CN212247193U - Optic fibre coating film device based on magnetron sputtering - Google Patents
Optic fibre coating film device based on magnetron sputtering Download PDFInfo
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- CN212247193U CN212247193U CN202021000770.3U CN202021000770U CN212247193U CN 212247193 U CN212247193 U CN 212247193U CN 202021000770 U CN202021000770 U CN 202021000770U CN 212247193 U CN212247193 U CN 212247193U
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Abstract
The application relates to the technical field of optical fiber coating, and discloses an optical fiber coating device based on magnetron sputtering, which comprises: the device comprises a coating chamber, a target component and an optical fiber component; the target assembly comprises a target, a first gear disc fixed at the top end of the target and a second gear disc at the bottom end of the target; the optical fiber assembly comprises a first conduction gear, a second conduction gear, a first optical fiber clamp and a second optical fiber clamp, wherein the first optical fiber clamp and the second optical fiber clamp are used for clamping optical fibers; the first main shaft of the first optical fiber clamp and the first transmission gear realize synchronous transmission through a first belt pulley; the second main shaft of the second optical fiber clamp and the second transmission gear realize synchronous transmission through a second belt pulley; arc-shaped limiting grooves are symmetrically formed in the top and the bottom of the coating chamber, and the first main shaft and the second main shaft can move along the arc-shaped limiting grooves together to change the distance between the optical fiber and the target. When the device disclosed by the above is used for coating the optical fiber, the distance between the target material and the optical fiber can be adjusted in advance, so that the final coating effect is improved.
Description
Technical Field
The application relates to the technical field of optical fiber coating, in particular to an optical fiber coating device based on magnetron sputtering.
Background
Magnetron sputtering is a collision process of incident particles and a target, and the working principle of the magnetron sputtering is that electrons run spirally near the surface of the target by utilizing the interaction of a magnetic field and an electric field, the electrons collide with argon to generate ions, and the generated ions collide with the target surface under the action of the electric field to sputter the target.
At present, a magnetron sputtering technique is often used to coat an optical fiber, and target atoms sputtered from a target material are deposited on the surface of the optical fiber to form a thin film on the surface of the optical fiber. In order to realize uniform coating, some optical fiber coating devices are provided with two gears which are meshed with each other, a target material and an optical fiber are respectively arranged on the gears, and the target material and the optical fiber are controlled by a motor to rotate in the sputtering process, so that a layer of uniform film can be finally formed on the surface of the optical fiber.
In the actual sputtering process, the distance between the target and the optical fiber will affect the coating effect, so to improve the coating effect, the distance between the target and the optical fiber needs to be adjusted to be optimal before sputtering. However, in the conventional optical fiber coating apparatus, the target and the optical fiber are fixed to two gears engaged with each other, and the distance between the target and the optical fiber is not adjustable, and in this case, the final coating effect is affected.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem that in the conventional optical fiber coating device, the target and the optical fiber are respectively fixed on two gears which are meshed with each other, and the distance between the target and the optical fiber is not adjustable, so that the final coating effect is affected, the application discloses an optical fiber coating device based on magnetron sputtering through the following embodiments.
The application discloses in a first aspect, an optical fiber coating device based on magnetron sputtering, includes: the device comprises a coating chamber, a target assembly and an optical fiber assembly, wherein the target assembly and the optical fiber assembly are positioned in the coating chamber;
the target assembly comprises a target, a first gear disc fixed at the top end of the target and a second gear disc fixed at the bottom end of the target, wherein the first gear disc is connected with a motor positioned outside the coating chamber through a transmission shaft;
the optical fiber assembly comprises a first transmission gear meshed with the first gear disc, a second transmission gear meshed with the second gear disc, and a first optical fiber clamp and a second optical fiber clamp which are respectively used for clamping the upper end and the lower end of an optical fiber;
the first optical fiber clamp comprises a first main shaft, the second optical fiber clamp comprises a second main shaft, and the axis of the first main shaft is coincident with the axis of the second main shaft;
the gear shaft of the first transmission gear and the first main shaft realize synchronous transmission through a first belt pulley;
the gear shaft of the second transmission gear and the second main shaft realize synchronous transmission through a second belt pulley;
arc-shaped limiting grooves are symmetrically formed in the top and the bottom of the coating cavity;
the first main shaft penetrates through the arc-shaped limiting groove at the top, the second main shaft penetrates through the arc-shaped limiting groove at the bottom, and the first main shaft and the second main shaft can move along the arc-shaped limiting groove together so as to change the distance between the optical fiber and the target.
