CN212420604U - Device for grinding double-sided polished thin plate by using electrolysis-assisted magnetic particles - Google Patents
Device for grinding double-sided polished thin plate by using electrolysis-assisted magnetic particles Download PDFInfo
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- CN212420604U CN212420604U CN202022018164.0U CN202022018164U CN212420604U CN 212420604 U CN212420604 U CN 212420604U CN 202022018164 U CN202022018164 U CN 202022018164U CN 212420604 U CN212420604 U CN 212420604U
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Abstract
The utility model relates to an ultra-precision machining technical field, concretely relates to supplementary magnetic particle of electrolysis grinds device of double-sided polishing sheet metal. The device comprises a machine tool body, a first magnetic pole, a second magnetic pole, a first motor, a second motor, an electrolyte collecting tank, a reciprocating device, a clamping device and an electrolytic polishing device; the first magnetic pole is clamped on a spindle chuck of a spindle box of a machine tool body, the first motor drives the spindle chuck and the first magnetic pole to rotate, the second magnetic pole is connected with a second motor, the second motor drives the second magnetic pole to rotate, and the rotation axes of the first magnetic pole and the second magnetic pole are the same; the reciprocating device and the second motor are connected with a guide rail of the machine tool body in a sliding mode, the electrolyte collecting tank is connected with the reciprocating device in a sliding mode, the clamping device is fixedly connected in the electrolyte collecting tank, the thin plate is vertically fixedly connected to the clamping device, and the thin plate is located between the first magnetic pole and the second magnetic pole. The processing efficiency of the hard alloy can be ensured, and the processing quality can be ensured.
Description
Technical Field
The utility model relates to an ultra-precision machining technical field, concretely relates to supplementary magnetic particle of electrolysis grinds device of double-sided polishing sheet metal.
Background
The hard alloy sheet has a series of excellent performances such as high hardness, wear resistance, good strength and toughness, heat resistance, corrosion resistance and the like, so that the hard alloy sheet is widely applied to many fields such as aerospace, ships and the like, and the improvement of the surface quality of the hard alloy sheet becomes a key research direction, but the problem of ensuring the processing efficiency and the processing quality of the hard alloy is a great scientific research problem at present.
For a hard alloy sheet, the machining precision of the surface of the hard alloy sheet is difficult to ensure by traditional mechanical grinding machine polishing and manual sand paper polishing, and the machining efficiency often cannot meet the production requirement.
The single-side grinding and polishing, the magnetic grinding and polishing, the electrochemical polishing and the like are special processing methods with long application time, but a single method has no particularly ideal polishing effect on the hard alloy and low polishing efficiency, and the three processing technologies have advantages respectively, but also have many defects. For example: the traditional single-side grinding and polishing process only can process one side at a time, and for plate parts needing double-side polishing, the defects of multiple working procedures and long processing time exist, so that the polishing efficiency of the plate parts by singly using the single-side grinding and polishing process is extremely low.
The electrochemical machining is a machining mode based on electrochemical reaction of anodic electrochemical dissolution, and the electrochemical reaction of anodic electrochemical dissolution is directly applied to re-machine machined parts so as to improve the surface smoothness of the workpieces. Compared with mechanical polishing, the electrolytic polishing has high efficiency and high precision, is not influenced by the hardness and toughness of materials, is suitable for processing any metal and alloy materials, but has high requirements on process control and equipment for achieving good processing efficiency and surface quality because the related factors in the processing process, such as a flow field of electrolyte, an interelectrode electric field, a temperature field and the like, influence workpieces.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem that a device for grinding a double-sided polishing thin plate by magnetic particles assisted by electrolysis is provided. The electrolysis-assisted magnetic particle grinding double-sided polishing thin plate can ensure the processing efficiency of the hard alloy and the processing quality.
