CN212277163U - 感性耦合边缘刻蚀反应装置 - Google Patents
感性耦合边缘刻蚀反应装置 Download PDFInfo
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- CN212277163U CN212277163U CN202021252850.8U CN202021252850U CN212277163U CN 212277163 U CN212277163 U CN 212277163U CN 202021252850 U CN202021252850 U CN 202021252850U CN 212277163 U CN212277163 U CN 212277163U
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- wafer
- radio frequency
- isolation ring
- etching
- edge
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- 238000005530 etching Methods 0.000 title claims abstract description 101
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 41
- 230000008878 coupling Effects 0.000 title claims abstract description 24
- 238000010168 coupling process Methods 0.000 title claims abstract description 24
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 24
- 230000001939 inductive effect Effects 0.000 title claims abstract description 19
- 238000002955 isolation Methods 0.000 claims abstract description 82
- 239000007789 gas Substances 0.000 claims description 39
- 239000002609 medium Substances 0.000 claims description 15
- 238000005086 pumping Methods 0.000 claims description 13
- 238000001816 cooling Methods 0.000 claims description 10
- 239000011261 inert gas Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 7
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 7
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims 2
- 230000005540 biological transmission Effects 0.000 abstract description 10
- 235000012431 wafers Nutrition 0.000 description 92
- 238000000034 method Methods 0.000 description 21
- 239000006227 byproduct Substances 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000012495 reaction gas Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
Abstract
Description
Claims (20)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202021252850.8U CN212277163U (zh) | 2020-07-01 | 2020-07-01 | 感性耦合边缘刻蚀反应装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202021252850.8U CN212277163U (zh) | 2020-07-01 | 2020-07-01 | 感性耦合边缘刻蚀反应装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN212277163U true CN212277163U (zh) | 2021-01-01 |
Family
ID=73898352
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202021252850.8U Active CN212277163U (zh) | 2020-07-01 | 2020-07-01 | 感性耦合边缘刻蚀反应装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN212277163U (zh) |
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2020
- 2020-07-01 CN CN202021252850.8U patent/CN212277163U/zh active Active
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address |
Address after: 201508 Room 12638, Building 2, No. 293, Weichang Road, Jinshan District, Shanghai Patentee after: Shanghai Bangxin Semiconductor Technology Co.,Ltd. Address before: 201500 room 12638, building 2, 293 Weichang Road, Jinshan District, Shanghai Patentee before: Shanghai Bangxin Semiconductor Equipment Co.,Ltd. |
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CP03 | Change of name, title or address | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Shanghai Lingang Financial Leasing Co.,Ltd. Assignor: Shanghai Bangxin Semiconductor Technology Co.,Ltd. Contract record no.: X2022980020105 Denomination of utility model: Inductively coupled edge etching reaction device Granted publication date: 20210101 License type: Exclusive License Record date: 20221028 |
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EE01 | Entry into force of recordation of patent licensing contract | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Inductively coupled edge etching reaction device Effective date of registration: 20221101 Granted publication date: 20210101 Pledgee: Shanghai Lingang Financial Leasing Co.,Ltd. Pledgor: Shanghai Bangxin Semiconductor Technology Co.,Ltd. Registration number: Y2022980020311 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
EC01 | Cancellation of recordation of patent licensing contract |
Assignee: Shanghai Lingang Financial Leasing Co.,Ltd. Assignor: Shanghai Bangxin Semiconductor Technology Co.,Ltd. Contract record no.: X2022980020105 Date of cancellation: 20231027 |
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EC01 | Cancellation of recordation of patent licensing contract | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20231027 Granted publication date: 20210101 Pledgee: Shanghai Lingang Financial Leasing Co.,Ltd. Pledgor: Shanghai Bangxin Semiconductor Technology Co.,Ltd. Registration number: Y2022980020311 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right |