CN212314912U - Can realize taking off top piece mechanism of getting substrate steadily safely - Google Patents
Can realize taking off top piece mechanism of getting substrate steadily safely Download PDFInfo
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- CN212314912U CN212314912U CN202020258664.9U CN202020258664U CN212314912U CN 212314912 U CN212314912 U CN 212314912U CN 202020258664 U CN202020258664 U CN 202020258664U CN 212314912 U CN212314912 U CN 212314912U
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Abstract
The utility model belongs to the technical field of the vacuum film preparation technique and specifically relates to a can realize taking off top piece mechanism of getting substrate steadily safely, its characterized in that: the top piece mechanism comprises at least one top piece device, the top piece device comprises a plurality of ejector rods and a plurality of suckers, the ejector rods are arranged at intervals, each ejector rod is connected with a cam and can be driven by the cam to lift, transmission fit is formed among the cams, each sucker is connected with a spring rod, and the spring rods are telescopic. The utility model has the advantages that: the substrate is safely and efficiently taken off, the safety of the substrate during taking off operation is ensured, the substrate is prevented from being damaged, and the quality of the substrate is effectively guaranteed; the mechanism has simple and reasonable integral structure, high automation degree and good coordination among the mechanisms, is favorable for industrial production and is suitable for popularization.
Description
Technical Field
The utility model belongs to the technical field of the vacuum film preparation technique and specifically relates to a can realize taking off top piece mechanism of getting substrate steadily safely.
Background
At present, coating equipment requires that a substrate to be coated is fixedly attached to a substrate disc through an adhesive tape on the substrate disc and then is sent into the coating equipment. When the film is formed, the substrate is in a high vacuum environment at the temperature of about 200 ℃, and the substrate vertically performs circular motion. A considerable adhesion between the tape and the substrate is necessary. After film formation, the substrate is fed out of the coating apparatus, and at this time, the substrate needs to be peeled off from the tape of the substrate tray. The thickness of the substrate is generally between 0.2 and 1mm, the substrate is fragile and has large deformation, and the substrate is difficult to stably and safely take off in a general sheet-removing mode and is easy to damage in the sheet-removing process. In addition, when partial film system is coated, the front surface of the substrate is not allowed to contact with a task object, and the difficulty in removing the substrate is increased.
Disclosure of Invention
The utility model aims at providing a can realize taking off the top piece mechanism of getting the substrate safely steadily according to above-mentioned prior art not enough, through the cooperation action of sucking disc and ejector pin, realize taking off the operation to the stable safety of substrate.
The utility model discloses the purpose is realized accomplishing by following technical scheme:
a top piece mechanism capable of stably and safely taking off a substrate is characterized in that: the top piece mechanism comprises at least one top piece device, the top piece device comprises a plurality of ejector rods and a plurality of suckers, the ejector rods are arranged at intervals, each ejector rod is connected with a cam and can be driven by the cam to lift, transmission fit is formed among the cams, each sucker is connected with a spring rod, and the spring rods are telescopic.
The top piece device is connected with a driving device, and the whole top piece device can be lifted and lowered under the connection driving of the driving device.
The contour curves of the cams of the ejector rods are different, so that the requirement that the ejector rods realize sequential jacking action one by one under the driving of the cams of the ejector rods is met.
The height of the sucker is higher than that of the ejector rod.
The suckers are located on the same level, and the ejector rods are located on the same level.
The top piece mechanism comprises a plurality of top piece devices, and the top piece devices are in transmission fit with each other.
The utility model has the advantages that: the substrate is safely and efficiently taken off, the safety of the substrate during taking off operation is ensured, the substrate is prevented from being damaged, and the quality of the substrate is effectively guaranteed; the mechanism has simple and reasonable integral structure, high automation degree and good coordination among the mechanisms, is favorable for industrial production and is suitable for popularization.
Drawings
FIG. 1 is a schematic view of the usage state of the present invention;
fig. 2 is a schematic structural view of the top plate device of the present invention;
FIG. 3 is a schematic view of the transmission connection between the mechanisms of the present invention;
FIG. 4 is a schematic view of a transverse shaft structure of the present invention;
FIG. 5 is a schematic outline view of the cam structures of the present invention;
fig. 6 is a flowchart of the present invention.
Detailed Description
The features of the present invention and other related features are described in further detail below by way of example in conjunction with the accompanying drawings to facilitate understanding by those skilled in the art:
as shown in fig. 1-6, the labels 1-13 are respectively shown as: the device comprises a base plate 1, a substrate 2, a top piece device 3, a hollow part 4, an adhesive tape pasting part 5, a push rod 6, a sucker 7, a spring rod 8, a cam 9, a coupler 10, a driving wheel 11, a synchronous belt, a synchronous wheel 12 and a cam shaft 13.
