CN210341122U - Air exhaust pipeline and single crystal furnace with same - Google Patents
Air exhaust pipeline and single crystal furnace with same Download PDFInfo
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- CN210341122U CN210341122U CN201921000004.4U CN201921000004U CN210341122U CN 210341122 U CN210341122 U CN 210341122U CN 201921000004 U CN201921000004 U CN 201921000004U CN 210341122 U CN210341122 U CN 210341122U
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Abstract
The application relates to an air exhaust pipeline and a single crystal furnace with the same, wherein the air exhaust pipeline comprises a cleaning pipeline, a cleaning port sealing cover and a combustion valve. The cleaning opening sealing cover is fixedly installed at the first opening end of the cleaning pipeline and used for sealing the first opening of the cleaning pipeline, the combustion valve is fixedly installed on the pipe wall of the cleaning pipeline and is close to the cleaning opening sealing cover, and the combustion valve is suitable for being opened before the cleaning opening sealing cover is opened when an air exhaust pipeline of the single crystal furnace is cleaned, so that the inner cavity of the cleaning pipeline is communicated with the outside. The combustion valve is opened in advance to enable the dusty oxide to be fully combusted with oxygen in a small amount of outside air, so that the deflagration phenomenon generated when the air exhaust pipeline is cleaned is effectively prevented, and the safety of the cleaning work of the air exhaust pipeline is greatly improved.
Description
Technical Field
The disclosure relates to the technical field of semiconductor processes, in particular to an air exhaust pipeline and a single crystal furnace with the same.
Background
A single crystal furnace is an apparatus for growing single crystal silicon in which a polycrystalline silicon material is pulled to become a single crystal silicon ingot. Monocrystalline silicon is an important raw material in the photovoltaic industry, the market demand is increasingly large in recent years, and the production time of a monocrystalline furnace is multiplied. When single crystal silicon is produced, the temperature in the single crystal furnace is high, and a thermal field crucible in the furnace generates partial dust-like oxides at high temperature. The amount of oxides increases with the production time of the single crystal furnace. Most of the oxides are taken away along with the gas in the furnace through the gas extraction pipeline, but partial oxides are still deposited in the pipeline, especially at a cleaning port of the gas extraction pipeline where the gas is not smooth. When the single crystal furnace is shut down to clean the air exhaust pipeline, a large amount of air enters the pipeline and reacts with the dust-shaped oxide quickly by opening the sealing cover of the cleaning opening of the air exhaust pipeline, so that the explosion phenomenon is generated and the personal safety is injured.
SUMMERY OF THE UTILITY MODEL
In view of this, the present disclosure provides an air exhaust duct, which can perform a combustion reaction on a soot-like oxide deposited in the air exhaust duct before opening a cleaning opening sealing cover for cleaning, so as to prevent a large amount of air from entering the duct and reacting with the soot-like oxide rapidly after opening the cleaning opening sealing cover of the air exhaust duct, thereby causing a deflagration phenomenon and hurting personal safety.
According to one aspect of the present disclosure, there is provided an air extraction duct comprising a cleaning conduit, a cleaning port closure and a combustion valve;
the cleaning opening sealing cover is fixedly arranged at the first opening end of the cleaning pipeline and used for sealing the first opening of the cleaning pipeline;
the combustion valve is fixedly arranged on the pipe wall of the cleaning pipeline and is close to the cleaning port sealing cover;
the combustion valve is suitable for being opened before the cleaning opening sealing cover is opened when an air exhaust pipeline of the single crystal furnace is cleaned, so that the inner cavity of the cleaning pipeline is communicated with the outside.
In one possible implementation, the connection between the cleaning opening cover and the first opening of the cleaning line is a flange connection or a hinge connection.
In one possible embodiment, the connection between the combustion valve and the cleaning line is a flanged connection, a welded connection or a threaded connection.
In one possible implementation, the combustion valve includes any one of a flow valve and an on-off valve.
