CN212388105U

CN212388105U - Cathode drive unit and deposition apparatus for depositing material on substrate

Info

Publication number: CN212388105U
Application number: CN202020398864.4U
Authority: CN
Inventors: 约阿希姆·索尼森; 丹尼尔·谢弗·科皮托; 托比亚斯·伯格曼
Original assignee: Applied Materials Inc
Current assignee: Applied Materials Inc
Priority date: 2020-03-25
Filing date: 2020-03-25
Publication date: 2021-01-22
Anticipated expiration: 2030-03-25

Abstract

The present disclosure provides a cathode drive unit (100) connectable to a cathode assembly (190) and a deposition apparatus (10) for depositing a material on a substrate. The cathode drive unit (100) includes a coolant discharge passage (150). The cathode drive unit (100) includes a first seal (110). A first seal (110) is disposed on a first side of the coolant discharge passage (150). The cathode drive unit (100) comprises a second seal (120). A second seal (120) is disposed on a first side of the coolant discharge passage (150). The first seal (110) and the second seal (120) are disposed on the same side of the coolant discharge passage (150). The cathode driving unit (100) includes a third seal (130), the third seal (130) being located on a second side of the coolant discharge passage (150). The second side is opposite the first side.

Description

Cathode drive unit and deposition apparatus for depositing material on substrate

Technical Field

Embodiments described herein relate to layer deposition by sputtering from a target. In particular, some embodiments relate to sputtering layers on large area substrates. In particular, embodiments described herein relate to a sputter deposition apparatus including one or more cathode assemblies.

Background

In many applications, it is desirable to deposit a thin layer on a substrate. The substrate may be coated in one or more chambers of a coating apparatus. The substrate may be coated in vacuum using vapor deposition techniques.

Several methods are known for depositing materials on a substrate. For example, the substrate may be coated by a Physical Vapor Deposition (PVD) process, a Chemical Vapor Deposition (CVD) process, or a Plasma Enhanced Chemical Vapor Deposition (PECVD) process, etc. Such processes are performed in the processing equipment or processing chamber in which the substrate to be coated is located. A deposition material is provided in the apparatus. Deposition on the substrate can be performed using a variety of materials, as well as oxides, nitrides, or carbides thereof. The coating material can be used in several applications and in several technical fields. For example, substrates for displays are often coated by Physical Vapor Deposition (PVD) processes. Further applications include insulating panels, Organic Light Emitting Diode (OLED) panels, substrates with Thin Film Transistors (TFTs), color filters, or the like.

For PVD processes, the deposition material may be present in the target in a solid phase. By bombarding the target with energetic particles, atoms of the target material (i.e. the material to be deposited) are ejected from the target. Atoms of the target are deposited on the substrate to be coated. In PVD processes, the sputtered material, i.e. the material to be deposited on the substrate, can be arranged in different ways. For example, the target may be made of the material to be deposited, or may have a backing member on which the material to be deposited is fixed. A target comprising a material to be deposited is supported or fixed in a predetermined position in the deposition chamber. In case a rotatable target is used, the target is connected to a rotating shaft or a connecting member connecting the shaft and the target.

Sputtering can be performed using segmented planar, monolithic planar, and rotatable targets. Due to the geometry and design of the cathode, rotatable targets generally have higher utilization and increased operating time compared to planar targets. The use of a rotatable target can extend service life and reduce costs.

Sputtering may be implemented as magnetron sputtering, where a magnet assembly is used to confine the plasma to improve the sputtering conditions. Plasma confinement can be used to adjust the particle distribution of the material to be deposited on the substrate.

During a deposition process, such as a sputtering process, a target used to coat the substrate is heated. To prevent the temperature of the target from rising too much, the target may be cooled during operation of the target. A liquid coolant, such as cooling water, may be used to cool the target. To ensure that coolant remains within the designated cooling circuit of the deposition apparatus, a sealing arrangement may be provided to prevent coolant from penetrating into other components of the apparatus. However, the sealing arrangement may not always work properly, so that leakage of coolant may occur. The leakage may cause damage to the deposition equipment, including, for example, corrosion or shorting. Accordingly, there is a need for an improved sealing arrangement for a deposition apparatus.

SUMMERY OF THE UTILITY MODEL

According to an embodiment, a cathode drive unit connectable to a cathode assembly is provided. The cathode driving unit includes a coolant discharge passage. The cathode driving unit includes a first sealing member. A first seal is disposed on a first side of the coolant discharge passage. The cathode driving unit includes a second sealing member. A second seal is disposed on a first side of the coolant discharge passage. The cathode driving unit includes a third seal member on a second side of the coolant discharge passage. The second side is opposite the first side.

According to an embodiment, the first, second and third seals are ring seals.

According to an embodiment, the first, second and third seals are substantially concentric seals.

According to an embodiment, the first, second and third seals are stationary seals.

According to an embodiment, the first, second and third seals are arranged in sliding contact with a substantially cylindrical rotatable member.

According to an embodiment, the cathode drive unit further comprises a grease storage area storing a quantity of grease configured for lubricating the second seal.

According to an embodiment, the first seal is spaced apart from the second seal with the grease storage area interposed therebetween.

According to an embodiment, the first seal is a primary seal for preventing coolant from reaching the main body portion of the cathode drive unit.

According to an embodiment, the second seal is a secondary seal for preventing coolant from reaching the main body portion of the cathode drive unit if the first seal has been breached.

According to an embodiment, the third seal is a tertiary seal for preventing coolant from reaching the main body portion of the cathode drive unit if the first and second seals have been breached.

According to an embodiment, the coolant discharge channel is configured for discharging the coolant of the cathode assembly.