In order to achieve the above object, the utility model adopts the following technical scheme:
the device for grinding the double-sided polished sheet by the electrolysis-assisted magnetic particles comprises a machine tool body, a first magnetic pole, a second magnetic pole, a first motor, a second motor, an electrolyte collecting tank, a reciprocating device, a clamping device and an electrolytic polishing device; the first magnetic pole is clamped on a spindle chuck of a spindle box of a machine tool body, the first motor drives the spindle chuck and the first magnetic pole to rotate, the second magnetic pole is connected with a second motor, the second motor drives the second magnetic pole to rotate, and the rotation axes of the first magnetic pole and the second magnetic pole are the same; the reciprocating device and the second motor are connected with a guide rail of the machine tool body in a sliding mode, the electrolyte collecting tank is connected with the reciprocating device in a sliding mode, the clamping device is fixedly connected in the electrolyte collecting tank, the thin plate is vertically fixedly connected to the clamping device, and the thin plate is located between the first magnetic pole and the second magnetic pole.
The belt conveyor also comprises a small belt wheel, a large belt wheel and a belt; the small belt wheel is directly connected with the first motor, the large belt wheel is connected with a spindle box spindle of the machine tool body, and the large belt wheel is connected with the small belt wheel through a belt.
The reciprocating device comprises a slide rail, a screw rod, a nut and a third motor; the slide rail bottom is equipped with the guide rail groove, and the slide rail slides with lathe bed guide rail and links to each other, and the slide rail top is equipped with the forked tail guide rail with guide rail groove vertically, and the electrolyte collecting vat is equipped with corresponding dovetail with it, and the lead screw is installed on the slide rail, and the screw links to each other with the lead screw thread, and the lead screw links to each other with the third motor, and the third motor drives the electrolyte collecting vat and removes along forked tail guide.
The clamping device comprises a supporting plate, the supporting plate is vertically and fixedly connected in the electrolyte collecting tank, and the thin plate is fixed on the supporting plate through a bolt.
The electrolytic polishing device comprises a hollow copper pipe, a peristaltic pump, an electrolytic polishing corrosion instrument, an electrolytic bath, a cathode wire and an anode wire; the hollow copper pipe is fixedly connected to the supporting plate, the hollow copper pipe is located right above the thin plate, the hollow copper pipe is connected with the cathode wire, the thin plate is connected with the anode wire, the cathode wire and the anode wire are respectively connected to the anode and the cathode of the electrolytic polishing corrosion instrument, the liquid outlet pipe of the peristaltic pump is connected with the inner hole of the hollow copper pipe, and the liquid inlet pipe of the peristaltic pump is connected with the electrolyte tank.
And the liquid outlet pipe and the liquid inlet pipe of the peristaltic pump are both silica gel pipes.
The hollow copper pipe comprises a pipe body and a connecting plate, the connecting plate is located at two ends of the pipe body and fixedly connected to the supporting plate through bolts, a plurality of through holes are formed in the lower portion of the pipe body, the diameter of each hole is 2-20 mm, and the distance between the hollow copper pipe and the thin plate is 10-15 mm.
The first magnetic pole and the second magnetic pole are the same in size and have the magnetic direction of N, S, and the magnetic abrasive is adsorbed on the first magnetic pole and the second magnetic pole.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model makes up the defects of the traditional single processing method, combines the flexible processing of magnetic particle grinding, the processing of which the electrochemistry is not influenced by the hardness of the workpiece, and the processing of which the double-side grinding greatly improves the processing efficiency; firstly, a passive film with lower hardness than the workpiece is formed on the surface of the workpiece through an electrochemical anode dissolution reaction, the dissolution reaction of the anode is weakened due to the presence of the passive film, and the passive film is removed by a magnetic particle grinding method, so that the dissolution of the electrolytic anode is continued.
Adopt two motors to drive the magnetic brush respectively and process two faces around the work piece in the aspect of mechanical structure, greatly improved machining efficiency than traditional processing method, adopt a rectangular frame to be fixed in above with the sheet metal, an electrolyte collecting vat is placed to the sheet metal below, prevents that electrolyte from polluting the machine, has increased machine life.
The utility model discloses the processing range is wide, to the sheet metal class work piece of processing different materials, can use the different electrolyte of ratio to adapt to the work piece that the material performance is different. Similarly, the particle size of the magnetic abrasive particles and the magnitude of the current of the etching apparatus can be set according to the requirements of the workpiece material.