In a possible implementation manner, the furnace body cleaning device further comprises a furnace chamber air suction pipeline, wherein the furnace chamber air suction pipeline is installed on the pipe wall of the cleaning pipeline;
the hearth air suction pipeline is communicated with the inner cavity of the cleaning pipeline;
and the side of the hearth air suction pipeline, which is not connected with the pipe wall of the cleaning pipeline, is suitable for being communicated with the hearth of the single crystal furnace.
In a possible implementation manner, the device further comprises an air suction pump pipeline;
the air suction pump pipeline is arranged at the second opening end of the cleaning pipeline and is communicated with the inner cavity of the cleaning pipeline;
and the suction pump pipeline is connected with the second opening of the cleaning pipeline in a flange connection or threaded connection mode.
In one possible implementation, the cleaning line includes a first tube, a second tube, and a third tube;
the first pipe fitting, the second pipe fitting and the third pipe fitting are communicated in sequence and then are in a straight cylinder shape;
the pipe orifice of the first pipe fitting, which is not communicated with the second pipe fitting, is a first opening of the cleaning pipeline;
the second pipe fitting is a three-way pipe fitting, and
the first pipe orifice of the second pipe fitting is communicated with the first pipe fitting, the second pipe orifice of the second pipe fitting is communicated with the third pipe fitting, and the third pipe orifice of the third pipe fitting is communicated with the hearth air suction pipeline.
In a possible implementation manner, the connection manner between the furnace extraction pipeline and the third pipe orifice of the second pipe fitting is flange connection.
In one possible implementation, the cleaning port cover is shaped as a disk.
According to another aspect of the present disclosure, there is provided a single crystal furnace including the exhaust duct of any one of the preceding claims.
According to the air exhaust pipeline, the combustion valve is fixedly installed on the pipe wall of the cleaning pipeline, the combustion valve is opened before the air exhaust pipeline is cleaned, so that the dust-shaped oxide deposited in the inner cavity of the cleaning pipeline reacts with oxygen in a small amount of outside air for combustion, and the explosion phenomenon caused by directly opening the sealing cover of the cleaning opening of the air exhaust pipeline can be effectively prevented. Moreover, the scheme is simple and efficient to operate and convenient to realize.
Other features and aspects of the present disclosure will become apparent from the following detailed description of exemplary embodiments, which proceeds with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate exemplary embodiments, features, and aspects of the disclosure and, together with the description, serve to explain the principles of the disclosure.
FIG. 1 shows a main block diagram of an extraction duct according to an embodiment of the present disclosure.
Detailed Description
Various exemplary embodiments, features and aspects of the present disclosure will be described in detail below with reference to the accompanying drawings. In the drawings, like reference numbers can indicate functionally identical or similar elements. While the various aspects of the embodiments are presented in drawings, the drawings are not necessarily drawn to scale unless specifically indicated.
It should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientation or positional relationship indicated in the drawings for convenience in describing the invention or for simplicity in description, and do not indicate or imply that the device or element so indicated must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
The word "exemplary" is used exclusively herein to mean "serving as an example, embodiment, or illustration. Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other embodiments.
Furthermore, in the following detailed description, numerous specific details are set forth in order to provide a better understanding of the present disclosure. It will be understood by those skilled in the art that the present disclosure may be practiced without some of these specific details. In some instances, methods, means, elements and circuits that are well known to those skilled in the art have not been described in detail so as not to obscure the present disclosure.
FIG. 1 shows a schematic diagram of the main structure of an evacuation duct 100 according to an embodiment of the present disclosure. As shown in fig. 1, the air exhaust duct 100 includes: the cleaning port cover 110, the combustion valve 120 and the cleaning pipeline 130, the air exhaust pipeline 100 is installed on the single crystal furnace and is used for cleaning and exhausting gas and part of dust-like oxides generated in the process of preparing the single crystal silicon.
The cleaning port cover 110 is shaped like a disk, and the cleaning port cover 110 is fixedly connected to the first opening 134 of the cleaning pipeline 130 for sealing the first opening 134 of the cleaning pipeline 130.
In a possible implementation manner, the cross-sectional area of the cleaning port cover 110 is larger than the cross-sectional area of the first opening 134 of the cleaning pipeline 130, so that when the cleaning port cover 110 is connected with the first opening 134, the cleaning port cover 110 can completely cover the first opening 134 of the cleaning pipeline 130, and gas and part of dust-like oxides generated during the operation of the equipment are prevented from leaking at the first opening 134.