According to an embodiment, the coolant discharge channel is arranged to discharge coolant that has leaked through the second seal.

According to an embodiment, the coolant discharge channel is arranged to discharge coolant that has leaked through the first and second seals.

According to an embodiment, the coolant discharge channel is in fluid communication with a region between the second seal and the third seal.

According to an embodiment, the coolant discharge channel is a tubular channel having a first end disposed between the second seal and the third seal, wherein the first seal and the second seal are disposed on the same side of the first end.

According to an embodiment, the cathode drive unit is configured to: supplying power to the cathode assembly; or supplying a coolant to the cathode assembly; or driving rotation of the cathode assembly; or any combination of the above.

According to another embodiment, a cathode drive unit connectable to a cathode assembly is provided. The cathode driving unit includes a coolant discharge passage. The cathode driving unit includes first and second sealing members respectively located on first sides of the coolant discharge passages. The cathode drive unit includes a grease storage area that stores a quantity of grease to lubricate the second seal.

According to another embodiment, a deposition apparatus for depositing a material on a substrate is provided. The deposition apparatus includes a cathode assembly. The cathode assembly has a housing for a coolant. The deposition apparatus includes a cathode driving unit. The cathode driving unit supports the cathode assembly. The cathode driving unit includes a coolant discharge passage. The cathode driving unit includes a first sealing member and a second sealing member. First and second seals are respectively disposed on first sides of the coolant discharge channels. The first and second seals separate the coolant discharge passage from the housing. The cathode drive unit includes a quantity of grease stored in a grease storage region between the first seal and the second seal. The cathode driving unit includes a third seal disposed on a second side of the coolant discharge passage, the second side being opposite to the first side.

According to an embodiment, the cathode assembly comprises a target having a curved surface, said target being rotatable around a target rotation axis.

Drawings

More particularly, a full and enabling disclosure is set forth to one of ordinary skill in the art in the remainder of the specification, including the accompanying figures, in which:

fig. 1 illustrates a deposition apparatus including a cathode drive unit having a first seal, a second seal, and a third seal according to embodiments described herein;

fig. 2 shows an example of a first seal of a cathode drive unit according to embodiments described herein;

FIG. 3 illustrates a deposition apparatus including a cathode drive unit in which an amount of grease is provided for lubricating a second seal, according to embodiments described herein;

fig. 4 shows an example of a first seal and a second seal of a cathode drive unit according to embodiments described herein, wherein an amount of grease is provided between the first seal and the second seal;

FIG. 5 illustrates a deposition apparatus including a cathode drive unit according to embodiments described herein; and

fig. 6-7 illustrate a deposition apparatus according to embodiments described herein.

Detailed Description

Reference will now be made in detail to the various embodiments, one or more examples of which are illustrated in the figures. In the following description of the drawings, like reference numerals designate like parts. Generally, only the differences with respect to the respective embodiments are described. Each example is provided by way of illustration and is not meant as a limitation. Furthermore, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a further embodiment. The description is intended to include such modifications and alterations.

The figures are schematic drawings which are not drawn to scale. Some elements in the figures may have exaggerated dimensions in order to highlight various aspects of the present disclosure and/or for clarity of presentation.

Embodiments described herein relate to a deposition apparatus for depositing a material on a substrate. In a deposition process or coating process, a layer of target material is deposited on a substrate. Coating a substrate with the material. The terms "coating process" and "deposition process" are used synonymously herein.

A deposition apparatus according to embodiments described herein may be configured for deposition on a vertically oriented substrate. The term "vertically oriented" may include substrates arranged with a small deviation from a perfectly vertical state, for example there may be an angle of up to 10 ° or even 15 ° between the substrate and the perfectly vertical direction.

Deposition apparatus according to embodiments described herein may be configured for deposition on large area substrates.

The substrates described herein may be large area substrates. The term "substrate" as used herein includes substrates commonly used in display manufacturing. For example, the substrate described herein may be a substrate typically used for LCDs (liquid crystal displays), OLED panels, and the like. For example, the large area substrate may be GEN 4.5, corresponding to about 0.67m²A substrate (0.73 × 0.92 m); GEN 5, corresponding to about 1.4m²A substrate (1.1m × 1.3 m); GEN 6, corresponding to about 2.8m²A substrate (1.85m × 1.5 m); GEN 7.5, corresponding to about 4.29m²A substrate (1.95m × 2.2 m); GEN 8.5, corresponding to about 5.7m²A substrate (2.2m × 2.5 m); or even GEN 10, corresponding to about 8.7m²Substrate (2.85m × 3.05 m). Even larger generations, such as GEN 11 and GEN 12 and corresponding substrate areas, may similarly be achieved.

The term "substrate" as used herein shall specifically include substantially inflexible substrates, such as wafers, slices of transparent crystals such as sapphire or the like, or glass plates. In particular, the substrate may be a glass substrate and/or a transparent substrate. The present disclosure is not so limited and the term "substrate" may also include flexible substrates such as webs or foils. The term "substantially inflexible" is understood to be distinguished from "flexible". In particular, the substantially inflexible substrate may have a degree of flexibility, e.g., a glass plate having a thickness of 0.51mm or less, wherein the substantially inflexible substrate is less flexible than the flexible substrate.

A deposition apparatus according to embodiments described herein may comprise one or more cathode assemblies, in particular a plurality of cathode assemblies. A cathode assembly is to be understood as an assembly suitable for use as a cathode in a coating process such as a sputter deposition process.

