four-way pipe, clamp subassembly, blind plate, vacuum valve, second blast pipe, vacuum pump, the entry end of first blast pipe and the inner chamber intercommunication of furnace body, the exit end of first blast pipe and the left port sealing connection of four-way pipe, the right-hand member mouth of four-way pipe passes through clamp subassembly and blind plate sealing connection, the last port of four-way pipe passes through clamp subassembly and blind plate sealing connection, the lower port of four-way pipe and the entry end sealing connection of vacuum valve, the exit end of vacuum valve and the entry end sealing connection of second blast pipe, the entry sealing connection of second blast pipe exit end and vacuum pump.

Preferably, the single crystal furnace capable of being conveniently disassembled, assembled and cleaned further comprises a heat shield, the heat shield comprises an inner cylinder, an outer cylinder and a cylinder bottom, the inner cylinder is sleeved in the outer cylinder, the cylinder bottom is annular, the cylinder bottom is arranged at the lower ends of the inner cylinder and the outer cylinder, the inner cylinder comprises a first cylinder body, a second cylinder body, a third cylinder body and a fourth cylinder body, the first cylinder body, the second cylinder body, the third cylinder body and the fourth cylinder body are all provided with an upper opening and a lower opening, the first cylinder body is conical, the diameter of the upper end of the first cylinder body is larger than that of the lower end of the first cylinder body, the third cylinder body is conical, the diameter of the upper end of the third cylinder body is larger than that of the lower end of the third cylinder body, the second cylinder body and the fourth cylinder body are both cylindrical, the diameter of the second cylinder body is equal to that of the lower end of the first cylinder body, the diameter, the diameter of fourth barrel equals the diameter of the lower extreme of third barrel, the internal diameter of fourth barrel equals the internal diameter of bobbin base, the outer wall of the upper end of first barrel and the inner wall connection of the upper end of urceolus, the upper end of second barrel with the lower extreme of first barrel is connected, the lower extreme of second barrel with the upper end of third barrel is connected, the lower extreme of third barrel is connected with the upper end of fourth barrel, the fourth barrel sets up with the bobbin base is coaxial, the lower extreme of fourth barrel and the upper surface connection of bobbin base, the outer wall of bobbin base and the inner wall connection of the lower extreme of urceolus fill in the cavity that inner tube, urceolus, bobbin base surrounded and have the heat preservation felt.

Preferably, the conicity value of the first cylinder is 2tan17 °.

Preferably, the conicity value of the third cylinder is 2tan45 °.

Preferably, the cylinder bottom comprises a first ring body and a second ring body, the first ring body is cylindrical, the second ring body is conical, the outer diameter of the first ring body is equal to the diameter of the lower end of the second ring body, the lower end of the fourth cylinder body is connected with the upper surface of the first ring body, the outer wall of the first ring body is connected with the lower end of the second ring body, and the outer wall of the upper end of the second ring body is connected with the inner wall of the lower end of the outer cylinder.

Preferably, the inner cylinder is made of quartz.

Preferably, the cylinder bottom, the outer cylinder and the heat-insulating felt are made of graphite materials.

Preferably, the heat shield further comprises a support cylinder, and the inner wall of the support cylinder is connected with the outer wall of the upper end of the outer cylinder.

Preferably, but convenient dismouting clearance formula single crystal growing furnace still includes the isolating valve, furnace body upper end opening, the lower extreme of isolating valve is connected with the upper end of furnace body, the furnace body includes casing, a heat preservation section of thick bamboo, apron, a heat preservation section of thick bamboo upper end opening, a heat preservation section of thick bamboo nestification is in the casing, installs the apron in the upper end of a heat preservation section of thick bamboo, the middle part of apron is equipped with the mounting hole, the mounting hole internal diameter is greater than the external diameter of urceolus, the mounting hole internal diameter is less than the external diameter of a support section of thick bamboo, the lower surface and the apron upper surface connection of a.

