CN212253984U

CN212253984U - Spliced scanning device

Info

Publication number: CN212253984U
Application number: CN202021300517.XU
Authority: CN
Inventors: 尹爱军; 陈平; 石波; 邢邦丽
Original assignee: Chengdu Zhongke Zhuneng Technology Co ltd
Current assignee: Chengdu Zhongke Zhuneng Technology Co ltd
Priority date: 2020-07-06
Filing date: 2020-07-06
Publication date: 2020-12-29
Anticipated expiration: 2030-07-06

Abstract

The utility model discloses a splicing scanning device, which comprises a base, an outer frame and an inner frame, wherein the inner frame is arranged inside the outer frame at intervals, the top of the inner frame is connected with the upper end of the outer frame through a flexible shaft, and the two ends of the bottom are respectively connected with the lower end of the outer frame through a hinged cross sliding table; y-axis driving components are arranged on two sides of the inner frame along the Y-axis direction respectively, a supporting plate is arranged in the inner frame, and lenses are arranged in the supporting plate; two sides of the supporting plate are respectively connected with a Y-axis driving assembly, and the Y-axis driving assembly drives the supporting plate to linearly move along the Y-axis direction; the outer frame is arranged on the base in a sliding mode and is driven to linearly move along the X-axis direction through the X-axis driving assembly; the left side and the right side of the bottom of the inner frame are respectively and symmetrically provided with an inclined pitching driving assembly. The utility model discloses a four-dimensional adjustment of adjustment frame has been realized to X axle drive assembly, Y axle drive assembly and slope every single move drive assembly, has better practicality.

Description

Spliced scanning device

Technical Field

The utility model belongs to the technical field of adjusting device, concretely relates to concatenation scanning device.

Background

In the sub-aperture splicing technology detection method, the main components of the detection system are an interferometer and an optical adjusting frame, and the interferometer host technology is mature in the continuous development process. Various types of finished interferometers have been produced on the market, and roughly classified into the following types according to structure: newton interferometers, Michelson interferometers, heynerger interferometers, Fizeau interferometers, tayman-Green interferometers. The Sophia interferometer is widely applied to sub-aperture splicing detection because of the advantage of common optical path. With the wide application of CCD cameras and phase shifting techniques, digital phase shifting interferometers are gradually replacing the traditional moire (fringe) interferometers. The mainstream digital phase-shifting type surface-shaped interferometer in the current market is a GPI digital phase-shifting type Fizeau interferometer of AYGO company.

In general, especially under workshop working conditions, in order to reduce random errors in the sub-aperture stitching measurement process, the environmental changes in the whole process should be reduced as much as possible, the measurement is completed in the shortest time, and meanwhile, in the measurement process of a plurality of sub-apertures, the interferometer needs to keep the reference surface basically still. Therefore, in the process of automatically moving the interferometer or the workpiece to finish the sub-aperture measurement, the attitude of the interferometer or the workpiece is not generally adjusted, and the error of the interferometer is not repeatedly calibrated. Therefore, in the measuring process, high requirements are put forward on the movement precision, the stability and the like of the adjusting frame. The research adjusting frame also has important significance for ensuring the measurement precision of the large-aperture optical lens.

Because the inside light path of interferometer can be influenced in the removal of interferometer, realize subaperture concatenation measurement process, wait to detect the component and put on two-dimentional accurate moving platform usually, realize that the interferometer is measured the whole region of optical lens, this has just provided very high requirement to moving platform's precision, especially along with the increase of measuring the bore, two-dimentional linear motion stroke increases, moving platform's design and machining precision are difficult to obtain the assurance, consequently need carry out fine adjustment to the slope of adjustment frame, every single move two directions, in order to guarantee the two-dimentional removal after, wait to detect the straightness and the depth of parallelism of component and satisfy the requirement. On the basis, the X, Y translation, inclination and pitching four-dimensional adjusting frame is designed for detecting the large-caliber optical lens.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a concatenation scanning device aims at realizing the four-dimensional adjustment to optical lens piece.