The utility model discloses not only can show the roughness that reduces workpiece surface, can polish the work piece moreover, obtain the higher surface of finishing degree. In addition, the method has the advantages of simple operation, low manufacturing cost, wide trial range, diversified functions, high reliability and the like.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic perspective view of the reciprocating device of the present invention;
FIG. 3 is a schematic view of the three-dimensional structure of the clamping device and the electrolyte collecting tank of the present invention;
FIG. 4 is a schematic view of the installation of the thin plate and the clamping device of the present invention;
FIG. 5 is a schematic front view of the hollow copper tube structure of the present invention;
FIG. 6 is a cross-sectional view taken along line D of FIG. 5;
FIG. 7 is a schematic view of the electrolytic polishing corrosion instrument of the present invention;
fig. 8 is a schematic view of the peristaltic pump of the present invention.
In the figure: 1-machine tool body 2-first magnetic pole 3-second magnetic pole 4-first motor 5-second motor 6-electrolyte collecting tank 7-reciprocating device 8-clamping device 9-electrolytic polishing device 10-thin plate 11-base 21-metal rod 41-small belt wheel 42-large belt wheel 43-belt 51-fixed support 71-sliding rail 72-screw rod 73-screw nut 74-third motor 75-dovetail guide rail 81-supporting plate 91-hollow copper pipe 92-peristaltic pump 93-electrolytic polishing corrosion instrument 94-electrolyte tank 95-cathode wire 96-anode wire 97-liquid outlet pipe 98-inner hole 99-liquid inlet pipe 911-pipe body 912-connecting plate 913-through hole 931 -voltage regulating means 932-voltage display 933-time setting means 934-current regulating means 935-current display 921-peristaltic pump flow switch 922-peristaltic pump pressure button 923-peristaltic pump screen
Detailed Description
Example (b):
the following further describes the embodiments of the present invention with reference to the attached drawings:
as shown in FIG. 1, the device for grinding a double-sided polished sheet by using electrolysis-assisted magnetic particles comprises a machine tool body 1, a first magnetic pole 2, a second magnetic pole 3, a first motor 4, a second motor 5, an electrolyte collecting tank 6, a reciprocating device 7, a clamping device 8 and an electrolytic polishing device 9.
The machine tool body 1 is in the prior art and can adopt a lathe body, the lathe body 1 is fixedly connected on the base 11, the first magnetic pole 2 is fixed on the metal rod 21, the metal rod 21 is clamped on a spindle chuck of a spindle box of the lathe body 1, the machine tool further comprises a small belt wheel 41, a large belt wheel 42 and a belt 43, the small belt wheel 41 is directly connected with the first motor 4, the large belt wheel 42 is connected with a spindle box of the lathe body 1, and the large belt wheel 42 is connected with the small belt wheel 41 through the belt 43. The first motor 4 drives the spindle chuck and the first magnetic pole 2 to rotate, thereby grinding one surface of the thin plate 10.
The second magnetic pole 3 is fixedly connected to an output shaft of the second motor 5, and the second motor 5 drives the second magnetic pole 3 to rotate, so that the other surface of the thin plate 10 is ground. The second motor 5 is fixedly connected to the fixed support 51, a guide rail groove corresponding to the guide rail of the machine tool body 1 is formed in the bottom of the fixed support 51, and the fixed support 51 is installed on the guide rail of the machine tool body 1 and slides along the guide rail to realize axial feeding.
The first magnetic pole 2 and the second magnetic pole 3 are the same in size and have a magnetic direction of N, S, and the magnetic abrasive is adsorbed on the first magnetic pole 2 and the second magnetic pole 3. The first motor 4 drives the first magnetic pole 2 to rotate, the magnetic grinding particles rotate to form a flexible magnetic brush, the second motor 5 drives the second magnetic pole 3 to rotate, the magnetic grinding particles rotate to form the flexible magnetic brush, the rotation axes of the first magnetic pole 2 and the second magnetic pole 3 are the same, the first magnetic pole 2 and the second magnetic pole 3 are located on two sides of the thin plate 10, and double-sided polishing of the thin plate 10 is achieved.