Optionally, the apparatus further comprises a distance adjusting assembly located outside the coating chamber;
the distance adjusting assembly comprises a connecting handle, a connecting shaft and a distance adjusting motor, one end of the connecting handle is fixedly connected with one end of the connecting shaft, the connecting handle is perpendicular to the connecting shaft, and the other end of the connecting shaft and a crankshaft of the distance adjusting motor realize synchronous transmission through a third belt pulley;
the top and the bottom of the coating chamber are provided with the distance adjusting assemblies;
the first main shaft penetrates out of one end of the top of the film coating cavity and is fixedly connected with the other end of the connecting handle at the top, the second main shaft penetrates out of one end of the bottom of the film coating cavity and is fixedly connected with the other end of the connecting handle at the bottom, and the first main shaft and the second main shaft are perpendicular to the connecting handle.
Optionally, the device further comprises an industrial personal computer;
the industrial personal computer is used for controlling the distance adjusting motor to rotate according to a preset optimal distance value so as to adjust the distance between the optical fiber and the target material.
Optionally, the first main shaft and the second main shaft are respectively installed in the arc-shaped limiting groove through a first ball bearing.
Optionally, a knob is arranged on the first ball bearing, and when the knob is in a loosening state, the first spindle and the second spindle can move up and down to adapt to the length of the optical fiber.
Optionally, one end of the first main shaft opposite to one end of the second main shaft is connected with a clamping part through threads;
the clamping portion comprises a first clamping block and a second clamping block which are matched with each other to clamp the optical fiber.
Optionally, the top and the bottom of the coating chamber are symmetrically provided with limiting holes;
the gear shaft of the first transmission gear is arranged in the limiting hole at the top, and the gear shaft of the second transmission gear is arranged in the limiting hole at the bottom.
Optionally, the gear shaft of the first transmission gear and the gear shaft of the second transmission gear are respectively mounted in the limiting hole through a second ball bearing.
Optionally, the second gear disc is rotatably mounted at the bottom of the coating chamber through a fixing shaft.
The embodiment of the application discloses an optical fiber coating device based on magnetron sputtering includes: the device comprises a coating chamber, a target component and an optical fiber component; the target assembly comprises a target, a first gear disc fixed at the top end of the target and a second gear disc at the bottom end of the target; the optical fiber assembly comprises a first conduction gear, a second conduction gear, a first optical fiber clamp and a second optical fiber clamp, wherein the first optical fiber clamp and the second optical fiber clamp are used for clamping optical fibers; the first main shaft of the first optical fiber clamp and the first transmission gear realize synchronous transmission through a first belt pulley; the second main shaft of the second optical fiber clamp and the second transmission gear realize synchronous transmission through a second belt pulley; arc-shaped limiting grooves are symmetrically formed in the top and the bottom of the coating chamber, and the first main shaft and the second main shaft can move along the arc-shaped limiting grooves together to change the distance between the optical fiber and the target. When the device disclosed by the above is used for coating the optical fiber, the distance between the target material and the optical fiber can be adjusted in advance, so that the final coating effect is improved. Specifically, the optical fiber can be close to or far away from the target material by controlling the first main shaft and the second main shaft to move along the arc-shaped limiting groove at the same time, so that the purpose of distance adjustment is realized.
Drawings
In order to more clearly explain the technical solution of the present application, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious to those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of an optical fiber coating apparatus based on magnetron sputtering according to an embodiment of the present disclosure;
FIG. 2 is a schematic structural diagram of another magnetron sputtering-based optical fiber coating apparatus disclosed in an embodiment of the present application;
fig. 3 is a schematic structural diagram of a first transmission gear and a first optical fiber clamp in an optical fiber coating device based on magnetron sputtering according to an embodiment of the present application.
In fig. 1-3:
1-a coating chamber, 101-an arc-shaped limiting groove, 102-a limiting hole, 103-a fixed shaft, 11-a target assembly, 111-a target, 112-a first gear plate, 113-a second gear plate, 12-a fiber assembly, 120-a clamping part, 1201-a first clamping block, 1202-a second clamping block, 121-a first transmission gear, 122-a second transmission gear, 123-a first fiber clamp, 1231-a first spindle, 124-a second fiber clamp, 1241-a second spindle, 125-a first belt pulley, 126-a second belt pulley, 127-a first ball bearing, 1271-a knob, 128-a second ball bearing, 13-a distance adjusting assembly, 131-a connecting handle, 132-a connecting shaft, 133-a distance adjusting motor, 134-a third belt pulley, 2-motor.
Detailed Description
In order to solve the technical problem that in the conventional optical fiber coating device, the target and the optical fiber are respectively fixed on two gears which are meshed with each other, and the distance between the target and the optical fiber is not adjustable, so that the final coating effect is affected, the application discloses an optical fiber coating device based on magnetron sputtering through the following embodiments.