The utility model discloses mainly realize through following technical scheme: a splicing scanning device comprises a base, an outer frame and an inner frame, wherein the inner frame is arranged inside the outer frame at intervals, the top of the inner frame is connected with the upper end of the outer frame through a flexible shaft, and two ends of the bottom of the inner frame are respectively connected with the lower end of the outer frame through hinged cross sliding tables; y-axis driving components are arranged on two sides of the inner frame along the Y-axis direction respectively, a supporting plate is arranged in the inner frame, and lenses are arranged in the supporting plate; two sides of the supporting plate are respectively connected with a Y-axis driving assembly, and the Y-axis driving assembly drives the supporting plate to linearly move along the Y-axis direction; the outer frame is arranged on the base in a sliding mode and is driven to linearly move along the X-axis direction through the X-axis driving assembly; the left side and the right side of the bottom of the inner frame are respectively and symmetrically provided with an inclined pitching driving assembly.

In order to realize better the utility model discloses, it is further, slope every single move drive assembly includes spherical hinge, electronic jar and rod end joint bearing, rod end joint bearing's both ends are connected with inside casing, electronic jar through spherical hinge respectively.

In order to realize better the utility model discloses, it is further, flexible axle includes interconnect's hinge ball and revolute pair, the revolute pair passes through the hinge ball and is connected with the frame, revolute pair and inside casing connection, the revolute pair rotates around the X axle.

In order to realize better the utility model discloses, it is further, the lens passes through the fixed subassembly dress card of lens on the layer board, the both sides of the fixed subassembly of lens are connected with the layer board through the round pin axle respectively.

In order to better realize the utility model, furthermore, the lens fixing component comprises a lens frame, a lens frame front baffle and a lens frame rear baffle, the lens is arranged in the lens frame and is limited to swing back and forth by the lens frame front baffle and the lens frame rear baffle, nylon layers are respectively arranged on the contact surfaces of the lens and the lens fixing component, and the lens frame front baffle is fixedly connected with the lens frame rear baffle; both ends of the mirror frame are symmetrically provided with fixed ends respectively, and the mirror frame is connected with the supporting plate through the fixed ends.

In order to realize better the utility model discloses, it is further, Y axle drive assembly includes servo motor, screw nut, rail block, the both sides of inside casing are provided with screw nut along Y axle direction rotation respectively, the layer board passes through connecting piece and rail block fixed connection, servo motor drive screw nut rotates, and screw nut linear motion is followed to the slider.

In order to realize better the utility model discloses, it is further, be provided with the slide rail on the base, and the frame passes through rail block and slide rail sliding connection, X axle drive assembly drive slide rail slider is along X axle direction linear motion.

When the utility model is used, the optical plane mirror is clamped on the supporting plate through the supporting components such as the hanging strip; two sides of the supporting plate are fixed on a lead screw nut and a guide rail sliding block of the inner frame; the inner frame is fixed on the outer frame through flexible components such as a spherical hinge, a cross sliding table and the like, the upper end of the inner frame is connected with the upper end of the outer frame through a flexible shaft, and the left side and the right side of the bottom of the inner frame are supported on the outer frame bottom plate through the cross sliding table; the outer frame is arranged on the guide rail slide block of the base.

The outer frame is installed on the base, and the X-axis driving assembly is used for realizing adjustment and accurate positioning of the driving mechanism along the X direction. And the two Y-axis driving components are arranged along the Y direction of the inner frame and used for realizing the adjustment and accurate positioning of the driving supporting plate mechanism along the Y direction. The two tilting and pitching driving components are arranged along the Z direction perpendicular to the inner frame, so that tilting and pitching motions of the mechanism are realized.