The cathode assembly according to embodiments described herein may be a rotatable cathode assembly. The cathode assembly may comprise a target, in particular a rotatable target. The rotatable target may be rotatable about an axis of rotation of the rotatable target. The rotatable target may have a curved surface, for example a cylindrical surface. The rotatable target is rotatable about an axis of rotation, which is the axis of the cylinder or tube. The cathode assembly can include a backing tube. A target material forming a target, which may comprise a material to be deposited onto a substrate during a coating process, may be mounted on the backing tube. Alternatively, the target material may be shaped as a tube without being disposed on the backing tube.

The cathode assembly may include a magnet assembly. The magnet assembly may be disposed in an interior region of the cathode assembly. The magnet assembly may be surrounded by the target. The magnet assembly may be arranged such that the target sputtered by the cathode assembly is sputtered towards the substrate. The magnet assembly may generate a magnetic field. The magnetic field may cause one or more plasma regions to form in the vicinity of the magnetic field during the sputter deposition process. The position of the magnet assembly within the cathode assembly affects the direction in which the target material is sputtered off the cathode assembly during the sputter deposition process.

In operation, an uncooled cathode assembly, and in particular, an uncooled magnet assembly of a cathode assembly, may become heated as the magnet assembly is surrounded by the target material that is bombarded by ions. The resulting impact causes heating of the cathode assembly. In order to maintain the magnet assembly at a suitable operating temperature, cooling of the cathode assembly, in particular of the target and the magnet assembly, may be provided.

A deposition apparatus according to embodiments described herein may be configured for vacuum deposition. The deposition apparatus may comprise a process chamber, in particular a vacuum chamber. The cathode assemblies described herein or at least a portion of the cathode assemblies can be disposed in a process chamber.

Fig. 1 shows a cross section of a deposition apparatus 10 comprising a cathode drive unit 100 according to embodiments described herein.

According to an embodiment, a cathode driving unit 100 connectable to the cathode assembly 190 is provided. The cathode driving unit 100 includes a coolant discharge passage 150. The cathode driving unit 100 includes a first sealing member 110. The first seal 110 is disposed on a first side of the coolant discharge passage 150. The cathode driving unit 100 includes a second sealing member 120. The second seal 120 is disposed on a first side of the coolant discharge passage 150. The first seal 110 and the second seal 120 are disposed on the same side of the coolant discharge passage 150. The cathode driving unit 100 includes a third sealing member 130, and the third sealing member 130 is located on a second side of the coolant discharge passage 150. The second side is opposite the first side.

The cathode driving unit 100 may be configured to support the cathode assembly 190. For example, the cathode assembly 190 may have or be mounted to a flange. The flange may be mounted on the cathode driving unit 100.

The cathode drive unit 100 may be adapted to be mounted to a non-rotating component of the deposition apparatus 10, typically to a wall, baffle or door.

The cathode driving unit 100 may be configured to supply power to the cathode assembly 190. The cathode drive unit 100 may include or be connectable to a power source for supplying power to the cathode assembly 190. Additionally or alternatively, the cathode drive unit 100 may be configured to supply water or coolant to the cathode assembly 190 and/or the coolant receiving casing 20 described herein. The cathode drive unit 100 may include or may be connected to a water or coolant supply for supplying water or coolant to the cathode assembly 190. Additionally or alternatively, the cathode drive unit 100 may be configured to drive rotation of the cathode assembly 190. The cathode driving unit 100 may include an actuator for driving the rotation of the cathode assembly 190. The cathode drive unit 100 may be configured to perform any combination of the above-described functions.

The cathode drive unit 100 described herein may be referred to as an end block or cathode drive block.

The cathode drive unit 100 described herein may be disposed below the cathode assembly 190. The cathode drive unit 100 may have a body portion 102 or body. The body portion 102 may have a hollow space inside. The cathode drive unit 100, and in particular the body portion 102, may be configured to remain stationary during rotation of the target of the cathode assembly 190. The target can be configured to rotate relative to the cathode drive unit 100, and in particular relative to the body portion 102. The cathode driving unit 100 does not rotate together with the target.

The cathode assembly 190 described herein can include a target. During operation of the cathode assembly 190, such as during a coating process, in which material from the target is deposited on the substrate, the cathode assembly 190, and in particular the target, may be subjected to heating. The deposition apparatus 10 according to embodiments described herein may include a coolant receiving housing 20. The coolant receiving housing 20 may be configured to receive a coolant 22. The coolant-receiving casing 20 with the coolant 22 may be configured to cool the target of the cathode assembly 190. The coolant receiving housing 20, which may be configured with a coolant 22, may be configured for cooling the cathode assembly 190, and in particular the target, during a deposition process, such as during a sputtering process.

The coolant 22 described herein may be configured to cool the cathode assembly 190. The coolant 22 may be configured to cool the magnet assembly of the cathode assembly 190. The magnet assembly may be arranged in an inner region of the cathode assembly, e.g. in a hollow region surrounded by the target. The coolant 22 may be a liquid coolant, such as, for example, water, and more specifically, cooling water. Other liquid coolants suitable for cooling the cathode assembly 190 may also be used.

For example, as shown in fig. 1, at least a portion of the coolant receiving casing 20 may be located inside the cathode assembly 190. At least a portion, in particular a major portion, of the coolant receiving casing 20 may be surrounded by the curved surface, in particular the tubular surface, of the cathode assembly 190. The curved surface can be a curved surface of a target of the cathode assembly 190.

For example, as shown in fig. 1, a portion of the coolant receiving casing 20 may be located outside the cathode assembly 190, specifically below the cathode assembly 190. According to embodiments described herein, the portion of the coolant receiving housing 20 located outside the cathode assembly 190 may be located inside the cathode drive unit 100. The cathode driving unit 100 may support the cathode assembly 190. The portion of the coolant receiving casing 20 located inside the cathode assembly 190 may be larger in volume than the remaining portion of the coolant receiving casing 20 located outside the cathode assembly 190.