Preferably, the furnace body further comprises a supporting shaft, a tray, a crucible, a bottom heater and a side heater, the supporting shaft is arranged at the bottom of the heat preservation felt, the tray is lifted on the supporting shaft, the crucible is placed on the tray, the bottom heater is installed between the bottom wall of the heat preservation felt and the tray, and the side heater is installed between the side wall of the heat preservation felt and the crucible.

The utility model has the advantages that the four-way pipe is used as the connecting pipe instead, the residual accumulated oxides in the pipeline can be easily and thoroughly cleaned, and the problems that the vacuum valve is not closed tightly due to more oxides and the performance of the crystal bar is influenced by the oxides in the pipeline are avoided; the right port and the upper port of the four-way pipe are connected in a sealing mode through the clamp assembly blind plates, the four-way pipe and the vacuum valve are convenient to install and disassemble, the four-way pipe and the vacuum valve are not required to be disassembled and assembled before and after cleaning is avoided, and cleaning efficiency is effectively improved.

Drawings

Fig. 1 is a schematic structural view of the exhaust apparatus.

Fig. 2 is a schematic structural view of the heat shield.

FIG. 3 is a schematic structural diagram of the single crystal furnace which can be conveniently disassembled and cleaned.

FIG. 4 is an assembly view of the flange and clip assembly.

Figure 5 is a front view of the clip body.

In the figure: the furnace body 10, the shell 11, the heat preservation cylinder 12, the cover plate 13, the support shaft 14, the tray 15, the crucible 16, the bottom heater 17, the side heater 18, the exhaust device 20, the first exhaust pipe 21, the four-way pipe 22, the hoop assembly 23, the hoop body 231, the middle part 2311, the first connecting part 2312, the second connecting part 2313, the middle frame 232, the center ring 2321, the O-shaped ring 2322, the blind plate 24, the vacuum valve 25, the second exhaust pipe 26, the vacuum pump 27, the flange 28, the heat shield 30, the inner cylinder 31, the first cylinder 311, the second cylinder 312, the third cylinder 313, the fourth cylinder 314, the inner cylinder 32, the cylinder bottom 33, the first ring body 331, the second ring body 332, the support cylinder 34 and the isolation valve 40.

Detailed Description

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.

Referring to fig. 1 and 2, the embodiment of the utility model provides a but convenient dismouting clearance formula single crystal growing furnace, which comprises a furnace body 10, exhaust apparatus 20 includes first blast pipe 21, four-way pipe 22, clamp subassembly 23, the blind plate 24, vacuum valve 25, second blast pipe 26, vacuum pump 27, the entry end of first blast pipe 21 and the inner chamber intercommunication of furnace body 10, the exit end of first blast pipe 21 and the left port sealing connection of four-way pipe 22, clamp subassembly 23 and blind plate 24 sealing connection are passed through to the right-hand member mouth of four-way pipe 22, clamp subassembly 23 and blind plate 24 sealing connection are passed through to the upper port of four-way pipe 22, the lower port of four-way pipe 22 and the entry end sealing connection of vacuum valve 25, the exit end of vacuum valve 25 and the entry end sealing connection of second blast pipe 26, the exit end of second blast pipe 26 and vacuum pump 27's entry sealing connection.

Specifically, clamp subassembly 23 is the KF clamp, and more specifically, clamp subassembly 23 is the stainless steel KF clamp, and more specifically, clamp subassembly 23 is the KF80 clamp, and vacuum valve 25 is high vacuum isolation ball valve.

Referring to fig. 4, a flange 28 is mounted on each of the right port of the cross pipe 22 and the lower port of the cross pipe 22, and a flange 28 is mounted on one end of the blind plate 24.

Referring to fig. 4, the band assembly 23 includes a band body 231 and an intermediate frame 232, the intermediate frame 232 includes a center ring 2321 and an O-ring 2322, the O-ring 2322 is fixedly mounted on an annular surface of the center ring 2321, a diameter of the center ring 2321 is smaller than an inner diameter of the flange 28, and a diameter of the O-ring 2322 is smaller than an outer diameter of the flange 28.