Example (b): as shown in fig. 1, the top sheet mechanism capable of realizing stable and safe peeling of a glass sheet in this embodiment is used for peeling operation of a base sheet 2 fixed on a base sheet 1. Specifically, as shown in fig. 1, a taping place 5 arranged along the length direction of the substrate 2 is provided on the base plate 1, and the substrate 2 may be bonded at the position of the taping place 5 to be fixed on the base plate 1 to be coated. When the substrate 2 is completely coated, the adhesion between the substrate and the tape 5 needs to be overcome to remove the substrate.
As shown in fig. 1, a hollow 4 is opened on the substrate 1, and the hollow 4 is located between two adjacent tape joints 5 and below the substrate 2. The sheet-lifting device 3 in the embodiment is arranged at the position of the hollow part 7, the sheet-lifting device 3 can lift the substrate 2 by penetrating the hollow part 4 from the lower part of the substrate 2, and the adhesive force between the substrate 2 and the adhesive tape-sticking part 5 is overcome, so that the removal operation of the substrate 2 is completed.
As shown in fig. 2, the top sheet device 3 of the present embodiment includes a top bar 6 and a suction cup 7, which serve as a force applying member for lifting and removing the base sheet 2. In the present embodiment, the top sheet device 3 comprises three top bars 6 and two suction cups 7, and the top bars 6 and the suction cups 7 are arranged in a staggered manner. The number, spacing, layout and other position parameters of the ejector rods 6 and the suckers 7 and the size parameters of the ejector rods 6 and the suckers 7 can be selected according to the shape and size of the substrate 2, so that enough full and stable jacking force can be provided for the substrate 2, and the safety and stability of the substrate 2 during taking off can be ensured.
As shown in fig. 2 and fig. 3, a cam 9 is provided at the lower part of each of the lift pins 6, and each cam 9 can be driven by a cam shaft 13 to rotate and drive the lift pin 6, which is in transmission connection with the cam shaft, to move up and down. As shown in fig. 3, the cams 9 of the three push rods 6 are connected in a transmission fit manner through a synchronous belt and a synchronous wheel 12, so that one cam 9 serves as a driving wheel 11 for power input, and the other cams can synchronously rotate under the driving of the synchronous belt and the synchronous wheel 12. At this time, as shown in fig. 5, since the cams 9 have different profile curves, the lift pins 6 can form different lift rhythms under the driving of the cams 9, so that the lift pins 6 can apply lift force to the substrate 2 in a certain lift sequence to complete the safe and stable lift-off operation of the substrate 2.
In some embodiments, as shown in fig. 4, the cams 9 can also be designed as a drive-fit connection to a transverse camshaft 13, by means of which transverse camshaft 13 the cams 9 are driven in rotation at the same time.
As shown in fig. 2, a spring rod 8 is arranged below each suction cup 7, the spring rod 8 can stretch along the vertical direction of the suction cup 7, and simultaneously drives the suction cup 7 to move up and down within the compression and rebound displacement range, so as to lift the substrate 2. Every sucking disc 7 can be external adsorption equipment respectively, and adsorption equipment accessible sucking disc 7 provides certain adsorption affinity to substrate 2, avoids substrate 2 to take place to walk about under the jacking effect to further guarantee that substrate 2 can be taken off safely and stably.
As shown in fig. 6, before the top sheet device 3 in this embodiment starts to remove the substrate, the three top bars 6 are at the same horizontal position, the two suction cups 7 are at the same horizontal position, and the heights of the two suction cups 7 are higher than the heights of the three top bars 6. The height difference between the ejector rod 6 and the sucker 7 is a set value so as to ensure the lifting height of the substrate 2 after being lifted and uncovered, and meet the requirement of the subsequent stroke range of the wafer taking manipulator.
The top piece device 3 is also connected with a driving device which can drive the top piece device 3 to move up and down integrally so as to realize the uncovering and taking operation of the substrate 2 by matching with the top piece device 3. As shown in fig. 6, the substrate 2 is shown adhered to the tape 5, and the work flow of the lifting operation of the top sheet device 3 includes the following specific steps:
1) in the initial state of the top piece device 3, firstly, the driving device drives to integrally lift the top piece device 3, when the top bar 6 is at a certain distance from the plane of the substrate 2, the driving device stops, and the top bar 6 and the suction cup 7 are located at the position of the hollow 4 shown in fig. 1. Because the height of the sucking disc 7 is higher than that of the mandril 6, the sucking disc 7 is already contacted with the substrate 2, the spring rod 8 connected with the sucking disc 7 is blocked by the substrate 2 and is in a compressed state, and the spring resilience force of the spring rod 8 outputs certain jacking force to the substrate 2. Subsequently, the suction of the suction pad 7 is started by the suction device and a suction force is applied to the substrate 2 to secure the relative positions of the suction pad 7 and the substrate 2.