X, Y shaft translation 3 active motion structures are the same in composition, are only one sliding pair and provide X, Y direction two-degree-of-freedom motion. The 2 active motion structures of inclining and pitching have the same composition and have 7 degrees of freedom (1 local degree of freedom): one moving pair and two spherical pairs driven by the moving pair. The top end of the inner frame is a passive motion structure composed of flexible shafts and provided with a spherical pair and a revolute pair (rotating around an X axis), and the bottom end of the inner frame is a passive motion structure composed of a cross sliding table and provides X, Z two-direction moving pairs for mechanism motion.

As shown in fig. 4, the inner frame mainly adopts two-point bearing support at the bottom and three-point posture support at the back. In order to adapt to the position and the shape of the inner frame after the angle is changed during the tilting and pitching motion, the back three-point (B, E, F) support and the bottom two-point (G, H) bearing support are designed by flexible hinges. The position B is provided with a flexible shaft which consists of a spherical hinge and a revolute pair; E. the F position is provided with a flexible shaft and a driving device which consists of a spherical hinge, a rod end joint bearing and an electric cylinder; G. the H position is a bearing unit at the bottom of the inner frame and consists of a spherical hinge and a cross sliding table.

The utility model has the advantages that:

(1) the utility model discloses a four-dimensional adjustment of adjustment frame has been realized to X axle drive assembly, Y axle drive assembly and slope every single move drive assembly.

(2) The lens installation component improves the installation stability of the lens through the arrangement of the nylon layer, and has better practicability.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic diagram of a rear side structure of the tiled scanning device;

FIG. 3 is a schematic view of a connection structure of the inner frame;

FIG. 4 is a flow chart of the inner frame tilt and pitch motion;

FIG. 5 is a schematic view of a lens retaining assembly;

FIG. 6 is a schematic structural view of a base;

fig. 7 is a schematic structural view of the inner frame.

Wherein: the spectacle frame comprises a lens fixing component 1, a supporting plate 2, a Y-axis driving component 3, an inner frame 4, an outer frame 6, a base 7, an inclined pitching driving component 8, an X-axis driving component 10, a flexible shaft 11, a cross sliding table 12, a spectacle frame front baffle 13, a spectacle frame rear baffle 14, a nylon layer 15 and a lens 16.

Detailed Description

Example 1:

a splicing scanning device is shown in figures 1, 2, 6 and 7 and comprises a base 7, an outer frame 6 and an inner frame 4, wherein the inner frame 4 is arranged inside the outer frame 6 at intervals, as shown in figure 3, the top of the inner frame 4 is connected with the upper end of the outer frame 6 through a flexible shaft 11, and two ends of the bottom are respectively connected with the lower end of the outer frame 6 through a hinged cross sliding table 12; two sides of the inner frame 4 are respectively provided with a Y-axis driving component 3 along the Y-axis direction, a supporting plate 2 is arranged inside the inner frame 4, and a lens 16 is arranged inside the supporting plate 2; two sides of the supporting plate 2 are respectively connected with a Y-axis driving component 3, and the Y-axis driving component 3 drives the supporting plate 2 to move linearly along the Y-axis direction; the outer frame 6 is arranged on the base 7 in a sliding mode, and the outer frame 6 is driven to linearly move along the X-axis direction through the X-axis driving assembly 10; the left side and the right side of the bottom of the inner frame 4 are respectively and symmetrically provided with an inclined pitching driving assembly 8.