As shown in fig. 2, the reciprocating device 7 includes a slide rail 71, a lead screw 72, a nut 73, and a third motor 74. The bottom of the slide rail 71 is provided with a guide rail groove, the slide rail 71 is connected with a guide rail of the machine tool body 1 in a sliding manner, and the slide rail 71 slides along the guide rail to realize axial movement. Slide rail 71 top is equipped with and guides the vertical forked tail guide rail 75 of groove, and electrolyte collecting tank 6 bottom is equipped with the corresponding dovetail with forked tail guide rail 75, and electrolyte collecting tank 6 installs on forked tail guide rail 75, and lead screw 72 installs on slide rail 71, and screw 73 links to each other with lead screw 72 screw thread, and electrolyte collecting tank 6 bottom rigid coupling is on screw 73, and lead screw 72 links to each other with third motor 74, and third motor 74 drives the lead screw 72 rotatory and then drives electrolyte collecting tank 6 along forked tail guide rail 75 radial movement.
As shown in fig. 3 and 4, the clamping device 8 includes a supporting plate 81, the supporting plate 81 is of a rectangular frame structure, the supporting plate 81 is vertically and fixedly connected in the electrolyte collecting tank 6, the thin plate 10 is fixed on the supporting plate 81 by bolts, the tightness degree of the thin plate 10 is adjusted by tightening nuts, and the thin plate 10 is perpendicular to the bottom surface of the electrolyte collecting tank 6.
As shown in fig. 1 and 5-8, the electropolishing apparatus 9 includes a hollow copper tube 91, a peristaltic pump 92, an electropolishing etcher 93, an electrolyte bath 94, a cathode wire 95, and an anode wire 96. The electropolishing corrosion meter 93 and peristaltic pump 92 are conventional products. The hollow copper tube 91 is transversely and fixedly connected to the supporting plate 81, the hollow copper tube 91 is located right above the thin plate 10, the hollow copper tube 91 is connected with a cathode wire 95, the thin plate 10 is connected with an anode wire 96, the cathode wire 95 and the anode wire 96 are respectively connected to a cathode electrode and an anode electrode of the electrolytic polishing corrosion instrument 93, a liquid outlet tube 97 of the peristaltic pump 92 is connected with an inner hole 98 of the hollow copper tube 91, and a liquid inlet tube 99 of the peristaltic pump 92 is connected with an electrolyte tank 94. The liquid outlet pipe 97 and the liquid inlet pipe 99 of the peristaltic pump 92 are both silica gel pipes.
When the thin plate 10 is polished, the electrolyte is pumped from the electrolyte tank 8 into the inner hole 98 in the hollow copper rod 10 by the peristaltic pump 5 through the liquid outlet pipe 97 and the liquid inlet pipe 99, and the electrolyte in the inner hole 98 flows to the surface of the thin plate 10 through the bottom through hole 913 in the hollow copper pipe 91, so that the electrolyte in the electrolytic process is supplied.
The voltage is adjusted by a voltage adjusting device 931 of the electropolishing etcher 93, and the corresponding voltage is displayed on a voltage display 932, and when the voltage is set, a current adjusting device 934 is not operated, and when the voltage is set, a current display 935 displays 0A, and then a time is set by a time setting device 933. The peristaltic pump 92 is started, the peristaltic pump flow direction switch 921 is adjusted, the peristaltic pump pressure is adjusted through the peristaltic pump pressure button 922, and the peristaltic pump screen 923 displays the corresponding electrolyte flow direction and the corresponding peristaltic pressure.
Starting the first motor 4 and the second motor 5, adsorbing the magnetic grinding materials on the first magnetic pole 2 and the second magnetic pole 3, driving the first magnetic pole 2 to rotate by the first motor 4, then the magnetic grinding particles rotate to form a flexible magnetic brush, the second motor 5 drives the second magnetic pole 3 to rotate, and then the magnetic grinding particles rotate to form a flexible magnetic brush, the first magnetic pole 2 and the second magnetic pole 3 have the same rotation axis, the first magnetic pole 2 and the second magnetic pole 3 are positioned on two sides of the thin plate 10, when polishing, the electrolytic polishing device 9 electrolyzes the surface of the thin plate 10 contacted with the anode line 96 thereof into a passive film with the hardness lower than that of the workpiece matrix, the electrolytic current approaches 0A along with the increase of the thickness of the passive film, under the drive of the first motor 4 and the second motor 5, the flexible magnetic brushes on the two sides of the thin plate 10 remove the passive film, so that the electrolysis can be continued, and the electrolysis is repeated in such a way, thereby achieving the purpose of polishing the surfaces of the thin plate parts with high efficiency and high precision.