The fixed mode between the cleaning opening sealing cover 110 and the first opening 134 of the cleaning pipeline 130 can be selected from hinging, through holes are formed in the edge of the cleaning opening sealing cover 110 and the edge of the first opening 134 of the cleaning pipeline 130, a pin shaft penetrates through the through holes in the edge of the cleaning opening sealing cover 110 and the through holes in the edge of the first opening 134, the cleaning opening sealing cover 110 is tightly connected with the first opening 134, and the cleaning opening sealing cover 110 can move in an opening and closing mode around a connecting shaft. Simple structure and easy realization.
Moreover, by hinging the cleaning port cover 110 with the first opening 134 of the cleaning pipeline 130, when the cleaning port cover 110 is damaged, the pin shaft is pulled out and the cleaning port cover 110 is replaced. The cost is greatly reduced, and the efficiency is improved.
Further, the cleaning opening cover 110 can be fixed to the first opening 134 of the cleaning pipeline 130 by other detachable connections (e.g., flange connection, screw connection, etc.), and the principle thereof is similar to the aforementioned hinge connection principle, and will not be described herein again.
The combustion valve 120 is fixedly installed on the pipe wall of the cleaning pipeline 130, and is suitable for realizing the pretreatment of the dust-like oxide deposited in the air extraction pipeline 110 when cleaning part of the dust-like oxide deposited in the air extraction pipeline 110 of the single crystal furnace. That is, the combustion valve 120 is opened before the cleaning port cover 110 is opened, so that the inner cavity of the cleaning line 130 communicates with the outside through the combustion valve 120. After the external air enters the cleaning pipeline 130 through the combustion valve 120, the oxygen in the air reacts with the oxide in the cleaning pipeline 130 to burn, so as to achieve the purpose of cleaning.
In the air extraction duct 100 according to the embodiment of the present disclosure, the combustion valve 120 is installed on the wall of the cleaning pipe 130, so that when cleaning the dust-like oxide in the air extraction duct 100, the combustion valve 120 is opened before the cleaning opening cover 110 is opened, and the cleaning pipe 130 is communicated with the outside through the valve port of the combustion valve 120, so that the external air flows into the cleaning pipe 130 through the combustion valve 120. Because the valve port aperture of the combustion valve 120 is smaller, the flow rate when the external air flows into the cleaning pipeline 130 is smaller, so that the purpose of fully burning the dusty oxide in the cleaning pipeline 130 under the condition that a small amount of air is introduced is achieved, and meanwhile, the burning of the dusty oxide is not too violent, so that the safe and effective cleaning of the residual dusty oxide in the air extraction pipeline 100 is ensured.
Further, the mounting position of the combustion valve 120 is close to the cleaning port sealing cover 110, and the first opening 134 of the cleaning pipeline 130 is a blind opening, so that gas circulation is not smooth, and dust-like oxides are often more easily accumulated at the first opening 134, so that the combustion valve 120 is mounted near the cleaning port sealing cover 110, when the combustion valve 130 is opened, air in external gas can be fully combusted with the dust-like oxides near the cleaning port sealing cover 110, thereby greatly improving the cleaning efficiency and the cleaning degree, reducing the possibility of explosion after a large amount of air enters the air extraction pipeline 100 when the cleaning port sealing cover 110 is subsequently opened, and improving the safety factor of equipment.
Further, the combustion valve 120 and the clean pipe 130 are fixed by flange connection, the side walls of the combustion valve 120 and the clean pipe 130 are respectively fixed on two flanges with the same size, the two flanges are aligned, and the two flanges are tightened by bolts so that the combustion valve 120 and the clean pipe 130 are tightly connected. Simple structure and easy realization.
Moreover, by adopting the flange connection between the combustion valve 120 and the cleaning pipeline 130, when the combustion valve 120 is damaged, the combustion valve 120 can be directly detached for replacement.
It should be noted that the fastening between the combustion valve 120 and the cleaning line 130 may be other detachable connections (e.g., threaded connections).