The utility model discloses in the use, as shown in fig. 1, fig. 2, optical lens piece 16 is examined in the installation in the fixed subassembly 1 of optical lens piece, and fixed subassembly hangs, the dress card is on layer board 2 through left and right sides round pin axle, and layer board 2 links firmly through connecting piece and the lead screw and the guide rail of arranging on inside casing 4 to through 3 drive layer boards of Y axle drive assembly 2 along the vertical removal of Y axle with the fixed subassembly 1 of lens. The inner frame 4 and the outer frame 6 are connected through a flexible hinge, a cross sliding table 12 and the like, the left side and the right side of the bottom of the inner frame 4 are symmetrically provided with an inclined driving assembly and a pitching driving assembly, when two groups of driving assemblies are simultaneously extended or shortened, the inner frame 4 drives the lens 16 to do pitching motion, when one driving assembly is extended and the other driving assembly is shortened, the inner frame 4 drives the lens 16 to do inclined motion. The outer frame 6 is made of rectangular steel pipes through bolt connection and spot welding, is fixed on a guide rail slide block of the base 7, and is driven to move horizontally along an X axis by an X axis driving assembly 10 on the base 7. During design, a certain gap is reserved between the inner frame 4 and the outer frame 6, so that the device does not generate interference when the device does tilting and pitching motion. The utility model discloses a four-dimensional adjustment of adjustment frame has been realized to X axle drive assembly 10, Y axle drive assembly 3 and slope every single move drive assembly 8.

Example 2:

this embodiment is optimized on embodiment 1's basis, Y axle drive assembly 3 includes servo motor, screw nut, rail block, the both sides of inside casing 4 rotate along Y axle direction respectively and are provided with screw nut, layer board 2 passes through connecting piece and rail block fixed connection, servo motor drive screw nut rotates, and the slider is along screw nut linear motion.

The utility model discloses in the use, load heavy burden: the pallet 2500kg, the lens holder 1 and the optical lens 16 together amount to 2000kg, and the load is halved since the Y-axis is lifted by two lead screws (as shown in fig. 2, the load should be theoretically small in the case of the design with a weight added, but for safety reasons, the load is the load when no weight is added).

As shown in fig. 6, a slide rail is disposed on the base 7, the outer frame 6 is slidably connected to the slide rail through a slide rail block, and the X-axis driving assembly 10 drives the slide rail block to move linearly along the X-axis direction.

Because the precision of ball screw will be greater than the slip screw far away, and the precision grade that uses the ball screw of grinding is higher. By inquiring the model selection data of the ball screws of various companies, the ball screw of the company THK in Japan is selected first, and the accuracy is selected to be C3 grade.

Other parts of this embodiment are the same as embodiment 1, and thus are not described again.

Example 3:

the present embodiment is optimized based on embodiment 1 or 2, and as shown in fig. 3, the tilt and pitch driving assembly 8 includes a spherical hinge, an electric cylinder, and a rod end joint bearing, and two ends of the rod end joint bearing are respectively connected to the inner frame 4 and the electric cylinder through the spherical hinge. As shown in fig. 4, the inner frame 4 is mainly supported by two-point load-bearing at the bottom and three-point posture at the back. In order to adapt to the position and the shape of the inner frame 4 after the angle is changed during the tilting and pitching motions, the back three-point (B, E, F) support and the bottom two-point (G, H) bearing support are designed by flexible hinges. The position B is provided with a flexible shaft 11 which consists of a spherical hinge and a revolute pair; E. the F position is provided with a flexible shaft 11 + driving device which consists of a spherical hinge, a rod end joint bearing and an electric cylinder; G. the H position is a bearing unit at the bottom of the inner frame 4 and consists of a spherical hinge and a cross sliding table 12.

The rest of this embodiment is the same as embodiment 1 or 2, and therefore, the description thereof is omitted.

Example 4:

the present embodiment is optimized on the basis of any one of embodiments 1 to 3, as shown in fig. 5, the lens 16 is mounted on the supporting plate 2 through the lens fixing assembly 1, and both sides of the lens fixing assembly 1 are respectively connected with the supporting plate 2 through the pin shafts. The lens fixing component 1 comprises a lens frame, a lens frame front baffle 13 and a lens frame rear baffle 14, a lens is arranged in the lens frame and is limited to swing back and forth through the lens frame front baffle 13 and the lens frame rear baffle 14, nylon layers 15 are respectively arranged on contact surfaces of a lens 16 and the lens fixing component 1, and the lens frame front baffle 13 is fixedly connected with the lens frame rear baffle 14; both ends of the mirror frame are symmetrically provided with fixed ends respectively, and the mirror frame is connected with the supporting plate 2 through the fixed ends. The installation stability of lens 16 has been improved through the setting of nylon layer 15 to the lens 16 installation component, has better practicality.