The utility model discloses a theory of operation and working process include following step:
1) the first magnetic pole 2 is clamped on a spindle chuck of a spindle box of a machine tool body 1, the second magnetic pole 3 is connected with a second motor 5, a thin plate 10 is vertically fixed on a clamping device 8, and the first magnetic pole 2 and the second magnetic pole 3 are positioned on two sides of the thin plate 10; the position of the reciprocating device 7 and the distance between the first magnetic pole 2 and the thin plate 10 are adjusted by adjusting a machine tool screw, and the distance between the second magnetic pole 3 and the thin plate 10 is adjusted by adjusting the machine tool screw;
2) mixing a magnetic grinding material and a water-based grinding liquid in a volume ratio of 1:2, and uniformly coating the mixture on magnetic heads of a first magnetic pole 2 and a second magnetic pole 3;
3) the hollow copper tube 91 is connected with a cathode wire 95, the thin plate 10 is connected with an anode wire 96, the cathode wire 95 and the anode wire 96 are respectively connected with a cathode and an anode of an electrolytic polishing corrosion instrument 93, a liquid outlet pipe 97 of the peristaltic pump 92 is connected with an inner hole 98 of the hollow copper tube 92, and a liquid inlet pipe 99 of the peristaltic pump 92 is connected with the electrolyte tank 4;
4) the peristaltic pump 92 conveys electrolyte into the hollow copper tube 92 through a conduit, the electrolyte flows to the surface of the thin plate through a through hole 913 in the lower part of the hollow copper tube 92, and after power is supplied, the hollow copper tube 92, the thin plate 10, a conducting wire and the electrolytic polishing corrosion instrument 93 form a closed circuit, so that current passes through the circuit at a passivation potential, and a passivation film is generated on the surface of the thin plate 10; the passivation potential is adjusted in different cathode ring areas according to actual requirements;
5) the two surfaces of the thin plate 10 are both attached to magnetic particle brushes formed by magnetic particles on the magnetic head, the flexible magnetic particle brushes extrude, slide and rotate the two surfaces of the thin plate, and the passivation film is removed by utilizing the mechanical action of the magnetic particles, so that the surface is leveled and polished.
The utility model makes up the defects of the traditional single processing method, combines the flexible processing of magnetic particle grinding, the processing of which the electrochemistry is not influenced by the hardness of the workpiece, and the processing of which the double-side grinding greatly improves the processing efficiency; firstly, a passive film with lower hardness than the workpiece is formed on the surface of the workpiece through an electrochemical anode dissolution reaction, the dissolution reaction of the anode is weakened due to the presence of the passive film, and the passive film is removed by a magnetic particle grinding method, so that the dissolution of the electrolytic anode is continued.
Adopt two motors to drive the magnetic brush respectively and process two faces around the work piece in the aspect of mechanical structure, greatly improved machining efficiency than traditional processing method, adopt a rectangular frame to be fixed in above with the sheet metal, an electrolyte collecting vat is placed to the sheet metal below, prevents that electrolyte from polluting the machine, has increased machine life.
The utility model discloses the processing range is wide, to the sheet metal class work piece of processing different materials, can use the different electrolyte of ratio to adapt to the work piece that the material performance is different. Similarly, the particle size of the magnetic abrasive particles and the magnitude of the current of the etching apparatus can be set according to the requirements of the workpiece material.