The cathode assembly 190 described herein may be a rotatable cathode assembly. The cathode assembly 190 may have a rotation axis 180 extending in a first direction 182. The cathode assembly 190 may be rotatable about the rotation axis 180. The rotation axis 180 may be a vertical rotation axis. The coolant receiving housing 20 may be a longitudinal housing having a length along the first direction 182. At least a portion of the coolant receiving casing 20 may extend in the first direction 182 a length that is 60% or more of the length of the cathode assembly 190 in the first direction 182. The coolant receiving shell 20 can be configured to cool the target of the cathode assembly 190 over substantially the entire length of the target in the first direction 182.

The coolant receiving casing 20 described herein may be tubular in a direction parallel to the axis of rotation of the cathode assembly 190.

The cathode driving unit 100 according to the embodiments described herein includes a first sealing member 110. The first seal 110 may engage a portion of the cathode assembly 190. The first seal 110 may be configured to prevent the coolant 22 from flowing out of the coolant receiving housing 20.

The first seal 110 described herein may be configured to prevent exchange of liquids, such as, for example, coolant, bearing grease, and vacuum lubricant, between the coolant receiving housing 20 and the main body portion 102 of the cathode drive unit 100. For example, the first seal 110 may be configured to prevent coolant from the coolant receiving housing 20 from reaching the body portion 102. Further, penetration of grease into the coolant receiving housing system is avoided.

The first seal 110 described herein can be configured to remain in a fixed position during rotation of the target of the cathode assembly 190. The first seal 110 may be a stationary seal.

Fig. 2 illustrates an example of the first seal 110 described herein.

For example, as shown in fig. 2, the first seal 110 described herein may have a first side 202 (or first surface) facing the interior of the coolant receiving housing 20. The first seal 110 may have a second side 204 (or second surface) opposite the first side 202. The first side 202 may be separated from the second side 204 by a side surface or thickness of the first seal 110. The first side 202 and the second side 204 may be opposing annular surfaces of an annular first seal.

The first side 202 of the first seal 110 may be configured to contact the coolant 22 in the coolant receiving housing 20. If the first seal 110 is not functioning properly, the second side 204 of the first seal 110 may not be in contact with the coolant 22 of the coolant receiving housing 20. The first side 202 of the first seal 110 may be the wet side of the first seal 110. The second side 204 of the first seal 110 may be the dry side of the first seal 110.

For example, as shown in fig. 1, the cathode driving unit 100 according to embodiments described herein includes a second sealing member 120. The second seal 120 may engage a portion of the cathode assembly 190.

The second seal 120 may be spaced apart from the first seal 110. The second seal 120 may be spaced from the first seal 110 in a direction parallel to the axis of rotation 180 of the cathode assembly 190, such as the first direction 182 described herein.

The second seal 120 described herein can be configured to remain in a fixed position during rotation of the target of the cathode assembly 190. The second seal 120 may be a stationary seal.

The first seal 110 and the second seal 120 may be held in a fixed position relative to each other during rotation of the target of the cathode assembly 190. During rotation of the target of the cathode assembly 190, the first seal 110 and/or the second seal 120 may remain in a fixed position relative to the body portion 102 of the cathode drive unit 100.

The first seal 110 may be disposed in a position for contact with the coolant in the coolant receiving housing 20. The second seal 120 may be arranged on the rear side of the first seal 110, i.e. on the dry side of the first seal 110. If the first seal 110 does not operate fail, the second seal 120 may not be in contact with the coolant 22 in the coolant receiving housing 20.

The first seal 110 may be a primary seal. The second seal 120 may be a secondary seal. In the event of a failure (i.e., a breach) of the first seal 110, coolant may leak through the first seal, i.e., from the coolant receiving housing 20. The second seal 120 may be a secondary seal to prevent exchange of liquid between the coolant receiving housing 20 and the main body portion 102 of the cathode drive unit 100 in the event of a failure of the first seal 110 (i.e., the primary seal). The second seal 120 may be a backup seal in the event of a breach of the primary seal, i.e., in the event of leakage of coolant from the coolant receiving housing 20 through the first seal 110. The second seal 120 provides the advantage that the coolant receiving housing 20 continues to be sealed even in the event of a leak in the first seal 110. Production can continue without interruption.

The first seal 110 may be a primary seal for preventing the coolant 22 from reaching the body portion 102 of the cathode drive unit 100. The second seal 120 may be a secondary seal for preventing the coolant 22 from reaching the body portion 102 of the cathode drive unit 100 if the first seal 110 has been breached.

For example, as shown in fig. 1, the cathode driving unit 100 according to the embodiment described herein includes a coolant discharge passage 150. The coolant discharge passage 150 is configured to discharge the coolant of the cathode assembly 190. The coolant discharge passage 150 is arranged to discharge the coolant that has leaked through the second seal 120. The coolant discharge passage 150 may be arranged to discharge the coolant that has leaked through the first and

second seals

110 and 120.

For example, as shown in FIG. 1, the first seal 110 and the second seal 120 are disposed on the same side of the coolant discharge passage 150, i.e., the first side of the coolant discharge passage 150 as described herein. For example, both the first and

second seals

110, 120 may be disposed below the coolant discharge passage 150. The second seal 120 may have a first side and a second side, the second side being opposite the first side. The first seal 110 may be located on a first side of the second seal 120. The coolant discharge channel 150 may be located on a second side of the second seal 120. The second seal 120 may be disposed between the first seal 110 and the coolant discharge passage 150.