Other parts of this embodiment are the same as any of embodiments 1 to 3, and thus are not described again.

The above is only the preferred embodiment of the present invention, not to the limitation of the present invention in any form, all the technical matters of the present invention all fall into the protection scope of the present invention to any simple modification and equivalent change of the above embodiments.

Claims

1. The spliced scanning device is characterized by comprising a base (7), an outer frame (6) and an inner frame (4), wherein the inner frame (4) is arranged inside the outer frame (6) at intervals, the top of the inner frame (4) is connected with the upper end of the outer frame (6) through a flexible shaft (11), and the two ends of the bottom are connected with the lower end of the outer frame (6) through hinged cross sliding tables (12) respectively; y-axis driving components (3) are respectively arranged on two sides of the inner frame (4) along the Y-axis direction, a supporting plate (2) is arranged inside the inner frame (4), and lenses (16) are arranged inside the supporting plate (2); two sides of the supporting plate (2) are respectively connected with a Y-axis driving component (3), and the Y-axis driving component (3) drives the supporting plate (2) to linearly move along the Y-axis direction; the outer frame (6) is arranged on the base (7) in a sliding mode, and the outer frame (6) is driven to linearly move along the X-axis direction through the X-axis driving assembly (10); the left side and the right side of the bottom of the inner frame (4) are respectively and symmetrically provided with an inclined pitching driving assembly (8).

2. A splicing scanning device according to claim 1, wherein the tilt and tilt driving assembly (8) comprises a spherical hinge, an electric cylinder and a rod end joint bearing, and both ends of the rod end joint bearing are respectively connected with the inner frame (4) and the electric cylinder through the spherical hinge.

3. A tiled scanning arrangement according to claim 1, wherein the flexible shaft (11) comprises a hinge ball and a revolute pair connected to each other, the revolute pair being connected to the outer frame (6) by the hinge ball, the revolute pair being connected to the inner frame (4), the revolute pair being rotatable about the X-axis.

4. A tiled scanning arrangement according to any of the claims 1-3, wherein the lens (16) is mounted on the pallet (2) by means of a lens holder assembly (1), and both sides of the lens holder assembly (1) are connected to the pallet (2) by means of respective pins.

5. The splicing scanning device according to claim 4, wherein the lens fixing component (1) comprises a frame, a frame front baffle (13) and a frame rear baffle (14), the lens is mounted in the frame and is limited from swinging back and forth by the frame front baffle (13) and the frame rear baffle (14), nylon layers (15) are respectively arranged on contact surfaces of the lens (16) and the lens fixing component (1), and the frame front baffle (13) and the frame rear baffle (14) are fixedly connected; both ends of the mirror frame are symmetrically provided with fixed ends respectively, and the mirror frame is connected with the supporting plate (2) through the fixed ends.

6. The splicing scanning device of claim 1, wherein the Y-axis driving assembly (3) comprises a servo motor, a lead screw nut and a guide rail slider, the lead screw nut is rotatably arranged on each of two sides of the inner frame (4) along the Y-axis direction, the supporting plate (2) is fixedly connected with the guide rail slider through a connecting piece, the servo motor drives the lead screw nut to rotate, and the slider linearly moves along the lead screw nut.

7. The splicing scanning device of claim 1, wherein a slide rail is arranged on the base (7), the outer frame (6) is slidably connected with the slide rail through a guide rail slide block, and the X-axis driving assembly (10) drives the slide rail slide block to move linearly along the X-axis direction.