The utility model discloses not only can show the roughness that reduces workpiece surface, can polish the work piece moreover, obtain the higher surface of finishing degree. In addition, the method has the advantages of simple operation, low manufacturing cost, wide trial range, diversified functions, high reliability and the like.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (8)
1. The device for grinding the double-sided polished sheet by the electrolysis-assisted magnetic particles is characterized by comprising a machine tool body, a first magnetic pole, a second magnetic pole, a first motor, a second motor, an electrolyte collecting tank, a reciprocating device, a clamping device and an electrolytic polishing device; the first magnetic pole is clamped on a spindle chuck of a spindle box of a machine tool body, the first motor drives the spindle chuck and the first magnetic pole to rotate, the second magnetic pole is connected with a second motor, the second motor drives the second magnetic pole to rotate, and the rotation axes of the first magnetic pole and the second magnetic pole are the same; the reciprocating device and the second motor are connected with a guide rail of the machine tool body in a sliding mode, the electrolyte collecting tank is connected with the reciprocating device in a sliding mode, the clamping device is fixedly connected in the electrolyte collecting tank, the thin plate is vertically fixedly connected to the clamping device, and the thin plate is located between the first magnetic pole and the second magnetic pole.
2. The apparatus for electrolytically assisting magnetic particle grinding of a double-sided polishing sheet as claimed in claim 1, further comprising a small pulley, a large pulley and a belt; the small belt wheel is directly connected with the first motor, the large belt wheel is connected with a spindle box spindle of the machine tool body, and the large belt wheel is connected with the small belt wheel through a belt.
3. The apparatus for electrolytically assisting magnetic particle grinding of a double-sided polishing sheet as claimed in claim 1, wherein the reciprocating means includes a slide rail, a screw, a nut and a third motor; the slide rail bottom is equipped with the guide rail groove, and the slide rail slides with lathe bed guide rail and links to each other, and the slide rail top is equipped with the forked tail guide rail with guide rail groove vertically, and the electrolyte collecting vat is equipped with corresponding dovetail with it, and the lead screw is installed on the slide rail, and the screw links to each other with the lead screw thread, and the lead screw links to each other with the third motor, and the third motor drives the electrolyte collecting vat and removes along forked tail guide.
4. The apparatus of claim 1, wherein the clamping device comprises a supporting plate vertically fixed in the electrolyte collecting tank, and the thin plate is fixed to the supporting plate by bolts.
5. The device for grinding the double-sided polished sheet by the electrolysis-assisted magnetic particles according to claim 1 or 4, wherein the electrolytic polishing device comprises a hollow copper tube, a peristaltic pump, an electrolytic polishing corrosion instrument, an electrolyte tank, a cathode wire and an anode wire; the hollow copper pipe is fixedly connected to the supporting plate, the hollow copper pipe is located right above the thin plate, the hollow copper pipe is connected with the cathode wire, the thin plate is connected with the anode wire, the cathode wire and the anode wire are respectively connected to the anode and the cathode of the electrolytic polishing corrosion instrument, the liquid outlet pipe of the peristaltic pump is connected with the inner hole of the hollow copper pipe, and the liquid inlet pipe of the peristaltic pump is connected with the electrolyte tank.
6. The apparatus of claim 5, wherein the liquid outlet and liquid inlet of the peristaltic pump are silicone tubes.
7. The apparatus of claim 5, wherein the hollow copper tube comprises a tube body and connecting plates, the connecting plates are disposed at two ends of the tube body, the connecting plates are fixed to the supporting plate by bolts, a plurality of through holes are formed in the lower portion of the tube body, the diameter of each through hole is 2-20 mm, and the distance between the hollow copper tube and the thin plate is 10-15 mm.
8. The apparatus of claim 1, wherein the first and second magnetic poles are of the same size and have a magnetic direction of N, S, and the magnetic abrasive is attached to the first and second magnetic poles.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202022018164.0U CN212420604U (en) | 2020-09-15 | 2020-09-15 | Device for grinding double-sided polished thin plate by using electrolysis-assisted magnetic particles |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202022018164.0U CN212420604U (en) | 2020-09-15 | 2020-09-15 | Device for grinding double-sided polished thin plate by using electrolysis-assisted magnetic particles |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113681436A (en) * | 2021-09-26 | 2021-11-23 | 温州大学 | Polishing device and polishing method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113681436A (en) * | 2021-09-26 | 2021-11-23 | 温州大学 | Polishing device and polishing method thereof |
| CN113681436B (en) * | 2021-09-26 | 2022-10-21 | 温州大学 | Polishing device and polishing method thereof |
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