The coolant discharge passage 150 is separated from the coolant receiving housing 20 by the first and

second seals

110 and 120. The first and

second seals

110 and 120 prevent coolant from the coolant receiving housing 20 from reaching the coolant discharge passage 150.

For example, as shown in fig. 1, the coolant discharge passage 150 may be in fluid communication with a region at the second side of the second seal 120. If the second seal 120 is not operating with a failure, no coolant flows into the coolant discharge passage 150.

The coolant discharge passage 150 described herein may be a conduit, a tubular passage, or a tube. The coolant discharge passage 150 may have a first end and a second end, the second end being opposite the first end. Fluid may flow through the coolant discharge passage 150 from the first end to the second end. The first end may be located in an area adjacent the second seal 120. The second end may be located in a region outside the cathode driving unit 100. The coolant discharge passage 150 may allow the coolant, which has leaked through the second seal 120, to be discharged to a region outside the cathode driving unit 100.

At least a portion of the coolant discharge passage 150 may be a portion of the main body portion 102 of the cathode drive unit 100. At least a portion of the coolant discharge passage 150 may be disposed in a tubular recess in the body portion 102.

In the event of a failure (i.e., a breach) of the first seal 110 or the primary seal, coolant may leak through the first seal, i.e., from the coolant receiving housing 20. The second seal 120 may be a secondary seal to prevent exchange of liquid between the coolant receiving housing 20 and the main body portion 102 of the cathode drive unit 100 in the event of a failure of the first seal 110 (i.e., the primary seal). In the event of a failure of the first and

second seals

110, 120, coolant may leak from the coolant receiving housing 20 through the first seal 110 and through the second seal 120. The leakage of coolant from the coolant receiving housing 20 through the first seal 110 and through the second seal 120 is illustrated by the arrows 5 in fig. 1. The coolant discharge passage 150 may be configured to receive coolant that has leaked through the first seal 110 and through the second seal 120. The leaked coolant may flow from the second seal 120 into the coolant discharge passage 150. The coolant discharge passage 150 may convey leaked coolant away from the second seal 120, for example, to a location where the leaked coolant may be safely disposed of. By configuring the coolant discharge passage 150 to receive leaked coolant, the leaked coolant does not come into contact with other components of the system. An advantage is that possible damage, such as corrosion or short circuits, caused by leaked coolant can be avoided.

For example, as shown in fig. 1, the cathode driving unit 100 according to embodiments described herein may include a third seal 130. The third seal 130 may engage a portion of the cathode assembly 190.

The third seal 130 may be spaced apart from the second seal 120. The third seal 130 may be spaced from the second seal 120 in a direction parallel to the axis of rotation 180 of the cathode assembly 190, such as the first direction 182 described herein.

The third seal 130 described herein can be configured to remain in a fixed position during rotation of the target of the cathode assembly 190. The third seal 130 may be a stationary seal.

The first, second, and

third seals

110, 120, 130 described herein may be stationary seals.

The first seal 110, the second seal 120, and the third seal 130 may be held in a fixed position relative to one another during rotation of the target of the cathode assembly 190. During rotation of the target of the cathode assembly 190, the first seal 110, the second seal 120, and/or the third seal 130 may remain in a fixed position relative to the body portion 102 of the cathode drive unit 100.

The third seal 130 may be arranged on the rear side of the second seal 120, i.e. on the dry side of the second seal 120. If the second seal 120 does not operate fail, the third seal 130 may not be in contact with the coolant 22 in the coolant receiving housing 20.

The first seal 110 described herein may be a primary seal to prevent exchange of liquid between the coolant receiving housing 20 and the body portion 102 of the cathode drive unit 100 described herein. The second seal 120 described herein may be a secondary seal to prevent exchange of liquid between the coolant receiving housing 20 and the body portion 102 of the cathode drive unit 100 in the event of a primary seal failure. The third seal 130 described herein may be a three-stage seal to prevent exchange of liquid between the coolant receiving housing 20 and the main body portion 102 of the cathode drive unit 100 in the event of failure of both the first seal 110 and the second seal 120.

The third seal 130 may be a tertiary seal for preventing the coolant 22 from reaching the body portion 102 of the cathode drive unit 100 if the first and

second seals

110, 120 have been breached.

For example, as shown in FIG. 1, the coolant discharge passage 150 may be in fluid communication with a region between the second seal 120 and the third seal 130. If the coolant leaks through the first seal 110 and through the second seal 120, the leaked coolant is discharged by the coolant discharge passage 150. In addition to the second seal 120, which acts as a first backup seal, the third seal 130 acts as a further backup seal. The third seal 130 provides the advantage that the coolant receiving housing 20 continues to be sealed even in the event of a leak in the first and

second seals

110, 120. Production can continue without interruption.

For example, as shown in fig. 1, the coolant discharge passage 150 may have a tubular passage having a first end disposed between the second seal 120 and the third seal 130. The first seal 110 and the second seal 120 may be disposed on the same side of the first end.

The first seal 110 described herein may be an annular seal. The second seal 120 described herein may be an annular seal. The third seal 130 described herein may be an annular seal. The first seal 110, the second seal 120, and the third seal 130 may be substantially concentric annular seals. The first seal 110, the second seal 120, and/or the third seal 130 may be annular seals that extend around the outer periphery of the coolant receiving housing 20.

Fig. 3 shows a deposition apparatus 10 comprising a cathode drive unit 100 according to embodiments described herein.