Referring to fig. 4 and 5, the two hoop bodies 231 are provided, each hoop body 231 includes a semicircular middle portion 2311, the cross section of the middle portion 2311 is concave, two sides of the middle portion 2311 are symmetrically provided with penetrating holes, the radius of the penetrating holes is larger than that of the four-way pipe 22, the radial inner side of the middle portion 2311 is a clamping groove, the radius of the clamping groove is larger than the outer diameter of the flange 28, two sides of the clamping groove are inclined surfaces, one end of the middle portion 2311 is connected with the first connecting portion 2312, and the other end of the middle portion 2311 is connected with the second connecting portion 2313.

The using method comprises the following steps: referring to fig. 4 and 5, the intermediate frame 232 is clamped between the two flanges 28, the first connecting portions 2312 of the two clamp bodies 231 are hinged, the two flanges 28 and the intermediate frame 232 are clamped into the annular clamping grooves formed by the two clamp bodies 231, the two second connecting portions 2313 are connected through bolts and tightened, the diameters of the clamping grooves formed by the two clamp bodies 231 are gradually reduced, the two sides of the clamping grooves are inclined surfaces, the two flanges 28 are relatively pressed in the axial direction by component force generated by the two sides of the clamping grooves, and the O-shaped ring 2322 of the intermediate frame 232 is clamped between the flanges 28, so that the two flanges 28 are relatively and hermetically connected.

The utility model has the advantages that the four-way pipe 22 is used as the connecting pipe, the residual accumulated oxides in the pipeline can be easily and thoroughly cleaned, and the problems that the vacuum valve 25 is not closed tightly due to more oxides and the performance of the crystal bar is influenced by the oxides in the pipeline are avoided; the right port and the upper port of the four-way pipe 22 are connected in a sealing mode through the clamp assembly 23 and the blind plate 24, the installation and the disassembly are convenient, the four-way pipe 22 and the vacuum valve 25 are required to be disassembled and assembled before and after cleaning is avoided, and the cleaning efficiency is effectively improved.

Referring to fig. 2, further, the single crystal furnace capable of being conveniently disassembled and cleaned further comprises a heat shield 30, the heat shield 30 comprises an inner cylinder 31, an outer cylinder 32 and a cylinder bottom 33, the inner cylinder 31 is sleeved in the outer cylinder 32, the cylinder bottom 33 is annular, the cylinder bottom 33 is arranged at the lower end of the inner cylinder 31 and the outer cylinder 32, the inner cylinder 31 comprises a first cylinder 311, a second cylinder 312, a third cylinder 313 and a fourth cylinder 314, the first cylinder 311, the second cylinder 312, the third cylinder 313 and the fourth cylinder 314 are all opened up and down, the first cylinder 311 is conical, the diameter of the upper end of the first cylinder 311 is larger than that of the lower end of the first cylinder 311, the third cylinder 313 is conical, the diameter of the upper end of the third cylinder 313 is larger than that of the lower end of the third cylinder 313, the second cylinder 312 and the fourth cylinder 314 are both cylindrical, the diameter of the second cylinder 312 is equal to that of the lower end of the first cylinder 311, the diameter of the second cylinder 312 is equal to that of the third cylinder, the diameter of the fourth cylinder 314 is equal to the diameter of the lower end of the third cylinder 313, the inner diameter of the fourth cylinder 314 is equal to the inner diameter of the cylinder bottom 33, the outer wall of the upper end of the first cylinder 311 is connected with the inner wall of the upper end of the outer cylinder 32, the upper end of the second cylinder 312 is connected with the lower end of the first cylinder 311, the lower end of the second cylinder 312 is connected with the upper end of the third cylinder 313, the lower end of the third cylinder 313 is connected with the upper end of the fourth cylinder 314, the fourth cylinder 314 is coaxially arranged with the cylinder bottom 33, the lower end of the fourth cylinder 314 is connected with the upper surface of the cylinder bottom 33, the outer wall of the cylinder bottom 33 is connected with the inner wall of the lower end of the outer cylinder 32, and the cavity surrounded by the inner cylinder 31, the.