The first embodiment of the present application discloses an optical fiber coating device based on magnetron sputtering, referring to fig. 1, the device includes: the device comprises a coating chamber 1, a target assembly 11 and an optical fiber assembly 12, wherein the target assembly 11 and the optical fiber assembly are positioned in the coating chamber 1.
It should be noted that, in order to clearly see the internal structure of the coating chamber, the coating chamber 1 shown in fig. 1 and 2 is a cross-sectional view, and in actual working conditions, the coating chamber 1 is a closed cylindrical cavity.
The target assembly 11 includes a target 111, a first gear plate 112 fixed to a top end of the target 111, and a second gear plate 113 fixed to a bottom end of the target 111, wherein the first gear plate 112 is connected to a motor 2 located outside the coating chamber 1 through a transmission shaft.
The first gear wheel 112 and the second gear wheel 113 are the same size, and have a diameter larger than the cross-sectional diameter of the target 111. When the motor 2 rotates, the two gear discs can directly drive the middle target 111 to rotate, so that the magnetron sputtering efficiency is higher and the effect is better.
The optical fiber assembly 12 includes a first transmission gear 121 engaged with the first gear plate 112, a second transmission gear 122 engaged with the second gear plate 113, and a first fiber clamp 123 and a second fiber clamp 124 for clamping the upper and lower ends of the optical fiber, respectively. Wherein the first transmission gear 121 and the second transmission gear 122 have the same size.
The first fiber clamp 123 includes a first spindle 1231, and the second fiber clamp 124 includes a second spindle 1241, where the axis of the first spindle 1231 coincides with the axis of the second spindle 1241.
Synchronous transmission is realized between the gear shaft of the first transmission gear 121 and the first main shaft 1231 through the first belt pulley 125.
The gear shaft of the second transmission gear 122 and the second main shaft 1241 realize synchronous transmission through the second pulley 126.
Arc-shaped limiting grooves 101 are symmetrically formed in the top and the bottom of the coating chamber 1.
The first spindle 1231 penetrates through the arc-shaped limiting groove 101 at the top, the second spindle 1241 penetrates through the arc-shaped limiting groove 101 at the bottom, and the first spindle 1231 and the second spindle 1241 can move along the arc-shaped limiting groove 101 together to change the distance between the optical fiber and the target 111.
In the embodiment of the present application, the first pulley 125 and the second pulley 126 are utilized to adjust the positions of the first optical fiber clamp 123 and the second optical fiber clamp 124, and the first spindle and the second spindle can move along the arc-shaped limiting groove by providing the arc-shaped limiting groove, so as to change the distance between the optical fiber and the target.
The embodiment of the application discloses an optical fiber coating device based on magnetron sputtering includes: the device comprises a coating chamber, a target component and an optical fiber component; the target assembly comprises a target, a first gear disc fixed at the top end of the target and a second gear disc at the bottom end of the target; the optical fiber assembly comprises a first conduction gear, a second conduction gear, a first optical fiber clamp and a second optical fiber clamp, wherein the first optical fiber clamp and the second optical fiber clamp are used for clamping optical fibers; the first main shaft of the first optical fiber clamp and the first transmission gear realize synchronous transmission through a first belt pulley; the second main shaft of the second optical fiber clamp and the second transmission gear realize synchronous transmission through a second belt pulley; arc-shaped limiting grooves are symmetrically formed in the top and the bottom of the coating chamber, and the first main shaft and the second main shaft can move along the arc-shaped limiting grooves together to change the distance between the optical fiber and the target. When the device disclosed by the above is used for coating the optical fiber, the distance between the target material and the optical fiber can be adjusted in advance, so that the final coating effect is improved. Specifically, the optical fiber can be close to or far away from the target material by controlling the first main shaft and the second main shaft to move along the arc-shaped limiting groove together, so that the purpose of distance adjustment is realized.
In an implementation manner, a technician can manually control the first main shaft 1231 and the second main shaft 1241 to move along the arc-shaped limiting groove 101 according to a pre-obtained optimal distance value, so as to achieve the purpose of adjusting the distance.
In another implementation, in order to improve the accuracy of the distance adjustment, the distance adjustment can be implemented using an automatic control method, and based on this, referring to fig. 2, the apparatus further comprises a distance adjustment assembly 13 located outside the coating chamber 1.