The first seal 110 may be spaced apart from the second seal 120. An amount of grease 350 may be stored in the grease storage area between the first seal 110 and the second seal 120. For example, the grease 350 may have a volume of 5-10 ml. Grease 350 may be a silicon-based grease. Grease 350 may be stored adjacent the side surface of the second seal 120 facing the first seal 110. For example, as shown in FIG. 3, grease 350 may be stored adjacent to the lower surface of the second seal 120.

The grease 350 may be configured to lubricate the second seal 120. Grease 350 may contact second seal 120. During operation of the cathode drive unit 100, the first seal 110 and the second seal 120 may be in sliding contact with a rotating member, such as the movable component 320 shown in fig. 3. The grease 350 lubricates the second seal 120 to reduce friction between the second seal 120 and the rotating component. Grease 350 may contact the second seal 120 and the rotating member. The grease 350 may provide a grease film between the second seal 120 and the rotating component to reduce friction between the second seal 120 and the rotating component. For example, as shown in fig. 4, the grease 350 may provide a grease film 450 interposed between the second seal 120 and the movable member 320.

The life of the second seal 120 may be extended by the lubrication action of the grease 350. When the quality of the first seal 110 (i.e., the primary seal) at a certain point deteriorates, for example, due to wear, the first seal 110 may be breached. The second seal 120 (i.e., the secondary seal) is still in good condition due to the lubricating action of the grease 350. The second seal 120 may seal the coolant receiving housing 20 for a long time after the first seal 110 has been breached. The coolant receiving housing 20 can be sealed continuously for a long time, i.e. without having to replace one of the seals. The coolant receiving housing 20 is initially sealed by the first seal 110 and subsequently, after the first seal 110 is breached, by the second seal 120, which has an extended life due to the lubricating action of the grease 350.

For example, the embodiments described herein allow the cathode drive unit 100 to operate for up to 3 years before the seal is replaced. In contrast, if the second seal 120 with grease 350 is not used, the seal may need to be replaced or serviced after 1 year.

For example, as shown in fig. 3, the deposition apparatus 10 described herein may include a movable member 320. The movable member 320 may be a rotatable member. The movable member 320 may be configured to rotate about the axis of rotation of the cathode assembly 190. The movable component 320 may be part of a rotatable shaft member of the deposition apparatus 10. The movable member 320 may be configured to rotate with the target of the cathode assembly 190. For example, the movable member 320 may be a rotatable tubular member as described herein. The first seal 110 may provide a seal against a first surface of the movable member 320. The second seal 120 may provide a seal against a first surface of the movable member 320. The third seal 130 may provide a seal against a first surface of the movable member 320. The first seal 110, the second seal 120, and/or the third seal 130 may be in sliding contact with the movable member 320. During rotation of the movable member 320, a first surface of the movable member 320 may be in sliding contact with the first seal 110 and/or the second seal 120 and/or the third seal 130.

The movable member 320 described herein may be a substantially cylindrical member, particularly a rotatable substantially cylindrical member. The movable member 320 may be substantially cylindrical in a direction parallel to the rotation axis 180 of the cathode assembly 190. As described herein, the first surface of the movable member 320 may be a curved surface, in particular a substantially cylindrical surface.

The first seal 110, the second seal 120, and the third seal 130 may be configured to be in sliding contact with a substantially cylindrical rotatable member, such as a movable member 320.

Fig. 4 shows a deposition apparatus 10 comprising a cathode drive unit 100 according to embodiments described herein.

According to another embodiment, a cathode drive unit 100 connectable to the cathode assembly 190 is provided. The cathode drive unit 100 includes a coolant discharge passage 150 as described herein. The cathode drive unit 100 includes a first seal 110 and a second seal 120 as described herein. The first and

second seals

110 and 120 are located on a first side of the coolant discharge passage 150, respectively. The cathode drive unit includes a grease storage area that stores an amount of grease 350 as described herein to lubricate the second seal. The first seal 110 may be spaced apart from the second seal 120. The amount of grease 350 may be stored in a grease storage area between the first seal 110 and the second seal 120.

Any aspect, feature, or combination of features described herein with respect to the cathode drive unit also applies to the cathode drive unit 100 shown in fig. 4. In particular, any feature or combination of features shown in fig. 1-3 may be included in the cathode drive unit 100 shown in fig. 4.

According to another embodiment, a deposition apparatus 10 for depositing a material on a substrate is provided. The deposition apparatus 10 includes a cathode assembly 190 as described herein. The cathode assembly 190 has a housing for the coolant 22. The deposition apparatus 10 includes a cathode drive unit 100 as described herein. The cathode driving unit 100 supports a cathode assembly 190. The cathode drive unit 100 includes a coolant discharge passage 150 as described herein. The cathode drive unit 100 includes a first seal 110 and a second seal 120 as described herein. The first and

second seals

110 and 120 are respectively disposed on a first side of the coolant discharge passage 150. The first and

second seals

110 and 120 separate the coolant discharge passage 150 from the housing. The cathode drive unit 100 includes a quantity of grease 350, the grease 350 being stored in a grease storage area between the first seal 110 and the second seal 120 as described herein. The cathode driving unit 100 includes a third seal 130 described herein, and the third seal 130 is disposed on a second side of the coolant discharge passage 150, the second side being opposite to the first side.

The deposition apparatus 10 according to embodiments described herein may be a sputter deposition apparatus. The cathode assembly 190 described herein can be a sputtering cathode assembly. The cathode assembly 190 can include a target as described herein. The target may be rotatable about an axis of rotation of the target. The target may have a curved surface, such as a substantially cylindrical surface. The cathode assembly 190 may include a magnet assembly as described herein. The magnet assembly may be disposed in the cathode assembly 190.