In the crystal bar drawing process, the whole crystal bar can pass through the innermost heat shield 30, the existing heat shield 30 is completely made of graphite, and due to the problem of graphite purity, impurity elements in the graphite can volatilize to the surface of the crystal bar and diffuse into the surface layer of the crystal bar, so that the contents of carbon and iron in the crystal bar are higher.

In this embodiment, the inner cylinder 31 closest to the ingot is designed to be a serial connection body of the first cylinder 311, the second cylinder 312, the third cylinder 313 and the fourth cylinder 314 in a segment manner, and the second cylinder 312 and the fourth cylinder 314 are designed to be cylindrical, so that the distance between the inner cylinder 31 and the ingot can be reduced, and the volatilization of impurity elements of the inner cylinder 31 to the surface of the ingot can be reduced.

Referring to fig. 2, further, the taper value of the first cylinder 311 is 2tan17 °.

Referring to fig. 2, further, the third cylinder 313 has a taper value of 2tan45 °.

Referring to fig. 2, the bottom 33 includes a first ring 331 and a second ring 332, the first ring 331 is cylindrical, the second ring 332 is conical, an outer diameter of the first ring 331 is equal to a diameter of a lower end of the second ring 332, a lower end of the fourth cylinder 314 is connected to an upper surface of the first ring 331, an outer wall of the first ring 331 is connected to a lower end of the second ring 332, and an outer wall of an upper end of the second ring 332 is connected to an inner wall of a lower end of the outer cylinder 32.

Referring to fig. 2, the inner cylinder 31 is made of quartz.

In the embodiment, the high-purity quartz has little iron content, no carbon atoms, can resist high temperature, and can reduce the possibility that impurity elements in the inner cylinder 31 can volatilize to the surface of a crystal bar.

Referring to fig. 2, the cylinder bottom 33, the outer cylinder 32 and the heat insulation felt are made of graphite.

Referring to fig. 2, further, the heat shield 30 further includes a support cylinder 34, and an inner wall of the support cylinder 34 is connected to an outer wall of an upper end of the outer cylinder 32.

Referring to fig. 2 and 3, furthermore, the single crystal furnace capable of being conveniently disassembled, assembled and cleaned further comprises an isolation valve 40, the upper end of the furnace body 10 is open, the lower end of the isolation valve 40 is connected with the upper end of the furnace body 10, the furnace body 10 comprises a shell 11, a heat preservation cylinder 12 and a cover plate 13, the upper end of the heat preservation cylinder 12 is open, the heat preservation cylinder 12 is nested in the shell 11, the cover plate 13 is installed at the upper end of the heat preservation cylinder 12, a mounting hole is formed in the middle of the cover plate 13, the inner diameter of the mounting hole is larger than the outer diameter of the outer cylinder 32, the inner diameter of the mounting hole is smaller than the outer diameter of the.

Referring to fig. 2 and 3, the furnace body 10 further comprises a supporting shaft 14, a tray 15, a crucible 16, a bottom heater 17 and a side heater 18, the supporting shaft 14 is arranged at the bottom of the heat insulation felt, the tray 15 is lifted on the supporting shaft 14, the crucible 16 is placed on the tray 15, the bottom heater 17 is installed between the bottom wall of the heat insulation felt and the tray 15, and the side heater 18 is installed between the side wall of the heat insulation felt and the crucible 16.

The embodiment of the utility model provides a module or unit in the device can merge, divide and delete according to actual need.

While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention.

Claims (10)

1. The utility model provides a can convenient dismouting clearance formula single crystal growing furnace which characterized in that: including furnace body, exhaust apparatus includes first blast pipe, four-way pipe, clamp subassembly, blind plate, vacuum valve, second blast pipe, vacuum pump, the entry end of first blast pipe and the inner chamber intercommunication of furnace body, the exit end of first blast pipe and the left port sealing connection of four-way pipe, the right-hand member mouth of four-way pipe passes through clamp subassembly and blind plate sealing connection, the last port of four-way pipe passes through clamp subassembly and blind plate sealing connection, the lower port of four-way pipe and the entry end sealing connection of vacuum valve, the exit end of vacuum valve and the entry end sealing connection of second blast pipe, the entry sealing connection of second blast pipe exit end and vacuum pump.