The distance adjusting assembly 13 comprises a connecting handle 131, a connecting shaft 132 and a distance adjusting motor 133, wherein one end of the connecting handle 131 is fixedly connected with one end of the connecting shaft 132, the connecting handle 131 is perpendicular to the connecting shaft 132, and the other end of the connecting shaft 132 is in synchronous transmission with a crankshaft of the distance adjusting motor 133 through a third belt pulley 134.
The top and the bottom of the coating chamber 1 are provided with the distance adjusting components 13.
One end of the first main shaft 1231 penetrating through the top of the coating chamber 1 is fixedly connected with the other end of the connecting handle 131 at the top, one end of the second main shaft 1241 penetrating through the bottom of the coating chamber 1 is fixedly connected with the other end of the connecting handle 131 at the bottom, and the first main shaft 1231 and the second main shaft 1241 are perpendicular to the connecting handle 131.
It should be noted that fig. 2 only shows the distance adjusting assembly installed on the top of the coating chamber 1, and the bottom is not shown, and in practical applications, it is fully possible for those skilled in the art to install the distance adjusting assembly on the corresponding position of the bottom according to the above disclosure.
When the adjustment is realized by using an automatic control method, the distance adjusting motor 133 is connected to an industrial personal computer (not shown in the figure), and the industrial personal computer simultaneously controls the distance adjusting motors 133 at the top and the bottom of the coating chamber to rotate by the same angle according to the pre-stored optimal distance value, so that the connecting shaft and the connecting handle in the distance adjusting assembly are linked to drive the first main shaft and the second main shaft to simultaneously move for a fixed distance along the arc-shaped limiting groove 101, and the distance between the optical fiber and the target is adjusted to be optimal.
Further, referring to fig. 3, the first main shaft 1231 and the second main shaft 1241 are respectively installed in the arc-shaped limiting grooves 101 through first ball bearings 127.
The ball bearing is one kind of rolling bearing, and spherical alloy steel balls are installed between the inner steel ring and the outer steel ring to reduce friction force in the power transmission process and raise the transmission efficiency of mechanical power.
Further, a knob 1271 is disposed on the first ball bearing 127, and when the knob 1271 is in a loose state, the first main shaft 1231 and the second main shaft 1241 can move up and down to adapt to the length of the optical fiber, and simultaneously, the optical fiber is straightened to ensure the film coating effect.
Further, the opposite ends of the first main shaft 1231 and the second main shaft 1241 are both connected with the clamping portion 120 through threads.
The clamping portion 120 includes a first clamping block 1201 and a second clamping block 1202 that cooperate to clamp the optical fiber.
When the clamping portion 120 is screwed tightly by the screw thread, the first clamping block 1201 and the second clamping block 1202 are closed, so that the optical fiber is firmly fixed, the optical fiber is prevented from shaking or falling off, and the coating effect is improved.
Furthermore, the top and the bottom of the coating chamber 1 are symmetrically provided with limiting holes 102.
The gear shaft of the first transmission gear 121 is installed in the top limit hole 102, and the gear shaft of the second transmission gear 122 is installed in the bottom limit hole 102.
Further, the gear shaft of the first transmission gear 121 and the gear shaft of the second transmission gear 122 are respectively mounted in the limiting hole 102 through a second ball bearing 128.
Further, the second gear wheel 113 is rotatably mounted at the bottom of the coating chamber 1 through a fixed shaft 103.
The optical fiber coating device disclosed by the embodiment of the application can complete coating of optical fibers at one time, saves time and manpower, and effectively improves the effect of optical fiber coating by setting the distance between the optical fibers and the target to be adjustable.
The present application has been described in detail with reference to specific embodiments and illustrative examples, but the description is not intended to limit the application. Those skilled in the art will appreciate that various equivalent substitutions, modifications or improvements may be made to the presently disclosed embodiments and implementations thereof without departing from the spirit and scope of the present disclosure, and these fall within the scope of the present disclosure. The protection scope of this application is subject to the appended claims.
Claims (9)
1. An optical fiber coating device based on magnetron sputtering is characterized by comprising: the device comprises a coating chamber (1), a target assembly (11) and an optical fiber assembly (12) which are positioned in the coating chamber (1);
the target assembly (11) comprises a target (111), a first gear disc (112) fixed at the top end of the target (111) and a second gear disc (113) fixed at the bottom end of the target (111), wherein the first gear disc (112) is connected with a motor (2) positioned outside the coating chamber (1) through a transmission shaft;
the optical fiber assembly (12) comprises a first conduction gear (121) meshed with the first gear disc (112), a second conduction gear (122) meshed with the second gear disc (113), and a first optical fiber clamp (123) and a second optical fiber clamp (124) which are used for clamping the upper end and the lower end of an optical fiber respectively;
the first fiber clamp (123) comprises a first spindle (1231), the second fiber clamp (124) comprises a second spindle (1241), an axis of the first spindle (1231) coincides with an axis of the second spindle (1241);
the gear shaft of the first transmission gear (121) and the first main shaft (1231) realize synchronous transmission through a first belt pulley (125);
the gear shaft of the second transmission gear (122) and the second main shaft (1241) realize synchronous transmission through a second belt pulley (126);
arc-shaped limiting grooves (101) are symmetrically formed in the top and the bottom of the coating chamber (1);
the first main shaft (1231) penetrates through the arc-shaped limiting groove (101) at the top, the second main shaft (1241) penetrates through the arc-shaped limiting groove (101) at the bottom, and the first main shaft (1231) and the second main shaft (1241) can move along the arc-shaped limiting groove (101) together to change the distance between the optical fiber and the target (111).