Fig. 6 shows a cross section of a deposition apparatus 10 according to embodiments described herein.

For example, as shown in fig. 6, the cathode drive unit 100 described herein may include a coolant supply channel 610 for supplying a coolant, in particular a cold coolant, as indicated by arrow 612.

For example, as shown in fig. 6, the coolant receiving housing 20 described herein may include a first coolant receiving portion 620 for receiving coolant. The first coolant receiving portion 620 may define a volume. The first coolant receiving portion 620 may be a radially outward portion of the coolant receiving housing 20. The terms "radially outward" and "radially inward" may be defined relative to the axis of rotation of the cathode assembly 190. The first coolant receiving portion 620 may be surrounded by a first rotatable tube 622 of the cathode assembly 190. The movable member 320 may be attached to a first rotatable tube 622. The movable member 320 and the first rotatable tube 622 may be configured to rotate together about the axis of rotation of the cathode assembly 190. The coolant supply channel 610 may be configured to supply a coolant, in particular a cold coolant, to the first coolant receiving portion 620. The coolant supplied by the coolant supply channel 610 may be directed through the first coolant receiving portion 620, as indicated by arrow 624. The coolant may be directed in an upward direction through the first coolant receiving portion 620. The coolant can be directed to the area of the target adjacent to the cathode assembly 190. The coolant may absorb heat as it cools the target and/or magnet assembly.

For example, as shown in fig. 6, the coolant receiving housing 20 described herein may include a second coolant receiving portion 630 for receiving coolant. The second coolant receiving portion 630 may define a volume. The second coolant receiving portion 630 may be downstream of the first coolant receiving portion 620 with respect to the flow of coolant through the coolant receiving housing 20. The second coolant receiving portion 630 may be a radially inward portion of the coolant receiving housing 20. The second coolant receiving portion 630 may be a volume in an interior region of the rotating shaft 632 of the cathode assembly 190. The rotation shaft 632 may be configured to rotate to drive rotation of the target. The coolant, specifically the heated coolant, may be directed through the second coolant receiving portion 630, as indicated by arrow 634. The coolant may be directed in a downward direction through the second coolant receiving portion 630, in particular through the rotation shaft 632. The coolant flowing into the second coolant receiving portion 630 may be a heated coolant, for example, a coolant that has been heated by absorbing heat from the target and/or the magnet assembly during cooling of the target and/or the magnet assembly.

For example, as shown in fig. 6, the cathode drive unit 100 described herein may include a coolant discharge channel 640 for discharging coolant, as indicated by arrow 642. The coolant discharge passage 640 may be fluidly connected with the coolant receiving housing 20. The coolant discharge passage 640 may be configured to receive coolant from the coolant receiving housing 20, and in particular from the second coolant receiving portion 630. The coolant discharge passage 640 may be configured to discharge the received coolant, specifically, the heated coolant.

The coolant discharge passage 640 described herein is different from the coolant discharge passage 150 described herein. The coolant discharge passage 150 is provided for discharging coolant, which has leaked through the seal (i.e., the second seal 120). The coolant discharge passage 150 is separated from the coolant receiving housing 20 by the first and

second seals

110 and 120. During normal operation of the deposition apparatus, i.e., if the first seal 110 does not operate with a failure, no coolant is discharged or exhausted through the coolant discharge passage 150. In contrast, the coolant discharge passage 640 is configured to discharge the coolant during normal operation of the deposition apparatus. The coolant discharge passage 640 is in fluid communication, specifically, directly in fluid communication, with the coolant receiving housing 20. There is no seal separating the coolant discharge passage 640 from the coolant receiving housing 20.

The first seal 110, the second seal 120, and the third seal 130 described herein may be part of a first seal assembly of the deposition apparatus 10. The first seal 110, the second seal 120, and/or the third seal 130 may be located adjacent to the coolant supply passage 610. The deposition apparatus 10 may include a second sealing assembly, as shown in fig. 6. The deposition apparatus 10 may include a seal 652 to prevent coolant from flowing out of the coolant receiving housing 20. For example, as shown in FIG. 6, the seal 652 may be located adjacent to the coolant discharge passage 640. The seal 652 may function similarly to the first seal 110. The seal 652 may be a primary seal, e.g., similar to the first seal 110.

For example, as shown in fig. 6, the cathode drive unit 100 described herein may include a second channel 660 to vent coolant that has leaked through the seal 652. The function of the second channel 660 is similar to that of the coolant discharge channel 150.

For example, as shown in fig. 6, a deposition apparatus 10 according to embodiments described herein may include a second rotatable tubular member 670, the second rotatable tubular member 670 defining at least a portion of a coolant receiving housing. The second rotatable tubular member 670 may be in sliding contact with the seal 652.

For example, as shown in fig. 6, the cathode drive unit 100 described herein can include a seal 654 spaced apart from the seal 652. The second channel 660 may be in fluid communication with the area between the seal 652 and the seal 654. The function of the seal 654 may be similar to the function of the third seal 130 described herein.

The cathode drive unit 100 described herein may comprise a further seal (not shown) between the seal 652 and the seal 654, in particular between the seal 652 and the second channel 660. The further seal may be a secondary seal, similar to the second seal 120 described herein. A quantity of grease, similar to grease 350, may be provided between the seal 652 and the further seal for lubricating the further seal.

Fig. 7 schematically shows a cross section of the deposition apparatus 10 along the rotation axis 180 according to an embodiment. The deposition apparatus 10 may include a process chamber 710 formed by

walls

712 and 714. According to an exemplary embodiment, the rotation axis 180, the target and/or the backing tube are substantially parallel to the wall 712 to which the cathode drive unit is attached. A drop-in configuration of the cathode assembly may be achieved.