2) Then, the mandril 6 starts jacking action under the driving of the cam 9; according to the design requirement, the three ejector rods 6 are sequentially jacked, as shown in figure 6, the ejector rod 6 on the left side is jacked firstly, so that the left end of the substrate 2 is firstly stripped from the adhesive tape sticking part 5; along with the jacking of the left ejector rod, the stripping area is gradually increased, and the deformation of the substrate 2 is increased. At the moment, the middle ejector rod positioned in the middle starts to lift so as to avoid the substrate 2 from being broken due to overlarge deformation; with the lifting of the middle ejector rod, the stripping area continues to increase, and finally the right ejector rod positioned at the right end starts to lift, so that the substrate 2 is completely separated from the adhesive tape sticking part 5. In the whole jacking process of the jacking rod 6, the spring rod 8 of the sucker 7 releases the compression all the time, namely, applies jacking force to the substrate 2 until the substrate 2 is completely peeled off, and the spring rod 8 releases the compression completely to lift the substrate 2 to the highest position (the position is the set height difference between the sucker 7 and the jacking rod 6). Meanwhile, the adsorption force of the sucker 7 always exists in the jacking process so as to ensure that the position of the substrate 2 is relatively fixed in the jacking and uncovering process.
3) After the substrate 2 is at the highest position, the mechanical arm for grabbing the substrate 2 is in place, then the vacuum is broken by the sucking disc 7, and the mechanical arm takes away the substrate 2 for standby application, so that the operation process of taking off the substrate 2 from the adhesive tape pasting position 5 is completed.
In the embodiment, in specific implementation: the top piece mechanism comprises a plurality of top piece devices 3 which are arranged in an array, and the number of the top piece devices 3 is matched with the number of the base pieces 2 on the base plate 1. As shown in fig. 3, the top piece devices 3 in the same row but different rows form a transmission fit through the shaft coupling 10, so that the whole top piece mechanism can realize the linkage of each top piece device 3 in the whole top piece mechanism only by taking one cam as a driving wheel, and the whole top piece mechanism forms a modular framework, and has the advantages of simplicity, reasonability, high automation degree and convenience for later maintenance and overhaul.
The driving device for driving the top piece device 3 to ascend and descend integrally can be a component which is used for conventionally providing ascending and descending driving force for an air cylinder, a hydraulic cylinder and the like.
Although the conception and the embodiments of the present invention have been described in detail with reference to the drawings, those skilled in the art will recognize that various changes and modifications can be made therein without departing from the scope of the appended claims, and therefore, the description thereof is not repeated herein.
Claims (6)
1. A top piece mechanism capable of stably and safely taking off a substrate is characterized in that: the top piece mechanism comprises at least one top piece device, the top piece device comprises a plurality of ejector rods and a plurality of suckers, the ejector rods are arranged at intervals, each ejector rod is connected with a cam and can be driven by the cam to lift, transmission fit is formed among the cams, each sucker is connected with a spring rod, and the spring rods are telescopic.
2. A top sheet mechanism for achieving stable and secure removal of a substrate as recited in claim 1, wherein: the top piece device is connected with a driving device, and the whole top piece device can be lifted and lowered under the connection driving of the driving device.
3. A top sheet mechanism for achieving stable and secure removal of a substrate as recited in claim 1, wherein: the contour curves of the cams of the ejector rods are different, so that the requirement that the ejector rods realize sequential jacking action one by one under the driving of the cams of the ejector rods is met.
4. A top sheet mechanism for achieving stable and secure removal of a substrate as recited in claim 1, wherein: the height of the sucker is higher than that of the ejector rod.
5. A top sheet mechanism for achieving stable and secure substrate removal according to claim 4, wherein: the suckers are located on the same level, and the ejector rods are located on the same level.
6. A top sheet mechanism for achieving stable and secure removal of a substrate as recited in claim 1, wherein: the top piece mechanism comprises a plurality of top piece devices, and the top piece devices are in transmission fit with each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020258664.9U CN212314912U (en) | 2020-03-05 | 2020-03-05 | Can realize taking off top piece mechanism of getting substrate steadily safely |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020258664.9U CN212314912U (en) | 2020-03-05 | 2020-03-05 | Can realize taking off top piece mechanism of getting substrate steadily safely |
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| CN212314912U true CN212314912U (en) | 2021-01-08 |
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| CN202020258664.9U Active CN212314912U (en) | 2020-03-05 | 2020-03-05 | Can realize taking off top piece mechanism of getting substrate steadily safely |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112687052A (en) * | 2021-01-25 | 2021-04-20 | 羊婷 | Small stall ordering machine |
| CN113086642A (en) * | 2021-04-10 | 2021-07-09 | 东莞市科靖自动化设备有限公司 | Glass slide slicing device for glass stacking |
-
2020
- 2020-03-05 CN CN202020258664.9U patent/CN212314912U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112687052A (en) * | 2021-01-25 | 2021-04-20 | 羊婷 | Small stall ordering machine |
| CN112687052B (en) * | 2021-01-25 | 2022-08-02 | 南安市英钗工业设计有限公司 | Small stall ordering machine |
| CN113086642A (en) * | 2021-04-10 | 2021-07-09 | 东莞市科靖自动化设备有限公司 | Glass slide slicing device for glass stacking |
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