2. A single crystal growing furnace as claimed in claim 1, which is readily removable and disposable, and which comprises: the single crystal furnace capable of being conveniently disassembled, assembled and cleaned further comprises a heat shield, the heat shield comprises an inner barrel, an outer barrel and a barrel bottom, the inner barrel is sleeved in the outer barrel, the barrel bottom is annular, the barrel bottom is arranged at the lower ends of the inner barrel and the outer barrel, the inner barrel comprises a first barrel, a second barrel, a third barrel and a fourth barrel, the first barrel, the second barrel, the third barrel and the fourth barrel are all provided with an upper opening and a lower opening, the first barrel is conical, the diameter of the upper end of the first barrel is larger than that of the lower end of the first barrel, the third barrel is conical, the diameter of the upper end of the third barrel is larger than that of the lower end of the third barrel, the second barrel and the fourth barrel are both cylindrical, the diameter of the second barrel is equal to that of the lower end of the first barrel, the diameter of the second barrel is equal to that of the third barrel, and the diameter of the upper end of the fourth barrel is equal to that of the lower, the internal diameter of fourth barrel equals the internal diameter of bobbin base, the outer wall of the upper end of first barrel and the inner wall connection of the upper end of urceolus, the upper end of second barrel with the lower extreme of first barrel is connected, the lower extreme of second barrel with the upper end of third barrel is connected, the lower extreme of third barrel is connected with the upper end of fourth barrel, the fourth barrel sets up with the bobbin base is coaxial, the lower extreme of fourth barrel and the upper surface connection of bobbin base, the inner wall connection of the outer wall of bobbin base and the lower extreme of urceolus has the heat preservation felt at the cavity that inner tube, urceolus, bobbin base surrounded.

3. A single crystal growing furnace as claimed in claim 2, wherein: the taper value of the first cylinder is 2tan17 °.

4. A single crystal growing furnace as claimed in claim 2, wherein: the taper value of the third cylinder is 2tan45 °.

5. A single crystal growing furnace as claimed in claim 2, wherein: the cylinder bottom comprises a first ring body and a second ring body, the first ring body is cylindrical, the second ring body is conical, the outer diameter of the first ring body is equal to the diameter of the lower end of the second ring body, the lower end of the fourth cylinder body is connected with the upper surface of the first ring body, the outer wall of the first ring body is connected with the lower end of the second ring body, and the outer wall of the upper end of the second ring body is connected with the inner wall of the lower end of the outer cylinder.

6. A single crystal growing furnace as claimed in claim 2, wherein: the inner cylinder is made of quartz.

7. A single crystal growing furnace as claimed in claim 2, wherein: the cylinder bottom, the outer cylinder and the heat preservation felt are made of graphite materials.

8. A single crystal growing furnace as claimed in claim 2, wherein: the heat shield further comprises a supporting cylinder, and the inner wall of the supporting cylinder is connected with the outer wall of the upper end of the outer cylinder.

9. A single crystal growing furnace as claimed in claim 8, which is readily removable and disposable, and which comprises: but convenient dismouting clearance formula single crystal growing furnace still includes the isolating valve, furnace body upper end opening, the lower extreme of isolating valve is connected with the upper end of furnace body, the furnace body includes casing, heat preservation section of thick bamboo, apron, heat preservation section of thick bamboo upper end opening, heat preservation section of thick bamboo nestification is in the casing, installs the apron in the upper end of heat preservation section of thick bamboo, the middle part of apron is equipped with the mounting hole, the mounting hole internal diameter is greater than the external diameter of urceolus, the mounting hole internal diameter is less than the external diameter of a supporting cylinder, the lower surface and the apron upper surface connection of a supporting cylinder.

10. A single crystal growing furnace as claimed in claim 9 which is readily removable and disposable, wherein: the furnace body still includes back shaft, tray, crucible, end heater, side heater, and heat preservation felt bottom is equipped with the back shaft, lifts the tray on the back shaft, has placed the crucible on the tray, installs end heater between heat preservation felt diapire and the tray, installs the side heater between heat preservation felt lateral wall and the crucible.

Images