Further, the optional combustion valve 120 includes any one of a flow valve and an on-off valve. In a possible implementation manner, the combustion valve 120 selects a flow valve to connect with the side wall of the cleaning pipeline 130, the flow valve is provided with a valve core capable of adjusting the flow in and out, and the valve core can be rotated to axially move to change the overflowing area of the valve port. The flow of the external air entering the cleaning pipeline 130 is adjusted by rotating the valve core of the flow valve, so that only a small amount of air enters the air extraction pipeline 100 after the outside is communicated with the inner cavity of the cleaning pipeline 130, and the purpose of reacting and burning the dusty oxide and the oxygen in the air is realized.
It should be noted that, when the combustion valve 120 is selected, a switch valve with a certain size may be selected to replace a control valve, and compared with selecting a flow valve, the switch valve is simpler to operate and lower in price than the flow valve, thereby greatly reducing the cost.
As shown in fig. 1, the air exhaust duct 100 further includes a furnace air exhaust duct 140 and an air exhaust pump duct 150, the furnace air exhaust duct 140 is fixedly installed on a tube wall of the cleaning duct 130, the furnace air exhaust duct 140 is communicated with an inner cavity of the cleaning duct 130, and a side of the furnace air exhaust duct 140 not connected with the tube wall of the cleaning duct 130 is communicated with a furnace of the single crystal furnace. The suction pump line 150 is mounted on the second open end 135 of the cleaning line 130 and communicates with the interior cavity of the cleaning line 130.
In a possible implementation manner, the connection manner between the suction pump pipeline 150 and the second open end 135 of the cleaning pipeline 130 is flange connection, the suction pump pipeline 150 and the second open end 135 of the cleaning pipeline 130 are respectively fixed on a flange, and then the two flanges are fixed by bolts, so that the suction pump pipeline 150 and the cleaning pipeline 130 are tightly connected, which is simple and convenient and easy to implement.
Further, the cleaning line 130 includes a first pipe 131, a second pipe 132, and a third pipe 133. The first pipe 131, the second pipe 132 and the third pipe 133 are sequentially communicated and are in a straight cylinder shape, the first pipe 131 is communicated with the first pipe opening 1321 of the second pipe 132, the second pipe opening 1322 of the second pipe 132 is communicated with the third pipe 133, and the communication modes are threaded connection.
In a possible implementation manner, the second pipe 132 is a three-way pipe, the surfaces of the first pipe orifice 1321 and the second pipe orifice 1322 are both provided with external threads, the end of the first pipe 131 connected with the first pipe orifice 1321 is provided with internal threads, and the first pipe 131 and the second pipe 132 are tightly connected through the internal and external threads.
Further, the connection manner and principle of the second nozzle 1322 of the second pipe 132 and the third pipe 133 are the same as the above principle, and are not described herein again.
Further, the third nozzle 1323 of the third pipe 133 is communicated with the furnace suction pipe 140, and the furnace suction pipe 140 is connected to the third nozzle 1323 of the second pipe 132 by a flange.
Thus, in a possible implementation, when the single crystal furnace performs the single crystal pulling, the generated gas and the dust-like oxide enter the cleaning line 130 through the furnace suction line 140 along the third nozzle 1323 of the second pipe 132, and then the gas and most of the dust-like oxide are exhausted from the suction pump line 150 under the suction force of the suction pump. When the air suction pipe 100 is cleaned, the combustion valve 120 is opened before the cleaning port sealing cover 110 is opened, a small amount of air enters the inner cavity of the cleaning pipe 130 to enable the cleaning pipe 130 to be communicated with the outside, and after oxygen in the air reacts with deposited dust-like oxides to be combusted, the cleaning port sealing cover 110 is opened to carry out next cleaning. Thereby avoiding the risk of deflagration caused by direct opening and improving the production safety of the single crystal furnace.
It should be noted that although the air extraction duct of the embodiment of the present disclosure is described by taking the air extraction duct shown in fig. 1 as an example, those skilled in the art will appreciate that the present disclosure should not be limited thereto. In fact, the user can flexibly set the structure of the air exhaust pipeline according to personal preference or practical application scenes as long as the expected functional effect can be achieved.