2. An optical fiber coating device based on magnetron sputtering according to claim 1, characterized in that the device further comprises a distance adjusting assembly (13) located outside the coating chamber (1);
the distance adjusting assembly (13) comprises a connecting handle (131), a connecting shaft (132) and a distance adjusting motor (133), one end of the connecting handle (131) is fixedly connected with one end of the connecting shaft (132), the connecting handle (131) is perpendicular to the connecting shaft (132), and the other end of the connecting shaft (132) is in synchronous transmission with a crankshaft of the distance adjusting motor (133) through a third belt pulley (134);
the top and the bottom of the coating chamber (1) are provided with the distance adjusting components (13);
one end of the first main shaft (1231) penetrating through the top of the film coating chamber (1) is fixedly connected with the other end of the connecting handle (131) at the top, one end of the second main shaft (1241) penetrating through the bottom of the film coating chamber (1) is fixedly connected with the other end of the connecting handle (131) at the bottom, and the first main shaft (1231) and the second main shaft (1241) are perpendicular to the connecting handle (131).
3. The magnetron sputtering-based optical fiber coating device according to claim 2, further comprising an industrial personal computer;
the industrial personal computer is used for controlling the distance adjusting motor to rotate according to a preset optimal distance value so as to adjust the distance between the optical fiber and the target material.
4. The magnetron sputtering-based optical fiber coating device according to claim 1 or 2, wherein the first spindle (1231) and the second spindle (1241) are respectively installed in the arc-shaped limiting groove (101) through a first ball bearing (127).
5. The magnetron sputtering-based optical fiber coating device according to claim 4, wherein the first ball bearing (127) is provided with a knob (1271), and when the knob (1271) is in a loose state, the first spindle (1231) and the second spindle (1241) can move up and down to adapt to the length of the optical fiber.
6. The magnetron sputtering-based optical fiber coating device according to claim 1, wherein one end of the first spindle (1231) opposite to the second spindle (1241) is connected with a clamping part (120) through a thread;
the clamping portion (120) includes a first clamping block (1201) and a second clamping block (1202) that cooperate to clamp the optical fiber.
7. The magnetron sputtering-based optical fiber coating device according to claim 1, wherein the top and the bottom of the coating chamber (1) are symmetrically provided with limiting holes (102);
the gear shaft of the first conduction gear (121) is installed in the limiting hole (102) at the top, and the gear shaft of the second conduction gear (122) is installed in the limiting hole (102) at the bottom.
8. The magnetron sputtering-based optical fiber coating device according to claim 7, wherein the gear shaft of the first conduction gear (121) and the gear shaft of the second conduction gear (122) are respectively installed in the limiting hole (102) through a second ball bearing (128).
9. The magnetron sputtering based optical fiber coating device according to claim 1, wherein the second gear wheel disc (113) is rotatably mounted at the bottom of the coating chamber (1) by a fixed shaft (103).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202021000770.3U CN212247193U (en) | 2020-06-03 | 2020-06-03 | Optic fibre coating film device based on magnetron sputtering |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202021000770.3U CN212247193U (en) | 2020-06-03 | 2020-06-03 | Optic fibre coating film device based on magnetron sputtering |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114774874A (en) * | 2022-04-13 | 2022-07-22 | 中国科学院上海微系统与信息技术研究所 | FC type joint optical fiber end face coating clamp, system and use method thereof |
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2020
- 2020-06-03 CN CN202021000770.3U patent/CN212247193U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114774874A (en) * | 2022-04-13 | 2022-07-22 | 中国科学院上海微系统与信息技术研究所 | FC type joint optical fiber end face coating clamp, system and use method thereof |
| CN114774874B (en) * | 2022-04-13 | 2023-12-15 | 中国科学院上海微系统与信息技术研究所 | FC type connector optical fiber end face coating clamp, system and use method thereof |
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