For example, as shown in fig. 7, at least one cathode drive unit 100 described herein is mounted to the process chamber 710 such that the body portion 102 of the cathode drive unit 100 is non-rotatable relative to the walls 712 of the process chamber 710. The body portion 102 is typically secured to a baffle or door 730 of the processing chamber 710 via an insulating plate 722. During sputtering, shutter or door 730 is closed. Thus, during sputtering, the body portion 102 is generally stationary, at least non-rotatable. Alternatively, the housing 735 may be secured directly to the wall 712 of the processing chamber 710.

According to an embodiment, the target flange 770 is disposed on the bearing housing 723 and a vacuum is securely mounted to this bearing housing. Typically, an O-ring seal is disposed between the bearing housing 723 and the target flange 770. Since the target flange 770 and the bearing housing 723 are generally non-rotatably coupled to each other, a rotatable target mounted on top of the target flange 723 can be rotated by a rotary drive.

During sputtering, the enclosure is typically not rotated relative to the processing chamber in which sputtering is performed. During sputtering, at least one upper component or target flange 770 is typically disposed outside of the enclosure, i.e., in a low pressure or vacuum environment. In contrast, the interior space of the housing is typically at a normal pressure and/or a higher pressure than the process chamber.

According to an embodiment, the rotary drive 750 (typically an electric drive) is arranged outside the process chamber 710 via a mounting support 752. Rotational drive 750 may also be placed within housing 735. Typically, a rotary drive 750 drives the rotatable target 740 of the cathode assembly via a motor shaft 754, a connected pinion gear (pinion)753, and a chain or toothed belt (not shown) that circulates around the pinion gear 753 and a gear 751, the gear 751 being attached to a bearing housing 723 of the rotor 725 during sputtering. The rotor 725 may be adapted to mechanically support the rotatable target 740.

Typically, the coolant support tube 734 and/or electrical support lines are fed from the coolant supply and exhaust unit 780 and/or electrical support unit through the housing 735 to the exterior of the process chamber 710.

While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.

Claims

1. A cathode drive unit connectable to a cathode assembly, characterized in that the cathode drive unit comprises:

a coolant discharge passage;

a first seal and a second seal, the first and second seals being located on a first side of the coolant discharge channel, respectively; and

a third seal located on a second side of the coolant discharge passage, the second side being opposite the first side.

2. The cathode drive unit as claimed in claim 1, wherein the first, second and third seals are annular seals.

3. The cathode drive unit as claimed in claim 2, wherein the first, second and third seals are substantially concentric seals.

4. The cathode drive unit according to claim 1, wherein the first seal, the second seal, and the third seal are fixed seals.

5. The cathode drive unit of claim 1, wherein the first, second, and third seals are configured to be in sliding contact with a substantially cylindrical rotatable member.

6. The cathode drive unit of claim 1, further comprising a grease storage area storing an amount of grease for lubricating the second seal.

7. The cathode drive unit of claim 6 wherein the first seal is spaced apart from the second seal with the grease storage area interposed therebetween.

8. The cathode drive unit according to claim 1, wherein the first seal is a primary seal for preventing coolant from reaching a main body portion of the cathode drive unit.

9. The cathode drive unit according to claim 1, wherein the second seal is a secondary seal for preventing coolant from reaching a main body portion of the cathode drive unit if the first seal has been breached.

10. The cathode drive unit according to claim 1, wherein the third seal is a tertiary seal for preventing coolant from reaching a main body portion of the cathode drive unit if the first seal and the second seal have been breached.

11. The cathode drive unit according to claim 1, wherein the coolant discharge channel is configured to discharge the coolant of the cathode assembly.

12. The cathode drive unit according to claim 1, wherein the coolant discharge passage is arranged to discharge the coolant that has leaked through the second seal.

13. The cathode driving unit according to claim 1, wherein the coolant discharge passage is arranged to discharge the coolant that has leaked through the first seal and the second seal.

14. The cathode drive unit according to claim 1, wherein the coolant discharge passage is in fluid communication with a region between the second seal and the third seal.

15. The cathode drive unit according to claim 1, wherein the coolant discharge channel is a tubular channel having a first end disposed between the second seal and the third seal, wherein the first seal and the second seal are disposed on a same side of the first end.

16. The cathode drive unit of claim 1, wherein the cathode drive unit is configured to:

supplying power to the cathode assembly; or

Supplying a coolant to the cathode assembly; or

Driving rotation of the cathode assembly; or

Any combination of the above.

17. A cathode drive unit connectable to a cathode assembly, characterized in that the cathode drive unit comprises:

a coolant discharge passage;

a grease storage area storing an amount of grease to lubricate the second seal.

18. The cathode drive unit of claim 17, wherein the first seal is spaced apart from the second seal, wherein the grease storage area is interposed between the first seal and the second seal.

19. A deposition apparatus for depositing a material on a substrate, the deposition apparatus comprising:

a cathode assembly having a casing for a coolant;

a cathode drive unit supporting the cathode assembly, the cathode drive unit comprising:

a coolant discharge passage;

a first seal and a second seal, the first seal and the second seal being respectively disposed on a first side of the coolant discharge passage, the first seal and the second seal separating the coolant discharge passage from the housing;

a volume of grease stored in a grease storage area between the first seal and the second seal;

a third seal disposed on a second side of the coolant discharge passage, the second side being opposite the first side.

20. The deposition apparatus of claim 19, wherein the cathode assembly comprises a target having a curved surface, the target being rotatable about an axis of rotation of the target.