In this way, by setting the structure of the air exhaust duct, the air exhaust duct according to the above-described embodiment of the present disclosure can accomplish an optimized improvement of the prior art.
In addition, it is also noted that the present disclosure provides a single crystal furnace according to any one of the exhaust ducts described above. The single crystal furnace of the embodiment of the disclosure comprises a furnace body and any one of the air extraction pipelines. Wherein, the air extraction pipeline is connected with the single crystal furnace and is used for cleaning and discharging gas and part of dust-like oxides generated in the single crystal furnace using the embodiment of the disclosure.
Having described embodiments of the present disclosure, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the disclosed embodiments. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is chosen in order to best explain the principles of the embodiments, the practical application, or improvements made to the technology in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.
Claims (10)
1. An air extraction pipeline is characterized by comprising a cleaning pipeline, a cleaning port sealing cover and a combustion valve;
the cleaning opening sealing cover is fixedly arranged at the first opening end of the cleaning pipeline and used for sealing the first opening of the cleaning pipeline;
the combustion valve is fixedly arranged on the pipe wall of the cleaning pipeline and is close to the cleaning port sealing cover;
the combustion valve is suitable for being opened before the cleaning opening sealing cover is opened when an air exhaust pipeline of the single crystal furnace is cleaned, so that the inner cavity of the cleaning pipeline is communicated with the outside.
2. The exhaust duct of claim 1, wherein the connection between the cleaning port cover and the first opening of the cleaning duct is a flange connection or a hinge connection.
3. The extraction duct according to claim 1, characterised in that the connection between the combustion valve and the cleaning duct is flanged, welded or screwed.
4. The extraction duct according to claim 1, wherein the combustion valve comprises any one of a flow valve and a switch valve.
5. The extraction duct according to any one of claims 1 to 4, further comprising a furnace extraction line mounted on a wall of the cleaning line;
the hearth air suction pipeline is communicated with the inner cavity of the cleaning pipeline;
and the side of the hearth air suction pipeline, which is not connected with the pipe wall of the cleaning pipeline, is suitable for being communicated with the hearth of the single crystal furnace.
6. The extraction duct according to any one of claims 1 to 4, further comprising an extraction pump line;
the air suction pump pipeline is arranged at the second opening end of the cleaning pipeline and is communicated with the inner cavity of the cleaning pipeline;
and the suction pump pipeline is connected with the second opening of the cleaning pipeline in a flange connection or threaded connection mode.
7. The extraction duct of claim 5, wherein the cleaning duct comprises a first tube, a second tube, and a third tube;
the first pipe fitting, the second pipe fitting and the third pipe fitting are communicated in sequence and then are in a straight cylinder shape;
the pipe orifice of the first pipe fitting, which is not communicated with the second pipe fitting, is a first opening of the cleaning pipeline;
the second pipe fitting is a three-way pipe fitting, and
the first pipe orifice of the second pipe fitting is communicated with the first pipe fitting, the second pipe orifice of the second pipe fitting is communicated with the third pipe fitting, and the third pipe orifice of the third pipe fitting is communicated with the hearth air suction pipeline.
8. The extraction duct according to claim 7, characterized in that the connection between the furnace extraction duct and the third nozzle of the second tube is a flange connection.
9. The evacuation duct of any of claims 1 to 4, wherein the cleaning port cover is shaped as a disk.
10. A single crystal growing furnace comprising the exhaust duct of any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921000004.4U CN210341122U (en) | 2019-06-28 | 2019-06-28 | Air exhaust pipeline and single crystal furnace with same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921000004.4U CN210341122U (en) | 2019-06-28 | 2019-06-28 | Air exhaust pipeline and single crystal furnace with same |
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| Publication Number | Publication Date |
|---|---|
| CN210341122U true CN210341122U (en) | 2020-04-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921000004.4U Active CN210341122U (en) | 2019-06-28 | 2019-06-28 | Air exhaust pipeline and single crystal furnace with same |
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|---|---|
| CN (1) | CN210341122U (en) |
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